Website
Division: ECE
Title: Professor
Address: 2304 EECS
Phone: (734) 936-2962
Fax: (734) 763-9324
Email:
Degree: Ph.D Princeton
Research Interests: Nanofabrication Technology, Nanoimprint, Microelectronic, Optical, Micromechanical, and Biomedical Devices
Research Areas: MEMS and Microsystems.
Areas of Specialty: Microfluidics and Gas/Chemical; Environmental Sensors; Nanotechnology and Nanofabrication.