PROFESSOR
KHALIL NAJAFI

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Lurie Nanofabrication Facility

Wireless Integrated Microsystems

 

Professor Khalil Najafi's Patents and Disclosures

  1. K.D. Wise, K. Suzuki, K. Najafi
    "Silicon Tactile Imaging and Method of Making Same"
    US Patent No. 5,055,838
    Issued 10/08/1991

  2. K.D. Wise, K. Najafi
    "Method of Manufacturing Thermopile Infrared Detector"
    US Patent No. 5,059,543
    Issued 10/22/1991

  3. K.D. Wise, K. Najafi
    "Thermopile Infrared Detector With Semiconductor Supporting Rim""
    US Patent No. 5,100,479
    Issued 03/31/1992

  4. K.D. Wise, K. Najafi
    "Single-Channel Microstimulator"
    US Patent No. 5,314,458
    Issued 05/24/1994

  5. N. Yazdi, and K. Najafi
    "Microelectromechanical Capacitive Accelerometer and Method of Making Same"
    US Patent No. 6,035,714
    Issued 03/14/2000

  6. N. Yazdi, K. Najafi
    "Single-Side Microelectromechanical Capacitive Accelerometer and Method of Making Same"
    US Patent No. 6,167,757
    Issued 01/02/2001

  7. L. Lin, Y-T. Cheng, K. Najafi and K. D. Wise
    "Process for Making Microstructures and Microstructures Made Thereby"
    US Patent No. 6,232,150
    Issued 05/15/2001

  8. N. Yazdi, K. Najafi, and A. Salian
    "Single-side Microelectromechanical Capacitive Accelerometer and Method of Making Same"
    US Patent No. 6,286,369
    Issued 09/11/2001

  9. N. Yazdi, K. Najafi
    "Single-Side Microelectromechanical Capacitive Accelerometer and Method of Making Same"
    US Patent No. 6,402,968
    Issued 06/11/2002

  10. L. Lin, Y-T. Cheng, K. Najafi and K. Wise
    "Microstructures"
    US Patent No. 6,436,853
    Issued 08/20/2002

  11. N. Yazdi, K. Najafi, and A. Salian
    "Single-side Microelectromechanical Capacitive Accelerometer and Method of Making Same"
    US Patent No. 6,718,605
    Issued 04/13/2004

  12. K. Najafi, and T.K. A Chou
    "Method of Fabricating a Device Having a Desired Non-planar Surface or Profile and Device Produced Thereby"
    US Patent No. 6,884,732
    Issued 04/26/2005

  13. Khalil Najafi, and Junseok Chae
    "Micromachined Capacitive Lateral Accelerometer Device and Monolithic, Three-Axis Accelerometer Having Same"
    US Patent No. 6,938,484 B
    Issued 09/06/2005

  14. Timothy J. Harpster, and Khalil Najafi
    "Method of Joining An Insulator Element to a Substrate"
    US Patent No. 6,939,778,
    Issued 09/06/2005

  15. Chou; Tsung-Kuan A., Najafi; Khalil, Bernal; Luis P., Washabaugh; Peter D.
    "Low-temperature patterned wafer bonding with photosensitive benzocyclobutene (BCB) and 3D MEMS (microelectromechanical systems) structure fabrication"
    US Patent No. 6,942,750
    Issued 09/13/2005

  16. Asli B. Ucok, Khalil Najafi, and Joseph Giachino
    "Multi-Substrate Package and Method for Assembling Same"
    US Patent No. 6,958,531
    Issued 10/25/2005

  17. Khalil Najafi and Chunbo Zhang
    "Method of Making a Thick Microstructural Oxide Layer"
    US Patent No. 6,962,831
    Issued 11/08/2005

  18. K. Najafi, H. Kim, L. Bernal, A. Astle, and P. Washabaugh
    "Micropump Assembly For A Micro Gas Chromatograph And The Like"
    US Patent No. 7,008,193
    Issued 03/07/2006

  19. B.H. Stark, and K. Najafi
    "Low temperature method for forming a microcavity on a substrate and article having same"
    US Patent No. 7,029,829
    Issued 04/18/2006

  20. K. Najafi, J. M. Giachino, and J. Chae
    "Method of Fabricating a Package with Substantially Vertical Feedthroughs for Micromachined or MEMS Devices"
    US Patent No. 7,098,117
    Issued 08/29/2006

  21. H. Kulah, and K. Najafi
    "Method and Micro Power Generator for Generating Electrical Power from Low Frequency Vibrational Energy"
    US Patent No. 7,579,757 B
    Issued 08/25/2009

  Copyright © 2010 Khalil Najafi
University of Michigan College of Engineering Electrical Engineering and Computer Science