Publications

Other Conference or Symposium Presentations

Journal Publications:

1. K. Najafi, K.D. Wise, T. Mochizuki, "A High-Yield IC-Compatible Multichannel Recording Array," IEEE Trans. Electron Devices, Vol. ED-32, No. 7, pp. 1206-1211, July 1985

2. S.L. BeMent, D.J. Anderson, K.D. Wise, K. Najafi, K.L. Drake, "Solid-State Electrodes for Multiplexed Multichannel Intracortical Neuronal Recording," IEEE Trans. Biomed. Eng., Vol. BME-33, No. 2, pp. 230-241, February 1986

3. K. Najafi, K.D. Wise, "An Implantable Multielectrode Array with On-Chip Signal Processing," IEEE J. Solid-State Ckts., Vol. SC-21, No. 6, pp. 1035-1044, December 1986

4. D.J. Anderson, K. Najafi, S.J. Tanghe, D.A. Evans, K.L. Levy, J.F. Hetke, X. Xue, J.J. Zappia, K.D. Wise, "Batch-Fabricated Thin-Film Electrodes for Stimulation of the Central Auditory System," IEEE Trans. Biomed. Eng., Vol. BME-36, No. 7, pp. 693-704, July 1989

5. K. Najafi, K. Suzuki, "Measurement of Fracture Stress, Young's Modulus, and Intrinsic Stress of Heavily Boron-Doped Silicon Microstructures," J. Thin Solid Films, 181, pp. 251-258, December 1989

6. S.J. Tanghe, K. Najafi, K.D. Wise, "A Planar IrO Multichannel Stimulating Electrode for Use in Neural Prosthesis," Sensors and Actuators, pp. 464-467, B1, 1990

7 . J. Ji, K. Najafi, K.D. Wise, "A Scaled Electronically-Configurable Multichannel Recording Array," Sensors and Actuators, pp. 589-591, A21-A23, 1990

8. K. Suzuki, K. Najafi, K.D. Wise, "Process Alternatives and Scaling Limits for High-Density Silicon Tactile Imagers," Sensors and Actuators, pp. 915-918, A21-A23, 1990

9. K. Najafi, "Integrated Sensors in Biological Environments," Invited Paper, Sensors and Actuators, pp. 453-459, B1, 1990

10. J.F. Hetke, K. Najafi, K.D. Wise, "Flexible Miniature Ribbon Cables for Long-Term Connection to Implantable Sensors," Sensors and Actuators, pp. 999-1002, A21-A23, 1990

11. K. Najafi, J. Ji, K.D. Wise, "Scaling Limitations of Silicon Multichannel Recording Probes," IEEE Trans. Biomed. Eng., Vol. BME-37, No. 1, pp. 1-11, January 1990

12. K. Najafi, J.F. Hetke, "Strength Characterization of Silicon Microprobes in Neurophysiological Tissues," IEEE Trans. on Biomedical Engineering, Vol. BME-37, No. 5, pp. 474-481, May 1990

13. K. Suzuki, K. Najafi, K.D. Wise, "A 1024-Element High-Performance Silicon Tactile Imager," IEEE Trans. Electron Devices, Vol. ED-37, No. 8, pp. 1852-1860, August 1990 (Winner of the Paul Rappaport Award for the best paper published in an Electron Device Society publication in 1990)

14. Jin Ji, K. Najafi, Kensall Wise, “A Low-Noise Demultiplexing System Active Multichannel Microelectrode Arrays,” IEEE Transactions of Biomedical Engineering, Vol. 38, #1 January 1991

15. K. Najafi, "Smart Sensors," Invited Paper, J. Micromech. & Microeng., 1, pp. 86-102, June 1991

16. K.D. Wise, K. Najafi, "Microfabrication Techniques for Integrated Sensors and Microsystems," Invited Paper, Science, Vol. 254, pp. 1335-1342, November 1991

17. S.T. Cho, K. Najafi, C.L. Lowman, K.D. Wise, "An Ultrasensitive Silicon Pressure-Based Microflow Sensor," IEEE Trans. Electron Devices, Vol. ED-39, No. 4, pp. 825-835, April 1992

18. S.T. Cho, K. Najafi, K.D. Wise, "Internal Stress Compensation and Scaling in Ultrasensitive Silicon Pressure Sensors," IEEE Trans. Electron Devices, Vol. ED-39, No. 4, pp. 836-842, April 1992

19. Y. Gianchandani, K. Najafi, "Batch-Assembled Multi-Level Micromachined Mechanisms from Bulk Silicon," Journal of Micromechanics and Microengineering, Vol. 2, No. 2, pp. 80-85, June 1992

20. J. Ji, S.T. Cho, Y. Zhang, K. Najafi, K.D. Wise, "An Ultraminiature CMOS Pressure Sensor for a Multiplexed Cardiovascular Catheter," IEEE Trans. on Electron Devices, Vol. ED-39, No. 10, pp. 2260-2267, October 1992

21. Y. Gianchandani, K. Najafi, "A Bulk Silicon Dissolved Wafer Process for Microelectromechanical Devices," IEEE/ASME J. Micro Electro Mechanical Systems (J-MEMS), Vol. 1, No. 2, pp. 77-85, June 1992

22. R.M. Bradley, R.H. Smoke, T. Akin, K. Najafi, "Functional Regeneration of Glossopharyngeal Nerve Through Micromachined Sieve Electrode Arrays," Brain Research, 594, pp. 84-90, 1992

23. S. Bouwstra, J. van Rooijen, H.A.C. Tilmans, A. Selvakumar, and K. Najafi, "Thermal-Base Drive for Micromechanical Resonators Employing Deep-Diffusion Bases," Sensors and Actuators, A, 37-38, pp. 38-44, 1993

24. R. Aroca, H. Bolourchi, D. Battisti, and K. Najafi, "Gas Adsorption and Electrical Properties of Two Langmuir-Blodgett Layers of Cerium Bisphthalocyanine," Langmuir Journal of the American Chemical Society, 1993

25. J.F. Hetke, J.L. Lund, K. Najafi, K.D. Wise, and D.J. Anderson, "Silicon Ribbon Cables for Chronically Implantable Microelectrode Arrays," IEEE Trans. on Biomedical Engineering, Vol. 41, No. 4, pp. 314-321, April 1994

26. T. Akin, K. Najafi, Richard H. Smoke, Robert M. Bradley, "A Micromachined Silicon Sieve Electrode for Nerve Regeneration Applications," IEEE Trans. Biomedical Engineering, Vol. 41, No. 4, pp. 305-313, April 1994

27. K. Najafi, "Solid-State Microsensors for Cortical Nerve Recordings," (Invited paper) IEEE Eng. in Medicine and Biology Magazine, pp. 375-387, June/July Issue, 1994

28. W.G. Baer, K. Najafi, K.D. Wise, and R.S. Toth, "A 32-Element Micromachined Thermal Imager with On-Chip Multiplexing," Sensors and Actuators, Vol. 48, No. 1, pp. 47-54, 1995

29. Y. Gianchandani, and K. Najafi, "Bent-Beam Strain Sensors," IEEE/ASME J. Micro Electro Mechanical Systems (JMEMS), pp. 52-58, Vol. 5, No. 1, March 1996

30. B. Ziaie, J. A. V. Arx, M.R. Dokmeci, and K. Najafi, “A Hermetic Glass-Silicon Micropackage with High-Density On-Chip Feedthroughs for Sensors & Actuators,” IEEE Journal of Microelectromechanical Systems, Vol. 5, No. 3, pp. 166-179, September 1996

31. R.M. Bradley, X. Cao, T. Akin, and K. Najafi, “Long-Term Chronic Recordings From Peripheral Sensory Fibers Using a Sieve Electrode,” J. Neuroscience Methods, 73, pp. 177-186, 1997

32. B. Ziaie, M.D. Nardin, A.R. Coghlan, and K. Najafi, “A Single-Channel Implantable Microstimulator for Functional Neuromuscular Stimulation,” IEEE Trans. on Biomedical Engineering, Vol. BME-44, No. 10, October 1997

33. Y. Gianchandani, and K. Najafi, A Silicon Micromachined Scanning Thermal Profiler with Integrated Elements for Sensing and Actuation,”IEEE Trans. Electron Devices, Vol. 44, No. 11, pp. 1857-1868, November 1997

34. C. Yeh, and K. Najafi, “A Low-Voltage Tunneling Based Silicon Microaccelerometer,” IEEE Transactions on Electron Devices, Vol. 44, No. 11, pp. 1875-1882, November 1997

35. J.S. Walter, L. Riedy, W. King, J.S. Wheeler, K. Najafi, C.L. Anderson, T.M. Gudausky, and M. Dokmeci, “Short-Term Bladder-Wall Response to Implantation of Microstimulators,” J. of Spinal Cord Medicine, Vol. 20, No. 3, pp. 319-323, 1997

36. T. Akin, K. Najafi, and R.M. Bradley, “A Wireless Implantable Multichannel Digital Neural Recording System for a Micromachined Sieve Electrode,” IEEE J. Solid-State Circuits, January 1998

37. Y. Gianchandani, M. Shinn, and K. Najafi, "Impact of High Thermal Budget Anneals on Polysilicon as a Micromechanical Material," IEEE/ASME J. Micro Electro Mechanical Systems (JMEMS), March 1998

38. C. Yeh, and K. Najafi, “CMOS Interface Circuitry For A Low-Voltage Micromachined Tunneling Accelerometer,” IEEE/ASME J. Micro Electro Mechanical Systems (JMEMS), March 1998

39. A. Selvakumar, F. Ayazi, and K. Najafi,” A High Sensitivity Z-Axis Capacitive Silicon Microaccelerometer With A Torsional Suspension,” IEEE/ASME Journal of Microelectromechanical Systems, Vol. 7, No. 2, June 1998

40. N. Yazdi, F. Ayazi, and K. Najafi, “Micromachined Inertial Sensors,” Invited Paper, Special Issue of IEEE Proceedings, vol. 86, no. 8, pp. 1640-1659, August 1998

41. A.J. Mason, N. Yazdi, A.V. Chavan, K. Najafi, and K.D. Wise, “A Generic Multi-Element Microsystem For Portable Wireless Applications,” Invited Paper, Special Issue of IEEE Proceedings, vol. 86, no. 8, pp. 1733-1746, August 1998

42. L. Lin, Y.T. Cheng, and K. Najafi, “Formation of Silicon-Gold Eutectic Bond Using Localized Heating Method,” Japanese Journal of Applied Physics, Part II, vol. 11B, pp. 1412-1414, Nov. 1998

43. T. Akin, B. Ziaie, S. A. Nikles, and K. Najafi, "A Modular Micromachined High-Density Connector for Implantable Biomedical Systems," IEEE Transactions on Biomedical Engineering, vol. 46, no. 4, pp. 471-480, April 1999

44. Y.T. Cheng, Liwei Lin and K. Najafi, "Localized Silicon Fusion and Eutectic Bonding for MEMS Fabrication and Packaging," IEEE/ASME Journal of Microelectromechanical Systems, Vol. 9, pp. 3-8, March, 2000

45. B. Ziaie, and K. Najafi, "A Generic Micromachined Silicon Platform for High-Performance RF Passive Components," J. Micromachanics & Microengineering, vol. 10, No. 3, pp. 365-371, Sept. 2000

46. Y. Gianchandani, H. Kim, M. Shinn, B. Ha, B. Lee, K. Najafi, and C.S. Song, “A Fabrication Process for Integrating polysilicon Microstructures with Post-Processed CMOS Circuits,” J. Micromachanics and Microengineering, vol. 10, No. 3, pp. 380-386, Sept. 2000

47. F. Ayazi, and K. Najafi, "High Aspect-ratio Combined Poly and Single-Crystal (HARPSS) MEMS Technology,” IEEE J. Micro Electro Mechanical Systems, vol. 9, No. 3, pp. 288-294, Sept. 2000

48. F. Ayazi, and K. Najafi, "High Aspect-Ratio Polysilicon Micromachining Technology,” Sensors and Actuators,Vol 87, No. 1-2, pp. 46-51, December 2000

49. N. Yazdi, A. Mason, K. Najafi, and K.D. Wise, "A Generic Interface Chip for Capacitive Sensors in Low-Power Multi-Parameter Microsystems," Sensors & Actuators, A: Physical, 84 (3) pp. 351-361, 2000

50. N. Yazdi, K. Najafi, "An All-Silicon Single-Wafer Micro-g Accelerometer with a Combined Surface and Bulk Micromachining Process," IEEE/ASME Journal of Microelectromechanical Systems, vol. 9, no. 4, December 2000, pp. 1-8.

51. Arjun Selvakumar, N. Yazdi, K. Najafi, "A Wide-Range Micromachined Threshold Accelerometer Array and Interface Circuit," Journal of Micromechanics and Microengineering, vol. 11, 2001, pp. 118-125.

52. B. Ziaie, S.C. Rose, M.D. Nardin, and K. Najafi, “A Self-Oscillating, Detuning-Insensitive Class-E Transmitter for Implantable Microsystems,” IEEE Transactions on Biomedical Engineering, Vol. 48, No. 3, pp. 397-399, March 2001

53. B. Ziaie, and K. Najafi, "An Implantable Microsystem for Tonometric Blood Pressure Measurement," Journal of Biomedical Microdevices, Biomedical Microdevices, Vol. 3, pp. 285-292, December 2001.

54. F. Ayazi, and K. Najafi, “A HARPSS polysiliocn Vibrating Ring Gyroscope,” IEEE/ASME J. Micro Electro Mechanical Systems, vol. 10, no. 2, pp. 169-179, June 2001

55. P. Mohseni, K. Nagarajan, B. Ziaie, K. Najafi, and S.B. Crary, "An Ultralight Biotelemetry Biotelemetry Backpack for Recording EMG Signals in Moths,” IEEE Transactions on Biomedical Engineering, Vol. 48, pp. 734-737, June 2001

56. M. Dokmeci and K. Najafi, "A High-Sensitivity Polyimide Capacitive Relative Humidity Sensor For Monitoring Anodically Bonded Hermetic Micropackages,” IEEE/ASME Journal of Microelectromechanical Systems, Vol.10, No.2, June 2001

57. David L. Zealear, Kurt C. Garren, Ricardo Rodriguez, Julio Reyes, Shan Huang, Mehmet Dokmeci, Khalil Najafi, "The biocompatibility, positional stability, and potential application of an injectable wireless micromachined microstimulator for reanimation of the paralyzed larynx,” IEEE Trans. On Biomedical Engineering (TBME), Vol. 48, No.8, August 2001

58. T. Cheng, Liwei Lin, Khalil Najafi, "Fabrication and Hermeticity Testing of A Glass-Silicon Packaging Formed Using Localized Aluminum/Silicon-to-Glass Bonding", IEEE/ASME Journal of Microelectromechanical Systems, September, 2001

59. J. W. Weigold, K. Najafi, and S. W. Pang, “Design and Fabrication of Submicrometer, Single Crystal Si Accelerometer,” IEEE/ASME Journal of Microelectromechanical Systems, vol. 10, no. 4, pp. 518-524, December 2001

60. Chunchieh Huang, Khalil Najafi, “Fabrication of Ultra-Thin P++ Silicon Microstructures Using Ion-Implantation and Boron Etch-Stop,” IEEE/ASME Journal Of Microelectromechanical Systems (JMEMS),

61. Orhan Akar, Tayfun Akin, And Khalil Najafi, “A Wireless Batch Sealed Absolute Capacitive Pressure Sensor,” Sensors and Actuators,

62. T. J. Harpster, B. Stark, and K. Najafi, “A Passive Wireless Integrated Humidity Sensor,” Sensors and Actuators A: Physical, Volume 95, Issues 2-3, pp. 100-107, 1 January 2002

63. T. J. Harpster, S. Hauvespre, M. Dokmeci, and K. Najafi, “A Passive Humidity Monitoring System for In-Situ Remote Wireless Testing of Micropackages,” IEEE/ASME J. Micro Electro Mechanical Systems (JMEMS}, Vol. 11, no. 1, pp. 61-67, February 2002.

64. Y. T. Cheng, W. T. Hsu, Liwei Lin, C. T. Nguyen, Khalil Najafi, "Vacuum Packaging Using Localized Aluminum/Silicon-to-Glass Bonding", IEEE/ASME Journal of Microelectromechanical Systems (JMEMS)

Conference Publications:

1. K.D. Wise, K. Najafi, "A Micromachined Integrated Sensor with On-Chip Self-Test Capability," Invited Paper, Digest, Solid-State Sensors Conf., pp. 12-16, Hilton Head, SC, June 1984

2. K.D. Wise, K. Najafi, K.L. Drake, "A Multichannel Intracortical Microprobe for Single-Unit Recording," Digest, IEEE/NSF Biosensors Conf., pp. 87-89, Los Angeles, CA, September 1984

3. S.L. BeMent, D.J. Anderson, K.D. Wise, K.L. Drake, K. Najafi, L. Xue, "Silicon Multielectrode Impedance, Geometry, and Neural Cell Recording Ability," Digest, IEEE/Seventh Annual Conf. Eng. Medicine and Biology Society, pp. 159-162, September 1985

4. K. Najafi, K.D. Wise, "An Implantable Multielectrode Array with On-Chip Signal Processing," Digest, Int. Solid-State Ckts. Conf., pp. 98-99, February 1986 (Beatrice Winner Award for Editorial Excellence)

5. S.L. BeMent, K.L. Drake, D.J. Anderson, K.D. Wise, K. Najafi, "Semiconductor Microprobes- Recording/Biocompatibility Properties," Invited Paper, IEEE/EMBS Eighth Annual Conf., Dallas, pp. 1622-1625, Texas, November 1986

6. K. Najafi, "Silicon Micromachining: Key to Silicon Integrated Sensors," Proc. of Symp. on Sensors and Technology, pp. 152-164, Vol. 87-15, Cleveland, April 1987

7. K. Najafi, "Sensor-System Interface: The Influence of On-Chip Electronics," Digest, Int. Symp. Circuits and Systems, pp. 233-236, Philadelphia, PA, May 1987

8. K. Najafi, J. Ji, K.D. Wise, "Multichannel Intracortical Recording Microprobes: Scaling Limitations, Device Characteristics, and Circuit Encapsulation," Digest, 4th Int. Conf. on Solid-State Sensors and Actuators, Transducers '87, pp. 65-68, Japan, June 1987

9. N. Najafi, K.W. Clayton, W.G. Baer, K. Najafi, K.D. Wise, "An Architecture and Interface for VLSI Sensors," Digest, Solid-State Sensor and Actuator Workshop, Hilton Head, SC, pp. 76-79, June 1988

10. K.D. Wise, N. Najafi, C.L. Johnson, J. Cowles, S. Cho, K. Najafi, "An Integrated VLSI Sensor for Semiconductor Process Control," Technical Digest, TECHCON '88, pp. 345-348, Dallas, TX, October 1988 (Best Paper in Session)

11. K. Suzuki, K. Najafi, K.D. Wise, "A 1024-Element High-Performance Silicon Tactile Imager," Digest, Int. Electron Device Meeting, IEDM 1988, pp. 674-677, San Francisco, December 1988

12. K. Najafi, K. Suzuki, "A Novel Technique and Structure for the Measurement of Intrinsic Stress and Young's Modulus of Thin Films," Digest, IEEE Workshop on Micro Electromechanical Systems, pp. 96-97, Salt Lake City, UT, February 1989

13. J.F. Hetke, K. Najafi, K.D. Wise, "Flexible Miniature Ribbon Cables for Long-Term Connection to Implantable Sensors," Book of Abstracts, 5th Int. Conf. on Solid-State Sensors and Actuators, Transducers '89, pp. 277-278, Montreux, Switzerland, June 1989

14. S.J. Tanghe, K. Najafi, K.D. Wise, "A Planar IrO Multichannel Stimulating Electrode for Use in Neural Prosthesis," Book of Abstracts, 5th Int. Conf. on Solid-State Sensors and Actuators, Transducers '89, pp. 297-298, Montreux, Switzerland, June 1989

15. J. Ji, K. Najafi, K.D. Wise, "A Scaled Electronically-Configurable Multichannel Recording Array," Book of Abstracts, 5th Int. Conf. on Solid-State Sensors and Actuators, Transducers '89, pp. 195-196, Montreux, Switzerland, June 1989

16. K. Suzuki, K. Najafi, K.D. Wise, "Process Alternatives and Scaling Limits for High-Density Silicon Tactile Imagers," Book of Abstracts, 5th Int. Conf. on Solid-State Sensors and Actuators, Transducers '89, pp. 260-262, Montreux, Switzerland, June 1989

17. K. Najafi, "Integrated Sensors in Biological Environments," Invited Paper, Book of Abstracts, 5th Int. Conf. on Solid-State Sensors and Actuators, Transducers '89, pp. 295-296, Montreux, Switzerland, June 1989

18. S.T. Cho, K. Najafi, K.D. Wise, "An Ultrasensitive Silicon Pressure-Based Flowmeter," Digest, International Electron Device Meeting, pp. 499-502, Washington, December 1989 (Winner of the Best Student Paper Award, Student: S.T. Cho)

19. S.T. Cho, K. Najafi, K.D. Wise, "Scaling and Dielectric Stress Compensation of Ultrasensitive Boron-Doped Silicon Microstructures," Digest, IEEE Workshop on Micro Electromechanical Systems, pp. 50-55, Napa Valley, California, February 1990

20. T. Akin, B. Ziaie, K. Najafi, "RF Telemetry Powering and Control of Hermetically-Sealed Integrated Sensors and Actuators," Digest, IEEE Solid-State Sensor and Actuator Workshop, pp. 145-148, Hilton-Head, SC, June 1990

21. S.T. Cho, K. Najafi, K.D. Wise, "Secondary Sensitivities and Stability of Ultrasensitive Pressure Sensors," Digest, IEEE Solid-State Sensor and Actuator Workshop, pp. 184-187, Hilton-Head, SC, June 1990

22. K.D. Wise, K. Najafi, J. Ji, J.F. Hetke, S.T. Tanghe, A. Hoogerwerf, D.J. Anderson, S.L. BeMent, M. Ghazzi, W. Baer, T. Hull, Y. Yang, "Micromachined Silicon Microprobes for CNS Recording and Stimulation," Invited Paper, Digest, IEEE Eng. in Medicine and Biol. Soc. Conf., Philadelphia, November 1990

23. T. Akin, K. Najafi, "A Micromachined Silicon Sieve Electrode for Nerve Regeneration Applications," 6th Int. Conf. on Solid-State Sensors and Actuators, pp. 128-131, San Francisco, CA, June 1991

24. B. Ziaie, Y. Gianchandani, K. Najafi, "A High-Current Thin-Film Neuromuscular Microstimulator," 6th Int. Conf. on Solid-State Sensors and Actuators, pp. 124-127, San Francisco, CA, June 1991

25. W.G. Baer, T. Hull, K.D. Wise, K. Najafi, K.D. Wise, "A Multiplexed Silicon Infrared Thermal Imager," 6th Int. Conf. Solid-State Sensors & Actuators, pp. 631-634, San Francisco, CA, June 1991

26. J.F. Hetke, K. Najafi, K.D. Wise, "Flexible Silicon Interconnects for Microelectromechanical Systems," 6th Int. Conf. Solid-State Sensors & Actuators, pp. 764-767, San Francisco, CA, June 1991

27. J. Ji, S.T. Cho, Y. Zhang, K. Najafi, K.D. Wise, "An Ultraminiature CMOS Pressure Sensor For a Multiplexed Cardiovascular Catheter," 6th Int. Conf. on Solid-State Sensors and Actuators, pp. 1018-1021, San Francisco, CA, June 1991

28. Y. Gianchandani, K. Najafi, "A Bulk Silicon Dissolved Wafer Process for Microelectromechanical Systems," Technical Digest, Int. Electron Devices Meeting, pp. 757-760, Washington D.C., December 1991

29. Y. Gianchandani, K. Najafi, "Micron-Sized High Aspect Ratio Bulk Silicon Micromechanical Devices," Proceedings, IEEE Micro Electro Mechanical Systems Workshop, pp. 208-213, Travemunde, Germany, February 1992

30. Y. Gianchandani, K. Najafi, "Batch Fabrication and Assembly of Micromotor-Driven Mechanisms With Multi-Level Linkages," Proceedings, IEEE Micro Electro Mechanical Systems Workshop, pp. 141-146, Travemunde, Germany, February 1992

31. S. Wang, S.B. Crary, K. Najafi, "Electronic Determination of the Modulus of Elasticity and Intrinsic Stress of Thin Films Using Capacitive Bridges," Proceedings, Symposium of the Materials Research Society (MRS), 1992 Spring Meeting, San Francisco, CA, April 27-May 1, 1992

32. S. Bouwstra, H.A.C. Tilmans, A. Selvakumar, and K. Najafi, "Base-Driven Micromechanical Resonators," Digest, IEEE Solid-State Sensors and Actuators Workshop, pp. 148-152, Hilton-Head, S.C., June 1992

33. K. Najafi, "Silicon Integrated Microsensors," Invited Paper, Proceedings, International Society for Optical Engineering (SPIE) Symposium, OE/FIBERS '92, Boston, MA, September 1992

34. S. Bouwstra, H.A.C. Tilmans, A. Selvakumar, and K. Najafi, "Base-Driven Micromechanical Resonators," Book of Abstracts, Eurosensors VI, pp. 65, San Sebastian, Spain, October 5-7, 1992

35. K. Najafi, "Solid-State Integrated Microsensors," Invited Paper, 124th Meeting of the Acoustical Society of America, New Orleans, LA, October 31-November 4, 1992

36. D.J. Anderson, K.D. Wise, and K. Najafi, "Micromachined Silicon Substrate Electrodes for Extracellular Recording," Invited Paper, Proceedings, IEEE Engineering in Medicine and Biology Conference, Paris, France, October 1992

37. B. Ziaie, M. Nardin, J. Von Arx, and K. Najafi, " A Single Channel Implantable Microstimulator for Functional Neuromuscular Stimulation (FNS)," Proceedings, 7th Int. Conference on Solid-State Sensors and Actuators (Transducers '93), pp. 266-269, Yokohama, Japan, June 1993

38. B. Ziaie, J. Von Arx, M. Nardin, and K. Najafi, "A Hermetic Packaging Technology with Multiple Feedthrough For Integrated Sensors and Actuators," Proceedings, 7th Int. Conference on Solid-State Sensors and Actuators (Transducers '93), Yokohama, Japan, June 1993

39. A.D. Oliver, W.G. Baer, K. Najafi, and K.D. Wise, "Precision Measurement of Process Temperature Uniformity in Semiconductor Manufacturing," Proceedings, SRC TECHCON '93, 1993

40. K. Najafi, and C.H. Mastrangelo, "Solid-State Microsensors and Smart Structures," Invited Paper Proceedings, IEEE Ultrasonics, Ferroelectrics, and Frequency Control Symposium, Baltimore, Maryland, November 1993

41. Y. Gianchandani, and K. Najafi, "Silicon Micromachined Thermal Profilers," Digest, Int. Electron Devices Meeting, IEDM '93, pp. 191-194, Washington, DC, December 1993

42. Tayfun Akin, Khalil Najafi, Robert Bradley, “A LowPower Implantable Multichannel Digital Neural Record System,” VLSI Symposium, Hawaii, January 1994

43. K. Ma, and K. Najafi, "A New Capacitive Electrochemical Etch-Stop Technique," Proceedings, IEEE/ASME Micro Electro Mechanical Systems, Workshop, pp. 158-163, Oiso, Japan, January 1994

44. Tayfun Akin, and K. Najafi, "A Telemetrically Powered and Controlled Implantable Neural Recording System with CMOS Interface Circuitry," Proceedings, IEEE 7th Mediterranean Electrotechnical Conf., pp. 545-548, Antalya, Turkey, April 1994

45. W.H. Juan, S.W. Pang, A. Selvakumar, and K. Najafi, "Using Electron Cyclotron Resonance (ECR) Source to Etch Polyimide Molds for Fabrication of Electroplated Microstructures," Digest, Solid-State Sensors and Actuators Workshop, pp. 82-85, Hilton Head, SC, June 1994

46. C.W. Yeh, and K. Najafi, "Bulk-Silicon Tunneling-Based Pressure Sensors," Digest, Solid-State Sensors and Actuators Workshop, pp. 201-204, Hilton Head, SC, June 1994

47. Y.B. Gianchandani, and K. Najafi, "A Compact Strain Sensor with a Bent Beam Deformation Multiplier and a Complementary Motion Vernier," Digest, Solid-State Sensors and Actuators Workshop, pp. 116-119, Hilton Head, SC, June 1994

48. K.J. Ma, N. Yazdi, and K. Najafi, "A Bulk-Silicon Capacitive Microaccelerometer with Built-In Overrange and Force Feedback Electrodes," Digest, Solid-State Sensors and Actuators Workshop, pp. 160-163, Hilton Head, SC, June 1994

49. A. Selvakumar, and K. Najafi, "High Density Vertical Comb Array Microactuators Fabricated Using A Novel Bulk/Poly-Silicon Trench Refill Technology," Digest, Solid-State Sensors and Actuators Workshop, pp. 138-141, Hilton Head, SC, June 1994

50. M.W. Putty, and K. Najafi, "A Micromachined Vibrating Ring Gyroscope," Invited Paper, Technical Digest, Solid-State Sensors and Actuators Workshop, pp. 213-220, Hilton Head, SC, June 1994

51. Y.B. Gianchandani, and K. Najafi, "Bulk Silicon Micromachining for the Scanning Thermal Profiler and Other Applications," Int. Symposium on Optics, Imaging, and Instrumentation, SPIE, San Diego, CA, July 1994

52. K. Najafi, "Integrated Sensing Systems in Closed Loop Neural Prosthesis," Invited Keynote Speaker, European Solid-State Sensors and Actuators Conf., EUROSENSORS, Toulouse, France, September 1994

53. K. Najafi, "Sensor/Circuit Integration in Biomedical Applications," Invited Presentation, European NEXUS Workshop on Sensor/Circuit Integration, Toulouse, France, Sept. 29-30, 1994

54. A. Selvakumar, K. Najafi, W.H. Juan, and S. Pang, "Vertical Comb Array Microactuators," Proceedings, IEEE Micro Electro Mechanical Systems (MEMS) Workshop, pp. 43-48, Amsterdam, Netherlands, February 1995

55. M. Nardin, B. Ziaie, J. Von Arx, A. Coghlan, M. Dokmeci, and K. Najafi, "An Inductively Powered Microstimulator for Functional Neuromuscular Stimulation," 13th International Symposium on Biotelemetry, pp. 99-104, Williamsburg, VA, April 1995

56. R.M. Bradley, T. Akin, S. Gurkan, X. Cao, and K. Najafi, "Chronic Recordings from Fibers of Rat Glossopharyngeal Nerve Regenerated Through a Micromachined Sieve Electrode Array," 17th annual meeting of the Association for Chemoreception Sciences, Sarasota FL, April 19-23, 1995

57. K. Najafi, "Silicon-Based Electronic Interfaces to Biological Systems," Invited Speaker at the Workshop on "Bio-Mechatronics" held as part of the 1995 IEEE Int. Conference on Robotics and Automation, Nagoya, Japan, May 22-27, 1995

58. T. Akin, K. Najafi, and R.M. Bradley, "An Implantable Multichannel Digital Neural Recording System for a Micromachined Sieve Electrode,” 1995 Int. Conference on Solid-State Sensors and Actuators, Transducers '95, Stockholm, Sweden, June 1995

59. M. Nardin, and K. Najafi, "A Multichannel Neuromuscular Microstimulator With Bi-Directional Telemetry,” 1995 Int. Conference on Solid-State Sensors and Actuators, Transducers '95, pp. 59-62, Stockholm, Sweden, June 1995

60. J. Von Arx, B. Ziaie, M. Dokmeci, And K. Najafi, "Hermeticity Testing of Glass-Silicon Packages with On-Chip Feedthroughs,” 1995 Int. Conference on Solid-State Sensors and Actuators, Transducers '95, pp. 244-247, Stockholm, Sweden, June 1995

61. A. Mason, N. Yazdi, K. Najafi, and K.D. Wise, "A Low-Power Wireless Microinstrumentation System for Environmental Monitoring,” 1995 Int. Conference on Solid-State Sensors and Actuators, Transducers '95, Stockholm, Sweden, June 1995

62. Y.B. Gianchandani, K.J. Ma, and K. Najafi, "A CMOS Dissolved Wafer Process for Integrated p++ Microelectromechanical Systems,” 1995 Int. Conference on Solid-State Sensors and Actuators, Transducers '95, Stockholm, Sweden, June 1995

63. K. Najafi, “Recent Progress in Micromachining Technology and Applications in Implantable Biomedical Systems,” Invited Lecture, Proceedings, Sixth Int. Symp. on Micro Machine and Human Science, MHS ‘95, pp. 11-20, Nagoya, Japan, October 1995

64. K. Najafi, “Microinstrumentation Systems for Environmental Monitoring,” Invited Paper, Proceedings, Int. Symp. on Micro Systems, Intelligent Materials and Robots, pp. 142-145, Sendai, Japan, September 1995

65. K.D. Wise, C.H. Mastrangelo, K. Najafi, and Clark T.C. Nguyen, “Research in Integrated Sensors and Microsystems at the University of Michigan”, Invited Paper, Disgest, Sensors Expo, Chicago, September 1995

66. C. Yeh, and K. Najafi, “A Low-Voltage Bulk Silicon Tunneling-Based Microaccelerometer,” Proceedings, 1995 Int. Electron Devices Meeting (IEDM ‘95), pp. 593-596, Washington D.C., December 1995

67. B. Ziaie and K. Najafi, "Biomedical Microdevices: A Micromachining Approach," Invited Paper, Proceedings, 1995 International Semiconductor Device Research Symposium, pp. 401-404, Charlottesville, VA, December 5-8, 1995

68. A. Selvakumar, N. Yazdi, and K. Najafi, “A Low-Power Wide Range Threshold Acceleration Sensing System,” Proceedings, 1996 Micro Electromechanical Systems Workshop (MEMS ‘96), San Diego, California, February 1996

69. T. Akin, B. Ziaie, and K. Najafi, “A Modular, Micromachined High-Density Connector for Implantable Biomedical Systems,” Proceedings, 1996 Micro Electromechanical Systems Workshop (MEMS ‘96), San Diego, California, February 1996

70. C. Huang, J. Papp, K. Najafi, and H.M. Nagib, “A Microactuator System for the Study and Control of Screech in High-Speed Jets,” Proceedings,1996 Micro Electromechanical Systems Workshop (MEMS ‘96), San Diego, California, February 1996

71. N. Yazdi, A. Mason, K. Najafi, and K.D. Wise, “A Smart Sensing Microsystem with a Capacitive Sensor Interface,” Proceedings, 1996 IEEE Int. Conf. on Circuits and Systems, Vol. 4, pp. 336-339, Atlanta, Georgia, May 1996

72. N. Yazdi, A. Mason, K. Najafi, K.D. Wise, “A Low-Power Generic Interface Circuit for Capacitive Sensors,” Technical Digest, Solid-State Sensor and Actuator Workshop, Hilton Head, SC, June 1996

73. K. Najafi, “Silicon Micromachining Technologies: Future Needs and Challenges,” Invited Speaker SPIE, Micromaching & Microfabrication Process Technology II Conference, October 1996

74. B. Ziaie, J. Von Arx, K. Najafi, “A Micro-Fabricated Planar High-Current IrOx Stimulating Microelectrode,” IEEE Eng. in Medicine and Biology (EMBS) Conf., Amsterdam, October 1996

75. E. Alnajjar, A. Naguib, H. Nagib, C.C. Huang, K. Najafi, “Receptivity of the Shear Layer of an Axi-Symmetric Jet to Excitation Using MEMS-Based Mechanical Actuators,” Meeting of the Division of Fluid Dynamics, New York, November 1996

76. A. Selvakumar, F. Ayazi, and K. Najafi, “A High-Sensitivity Z-Axis Silicon Accelerometer,” Technical Digest, IEEE Int. Electron Devices Meeting, San Francisco, December 1996

77. N. Yazdi, and K. Najafi, “An All-Silicon Single-Wafer Fabrication Technology for Precision Microaccelerometers,” Ninth IEEE Int. Conference on Solid-State Sensors and Actuators, Transducers ‘97, Chicago, June 1997

78. C. Yeh, and K. Najafi, “Micromachined Tunneling Accelerometer with a Low-Voltage CMOS Interface Circuit,” Ninth IEEE Int. Conference on Solid-State Sensors and Actuators, Transducers ‘97, Chicago, June 1997

79. J. Von Arx, and K. Najafi, “On-Chip Coils with Integrated Cores for Remote Inductive Powering of Integrated Microsystems,” Ninth IEEE Int. Conference on Solid-State Sensors and Actuators, Transducers ‘97, Chicago, June 1997

80. M. Dokmeci, J. Von Arx, and K. Najafi, “Accelerated Testing of Anodically Bonded Glass-Silicon Packages in Salt Water,” Ninth IEEE Int. Conference on Solid-State Sensors and Actuators, Transducers ‘97, Chicago, June 1997

81. B. Ziaie, N. Kocaman, and K. Najafi, “A Generic Micromachined Silicon Platform for Low-Power, Low-Loss Miniature Transceivers,” Ninth IEEE Int. Conference on Solid-State Sensors and Actuators, Transducers ‘97, Chicago, June 1997

82. Y. Gianchandani, M. Shinn, K. Najafi, “Impact of Long, High Temperature Anneals on Residual Stress in Polysilicon,” Ninth IEEE Int. Conference on Solid-State Sensors and Actuators, Transducers ‘97, Chicago, June 1997

83. A. Naguib, C. Christophorou, E. Alnajjar, H. Nagib, C.C. Huang, and K. Najafi, “Arrays of MEMS-Based Actuators for Control of Supersonic Jet Screech,” Meeting of the American Institute of Aeronautics and Astronautics, Paper AIAA 97-1963, July 1997

84. B. Ziaie, K. Najafi, and D. J. Anderson, "A Low-Power Miniature Transmitter Using a Low-Loss Silicon Platform for Biotelemetry," Proc. 19th Ann. International IEEE Engineering in Medicine and Biology Conference, Chicago, 4 pages, October 1997

85. E. Alnajjar, H. Nagib, A. Naguib, C. Christophorou, C. Huang, and K. Najafi, "Receptivity of High-Speed Jets to Excitation Using an Array of MEMS-Based Mechanical Actuators," ASME, FEDSM'97, 1997

86. F. Ayazi and K. Najafi, "Design and fabrication of a high-performance polysilicon vibrating ring gyroscope," Proceedings, IEEE Micro Electro Mechanical Systems Workshop (MEMS'98), Heidelberg, Germany, pp. 621-626, Jan. 1998.

87. Y. Gianchandani, H. Kim, M Shinn, B. Ha, B. Lee, K. Najafi, and C. Song, "A MEMS-First Fabrication Process for Integrating CMOS Circuits with Polysilicon Microstructures," Proc. Eleventh IEEE International Workshop on Micro Electro Mechanical Systems (MEMS), Heidelberg, Germany, pp. 257-262, Jan. 1998

88. C. Huang, K. Najafi, E. Alnajjar, C. Christophorou, A. Naguib, and H.M. Nagib, “Operation and Testing of Electrostatic Microactuators and Micromachined Sound Detectors for Active Control of High Speed Flows,” Proceedings, IEEE/ASME Micro Electro Mechanical Systems Workshop, Heidelberg, Germany, pp. 81-86, January 1998

89. C. Huang, and K. Najafi, “Ultra-Thin p++ Monocrystalline Silicon Microstructures,” Technical Digest, Solid-State Sensor and Actuator Workshop, Hilton-Head, S.C., June 1998

90. B. Ziaie, T.W. Wu, N. Kocaman, K. Najafi, and D.J. Anderson, “An Implantable Pressure Sensor Cuff For Tonometric Blood Pressure Measurement,” Technical Digest, Solid-State Sensor and Actuator Workshop, Hilton-Head, S.C., June 1998

91. Y.T. Cheng, L. Lin, and K. Najafi, “Localized Silicon Fusion and Eutectic Bonding for MEMS Fabrication and Packaging,” Technical Digest, Solid-State Sensor and Actuator Workshop, pp. 233-236, Hilton-Head, S.C., June 1998

92. N. Yazdi, K. Najafi, “Modeling and Noise Analysis of A Silicon Micro-g Accelerometer with Direct Digital Output,” Proceedings of The 2nd International Conference on Integrated Nano/Microtechnology for Space Applications (NanoSpace98), Houston, TX, USA, November 1998

93. Y.T. Cheng, L. Lin, and K. Najafi, “Localized Bonding with PSG or Indium Solder as Intermediate Layer,” Digest, IEEE Micro Electro Mechanical Systems (MEMS) Conference, pp. 285-289, Orlando, Florida, Jan. 1999

94. M. Dokmeci, and K. Najafi,”A High Sensitivity Polyimide Humidity Sensor For Monitoring Hermetic Micropackages,” Digest, IEEE Micro Electro Mechanical Systems (MEMS) Conference, Orlando, Florida, Jan. 1999

95. N. Yazdi, A. Salian, and K. Najafi, “A High-Sensitivity Capacitive Microaccelerometer With a Folded-Electrode Structure,” Digest, IEEE Micro Electro Mechanical Systems (MEMS) Conference, Orlando, Florida, Jan. 1999

96. J.A. Von Arx, and K. Najafi, “A Single-Chip Fully-Integrated Telemetry-Powered System For Peripheral Nerve Stimulation,” Digest, IEEE Int. Conf. On Solid-State Circuits (ISSCC ‘99), pp. 214-215, San Francisco, February 1999

97. N. Yazdi, and K. Najafi, “An Interface IC For Capacitive Silicon µg Accelerometers,” Digest, IEEE Int. Conf. On Solid-State Circuits (ISSCC ‘99), pp. 132-133, San Francisco, February 1999

98. A. Naguib, E. Soupos, H. Nagib, C. Huang, and K. Najafi, “A Piezoresistive MEMS Sensor for Acoustic Noise Measurements,” 5th AIAA/CEASAeroacoustic Conference and Exhibit, May 10-12, Bellevue, WA, 1999

99. Babak Amir Parviz, L. Bernal, and K. Najafi, “A Micromachined Helmholtz Resonator For Generation of Microjet Flows,” Technical Digest, Tenth Int. Conf. On Solid-State Sensors and Actuators (Transducers ’99), pp. 1788-1791, Sendai, Japan, June 1999

100. B. Amir Parviz, and K. Najafi, Fabrication of Bulk-Silicon Microstructures Using a Trench-Assisted Etch-Stop Process,” Technical Digest, Tenth Int. Conf. On Solid-State Sensors and Actuators (Transducers ’99), pp. 534-537, Sendai, Japan, June 1999

101. F. Ayazi, and K. Najafi, “High Aspect-Ratio Polysilicon Micromachining Technology,” Technical Digest, Tenth Int. Conf. Solid-State Sensors & Actuators (Transducers ’99), Sendai, Japan, June 1999

102. R. Vogt, K. Najafi, Ralph Steiner, and H. Baltes, “A Low-Drift Differential Double Hall Sensor with On-Chip CMOS Circuitry,” Technical Digest, Tenth Int. Conf. On Solid-State Sensors and Actuators (Transducers ’99), Sendai, Japan, June 1999

103. A. Naguib, D. Benson, H. Nagib, C. Huang, and K. Najafi, “Assessment of MEMS-Based Hot Wires,” Proceedings of the 3rd ASME/JSME Joint Fluids Engineering Conference, San Francisco, CA July 1999

104. K. Najafi, B.A. Parviz, L.P. Bernal, P. Washabaugh, A.K. Chou, C. Zhang, M. Muller, and R. Moran, “Micromachined Resonators and Their Application in Micro Propulsion Systems,” Proceedings, 6th Annual Strategic and Technical Symposium on Vehicular Applications of Displays and Micro Sensors, pp. 189-192, Ypsilanti, Michigan, Sept. 1999

105. D. Aslam, V. Papageorgiou, F. Ayazi, and K. Najafi, “IC-Compatible Technology of Poly-Diamond MEMS,” Proceedings, 6th Annual Strategic and Technical Symposium on Vehicular Applications of Displays and Micro Sensors, pp. 113-116, Ypsilanti, Michigan, Sept. 1999

106. F. Ayazi, H.H. Chen, and K. Najafi,” High-Performance Vibratory Silicon Microgyroscope,” Proceedings, 6th Annual Strategic and Technical Symposium on Vehicular Applications of Displays and Micro Sensors, pp. 153-158, Ypsilanti, Michigan, Sept. 1999

107. A. Salian, H. Kulah, N. Yazdi, and K. Najafi,“A Micro-g Capacitive Silicon Microaccelerometer,” Proceedings, 6th Annual Strategic and Technical Symposium on Vehicular Applications of Displays and Micro Sensors, pp. 165-172, Ypsilanti, Michigan, Sept. 1999

108. M. Dokmeci, K. Najafi, “Glass-Silicon Hermetic Micro Packages for Implantable Biomedical Microsystems,” Proceedings, 6th Annual Strategic and Technical Symposium on Vehicular Applications of Displays and Micro Sensors, pp. 159-164, Ypsilanti, Michigan, Sept. 1999

109. Arjun Chandran, K. Najafi, and K.D. Wise, “A New DC Baseline Stabilization Scheme for Neural Recording Microprobes,” 1999 First Joint BMES/EMBS Conference, Annual Fall Meeting of the Biomedical Engineering Society, 21st Annual International Conference of the Engineering in Medicine and Biology Society, pp. 386-387, Atlanta, Georgia, October 1999

110. S. Hauvespre, M. Dokmeci, and K. Najafi , “Wireless Humidity Monitoring in Hermetic Biomedical Micropackages,” 1999 First Joint BMES/EMBS Conference, Annual Fall Meeting of the Biomedical Engineering Society, 21st Annual International Conference of the Engineering in Medicine and Biology Society, pp. 487-488, Atlanta, Georgia, October 1999

111. P. Mohseni, K. Nagarajan, B. Ziaie, K. Najafi, and S. B. Crary, “Robotics at the Interface of Microsystems Technology and Biology: Biobotics,” International Advanced Robotics Program's Workshop on Micro Robots, Micro Machines and Systems, The Institute for Problems in Mechanics, Russian Academy of Sciences, Moscow, Russia, pp. 78-82, 24-25 November 1999

112. Michael O. Muller, Luis P. Bernal, Robert P. Moran, Peter D. Washabaugh, Babak Amir Parviz, and Khalil Najafi, " Micromachined acoustic resonators for microjet propulsion", AIAA 38th Aerospace Science Conference, January 10-13, 2000, Reno Nevada, AIAA-2000-0547

113. Robert P. Moran, Peter D. Washabaugh, Michael O. Muller, Luis P. Bernal, Babak Amir Parviz, and Khalil Najafi, "Numerical simulation of micromachined acoustic resonators", AIAA 38th Aerospace Science Conference, January 10-13, 2000, Reno Nevada, AIAA-2000-0546

114. Michael O. Muller, Luis P. Bernal, Robert P. Moran, Peter D. Washabaugh, Babak Amir Parviz, Allen T. -K. Chou, Chunbo Zhang, and Khalil Najafi, "Thrust performance of micromachined synthetic jets,” AIAA Fluids 2000 Conference, January 19-22, 2000, Denver Colorado, AIAA-2000-2404

115. J. Chae, H. Kulah, A. Salian, and K. Najafi, "A High-Sensitivity Silicon-On-Glass Lateral Micro-g Microaccelerometer," Third Annual Micro/NanoTechnology Conference, Nanospace 2000, Houston, Texas, January 2000

116. B.A. Parviz, T.K. Chou, C. Zhang, K. Najafi, M.O. Muller, L.P. Bernal, and P. Washabaugh, “A Wafer-Integratedf Array of Micromachined Electrostatically-Driven Ultrasonic Resonators for Microfluidic Applications,” Technical Digest, 13th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 34-39, Myazaki, Japan, January 2000

117. T. Harpster, S. Hauvespre, M. Dokmeci, B. Stark, A. Vosoughi, and K. Najafi, “A Passive Humidity Monitoring System for In-Situ remote Wireless Testing of Micropackages,” Technical Digest, 13th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 335-340, Myazaki, Japan, January 2000

118. Y.T. Cheng, L. Lin, and K. Najafi, “Fabrication and Hermeticity Testing of A Glass-Silicon Package Formed Using Localized Aluminum/Silicon-To-Glass Bonding,” Technical Digest, 13th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 757-762, Miyazaki, Japan, January 2000

119. F. Ayazi and K. Najafi, “High Aspect-Ratio Dry-Release Poly-Silicon MEMS Technology for Inertial-Grade Microgyroscopes,” in Proc. IEEE 2000 Position Location and Navigation Symposium (PLANS 2000), San Diego, CA, March 2000, pp. 304-308.

120. P.D. Washabaugh, T. MacDermid, M.O. Muller, L.P. Bernal, B. Amir Parviz, T.K. Chou, C. Zhang, and K. Najafi, “An Approach Toward a Wafer Integrated Micro Air Vehicle,” Proceedings, Fifteenth International Conference on Unmanned Air Vehicle Systems, pp. 33.1-33.11, Bristol, UK, April 2000

121. Arvind Salian, Haluk Kulah, Navid Yazdi, Guohong He and Khalil Najafi, "A High-Performance Hybrid CMOS Microaccelerometer, " Technical Digest, Hilton Head 2000 Solid-State Sensor & Actuator Workshop, pp. 285-288, Hilton Head Island, SC, June 2000

122. F. Ayazi, H.H Chen, F. Kocer, G. He, and K. Najafi, “A High Aspect-Ratio Polysilicon Vibrating Ring Gyroscope,” in Tech. Dig. Solid-State Sensors and Actuators Workshop, Hilton Head, SC, June 2000, pp. 289-292.

123. Michael O. Müller, Luis P. Bernal, Robert P. Moran, Peter D. Washabaugh, Babak Amir Parviz, Tsung-Kuan Allen Chou, Chunbo Zhang, Khalil Najafi, “Thrust Performance of Micromachined Synthetic Jets,” Fluids 2000 Conference and Exhibit, AIAA Paper 2000-2404, Denver, CO, June 19-22 2000

124. K. Najafi, “Micromachined Micro Systems: Miniaturization Beyond Microelectronics,” Keynote Plenary Talk, IEEE VLSI Circuits Symposium, Hawaii, June 12-16, 2000

125. K. Najafi, “Low-Power Micromachined Micro Systems,” Keynote Speaker, Int. Symposium on Low-Power Electronics and Devices (ISLPED ’00), Portofino, Italy, July 2000

126. R. Rangarajan, J.A. Von Arx, S. Rose, B. Ziaie, K. Najafi, "Fully Integrated Nerve Electrical Stimulation System,” IEEE Midwest Symposium for Circuits and Systems, 2000, Lansing, MI, Aug. 8-11, 2000

127. A. Salian, H. Kulah, N. Yazdi, G. He, and K. Najafi, "A Hybrid Silicon Microaccelerometer System with CMOS Interface Circuit," IEEE Midwest Symposium for Circuits and Systems, Lansing MI, August 8-11 2000

128. H. Kulah, N. Yazdi, and K. Najafi, "A CMOS Switched-Capacitor Interface Circuit for an Integrated Acclerometer," IEEE Midwest Symposium for Circuits and Systems, Lansing MI, August 8-11 2000

129. T. Lisby, S. Nikles, K. Najafi, O. Hansen, S. Bouwstra and J. Branebjerg, “Mechanical characterization of flexible silicon microstructures,” Eurosensors 2000, The 14th European Conference on Solid-State Transducers, 27-30 August 2000, Copenhagen, Denmark

130. Orhan Akar, Tayfun Akin, Tim Harpster, and Khalil Najafi, “A Wireless Batch Sealed Absolute Capacitive Pressure Sensor,” Eurosensors 2000, The 14th European Conference on Solid-State Transducers, Copenhagen, Denmark , pp. 585-588, 27-30 August 2000,

131. N. Yazdi, K. Najafi, "Performance limits of a closed-loop micro-G silicon accelerometer with deposited rigid electrodes," Proceedings of the 12th IEEE International Conference on Microelectronics (ICM 2000), Tehran, Iran, October 2000, pp. 313 -316.

132. M.O. Müller, L.P. Bernal, P.K. Miska, P.D. Washabaugh, T.-K.A. Chou, B.A. Parviz, C. Zhang & K. Najafi, “Flow structure and performance of axisymmetric synthetic jets,” AIAA 39th Aerospace Sciences Meeting & Exhibit, January 8-11, 2001, Reno, Nevada, AIAA Paper 2001-1008.

133. Y. T. Cheng, W.T. Hsu, Liwei Lin, C.T. Nguyen, and K. Najafi, "Vacuum Packaging Technology Using Localized Aluminum/Silicon-To-Glass Bonding,” Proceedings of 14th IEEE Micro Electro Mechanical Systems Conference (MEMS 2001), pp.18-21, Interlaken, Switzerland, Jan. 2001

134. B.A. Parviz, T.K. Chou, C. Zhang, K. Najafi, M.O. Müller, L.P. Bernal & P. Washabaugh, “Performance of ultrasonic electrostatic resonators for use in micro propulsion,” Proceedings of 14th IEEE Micro Electro Mechanical Systems Conference (MEMS 2001), pp. 586-589, Interlaken, Switzerland, Jan. 2001

135. T. Harpster, B. Stark, and K. Najafi, "A Passive Wireless Integrated Humidity Sensor,” Proceedings of 14th IEEE Micro Electro Mechanical Systems Conference (MEMS 2001), Miyazaki, Japan, pp.335-340., Jan. 2001

136. Stefan Nikles, Sanford Bledsoe, Robert Bradley, and Khalil Najafi, "Reliability and Contact Resistance of Polysilicon Beams Leads for Use in a High-Density Connector", Proceedings of 14th IEEE Micro Electro Mechanical Systems Conference (MEMS 2001), pp. 65-67, Interlaken, Switzerland, January 21-25, 2001.

137. B. H. Stark, M. Dockmeci, T. J. Harspter, and K. Najafi, "Improving Corrosion resitance and Silicon Glass Micropackages Using Boron Doping and/or Self-Induced Galvanic Bias", Proceedings of International Reliability Physics Symposium, Orlando, Fl, pp. 455-462, April 2001.

138. K. D. Wise, K. Najafi, D. M. Aslam, R. B. Brown, J. M. Giachino, L. C. McAfee, C. T.-C. Nguyen, R. O. Warrington, and E. T. Zellers, "Wireless Integrated MicroSystems (WIMS): The Coming Revolution in the Remote Gathering of Information, Digest SensorsExpo, (Symposium Keynote), Chicago, June 2001.

139. Tsung-Kuan A. Chou, Khalil Najafi, “3D MEMS Fabrication Using Low-Temperature Wafer Bonding With Benzocyclobutene (BCB),” Digest, Twelft IEEE Int. Conf. On Solid-State Sensors and Actuators (Transducers '01), Munich, Germany, June 2001.

140. C. Zhang, K. Najafi, L.P. Bernal & P. Washabaugh, “An integrated combustor-thermoelectric micro power generato,” Technical Digest, Digest, Twelft IEEE Int. Conf. On Solid-State Sensors and Actuators (Transducers '01), Munich, Germany, June 2001.

141. T.K. Chou, K. Najafi, M.O. Müller, L.P. Bernal & P. Washabaugh, “High-Density micromachined ejector array for micro propulsion,” Technical Digest, Twelft IEEE Int. Conf. On Solid-State Sensors and Actuators (Transducers '01), Munich, Germany, June 2001.

142. Brian H. Stark and Khalil Najafi, “An Ultra-Thin Hermetic Package Utilizing Electroplated Gold,” Technical Digest, Twelft IEEE Int. Conf. On Solid-State Sensors and Actuators (Transducers '01), Munich, Germany, June 2001.

143. H. Yu, and K. Najafi, Circuitry For A Wireless Microsystem For Neural Recording Microprobes," Proceedings, International IEEE Engineering in Medicine and Biology Conference (EMBC), Istanbul, Turkey, October 2001.

144. G. J. O‚Brien, D. J. Monk, and K. Najafi, “Submicron High Aspect Ratio Silicon Beam Etch," Proceedings, SPIE MEMS Symposium, Vol. 4592, pp. 41-48, Australia, December 2001.

145. M.O. Müller, L.P. Bernal, P.D. Washabaugh, T-K A. Chou, And K. Najafi, Flow Field And Performance of High Frequency Micromachined Synthetic Jets," 40th AIAA Aerospace Sciences Meeting and Exhibit, paper # 2002-0974, Reno, Nevada, January 2002

146. J. Chae, H. Kulah, and K. Najafi, "A Hybrid Silicon-On-Glass (Sog) Lateral Micro-Accelerometer With CMOS Readout Circuitry," Technical Digest, IEEE 2002 Int. Conference on Micro Electro Mechanical Systems (MEMS 2002), Las Vegas, January 2002

147. T-K A. Chou and K. Najafi, "Fabrication Of Out-Of-Plane Curved Surfaces In Si By Utilizing RIE Lag," Technical Digest, IEEE 2002 Int. Conference on Micro Electro Mechanical Systems (MEMS 2002), Las Vegas, January 2002

148. G. He, and K. Najafi, "A Single-Crystal Silicon Vibrating Ring Gyroscope," Technical Digest, IEEE 2002 Int. Conference on Micro Electro Mechanical Systems (MEMS 2002), Las Vegas, January 2002

149. T-K A. Chou, K. Najafi, M.O. Muller, L.P. Bernal, and P.D. Washabaugh, "Characterization Of Micromachined Acoustic Ejector And Its Applications," Technical Digest, IEEE 2002 Int. Conference on Micro Electro Mechanical Systems (MEMS 2002), Las Vegas, January 2002

150. T. J. Harpster and K. Najafi, "Long-Term Testing Of Hermetic Anodically Bonded Glass-Silicon Packages," Technical Digest, IEEE 2002 Int. Conference on Micro Electro Mechanical Systems (MEMS 2002), Las Vegas, January 2002

151. C. Zhang, and K. Najafi, "Fabrication Of Thick Silicon Dioxide Layers Using DRIE, Oxidation And Trench Refill," Technical Digest, IEEE 2002 Int. Conference on Micro Electro Mechanical Systems (MEMS 2002), Las Vegas, January 2002

152. T-K A. Chou, K. Najafi, M.O. Muller, L.P. Bernal, P.D. Washabaugh, and B. Amirparviz, "Micromachined E-Jet for IC Chip Cooling," Technical Digest, IEEE International Solid-State Circuits Conference, pp. 356-357, San Francisco, CA, February 2002

Chapters in Books:

1. K.D. Wise, K. Najafi, "VLSI Sensors in Medicine," in VLSI In Medicine, Norman G. Einspruch and Robert D. Gold, eds., Academic Press, 1988

2. K. Najafi, K.D. Wise, N. Najafi, "Integrated Sensors," Published in "Semiconductor Sensors," Edited by Simon Sze, John Wiley, 1994

3. K. Najafi, "Sensor and Circuit Integration in Biomedical Applications," in Silicon Sensors and Circuits: On-Chip Compatibility, Ed. R.F. Wolffenbuttel, pp. 211-257, Chapman and Hall, 1996

4. K. Najafi, "Micromachined Systems For Neurophysiological Applications," in Handbook of Microlithography, Micromachining and Microfabrication, Volume II: Micromachining and Microfabrication, SPIE, 1997

Publications

Journal Publications:

Conference Publications:

Other Conference or Symposium Presentations:

Chapters in Books: