The main Facilities at the University of Michigan used by MURI Center on Intelligent Microelectronics Manufacturing at Univerisity of Michigan are

• Center for Display Technology and Manufacuring(DTM)

The Center is a national focal point for research and development in flat panel display technologies. Its' focus is on the manufacturing processes and materials that are the keys to producing low-cost, high-quality displays.

• Electronics Manufacturing Laboratory(EML)

The Laboratory is a $10 million, 3,000 square-foot class 10 and 100 clean room facility. It provides a state-of-the-art laboratory environment for focused research on the design, development, and manufacture of flat panel displays. Plasma etching and deposition, plasma diagnostics, thin film characterization, liquid crystal processing and process control equipment are housed in EML. The laboratory is also used to demonstrate state-of-the art fabrication equipment to our industrial partners.

• Solid-State Electronics Laboratory(SSEL)

This laboratory is a $25 million state-of-the-art facility on the North Campus of The University of Michigan. Central to solid-state electronics research is the micro-electronics processing facility which is housed in 6000 sq. ft. of class 1000, class 100, and class 10 clean space and is equipped with state-of-the-art tools for materials preparation and characterization with in-situ diagnostics, epitaxial growth, device fabrication with feature sizes smaller than 0.1um, and device characterization. The entire facility, comparable to the best in the world, is used by over one hundred students and researchers and is managed and maintained by a well-qualified staff. Also included is a fully equipped class 10,000 instructional laboratory dedicated to the education and training of undergraduate and graduate students specializing in these areas.