Solid-State Chemical Sensors
Planar Sensor Fabrication Feasibility Assessment
Abstract:
Researchers at the University of Michigan are developing microfabricated ion-selective sensor arrays to
detect blood gas/electrolytes. Simple, direct methods have been developed for
deposting the membranes on the small geometry sensors. Improvements in
manufacturability, reliability, and lifetime of the sensors are addressed in
this
project. Advanced packaging schemes are also being developed, making
commercialization of small, low-cost sensors practical.
Department of Electrical Engineering and Computer
Science
Solid-State Electronics Laboratory
Researchers
University of Michigan