About MISTIC

MISTIC is a planar process compiler for Micromachined Devices. It automatically generates fabrication process sequences of surface micromachined structures from a two-dimensional description. The synthesis method used is based on topological sorting techniques to find all possible flows for the device. An optimal flow is selected which maximizes the device yield.

MISTIC primarily consists of four major software modules: an input device builder, a compilation core, an output processor and a database of materials and processes. Here's a viewgraph showing the organization of MISTIC. The graphical user interfaces(GUIs) used by MISTIC facilitate inputing the machine structure, editing the material database and displaying the output(process flow data).

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