This page acts as your guide to the current research topics of the Integrated Manufacturing Process Automation and Control Technologies group. Presently, our endeavors are focused in four main areas: Run-to Run Control, Inter-Process Control, Sensor Bus Development and Testing, and Control Systems Standardization. All of these are part of the Multi-Level Control Hierarchy which is optimal for controling manufacturing processes, particularly in semiconductor manufacturing. A brief description of each area , as well as a link that will take you to a more detailed description of our research in that field. In addition to these areas, a link to the Generic Cell Controler (GCC), the main product of the group, has been included.

Run-to-Run Control

Process Control which takes place in between runs of a particular process in order to reduce drift in the process output.

Inter-Process Control

Control of an overall process which takes place during a run, but inbetween seperate steps of the process.

Sensor Bus Development and Testing

Bus and Network development for use in machine and process control.

Control Systems Standardization

Standardization of systems and sensor bus specifications for industrial situations.

Generic Cell Controller

A generic control device developed by IMPACT for use in Run-to-Run control of manufacturing processes, particularly in the semiconductor industry.