MISTIC Publications

Journal and Conference Articles

Gogoi, B., Yuen, E. and Mastrangelo, C. H. (1994). The Automatic Synthesis of Planar Fabrication Process Flows for Surface Micromachined Devices
[postscript](6650k)

Hasanuzzaman, M. and Mastrangelo, C. H. (1995). MISTIC 1.1: A Process Compiler for Micromachined Devices. Eurosensors IX, June 25-29, 1995: Proceedings of the 8th International Conference on Solid-State Sensors and Actuators (vol. 1, pp. 38-42). Stockholm, Sweden.
[postscript](286k)

Hasanuzzaman, M. and Mastrangelo, C. H. (1995). Process Compilation of Thin Film Devices. IEEE Transactions on Computer-Aided Design of Circuits and Systems, vol. 15, no. 7, pp. 745-764, July 1996.
[postscript](1028k)

Carlen, E.T. and Mastrangelo, C.H. (1997). An Experimental Methodology for the Estimation of Spatially Correlated Parametric Yield in Thin Film Devices. 1997 International Conference on Simulation of Semiconductor Processes and Devices. 8-10 September 1997.
Paper: [postscript](3182k)
Viewgraphs: [postscript](3236k)

Wang, Y.S. and Mastrangelo, C.H. (1997). A Multiple Zone Inverse Diffusion Solver for Silicon Processing. 1997 International Conference on Simulation of Semiconductor Processes and Devices. 8-10 September 1997.
Paper: [postscript](3182k)
Viewgraphs: [postscript](3182k)

Carlen, E.T. and Mastrangelo, C.H. (1997). Statistical Multi-Lot Characterization of Spatial Thickness Variations in LPCVD Oxide, Nitride, Polysilicon, and Thermal Oxide Films. 1997 SPIE Symposium on Microelectronic Manufacturing. 1-2 October, 1997. [postscript](3431k)

Carlen, E.T. and Mastrangelo, C.H. (1997). Statistical Model for Spatial Correlation in Thin Film Deposition and Reactive Growth. IEEE Transactions on Semiconductor Manufacturing, VOL 11, NO. 3, AUGUST 1998. [postscript](3431k)

Zaman, M.H., Carlen, E.T. and Mastrangelo, C. H. (1999) Automatic Generation of Thin Film Process Flows -- Part I: Basic Algorithms . IEEE Transactions on Semiconductor Manufacturing, VOL. 12, NO. 1, FEBRUARY 1999.
[postscript](1028k)

Zaman, M.H., Carlen, E.T. and Mastrangelo, C. H. (1999) Automatic Generation of Thin Film Process Flows -- Part II: Recipe Generation, Flow Evaluation, and System Framework IEEE Transactions on Semiconductor Manufacturing, VOL. 12, NO. 1, FEBRUARY 1999.
[postscript](1028k)

Theses