ISTIC is a planar process compiler for thin-film and micromachined devices. This tool automatically generates fabrication process flows starting from a two-dimensional geometrical device description. The synthesis method used is based on topological sorting techniques which find all possible flows for the device. An optimal flow is selected which maximizes the device yield.

MISTIC primarily consists of four major software modules: an input device builder, a compilation core, an output processor, and a database of materials and processes. Here's a viewgraph showing the organization of MISTIC. The graphical user interfaces(GUIs) used by MISTIC facilitate inputing the machine structure, editing the material database and displaying the generated process flow data.