Clean Room

The laboratory offers a full range of process tools, including electron-beam lithography, MBE, MOMBE, MOCVD, ion implantation, and LPCV. This capability is centered in 4,000 square feet of class-100 processing area, with approximately 1000 square feet of class-10 space devoted to submicron lithography.

Facilities

• New Building on North Campus ($30Mof State Funds; 130,000 sq. ft.).
• Renovated Building on North Campus (30,000 sq. ft.).
• Solid-State Electronics Laboratory in New Building (12,000 sq. ft. of lab space; 1,000 sq. ft. Class 10, 4,000 sq. ft. Class 100, 3,000 sq. ft. Class 1,000 separate instructional laboratory).

Material Growth Equipment

• RIBER 2300 MBE
• Varian Gen. II MBE
• Varian MO-MBE
• EMCORE GS3200 MOCVD
• Extrion 400 KeV Ion Implanter
• Thermo Diffusion Furnaces with DDC
• Thermo LPCVD &APCVD System
• Plasma Therm Deposition System
• Enerjet Sputtering System
• Liquid Phase Epitaxy

Processing Equipment

• JEOL JBX-5D11(F) Electron Beam Lithography System
• JEOL JXM-840 Scanning Electron Microscope
• SEMI Reactive Ion Etching System (2 chamber)
• SEMI Plasm-CVD and RIE/PPE Dual Chamber System
• Commonwealth CA-RIBE System
• Millatron Ion Beam Etching System
• CVC Filament Evaporation System (2)
• COOK E-Beam Evaporator for P-material Processing
• KJL Electron Beam Evaporator
• Kasper 3001 Contact/Proximity Aligner
• Karl Suss MJB-3 Infrared Aligner (2-sided)
• Karl Suss MAG (3)
• Rapid Thermal Annealing Station
• Technics Plasma Etching/Deposition
• Micro Automation Dicing Saw, Logitech Wafer Polishing & Thinning
• K & S Wedge Bonding
• Spectra Mass Spectrometer

Characterization Equipment

• Olympus Interference Contrast Microscope
• DEKTAK Profiler
• Gaertner Ellipsometer
• Rudolf Spectroscopic Ellipsometer
• Automatic Test Equipment for Device Characterization up to 100 GHz
• Hot and cold probe station

Measurement Equipment

• C-V, C-t, DLTS and Optical DLTS
• Photocapacitance and Photoionization
• Low-temperature and Time Resolved Photoluminescence (Streak Camera)
• Low-and High-Field Transport Impact Ionization Coefficients
• High Magnetic Field Meas. (Sd-H, PL. absorption)
• High-Pressure diamond-anvil)
• Photothermal Ionization Spectroscopy (BOMEM)
• VHS/HF Device and Circuit Characterization
• Picosecond and Femtosecond Optical Spectroscopy
• Raman Scattering, X-Ray Diffractometer

Review of Group Activities

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