ECE
ECE
ECE ECE


Defense Event

Run-to-Run Control for Wafer Patterning in Semiconductor Manufacturing

Chadi Elias El Chemali


 
Tuesday, September 24, 2002
2:00pm - 4:00pm
1005 EECS

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Additional Information

Contact: Linda Cox

Phone: 764-9387

Email: cox@eecs.umich.edu

Sponsor(s): Professor James Freudenberg

Open to: Public