Electrical Engineering and Computer Science

NNIN Seminar

Micro and Nano Machining for High Aspect Ratio Structures

February 28th 2012
 
Tuesday, February 28, 2012
08:00am - 5:30pm
Lurie Nanofabrication Facility

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Micro and Nano Machining for High Aspect Ratio Structures February 28, 2012 This is a one day workshop on micro and nano machining for high aspect ratio structures in glass, silicon, silicon carbide, PZT and other materials, held at the Lurie Nanofabrication Facility at the University of Michigan in Ann Arbor, MI. The short course will include both classroom lectures and hands-on activities relevant to many different applications. Topics that will be covered include: DRIE on Si, glass, other materials Metrology and analysis of etched results Design rules Masking strategies: resists and others Review of LNF capabilities …and much more!!!! For more information: Contact David Yates at LNF-info@umich.edu or 734-323-1432

Additional Information

Sponsor: EECS

Open to: Public