PROFESSOR
KHALIL NAJAFI

Home

Biography

Projects & Research

Publications

People

Patents & Disclosures

Links of Interest

Multimedia

Contact

 

Lurie Nanofabrication Facility

Wireless Integrated Microsystems

 

Professor Khalil Najafi's Publications

Journal Publications

  1. K. Najafi, K.D. Wise, T. Mochizuki, "A High-Yield IC-Compatible Multichannel Recording Array," IEEE Trans. Electron Devices, Vol. ED-32, No. 7, pp. 1206-1211, 01/1985

  2. S.L. BeMent, D.J. Anderson, K.D. Wise, K. Najafi, K.L. Drake, "Solid-State Electrodes for Multiplexed Multichannel Intracortical Neuronal Recording," IEEE Trans. Biomed. Eng., Vol. BME-33, No. 2, pp. 230-241, 02/1986

  3. K. Najafi, K.D. Wise, "An Implantable Multielectrode Array with On-Chip Signal Processing," IEEE J. Solid-State Ckts., Vol. SC-21, No. 6, pp. 1035-1044, 12/1986

  4. D.J. Anderson, K. Najafi, S.J. Tanghe, D.A. Evans, K.L. Levy, J.F. Hetke, X. Xue, J.J. Zappia, K.D. Wise, "Batch-Fabricated Thin-Film Electrodes for Stimulation of the Central Auditory System," IEEE Trans. Biomed. Eng., Vol. BME-36, No. 7, pp. 693-704, 07/1989

  5. K. Najafi, K. Suzuki, "Measurement of Fracture Stress, Young's Modulus, and Intrinsic Stress of Heavily Boron-Doped Silicon Microstructures," J. Thin Solid Films, 181, pp. 251-258, 12/1989

  6. S.J. Tanghe, K. Najafi, K.D. Wise, "A Planar IrO Multichannel Stimulating Electrode for Use in Neural Prosthesis," Sensors and Actuators, pp. 464-467, B1, 01/1990

  7. J. Ji, K. Najafi, K.D. Wise, "A Scaled Electronically-Configurable Multichannel Recording Array," Sensors and Actuators, pp. 589-591, A21-A23, 01/1990

  8. K. Suzuki, K. Najafi, K.D. Wise, "Process Alternatives and Scaling Limits for High-Density Silicon Tactile Imagers," Sensors and Actuators, pp. 915-918, A21-A23, 01/1990

  9. K. Najafi, "Integrated Sensors in Biological Environments," Sensors and Actuators, pp. 453-459, B1, 01/1990

  10. J.F. Hetke, K. Najafi, K.D. Wise, "Flexible Miniature Ribbon Cables for Long-Term Connection to Implantable Sensors," Sensors and Actuators, pp. 999-1002, A21-A23, 01/1990

  11. K. Najafi, J. Ji, K.D. Wise, "Scaling Limitations of Silicon Multichannel Recording Probes," IEEE Trans. Biomed. Eng., Vol. BME-37, No. 1, pp. 1-11, 01/1990

  12. K. Najafi, J.F. Hetke, "Strength Characterization of Silicon Microprobes in Neurophysiological Tissues," IEEE Trans. on Biomedical Engineering, Vol. BME-37, No. 5, pp. 474-481, 05/1990

  13. K. Suzuki, K. Najafi, K.D. Wise, "A 1024-Element High-Performance Silicon Tactile Imager," IEEE Trans. Electron Devices, Vol. ED-37, No. 8, pp. 1852-1860, 08/1990

  14. Jin Ji, K. Najafi, Kensall Wise, "A Low-Noise Demultiplexing System Active Multichannel Microelectrode Arrays," IEEE Transactions of Biomedical Engineering, Vol. 38, #1, 01/1991

  15. K. Najafi, "Smart Sensors," Micromech. & Microeng., 1, pp. 86-102, 06/1991

  16. K.D. Wise, K. Najafi, "Microfabrication Techniques for Integrated Sensors and Microsystems," Science, Vol. 254, pp. 1335-1342, 11/1991

  17. R.M. Bradley, R.H. Smoke, T. Akin, K. Najafi, "Functional Regeneration of Glossopharyngeal Nerve Through Micromachined Sieve Electrode Arrays," Brain Research, 594, pp. 84-90, 01/1992

  18. S.T. Cho, K. Najafi, C.L. Lowman, K.D. Wise, "An Ultrasensitive Silicon Pressure-Based Microflow Sensor," IEEE Trans. Electron Devices, Vol. ED-39, No. 4, pp. 825-835, 04/1992

  19. S.T. Cho, K. Najafi, K.D. Wise, "Internal Stress Compensation and Scaling in Ultrasensitive Silicon Pressure Sensors," IEEE Trans. Electron Devices, Vol. ED-39, No. 4, pp. 836-842, 04/1992

  20. Y. Gianchandani, K. Najafi, "Batch-Assembled Multi-Level Micromachined Mechanisms from Bulk Silicon," Journal of Micromechanics and Microengineering, Vol. 2, No. 2, pp. 80-85, 06/1992

  21. Y. Gianchandani, K. Najafi, "A Bulk Silicon Dissolved Wafer Process for Microelectromechanical Devices," IEEE/ASME J. Micro Electro Mechanical Systems (J-MEMS), Vol. 1, No. 2, pp. 77-85, 06/1992

  22. J. Ji, S.T. Cho, Y. Zhang, K. Najafi, K.D. Wise, "An Ultra-miniature CMOS Pressure Sensor for a Multiplexed Cardiovascular Catheter," IEEE Trans. on Electron Devices, Vol. ED-39, No. 10, pp. 2260-2267, 10/1992

  23. S. Bouwstra, J. van Rooijen, H.A.C. Tilmans, A. Selvakumar, and K. Najafi, "Thermal-Base Drive for Micromechanical Resonators Employing Deep-Diffusion Bases," Sensors and Actuators, A, 37-38, pp. 38-44, 01/1993

  24. R. Aroca, H. Bolourchi, D. Battisti, and K. Najafi, "Gas Adsorption and Electrical Properties of Two Langmuir-Blodgett Layers of Cerium Bisphthalocyanine," Langmuir Journal of the American Chemical Society, 9 (11), pp. 3138-3141, 11/1993

  25. J.F. Hetke, J.L. Lund, K. Najafi, K.D. Wise, and D.J. Anderson, "Silicon Ribbon Cables for Chronically Implantable Microelectrode Arrays," IEEE Trans. on Biomedical Engineering, Vol. 41, No. 4, pp. 314-321, 04/1994

  26. T. Akin, K. Najafi, Richard H. Smoke, Robert M. Bradley, "A Micromachined Silicon Sieve Electrode for Nerve Regeneration Applications," IEEE Trans. Biomedical Engineering, Vol. 41, No. 4, pp. 305-313, 04/1994

  27. K. Najafi, "Solid-State Microsensors for Cortical Nerve Recordings," IEEE Eng. in Medicine and Biology Magazine, pp. 375-387, 06/1994

  28. W.G. Baer, K. Najafi, K.D. Wise, and R.S. Toth, "A 32-Element Micromachined Thermal Imager with On-Chip Multiplexing," Sensors and Actuators, Vol. 48, No. 1, pp. 47-54, 01/1995

  29. Y. Gianchandani, and K. Najafi, "Bent-Beam Strain Sensors," IEEE/ASME J. Micro Electro Mechanical Systems (JMEMS), pp. 52-58, Vol. 5, No. 1, 03/1996

  30. B. Ziaie, J. A. V. Arx, M.R. Dokmeci, and K. Najafi, "A Hermetic Glass-Silicon Micropackage with High-Density On-Chip Feedthroughs for Sensors & Actuators," IEEE Journal of Microelectromechanical Systems, Vol. 5, No. 3, pp. 166-179, 09/1996

  31. J.S. Walter, L. Riedy, W. King, J.S. Wheeler, K. Najafi, C.L. Anderson, T.M. Gudausky, and M. Dokmeci, "Short-Term Bladder-Wall Response to Implantation of Microstimulators," J. of Spinal Cord Medicine, Vol. 20, No. 3, pp. 319-323, 01/1997

  32. R.M. Bradley, X. Cao, T. Akin, and K. Najafi, "Long-Term Chronic Recordings From Peripheral Sensory Fibers Using a Sieve Electrode," J. Neuroscience Methods, 73, Issue 2, pp. 177-186, 05/1997

  33. B. Ziaie, M.D. Nardin, A.R. Coghlan, and K. Najafi, "A Single-Channel Implantable Microstimulator for Functional Neuromuscular Stimulation," IEEE Trans. on Biomedical Engineering, Vol. BME-44, No. 10, 10/1997

  34. Y. Gianchandani, and K. Najafi, "A Silicon Micromachined Scanning Thermal Profiler with Integrated Elements for Sensing and Actuation," IEEE Trans. Electron Devices, Vol. 44, No. 11, pp. 1857-1868, 11/1997

  35. C. Yeh, and K. Najafi, "A Low-Voltage Tunneling Based Silicon Microaccelerometer," IEEE Transactions on Electron Devices, Vol. 44, No. 11, pp. 1875-1882, 11/1997

  36. T. Akin, K. Najafi, and R.M. Bradley, "A Wireless Implantable Multichannel Digital Neural Recording System for a Micromachined Sieve Electrode," IEEE J. Solid-State Circuits, Vol. 33, Issue 1, pp. 109-118, 01/1998

  37. Y. Gianchandani, M. Shinn, and K. Najafi, "Impact of High Thermal Budget Anneals on Polysilicon as a Micromechanical Material," IEEE/ASME J. Micro Electro Mechanical Systems (JMEMS), Vol. 7, Issue 1, pp. 102-105, 03/1998

  38. C. Yeh, and K. Najafi, "CMOS Interface Circuitry For A Low-Voltage Micromachined Tunneling Accelerometer," IEEE/ASME J. Micro Electro Mechanical Systems (JMEMS), Vol. 7, Issue 1, pp. 6-15, 03/1998

  39. A. Selvakumar, F. Ayazi, and K. Najafi, "A High Sensitivity Z-Axis Capacitive Silicon Microaccelerometer With A Torsional Suspension," IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), Vol. 7, No. 2, pp. 192-200, 06/1998

  40. N. Yazdi, F. Ayazi, and K. Najafi, "Micromachined Inertial Sensors," Special Issue of IEEE Proceedings, Vol. 86, No. 8, pp. 1640-1659, 08/1998

  41. A.J. Mason, N. Yazdi, A.V. Chavan, K. Najafi, and K.D. Wise, "A Generic Multi-Element Microsystem For Portable Wireless Applications," Special Issue of IEEE Proceedings, Vol. 86, No. 8, pp. 1733-1746, 08/1998

  42. L. Lin, Y.T. Cheng, and K. Najafi, "Formation of Silicon-Gold Eutectic Bond Using Localized Heating Method," Japanese Journal of Applied Physics, Part II, Vol. 11B, pp. 1412-1414, 11/1998

  43. T. Akin, B. Ziaie, S. A. Nikles, and K. Najafi, "A Modular Micromachined High-Density Connector for Implantable Biomedical Systems," IEEE Transactions on Biomedical Engineering, Vol. 46, No. 4, pp. 471-480, 04/1999

  44. Y.T. Cheng, Liwei Lin and K. Najafi, "Localized Silicon Fusion and Eutectic Bonding for MEMS Fabrication and Packaging," IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), Vol. 9, No. 1, pp. 3-8, 03/2000

  45. B. Ziaie, and K. Najafi, "A Generic Micromachined Silicon Platform for High-Performance RF Passive Components," J. Micromachanics & Microengineering, Vol. 10, No. 3, pp. 365-371, 09/2000

  46. Y. Gianchandani, H. Kim, M. Shinn, B. Ha, B. Lee, K. Najafi, and C.S. Song, "A Fabrication Process for Integrating polysilicon Microstructures with Post-Processed CMOS Circuits," J. Micromachanics and Microengineering, Vol. 10, No. 3, pp. 380-386, 09/2000

  47. F. Ayazi, and K. Najafi, "High Aspect-ratio Combined Poly and Single-Crystal (HARPSS) MEMS Technology," IEEE J. Micro Electro Mechanical Systems, Vol. 9, No. 3, pp. 288-294, 09/2000

  48. N. Yazdi, A. Mason, K. Najafi, and K.D. Wise, "A Generic Interface Chip for Capacitive Sensors in Low-Power Multi-Parameter Microsystems," Sensors & Actuators, A: Physical, 84 (3) pp. 351-361, 09/2000

  49. F. Ayazi, and K. Najafi, "High Aspect-Ratio Polysilicon Micromachining Technology," Sensors and Actuators, Vol 87, No. 1-2, pp. 46-51, 12/2000

  50. N. Yazdi, K. Najafi, "An All-Silicon Single-Wafer Micro-g Accelerometer with a Combined Surface and Bulk Micromachining Process," IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), Vol. 9, No. 4, pp. 1-8., 12/2000

  51. A. Selvakumar, N. Yazdi, K. Najafi, "A Wide-Range Micromachined Threshold Accelerometer Array and Interface Circuit," Journal of Micromechanics and Microengineering, Vol. 11, No. 2, pp. 118-125, 03/2001

  52. B. Ziaie, S.C. Rose, M.D. Nardin, and K. Najafi, "A Self-Oscillating, Detuning-Insensitive Class-E Transmitter for Implantable Microsystems," IEEE Transactions on Biomedical Engineering, Vol. 48, No. 3, pp. 397-399, 03/2001

  53. F. Ayazi, and K. Najafi, "A HARPSS polysiliocn Vibrating Ring Gyroscope," IEEE/ASME J. Micro Electro Mechanical Systems (JMEMS), Vol. 10, No. 2, pp. 169-179, 06/2001

  54. P. Mohseni, K. Nagarajan, B. Ziaie, K. Najafi, and S.B. Crary, "An Ultralight Biotelemetry Biotelemetry Backpack for Recording EMG Signals in Moths," IEEE Transactions on Biomedical Engineering, Vol. 48, pp. 734-737, 06/2001

  55. M. Dokmeci and K. Najafi, "A High-Sensitivity Polyimide Capacitive Relative Humidity Sensor For Monitoring Anodically Bonded Hermetic Micropackages," IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), Vol.10, No.2, pp. 197-204, 06/2001

  56. D. L. Zealear, K. C. Garren, R. Rodriguez, J. Reyes, S. Huang, M. Dokmeci, K. Najafi, "The biocompatibility, positional stability, and potential application of an injectable wireless micromachined microstimulator for reanimation of the paralyzed larynx," IEEE Trans. On Biomedical Engineering (TBME), Vol. 48, No.8, pp. 890-897, 08/2001

  57. T. Cheng, L. Lin, K. Najafi, "A Hermetic Glass-Silicon Package Formed Using Localized Aluminum/Silicon-Glass Bonding," IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), Vol. 10, No. 3, pp. 392-399, 09/2001

  58. J. W. Weigold, K. Najafi, and S. W. Pang, "Design and Fabrication of Submicrometer, Single Crystal Si Accelerometer," IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), Vol. 10, No. 4, pp. 518-524, 12/2001

  59. C. Huang, K. Najafi, "Fabrication of Ultra-Thin P++ Silicon Microstructures Using Ion-Implantation and Boron Etch-Stop," IEEE/ASME Journal Of Microelectromechanical Systems (JMEMS), Vol. 10, No. 4, pp 532-537, 12/2001

  60. B. Ziaie, and K. Najafi, "An Implantable Microsystem for Tonometric Blood Pressure Measurement," Journal of Biomedical Microdevices, Vol. 3, pp. 285-292, 12/2001

  61. O. Akar, T. Akin, And K. Najafi, "A Wireless Batch Sealed Absolute Capacitive Pressure Sensor," Sensors and Actuators A: Physical, 95 (1), pp. 29-38, 12/2001

  62. T. J. Harpster, B. Stark, and K. Najafi, "A Passive Wireless Integrated Humidity Sensor," Sensors and Actuators A: Physical, Volume 95, Issues 2-3, pp. 100-107, 01/2002

  63. T. J. Harpster, S. Hauvespre, M. Dokmeci, and K. Najafi, "A Passive Humidity Monitoring System for In-Situ Remote Wireless Testing of Micropackages," IEEE/ASME J. Micro Electro Mechanical Systems (JMEMS), Vol. 11, No. 1, pp. 61-67, 02/2002

  64. C. Huang, C. Christophorou, K. Najafi, A. Naguib and H. Nagib, "An Electrostatic Microactuator System in High Speed Jets," IEEE/ASME Journal Of Micro Electro Mechanical Systems (JMEMS), Vol. 11, No. 3, pp. 222-235, 06/2002

  65. Y. T. Cheng, W. T. Hsu, L. Lin, C. T. Nguyen, K. Najafi, "Vacuum Packaging Using Localized Aluminum/Silicon-to-Glass Bonding," IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), Vol. 11, No. 5, pp. 556-565, 10/2002

  66. C. Huang, A. Naguib, E. Soupos, and K. Najafi, "A Silicon Micromachined Microphone For Fluid Mechanics Research," Journal of Micromechanics and Microengineering, Vol. 12, No. 6, pp. 767-774, 11/2002

  67. K. Ma, Y. Gianchandani, and K. Najafi, "The Active Dissolved Wafer Process (ADWP) for Integrating Single-Crystal Silicon MEMS with CMOS," J. of Semiconductor Technology and Science, Vol. 2, No. 4, pp. 273-279, 12/2002

  68. A. Selvakumar, and K. Najafi, "Vertical Comb Array Microactuators," IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), Volume: 12 Issue: 4, pp. 440-449, 08/2003

  69. N. Yazdi, A. Salian, and K. Najafi, "A High-Sensitivity Silicon Accelerometer with a Folded-Electrode Structure," IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), Vol. 12, No. 4, pp. 479-486, 08/2003

  70. B. H. Stark, M. R. Dokmeci, and K. Najafi, "Improving Corrosion-Resistance of Polysilicon Using Boron Doping and Self-Induced Galvanic Bias," IEEE Transactions on Advanced Packaging, Vol. 26, No. 3, pp. 295-301, 08/2003

  71. Y. Shimatani, S. A. Nikles, K.Najafi, and R. M. Bradley, "Long-term recordings from afferent taste fibers," J. Physiology & Behavior, Vol. 80, Issues 2-3, pp. 309-315, 11/2003

  72. K.D. Wise, D.J. Anderson, J.F. Hetke, K, D.R. Kipke, K. Najafi, "Wireless implantable microsystems: high-density electronic interfaces to the nervous system," Proceedings of the IEEE, Vol. 92, Issue: 1, pp. 76-97, 01/2004

  73. B. H. Stark and K. Najafi, "A Low Temperature Thin Film Electroplated Metal Vacuum Package," IEEE/ASME J. Micro Electro Mechanical Systems (JMEMS), Vol. 13, No. 2, pp. 147-157, 04/2004

  74. P. Mohseni and K. Najafi, "A Fully Integrated Neural Recording Amplifier With DC Input Stabilization," IEEE Transactions on Biomedical Engineering, Vol. 51, No. 5, pp. 832-837, 05/2004

  75. C. Zhang, and K. Najafi, "Fabrication of Thick Silicon Dioxide Layers For Thermal Isolation," Journal of Micromechanics and Microengineering, Vol. 14, Issue 6, pp. 769 – 774, 06/2004

  76. T. Lisby, S.A. Nikles, K. Najafi, O. Hansen, S. Bouwstra, J.A. Branebjerg, "Mechanical Characterization and Design of Flexible Silicon Microstructures," IEEE/ASME J. of Microelectromechanical Systems (JMEMS), Vol. 13, No. 3, pp. 452-464, 06/2004

  77. X. Zhu, D.S. Aslam, Y. Tang, B.H. Stark, K. Najafi, "The Fabrication of All-Diamond Packaging Panels With Built-In Interconnects for Wireless Integrated Microsystems," IEEE/ASME J. of Microelectromechanical Systems (JMEMS), Vol. 13, No. 3, pp. 396-405, 06/2004

  78. S. Nikles, R.M. Bradley, S. Bledsoe, and K. Najafi, "Design and Testing of Conductive Polysilicon Beam Leads for Use in a High-Density Biomedical Connector," J. Micromechanics and Microengineering, Vol. 14, No. 7, pp. 957-968, 07/2004

  79. J. Chae, H. Kulah, and K. Najafi, "An In-Plane High-Sensitivity, Low-Noise Micro-g Silicon Accelerometer with CMOS Readout Circuitry," IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), Vol. 13, No. 4, p 628-635, 08/2004

  80. Y. Mei, J.S. Mitchell, G. Roientan Lahiji, and K. Najafi, "Wafer Bonding Technology For Vacuum Packaging Using Gold-Silicon Eutectic," Journal of Iranian Association for Electrical and Electronics Engineers (IAEEE), Vol.1, No.2, pp. 27-32, 09/2004

  81. M. Ghovanloo, K. Najafi, "Fully Integrated Wideband High-current rectifiers for Inductively Powered Devices," IEEE J. Solid-State Circuits, Vol. 39, No. 11, pp. 1976-1984, 11/2004

  82. C. Zhang, and K. Najafi, "Fabrication of Thick Silicon Dioxide Layers For Thermal Isolation," Journal of Micromechanics and Microengineering, Vol. 14, No. 6, pp. 769 – 774, 11/2004

  83. M. Ghovanloo, K. Najafi, "A Modular 32-site Wireless Neural Stimulation Microsystem," IEEE J. Solid-State Circuits, Vol. 39, No. 12, pp. 2457-2466, 12/2004

  84. Ghovanloo, K. Najafi, "A Wideband Frequency-Shift Keying Wireless Link for Inductively Powered Biomedical Implants," IEEE Trans. On Circuits and Systems I: Fundamental Theory and Applications, Vol. 51, No. 12, pp. 2374-2383, 12/2004

  85. M. Ghovanloo, K. Najafi, "A Compact Large Voltage-Compliance High Output Impedance Programmable Current Source for Implantable Microstimulators," IEEE Trans. Biomedical Engineering, Vol. 52, No. 1, pp. 97-105, 01/2005

  86. J. Chae, H. Kulah, and K. Najafi, "A CMOS-compatible high aspect ratio silicon-on-glass in-plane micro-accelerometer," J. Micromechanics and Microengineering, Vo. 15, No. 2, pp. 336-345, 02/2005

  87. J. Chae, H. Kulah, K. Najafi, "A Monolithic Three-Axis Micro-g Micromachined Silicon Capacitive Accelerometer," IEEE Journal of Microelectromechanical Systems (JMEMS), Vol. 14, No. 2, pp. 235-242, 04/2005

  88. P. Mohseni and K. Najafi, "A 1.48-mW Low-Phase-Noise Analog Frequency Modulator for Wireless Biotelemetry," IEEE Trans. Biomedical Eng., Vol. 52, No. 5, pp. 938-942, 05/2005

  89. T.J. Harpster, S.A. Nikles, M.R. Dokmeci, K. Najafi, "Long-Term Hermeticity and Biological Performance of Anodically Bonded Glass-Silicon Implantable Packages," IEEE Transactions on Device and Materials Reliability, Vol. 5, Issue 3, pp. 458-466, 09/2005

  90. P. Mohseni, K. Najafi, S. J. Eliades, and X. Wang, "Wireless multichannel biopotential recording using an integrated FM telemetry circuit," IEEE Trans. on Neural Systems and Rehabilitation Engineering, (see also IEEE Trans. on Rehabilitation Engineering), Vol. 13, Issue 3, pp. 263-271, 09/2005

  91. B. A. Parviz, K. Najafi, M. O. Muller, L. P. Bernal, P. D. Washabaugh, "Electrostatically-Driven Synthetic Microjet Arrays As A Propulsion Method For Micro Flight Part II: Microfabrication and Initial Characterization," J. Microsystem Technologies, Vol. 11, No. 12, pp. 1292-1300, 10/2005

  92. A. Parviz, K. Najafi, M. O. Muller, L. P. Bernal, P. D. Washabaugh, "Electrostatically-Driven Synthetic Microjet Arrays As A Propulsion Method For Micro Flight Part I: Principles Of Operation, Modeling, and Simulation," J. Microsystem Technologies, Vol. 11, No. 11, pp. 1214-1222, 10/2005

  93. J. Chae, B.H. Stark, and K. Najafi, "A micromachined Pirani gauge with dual heat sinks," IEEE Transactions on Advanced Packaging (IEEE Transactions on Components, Packaging and Manufacturing Technology, Part B: Advanced Packaging), Vol. 28, Issue 4, pp. 619-625, 11/2005

  94. W.C. Welch, III, J. Chae, and K. Najafi, "Transfer of metal MEMS packages using a wafer-level solder transfer technique," IEEE Transactions on Advanced Packaging (IEEE Transactions on Components, Packaging and Manufacturing Technology, Part B: Advanced Packaging), Vol. 28, Issue 4, pp. 643-649, 11/2005

  95. H. Kim, and K. Najafi, "Characterization of Low-Temperature Wafer Bonding Using Thin Film Parylene," IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), Vol. 14, No. 6, pp. 1347-1355, 12/2005

  96. H. Kulah, J. Chae, N. Yazdi and K. Najafi, "Noise Analysis and Characterization of a Sigma-Delta Capacitive Microaccelerometer," IEEE Journal of Solid-State Circuits, Vol. 41, No. 2, pp. 352-361, 02/2006

  97. A. M. Sodagar, K. Najafi, "Extremely-Wide-Range Supply-Independent CMOS Voltage References for Telemetry-Powering Applications," Journal for Analog Integrated Circuits and Signal Processing, An International Journal, Kluwer Academic Publishers, 46, pp. 253-261, 03/2006

  98. S. W. Yoon, N. Yazdi, N. C. Perkins, K. Najafi, "Micromachined Integrated Shock Protection for MEMS," Sensors and Actuators A: Physical, Vol. 130-131, pp. 166-175, 08/2006

  99. B. H. Stark and K. Najafi, "A Mold and Transfer Process for Lead-Free Fluxless Soldering and Application to MEMS Packaging," IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), Vol. 15, No. 4, pp. 849-858, 08/2006

  100. A. Astle, H. Kim, L. Bernal, K. Najafi, and P. Washabaugh, "Theoretical and experimental performance of a high frequency gas micropump," Sensors and Actuators A: Physical, Vol. 134, Issue 1, pp. 245-256, 02/2007

  101. A. M. Sodagar, K. D. Wise, K. Najafi, "A Fully-Integrated Mixed-Signal Neural Processor for Implantable Multi-Channel Cortical Recording," IEEE Transactions on Biomedical Engineering, Vol. 54, Issue 6, Part 1, pp. 1075-1088, 06/2007

  102. M. Ghovanloo, and K. Najafi, "A Wireless Implantable Multicahnnel Microstimulating System-on-a-Chip with Modular Architecture," IEEE Transactions on Neural Systems and Rehabilitation Engineering, Vol. 15, No. 3, pp. 449-457, 09/2007

  103. H. Kim, and K. Najafi, "Characterization of Aligned Wafer-Level Transfer of Thin and Flexible Parylene Membranes," IEEE /ASME J. of Microelectromechanical Systems (JMEMS), Vol. 16, No. 6, pp. 1386 – 1396, 12/2007

  104. K. King, S.W. Yoon, N.C. Perkins, and K. Najafi, "Wireless MEMS inertial System foir Golf Swing Dynamics," Sensors and Actuators A: Physical, Vol. 141, Issue 2, pp. 619-630, 02/2008

  105. J. Chae, J.M. Giachino, K. Najafi, "Fabrication and Characterization of a Wafer-Level MEMS Vacuum Package With Vertical Feedthroughs," IEEE J. of Microelectromechanical Systems (JMEMS), Vol. 17, Issue 1, pp. 193-200, 02/2008

  106. J. Mitchell, G.R. Lahiji, K. Najafi, "An Improved Performance Poly-Si Pirani Vacuum Gauge Using Heat-Distributing Structural Supports," IEEE J. Microelectromechanical Systems (JMEMS), Vol. 17, Issue 1, pp. 93-102, 02/2008

  107. H. Kulah, and K. Najafi, "Energy Scavenging from Low Frequency Vibrations By Using Frequency Up Conversion for Wireless Sensor Applications," IEEE J. Sensors, Vol. 8, No. 3, pp. 261-268, 03/2008

  108. K. D. Wise, A. M. Sodagar, Y. Yao, M. N. Gulari, G. E. Perlin, and K. Najafi, "Microelectrodes, Microelectronics, and Implantable Neural Microsystems," Proc. IEEE, Special Issue on Implantable Biomimetic Microelectronic Systems, pp. 1184-1202, 07/2008

  109. K.D. Wise, A.M. Sodagar, Y. Yao; M.N. Gulari, G.E. Perlin, K. Najafi, "Microelectrodes, Microelectronics, and Implantable Neural Microsystems," Proceedings of the IEEE, Vol. 96, Issue 7, pp. 1184 – 1202, 07/2008

  110. Baoling Huang, Chris Lawrence, Andrew Gross, Gi-Suk Hwang, Niloufar Ghafouri, Sang-Woo Lee, Hanseup Kim, Chang-Peng Li, Ctirad Uher, Khalil Najafi, and Massoud Kaviany, "Low-temperature characterization and micropatterning of coevaporated Bi2Te3 and Sb2Te3 films," J. Applied Physics , 104, Issue 11, 113710-pp. 0-8, 12/2008

  111. G.S. Hwang, A.J. Gross, H. Kim, S.W. Lee, N. Ghafouri, B.L. Huang, C. Lawrence, C. Uher, K. Najafi, M. Kaviany, "Micro thermoelectric cooler: Planar multistage," International Journal of Mass and Heat Transfer, 52, Issues 7-8, pp. 1843–1852, 03/2009

  112. K.D. Wise, G.E. Perlin, Y. Yao, K. Najafi, A.M. Sodagar, "An Implantable 64-Channel Wireless Microsystem for Single-Unit Neural Recording," IEEE Journal of Solid-State Circuits, Vol. 44, Issue 9, pp. 2591 – 2604, 09/2009

  113. H. Kim, K. Najafi, and L.P. Bernal, "Helmholtz Resonance Based Micro Electrostatic Actuators for Compressible Gas Control: a Microjet Generator and a Gas Micro Pump," Journal of Microelectronics and Electronic Packaging, Vol. 7, No. 1, pp. 1-9, 01/2010

  114. S.W. Yoon, S. Lee, N.C. Perkins, K. Najafi, "Analysis and wafer-level design of a high-order silicon vibration isolator for resonating MEMS devices," Journal of Micromechanics and Microengineering, Vol. 21, No. 1, 015017, 01/2011

  115. T. V. Galchev, W.C. Welch III, K. Najafi, "A new low-temperature high-aspect-ratio MEMS process using plasma activated wafer bonding," Journal of Micromechanics and Microengineering, v 21, n 4, 04/2011

  116. E. E. Aktakka, H. Kim, K. Najafi, "Energy Scavenging From Insect Flight," Journal of Micromechanics and Microengineering, Vol. 21, No. 095016, 08/2011

  117. S. W. Yoon, S. Lee, N. C. Perkins, K. Najafi, "Shock Protection Improvement Using Integrated Novel Shock Protection Technologies," IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), vol. 20, no. 4, pp. 1016-1031, 08/2011

  118. T. Galchev, H. Kim, K. Najafi, "Micro Power Generator for Harvesting Low-Frequency and Nonperiodic Vibrations," IEEE/ASME Journal of Microelectromechanical Systems, (JMEMS), pp. 852-866, 08/2011

  119. T V Galchev, J McCullagh, R L Peterson and K Najafi, "Harvesting traffic-induced vibrations for structural health monitoring of bridges," Journal of Micromechanics and Microengineering, 21, 104005, 10/2011

  120. A. J. Gross, G. S. Hwang, B. Huang, H. Yang, N. Ghafouri, H. Kim, R. L. Peterson, C. Uher, M. Kaviany, K. Najafi, "Multistage Planar Thermoelectric Microcoolers," IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), vol. 20, no. 5, pp. 1201-1210, 10/2011

  121. S. W. Yoon, S. Lee, K. Najafi, "Vibration Sensitivity Analysis of MEMS Vibratory Ring Gyroscopes," Sensors and Actuators A: Physical, vol. 171, no.2, pp. 163-177, 11/2011

  122. S. W. Yoon, S. Lee, K. Najafi, "Vibration-Induced errors in MEMS Tuning Fork Gyroscopes," Sensors and Actuators A: Physical, vol. 180, pp. 32-44, 06/2012

  123. T. Galchev, E. E. Aktakka, K. Najafi, "A Piezoelectric Parametric Frequency Increased Generator for Harvesting Low-Frequency Vibrations," IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), vol. 21(6), pp. 1311-1320, 12/2012

Conference Publications

  1. T. Galchev, J. McCullagh, R. L. Peterson, K. Najafi, A. Mortazawi, "Energy harvesting of radio frequency and vibration energy to enable wireless sensor monitoring of civil infrastructure," Proc. SPIE Smart Structures/NDE, San Diego, CA, v 7983, p 798314, 00/0000

  2. K.D. Wise, K. Najafi, "A Micromachined Integrated Sensor with On-Chip Self-Test Capability," Solid-State Sensors Conference, Hilton Head, SC, pp. 12-16, 06/1984

  3. K.D. Wise, K. Najafi, K.L. Drake, "A Multichannel Intracortical Microprobe for Single-Unit Recording," IEEE/NSF Biosensors Conference, Los Angeles, CA, pp. 87-89, 09/1984

  4. S.L. BeMent, D.J. Anderson, K.D. Wise, K.L. Drake, K. Najafi, L. Xue, "Silicon Multielectrode Impedance, Geometry, and Neural Cell Recording Ability," IEEE/Seventh Annual Conf. Eng. Medicine and Biology Society, pp. 159-162, 09/1985

  5. K. Najafi, K.D. Wise, "An Implantable Multielectrode Array with On-Chip Signal Processing," Int. Solid-State Ckts. Conf., pp. 98-99, 02/1986

  6. S.L. BeMent, K.L. Drake, D.J. Anderson, K.D. Wise, K. Najafi, "Semiconductor Microprobes- Recording/Biocompatibility Properties," IEEE/EMBS Eighth Annual Conference, Dallas, Texas, pp. 1622-1625,, 11/1986

  7. K. Najafi, "Silicon Micromachining: Key to Silicon Integrated Sensors," Proc. of Symp. on Sensors and Technology, Cleveland, Vol. 87-15, pp. 152-164, 04/1987

  8. K. Najafi, "Sensor-System Interface: The Influence of On-Chip Electronics," Int. Symp. Circuits and Systems, Philadelphia, PA, pp. 233-236, 05/1987

  9. K. Najafi, J. Ji, K.D. Wise, "Multichannel Intracortical Recording Microprobes: Scaling Limitations, Device Characteristics, and Circuit Encapsulation," 4th Int. Conf. on Solid-State Sensors and Actuators, Transducers '87, Japan, pp. 65-68, 06/1987

  10. N. Najafi, K.W. Clayton, W.G. Baer, K. Najafi, K.D. Wise, "An Architecture and Interface for VLSI Sensors," Solid-State Sensor and Actuator Workshop, Hilton Head, SC, pp. 76-79, 06/1988

  11. K. Najafi, "Implantable Sensors," Symposium for Innovation in Measurement Science, Instrument Society of America, Geneva NY, 08/1988

  12. K.D. Wise, N. Najafi, C.L. Johnson, J. Cowles, S. Cho, K. Najafi, "An Integrated VLSI Sensor for Semiconductor Process Control," TECHCON '88, Dallas, TX, pp. 345-348, 10/1988

  13. K. Suzuki, K. Najafi, K.D. Wise, "A 1024-Element High-Performance Silicon Tactile Imager," Int. Electron Device Meeting (IEDM) San Francisco CA, pp. 674-677, 12/1988

  14. K. Najafi, K. Suzuki, "A Novel Technique and Structure for the Measurement of Intrinsic Stress and Young's Modulus of Thin Films," IEEE Workshop on Micro Electromechanical Systems, Salt Lake City, UT, pp. 96-97, 02/1989

  15. J.F. Hetke, K. Najafi, K.D. Wise, "Flexible Miniature Ribbon Cables for Long-Term Connection to Implantable Sensors," 5th Int. Conf. on Solid-State Sensors and Actuators, Transducers '89, Montreux, Switzerland, pp. 277-278, 06/1989

  16. S.J. Tanghe, K. Najafi, K.D. Wise, "A Planar IrO Multichannel Stimulating Electrode for Use in Neural Prosthesis," 5th Int. Conf. on Solid-State Sensors and Actuators, Transducers '89, Montreux, Switzerland, pp. 297-298, 06/1989

  17. J. Ji, K. Najafi, K.D. Wise, "A Scaled Electronically-Configurable Multichannel Recording Array," 5th Int. Conf. on Solid-State Sensors and Actuators, Transducers '89, Montreux, Switzerland, pp. 195-196, 06/1989

  18. K. Suzuki, K. Najafi, K.D. Wise, "Process Alternatives and Scaling Limits for High-Density Silicon Tactile Imagers," 5th Int. Conf. on Solid-State Sensors and Actuators, Transducers '89, Montreux, Switzerland, pp. 260-262, 06/1989

  19. K. Najafi, "Integrated Sensors in Biological Environments," 5th Int. Conf. on Solid-State Sensors and Actuators, Transducers '89, Montreux, Switzerland, pp. 295-296, 06/1989

  20. S.T. Cho, K. Najafi, K.D. Wise, "An Ultrasensitive Silicon Pressure-Based Flowmeter," International Electron Device Meeting, Washington, pp. 499-502, 12/1989

  21. S.T. Cho, K. Najafi, K.D. Wise, "Scaling and Dielectric Stress Compensation of Ultrasensitive Boron-Doped Silicon Microstructures," IEEE Workshop on Micro Electromechanical Systems, Napa Valley, CA, pp. 50-55, 02/1990

  22. T. Akin, B. Ziaie, K. Najafi, "RF Telemetry Powering and Control of Hermetically-Sealed Integrated Sensors and Actuators," IEEE Solid-State Sensor and Actuator Workshop, Hilton-Head, SC, pp. 145-148, 06/1990

  23. S.T. Cho, K. Najafi, K.D. Wise, "Secondary Sensitivities and Stability of Ultrasensitive Pressure Sensors," IEEE Solid-State Sensor and Actuator Workshop, Hilton-Head, SC, pp. 184-187, 06/1990

  24. K.D. Wise, K. Najafi, J. Ji, J.F. Hetke, S.T. Tanghe, A. Hoogerwerf, D.J. Anderson, S.L. BeMent, M. Ghazzi, W. Baer, T. Hull, Y. Yang, "Micromachined Silicon Microprobes for CNS Recording and Stimulation," IEEE Eng. in Medicine and Biol. Soc. Conf., Philadelphia, PA, Digest, 11/1990

  25. T. Akin, K. Najafi , "A Micromachined Silicon Sieve Electrode for Nerve Regeneration Applications," 6th Int. Conf. on Solid-State Sensors and Actuators, San Francisco, CA, pp. 128-131, 06/1991

  26. B. Ziaie, Y. Gianchandani, K. Najafi, "A High-Current Thin-Film Neuromuscular Microstimulator," 6th Int. Conf. on Solid-State Sensors and Actuators, San Francisco, CA, pp. 124-127, 06/1991

  27. W.G. Baer, T. Hull, K.D. Wise, K. Najafi, K.D. Wise, "A Multiplexed Silicon Infrared Thermal Imager," 6th Int. Conf. on Solid-State Sensors and Actuators, San Francisco, CA, pp. 631-634, 06/1991

  28. J.F. Hetke, K. Najafi, K.D. Wise, "Flexible Silicon Interconnects for Microelectromechanical Systems," 6th Int. Conf. on Solid-State Sensors and Actuators, San Francisco, CA, pp. 764-767, 06/1991

  29. J. Ji, S.T. Cho, Y. Zhang, K. Najafi, K.D. Wise, "An Ultraminiature CMOS Pressure Sensor For a Multiplexed Cardiovascular Catheter," 6th Int. Conf. on Solid-State Sensors and Actuators, San Francisco, CA, pp. 1018-1021, 06/1991

  30. Y. Gianchandani, K. Najafi, "A Bulk Silicon Dissolved Wafer Process for Microelectromechanical Systems," Technical Digest, Int. Electron Devices Meeting, Washington DC, pp. 757-760, 12/1991

  31. Y. Gianchandani, K. Najafi, "Micron-Sized High Aspect Ratio Bulk Silicon Micromechanical Devices," Proceedings, IEEE Micro Electro Mechanical Systems Workshop, Travermude, Germany, pp. 208-213, 02/1992

  32. Y. Gianchandani, K. Najafi, "Batch Fabrication and Assembly of Micromotor-Driven Mechanisms With Multi-Level Linkages," Proceedings, IEEE Micro Electro Mechanical Systems Workshop, Travermude, Germany, pp. 141-146, 02/1992

  33. S. Bouwstra, H.A.C. Tilmans, A. Selvakumar, and K. Najafi, "Base-Driven Micromechanical Resonators," Digest, IEEE Solid-State Sensors and Actuators Workshop, Hilton Head, SC, pp. 148-152, 06/1992

  34. K. Najafi, "Silicon Integrated Microsensors," International Society for Optical Engineering (SPIE) Symposium, OE/FIBERS '92, Boston, MA, OE/FIBERS 92, 09/1992

  35. S. Bouwstra, H.A.C. Tilmans, A. Selvakumar, and K. Najafi, "Base-Driven Micromechanical Resonators," Eurosensors VI, San Sebastian, Spain, pp. 65, 10/1992

  36. K. Najafi, "Solid-State Integrated Microsensors," 124th Meeting of the Acoustical Society of America, New Orleans, LA, 10/1992

  37. B. Ziaie, M. Nardin, J. Von Arx, and K. Najafi, "A Single Channel Implantable Microstimulator for Functional Neuromuscular Stimulation (FNS)," 7th Int. Conference on Solid-State Sensors and Actuators (Transducers '93), Yokohama, Japan, pp. 266-269, 06/1993

  38. B. Ziaie, J. Von Arx, M. Nardin, and K. Najafi, "A Hermetic Packaging Technology with Multiple Feedthrough For Integrated Sensors and Actuators," 7th Int. Conference on Solid-State Sensors and Actuators (Transducers '93), Yokohama, Japan, pp. 450-453, 06/1993

  39. A.D. Oliver, W.G. Baer, K. Najafi, and K.D. Wise, "Precision Measurement of Process Temperature Uniformity in Semiconductor Manufacturing," SRC TECHCON '93, Proceedings, 10/1993

  40. K. Najafi, and C.H. Mastrangelo, "Solid-State Microsensors and Smart Structures," IEEE Ultrasonics, Ferroelectrics, and Frequency Control Symposium, Baltimore, Maryland, Proceedings, 11/1993

  41. Y. Gianchandani, and K. Najafi, "Silicon Micromachined Thermal Profilers," Int. Electron Devices Meeting, IEDM '93, Washington, DC, pp. 191-194, 12/1993

  42. K. Ma, and K. Najafi, "A New Capacitive Electrochemical Etch-Stop Technique," IEEE/ASME Micro Electro Mechanical Systems, Oiso, Japan, pp. 158-163, 01/1994

  43. T. Akin, K. Najafi, R. Bradley, "A LowPower Implantable Multichannel Digital Neural Record System," VLSI Symposium, Hawaii, Proceedings, 01/1994

  44. T. Akin, K. Najafi, "A Telemetrically Powered and Controlled Implantable Neural Recording System with CMOS Interface Circuitry," IEEE 7th Mediterranean Electrotechnical Conf., Antalya, Turkey, pp. 545-548, 04/1994

  45. W.H. Juan, S.W. Pang, A. Selvakumar, and K. Najafi, "Using Electron Cyclotron Resonance (ECR) Source to Etch Polyimide Molds for Fabrication of Electroplated Microstructures," Solid-State Sensors and Actuators Workshop, Hilton Head, SC, pp. 82-85, 06/1994

  46. C.W. Yeh, and K. Najafi, "Bulk-Silicon Tunneling-Based Pressure Sensors," Solid-State Sensors and Actuators Workshop, Hilton Head, SC, pp. 201-204, 06/1994

  47. Y.B. Gianchandani, and K. Najafi, "A Compact Strain Sensor with a Bent Beam Deformation Multiplier and a Complementary Motion Vernier," Solid-State Sensors and Actuators Workshop, Hilton Head, SC, pp. 116-119, 06/1994

  48. K.J. Ma, N. Yazdi, and K. Najafi, "A Bulk-Silicon Capacitive Microaccelerometer with Built-In Overrange and Force Feedback Electrodes," Solid-State Sensors and Actuators Workshop, Hilton Head, SC, pp. 160-163, 06/1994

  49. A. Selvakumar, and K. Najafi, "High Density Vertical Comb Array Microactuators Fabricated Using A Novel Bulk/Poly-Silicon Trench Refill Technology," Solid-State Sensors and Actuators Workshop, Hilton Head, SC, pp. 138-141, 06/1994

  50. M.W. Putty, and K. Najafi, "A Micromachined Vibrating Ring Gyroscope," Solid-State Sensors and Actuators Workshop, Hilton Head, SC, pp. 213-220, 06/1994

  51. Y.B. Gianchandani, and K. Najafi, "Bulk Silicon Micromachining for the Scanning Thermal Profiler and Other Applications," Int. Symposium on Optics, Imaging, and Instrumentation, SPIE, San Diego, CA, Digest, 07/1994

  52. K. Najafi, "Integrated Sensing Systems in Closed Loop Neural Prosthesis," European Solid-State Sensors and Actuators Conf., EUROSENSORS, Toulouse, France, pp. 5, 09/1994

  53. K. Najafi, "Sensor/Circuit Integration in Biomedical Applications," European NEXUS Workshop on Sensor/Circuit Integration, Toulouse, France, 09/1994

  54. A. Selvakumar, K. Najafi, W.H. Juan, and S. Pang, "Vertical Comb Array Microactuators," EEE Micro Electro Mechanical Systems (MEMS) Workshop, Amsterdam, Netherlands, pp. 43-48, 02/1995

  55. M. Nardin, B. Ziaie, J. Von Arx, A. Coghlan, M. Dokmeci, and K. Najafi, "An Inductively Powered Microstimulator for Functional Neuromuscular Stimulation," 13th International Symposium on Biotelemetry, Williamsburg, VA, pp. 99-104, 04/1995

  56. R.M. Bradley, T. Akin, S. Gurkan, X. Cao, and K. Najafi, "Chronic Recordings from Fibers of Rat Glossopharyngeal Nerve Regenerated Through a Micromachined Sieve Electrode Array," 17th annual meeting of the Association for Chemoreception Sciences, Sarasota FL, pp. 231, 04/1995

  57. K. Najafi, "Silicon-Based Electronic Interfaces to Biological Systems," 1995 IEEE Int. Conference on Robotics and Automation, Nagoya, Japan, 05/1995

  58. T. Akin, K. Najafi, and R.M. Bradley, "An Implantable Multichannel Digital Neural Recording System for a Micromachined Sieve Electrode," Int. Conference on Solid-State Sensors and Actuators, Transducers '95, Stockholm, Sweden, Vol. 1, pp. 51-54 (5-A1), 06/1995

  59. M. Nardin, and K. Najafi, "A Multichannel Neuromuscular Microstimulator With Bi-Directional Telemetry," Int. Conference on Solid-State Sensors and Actuators, Transducers '95, Stockholm, Sweden, Vol. 1, pp. 59-62 (7-A1), 06/1995

  60. J. Von Arx, B. Ziaie, M. Dokmeci, And K. Najafi, "Hermeticity Testing of Glass-Silicon Packages with On-Chip Feedthroughs," Int. Conference on Solid-State Sensors and Actuators, Transducers '95, Stockholm, Sweden, Vol. 1, pp. 244-247 (54-A6), 06/1995

  61. A. Mason, N. Yazdi, K. Najafi, and K.D. Wise, " Low-Power Wireless Microinstrumentation System for Environmental Monitoring," Int. Conference on Solid-State Sensors and Actuators, Transducers '95, Stockholm, Sweden, Vol. 1, pp. 107-110 (19-A3), 06/1995

  62. Y.B. Gianchandani, K.J. Ma, and K. Najafi, "A CMOS Dissolved Wafer Process for Integrated p++ Microelectromechanical Systems," Int. Conference on Solid-State Sensors and Actuators, Transducers '95, Stockholm, Sweden, Vol. 1, pp. 79-82 (12-A2), 06/1995

  63. K. Najafi, "Microinstrumentation Systems for Environmental Monitoring," nt. Symp. on Micro Systems, Intelligent Materials and Robots, Sendai, Japan, pp. 142-145, 09/1995

  64. K.D. Wise, C.H. Mastrangelo, K. Najafi, and Clark T.C. Nguyen, "Research in Integrated Sensors and Microsystems at the University of Michigan," Sensors Expo, Chicago, IL, Digest, 09/1995

  65. K. Najafi, "Recent Progress in Micromachining Technology and Applications in Implantable Biomedical Systems," Sixth Int. Symp. on Micro Machine and Human Science, MHS ‘95, Nagoya, Japan, pp. 11-20, 10/1995

  66. C. Yeh, and K. Najafi, "A Low-Voltage Bulk Silicon Tunneling-Based Microaccelerometer," Int. Electron Devices Meeting (IEDM ‘95), Washington D.C., pp. 593-596, 12/1995

  67. B. Ziaie and K. Najafi, "Biomedical Microdevices: A Micromachining Approach," International Semiconductor Device Research Symposium, Charlottesville, VA, pp. 401-404, 12/1995

  68. A. Selvakumar, N. Yazdi, and K. Najafi, "A Low-Power Wide Range Threshold Acceleration Sensing System," Micro Electromechanical Systems Workshop (MEMS ‘96), San Diego, California, pp. 186-191, 02/1996

  69. T. Akin, B. Ziaie, and K. Najafi, "A Modular, Micromachined High-Density Connector for Implantable Biomedical Systems," Micro Electromechanical Systems Workshop (MEMS ‘96), San Diego, California, pp. 497-502, 02/1996

  70. C. Huang, J. Papp, K. Najafi, and H.M. Nagib, "A Microactuator System for the Study and Control of Screech in High-Speed Jets," Micro Electromechanical Systems Workshop (MEMS ‘96), San Diego, California, pp. 19-24, 02/1996

  71. N. Yazdi, A. Mason, K. Najafi, and K.D. Wise, "A Smart Sensing Microsystem with a Capacitive Sensor Interface," IEEE Int. Conf. on Circuits and Systems, Atlanta, Georgia, Vol. 4, pp. 336-339, 05/1996

  72. N. Yazdi, A. Mason, K. Najafi, K.D. Wise, "A Low-Power Generic Interface Circuit for Capacitive Sensors," Solid-State Sensor and Actuator Workshop, Hilton Head, SC, pp. 215-218, 06/1996

  73. K. Najafi, "Silicon Micromachining Technologies: Future Needs and Challenges," Micromaching & Microfabrication Process Technology II Conference, SPIE, 10/1996

  74. B. Ziaie, J. Von Arx, K. Najafi, "A Micro-Fabricated Planar High-Current IrOx Stimulating Microelectrode," IEEE Eng. in Medicine and Biology (EMBS) Conf., Amsterdam, 10/1996

  75. E. Alnajjar, A. Naguib, H. Nagib, C.C. Huang, K. Najafi, "Receptivity of the Shear Layer of an Axi-Symmetric Jet to Excitation Using MEMS-Based Mechanical Actuators," Meeting of the Division of Fluid Dynamics, New York, 11/1996

  76. A. Selvakumar, F. Ayazi, and K. Najafi, "A High-Sensitivity Z-Axis Silicon Accelerometer," IEEE Int. Electron Devices Meeting, San Francisco, 12/1996

  77. E. Alnajjar, H. Nagib, A. Naguib, C. Christophorou, C. Huang, and K. Najafi, "Receptivity of High-Speed Jets to Excitation Using an Array of MEMS-Based Mechanical Actuators," ASME, FEDSM'97, 01/1997

  78. B. Ziaie, K. Najafi, and D. J. Anderson , "A Low-Power Miniature Transmitter Using a Low-Loss Silicon Platform for Biotelemetry," 19th Ann. International IEEE Engineering in Medicine and Biology Conference, Chicago,, 4 pages, 01/1997

  79. S. Wang, S.B. Crary, K. Najafi, "Electronic Determination of the Modulus of Elasticity and Intrinsic Stress of Thin Films Using Capacitive Bridges," Proceedings, Symposium of the Materials Research Society (MRS), San Francisco CA, Vol. 276, pp. 203-208, 04/1997

  80. N. Yazdi, and K. Najafi, "An All-Silicon Single-Wafer Fabrication Technology for Precision Microaccelerometers," Ninth IEEE Int. Conference on Solid-State Sensors and Actuators, Transducers ‘97, Chicago, Vol. 2, pp. 1181-1184 (4B1.04), 06/1997

  81. C. Yeh, and K. Najafi, "Micromachined Tunneling Accelerometer with a Low-Voltage CMOS Interface Circuit," Ninth IEEE Int. Conference on Solid-State Sensors and Actuators, Transducers ‘97, Chicago, Vol. 2, pp. 1213-1216 (4B2.08P), 06/1997

  82. J. Von Arx, and K. Najafi, "On-Chip Coils with Integrated Cores for Remote Inductive Powering of Integrated Microsystems," Ninth IEEE Int. Conference on Solid-State Sensors and Actuators, Transducers ‘97, Chicago, Vol. 2, pp. 999-1002 (3D1.03), 06/1997

  83. M. Dokmeci, J. Von Arx, and K. Najafi, "Accelerated Testing of Anodically Bonded Glass-Silicon Packages in Salt Water," Ninth IEEE Int. Conference on Solid-State Sensors and Actuators, Transducers ‘97, Chicago, Vol. 1, pp. 283-286 (1D4.08P), 06/1997

  84. B. Ziaie, N. Kocaman, and K. Najafi, "A Generic Micromachined Silicon Platform for Low-Power, Low-Loss Miniature Transceivers," Ninth IEEE Int. Conference on Solid-State Sensors and Actuators, Transducers ‘97, Chicago,, Vol. 1, pp. 257-260 (1D4.01), 06/1997

  85. Y. Gianchandani, M. Shinn, K. Najafi, "Impact of Long, High Temperature Anneals on Residual Stress in Polysilicon," Ninth IEEE Int. Conference on Solid-State Sensors and Actuators, Transducers ‘97, Chicago,, Vol. 1, pp. 623-624 (2D1.09PL), 06/1997

  86. A. Naguib, C. Christophorou, E. Alnajjar, H. Nagib, C.C. Huang, and K. Najafi, "Arrays of MEMS-Based Actuators for Control of Supersonic Jet Screech," Meeting of the American Institute of Aeronautics and Astronautics, Paper AIAA 97-1963, 07/1997

  87. F. Ayazi and K. Najafi, "Design and fabrication of a high-performance polysilicon vibrating ring gyroscope," IEEE Micro Electro Mechanical Systems Workshop (MEMS'98), Heidelberg, Germany, pp. 621-626, 01/1998

  88. Y. Gianchandani, H. Kim, M Shinn, B. Ha, B. Lee, K. Najafi, and C. Song, "A MEMS-First Fabrication Process for Integrating CMOS Circuits with Polysilicon Microstructures," Eleventh IEEE International Workshop on Micro Electro Mechanical Systems (MEMS), Heidelberg, Germany, pp. 257-262, 01/1998

  89. C. Huang, K. Najafi, E. Alnajjar, C. Christophorou, A. Naguib, and H.M. Nagib , "Operation and Testing of Electrostatic Microactuators and Micromachined Sound Detectors for Active Control of High Speed Flows," IEEE/ASME Micro Electro Mechanical Systems Workshop, Heidelberg, Germany, pp. 81-86, 01/1998

  90. C. Huang, and K. Najafi, "Ultra-Thin p++ Monocrystalline Silicon Microstructures," Solid-State Sensor and Actuator Workshop, Hilton-Head, S.C., pp. 241-244, 06/1998

  91. B. Ziaie, T.W. Wu, N. Kocaman, K. Najafi, and D.J. Anderson, "An Implantable Pressure Sensor Cuff For Tonometric Blood Pressure Measurement," Solid-State Sensor and Actuator Workshop, Hilton-Head, S.C., pp. 216-219, 06/1998

  92. Y.T. Cheng, L. Lin, and K. Najafi, "Localized Silicon Fusion and Eutectic Bonding for MEMS Fabrication and Packaging," Solid-State Sensor and Actuator Workshop, Hilton-Head, S.C., pp. 233-236, 06/1998

  93. N. Yazdi, K. Najafi, "Modeling and Noise Analysis of A Silicon Micro-g Accelerometer with Direct Digital Output," The 2nd International Conference on Integrated Nano/Microtechnology for Space Applications (NanoSpace98), Houston, TX, 11/1998

  94. Y.T. Cheng, L. Lin, and K. Najafi, "Localized Bonding with PSG or Indium Solder as Intermediate Layer," IEEE Micro Electro Mechanical Systems (MEMS) Conference, Orlando FL, pp. 285-289, 01/1999

  95. M. Dokmeci, and K. Najafi, "A High Sensitivity Polyimide Humidity Sensor For Monitoring Hermetic Micropackages," IEEE Micro Electro Mechanical Systems (MEMS) Conference, Orlando, Florida, pp. 279-284, 01/1999

  96. N. Yazdi, A. Salian, and K. Najafi, "A High-Sensitivity Capacitive Microaccelerometer With a Folded-Electrode Structure," IEEE Micro Electro Mechanical Systems (MEMS) Conference, Orlando, Florida, pp. 600-605, 01/1999

  97. J.A. Von Arx, and K. Najafi, "A Single-Chip Fully-Integrated Telemetry-Powered System For Peripheral Nerve Stimulation," IEEE Int. Conf. On Solid-State Circuits (ISSCC ‘99), San Francisco CA, pp. 214-215, 02/1999

  98. N. Yazdi, and K. Najafi, "An Interface IC For Capacitive Silicon µg Accelerometers," IEEE Int. Conf. On Solid-State Circuits (ISSCC ‘99), San Francisco CA, pp. 132-133, 02/1999

  99. A. Naguib, E. Soupos, H. Nagib, C. Huang, and K. Najafi, "A Piezoresistive MEMS Sensor for Acoustic Noise Measurements," 5th AIAA/CEASAeroacoustic Conference and Exhibit,, Bellevue, WA, 05/1999

  100. Babak Amir Parviz, L. Bernal, and K. Najafi, "A Micromachined Helmholtz Resonator For Generation of Microjet Flows," Tenth Int. Conf. On Solid-State Sensors and Actuators (Transducers ’99), Sendai, Japan, pp. 1788-1791, 06/1999

  101. B. Amir Parviz, and K. Najafi, "Fabrication of Bulk-Silicon Microstructures Using a Trench-Assisted Etch-Stop Process," Tenth Int. Conf. On Solid-State Sensors and Actuators (Transducers ’99), Sendai, Japan, pp. 534-537, 06/1999

  102. F. Ayazi, and K. Najafi, "High Aspect-Ratio Polysilicon Micromachining Technology," Tenth Int. Conf. Solid-State Sensors & Actuators (Transducers ’99), Sendai, Japan, pp. 320-323 (2A3.1), 06/1999

  103. R. Vogt, K. Najafi, Ralph Steiner, and H. Baltes, "A Low-Drift Differential Double Hall Sensor with On-Chip CMOS Circuitry," Tenth Int. Conf. On Solid-State Sensors and Actuators (Transducers ’99), Sendai, Japan, pp. 172-175 (1D4.4), 06/1999

  104. A. Naguib, D. Benson, H. Nagib, C. Huang, and K. Najafi, "Assessment of MEMS-Based Hot Wires," 3rd ASME/JSME Joint Fluids Engineering Conference, San Francisco, CA, Proceedings of the, 07/1999

  105. K. Najafi, B.A. Parviz, L.P. Bernal, P. Washabaugh, A.K. Chou, C. Zhang, M. Muller, and R. Moran, "Micromachined Resonators and Their Application in Micro Propulsion Systems," 6th Annual Strategic and Technical Symposium on Vehicular Applications of Displays and Micro Sensors, Ypsilanti MI, pp. 189-192, 09/1999

  106. D. Aslam, V. Papageorgiou, F. Ayazi, and K. Najafi, "IC-Compatible Technology of Poly-Diamond MEMS," 6th Annual Strategic and Technical Symposium on Vehicular Applications of Displays and Micro Sensors, Ypsilanti MI, pp. 113-116, 09/1999

  107. F. Ayazi, H.H. Chen, and K. Najafi, "High-Performance Vibratory Silicon Microgyroscope," 6th Annual Strategic and Technical Symposium on Vehicular Applications of Displays and Micro Sensors, Ypsilanti MI, pp. 153-158, 09/1999

  108. A. Salian, H. Kulah, N. Yazdi, and K. Najafi, "A Micro-g Capacitive Silicon Microaccelerometer," 6th Annual Strategic and Technical Symposium on Vehicular Applications of Displays and Micro Sensors, Ypsilanti MI, pp. 165-172, 09/1999

  109. M. Dokmeci, K. Najafi, "Glass-Silicon Hermetic Micro Packages for Implantable Biomedical Microsystems," 6th Annual Strategic and Technical Symposium on Vehicular Applications of Displays and Micro Sensors, Ypsilanti MI, pp. 159-164, 09/1999

  110. A. Chandran, K. Najafi, K.D. Wise, "A New DC Baseline Stabilization Scheme for Neural Recording Microprobes," First Joint BMES/EMBS Conference, Annual Fall Meeting of the Biomedical Engineering Society, 21st Annual International Conference of the Engineering in Medicine and Biology Society, Atlanta GA, pp. 386-387, 10/1999

  111. S. Hauvespre, M. Dokmeci, and K. Najafi, "Wireless Humidity Monitoring in Hermetic Biomedical Micropackages," First Joint BMES/EMBS Conference, Annual Fall Meeting of the Biomedical Engineering Society, 21st Annual International Conference of the Engineering in Medicine and Biology Society, Atlanta GA, pp.487-488, 10/1999

  112. P. Mohseni, K. Nagarajan, B. Ziaie, K. Najafi, and S. B. Crary, "Robotics at the Interface of Microsystems Technology and Biology: Biobotics," International Advanced Robotics Program's Workshop on Micro Robots, Micro Machines and Systems, The Institute for Problems in Mechanics, Russian Academy of Sciences, Moscow, Russia, pp. 78-82, 11/1999

  113. M.O. Muller, L.P. Bernal, R.P. Moran, P.D. Washabaugh, B.A. Parviz, A. T.-K. Chou, C. Zhang, K. Najafi, "Thrust performance of micromachined synthetic jets," AIAA Fluids 2000 Conference, Denver Colorado, AIAA-2000-2404, 01/2000

  114. M.O. Muller, L.P. Bernal, R.P. Moran, P.D. Washabaugh, B.A. Parviz, K. Najafi, "Micromachined acoustic resonators for microjet propulsion," AIAA 38th Aerospace Science Conference, Reno NV, AIAA-2000-0547, 01/2000

  115. R.P. Moran, P.D. Washabaugh, M.O. Muller, L.P. Bernal, B.A.Parviz, K. Najafi, "Numerical simulation of micromachined acoustic resonators," AIAA 38th Aerospace Science Conference, Reno NV, AIAA-2000-0546, 01/2000

  116. J. Chae, H. Kulah, A. Salian, and K. Najafi, "A High-Sensitivity Silicon-On-Glass Lateral Micro-g Microaccelerometer," Third Annual Micro/NanoTechnology Conference, Houston TX, Nanospace 2000, 01/2000

  117. B.A. Parviz, T.K. Chou, C. Zhang, K. Najafi, M.O. Muller, L.P. Bernal, and P. Washabaugh, "A Wafer-Integrated Array of Micromachined Electrostatically-Driven Ultrasonic Resonators for Microfluidic Applications," 13th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Myazaki, Japan, pp. 34-39, 01/2000

  118. T. Harpster, S. Hauvespre, M. Dokmeci, B. Stark, A. Vosoughi, and K. Najafi, "A Passive Humidity Monitoring System for In-Situ remote Wireless Testing of Micropackages," 13th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Myazaki, Japan, pp. 335-340, 01/2000

  119. Y.T. Cheng, L. Lin, K. Najafi, "Fabrication and Hermeticity Testing of A Glass-Silicon Package Formed Using Localized Aluminum/Silicon-To-Glass Bonding," 13th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Myazaki, Japan, pp. 757-762, 01/2000

  120. K. Najafi, "Micromachined Micro Systems: Miniaturization Beyond Microelectronics," IEEE VLSI Circuits Symposium, Honolulu Hawaii, pp. 6-13, 06/2000

  121. K. Najafi, "Low-Power Micromachined Micro Systems," Int. Symposium on Low-Power Electronics and Devices (ISLPED ’00), Portofino, Italy, 07/2000

  122. A. Salian, H. Kulah, N. Yazdi, G. He, and K. Najafi, "A Hybrid Silicon Microaccelerometer System with CMOS Interface Circuit," IEEE Midwest Symposium for Circuits and Systems, Lansing, MI, 08/2000

  123. H. Kulah, N. Yazdi, and K. Najafi, "A CMOS Switched-Capacitor Interface Circuit for an Integrated Acclerometer," IEEE Midwest Symposium for Circuits and Systems, Lansing, MI, 08/2000

  124. N. Yazdi, K. Najafi, "Performance limits of a closed-loop micro-G silicon accelerometer with deposited rigid electrodes," Proceedings of the 12th IEEE International Conference on Microelectronics (ICM 2000), Tehran Iran, pp. 313-316, 08/2000

  125. R. Rangarajan, J.A. Von Arx, S. Rose, B. Ziaie, K. Najafi, "Fully Integrated Nerve Electrical Stimulation System," IEEE Midwest Symposium for Circuits and Systems, Lansing, MI, 08/2000

  126. T. Lisby, S. Nikles, K. Najafi, O. Hansen, S. Bouwstra and J. Branebjerg, "Mechanical characterization of flexible silicon microstructures," Eurosensors 2000, The 14th European Conference on Solid-State Transducers, Copenhagen, Denmark, 08/2000

  127. Orhan Akar, Tayfun Akin, Tim Harpster, and Khalil Najafi, "A Wireless Batch Sealed Absolute Capacitive Pressure Sensor," Eurosensors 2000, The 14th European Conference on Solid-State Transducers, Copenhagen, Denmark, pp. 585-588, 08/2000

  128. Y. T. Cheng, W.T. Hsu, Liwei Lin, C.T. Nguyen, and K. Najafi, "Vacuum Packaging Technology Using Localized Aluminum/Silicon-To-Glass Bonding," Proceedings of 14th IEEE Micro Electro Mechanical Systems Conference (MEMS 2001), Interlaken Switzerland, pp. 18-21, 01/2001

  129. B.A. Parviz, T.K. Chou, C. Zhang, K. Najafi, M.O. Müller, L.P. Bernal & P. Washabaugh, "Performance of ultrasonic electrostatic resonators for use in micro propulsion," Proceedings of 14th IEEE Micro Electro Mechanical Systems Conference (MEMS 2001), Interlaken Switzerland, pp. 586-589, 01/2001

  130. T. Harpster, B. Stark, and K. Najafi, "A Passive Wireless Integrated Humidity Sensor," Proceedings of 14th IEEE Micro Electro Mechanical Systems Conference (MEMS 2001), Interlaken Switzerland, pp. 553-557, 01/2001

  131. Stefan Nikles, Sanford Bledsoe, Robert Bradley, and Khalil Najafi, "Reliability and Contact Resistance of Polysilicon Beams Leads for Use in a High-Density Connector," Proceedings of 14th IEEE Micro Electro Mechanical Systems Conference (MEMS 2001), Interlaken Switzerland, pp. 65-67, 01/2001

  132. M.O. Müller, L.P. Bernal, P.K. Miska, P.D. Washabaugh, T.-K.A. Chou, B.A. Parviz, C. Zhang & K. Najafi, "Flow structure and performance of axisymmetric synthetic jets," AIAA 39th Aerospace Sciences Meeting & Exhibit, Reno Nevada, AIAA Paper 2001-1008, 01/2001

  133. B. H. Stark, M. Dockmeci, T. J. Harspter, and K. Najafi, "Improving Corrosion resitance and Silicon Glass Micropackages Using Boron Doping and/or Self-Induced Galvanic Bias," roceedings of International Reliability Physics Symposium, Orlando, Fl, pp, 455-462, 04/2001

  134. K. D. Wise, K. Najafi, D. M. Aslam, R. B. Brown, J. M. Giachino, L. C. McAfee, C. T.-C. Nguyen, R. O. Warrington, and E. T. Zellers, "Wireless Integrated MicroSystems (WIMS): The Coming Revolution in the Remote Gathering of Information," SensorsExpo, Chicago, IL, 06/2001

  135. B. H. Stark and K. Najafi, "An Ultra-Thin Hermetic Package Utilizing Electroplated Gold," Twelft IEEE Int. Conf. On Solid-State Sensors and Actuators (Transducers '01), Munich, Germany, Vol. 1, pp. 194-197 (1C3.05P), 06/2001

  136. C. Zhang, K. Najafi, L.P. Bernal & P. Washabaugh, "An integrated combustor-thermoelectric micro power generato," Twelft IEEE Int. Conf. On Solid-State Sensors and Actuators (Transducers '01), Munich, Germany, Vol. 1, pp. 34-37 (1A3.03), 06/2001

  137. T.K. Chou, K. Najafi, M.O. Müller, L.P. Bernal & P. Washabaugh, "High-Density micromachined ejector array for micro propulsion," Twelft IEEE Int. Conf. On Solid-State Sensors and Actuators (Transducers '01), Munich, Germany, Vol. 2, pp. 890-893 (3A1.03), 06/2001

  138. T-K. A. Chou and K. Najafi, "3D MEMS Fabrication Using Low-Temperature Wafer Bonding With Benzocyclobutene (BCB)," Twelft IEEE Int. Conf. On Solid-State Sensors and Actuators (Transducers '01), Munich, Germany, Vol. 2, pp. 1570 - 1573 (4C2.01), 06/2001

  139. H. Yu, and K. Najafi, "Circuitry For A Wireless Microsystem For Neural Recording Microprobes," International IEEE Engineering in Medicine and Biology Conference (EMBC), Istanbul, Turkey, 10/2001

  140. G. J. O‚Brien, D. J. Monk, and K. Najafi, "Submicron High Aspect Ratio Silicon Beam Etch," SPIE MEMS Symposium, Australia, Vol. 4592, pp. 41-48, 12/2001

  141. M.O. Müller, L.P. Bernal, P.D. Washabaugh, T-K A. Chou, And K. Najafi, "Flow Field And Performance of High Frequency Micromachined Synthetic Jets," 40th AIAA Aerospace Sciences Meeting and Exhibit, Reno Nevada, paper # 2002-0974, 01/2002

  142. J. Chae, H. Kulah, and K. Najafi, "A Hybrid Silicon-On-Glass (Sog) Lateral Micro-Accelerometer With CMOS Readout Circuitry," IEEE 2002 Int. Conference on Micro Electro Mechanical Systems (MEMS 2002), Las Vegas, NV, pp. 623-626, 01/2002

  143. T-K A. Chou and K. Najafi, "Fabrication Of Out-Of-Plane Curved Surfaces In Si By Utilizing RIE Lag," IEEE 2002 Int. Conference on Micro Electro Mechanical Systems (MEMS 2002), Las Vegas, NV, pp. 145-148, 01/2002

  144. G. He, and K. Najafi, "A Single-Crystal Silicon Vibrating Ring Gyroscope," IEEE 2002 Int. Conference on Micro Electro Mechanical Systems (MEMS 2002), Las Vegas, NV, pp. 718-721, 01/2002

  145. T-K A. Chou, K. Najafi, M.O. Muller, L.P. Bernal, and P.D. Washabaugh, "Characterization Of Micromachined Acoustic Ejector And Its Applications," IEEE 2002 Int. Conference on Micro Electro Mechanical Systems (MEMS 2002), Las Vegas, NV, pp. 264-267, 01/2002

  146. T. J. Harpster and K. Najafi, "Long-Term Testing Of Hermetic Anodically Bonded Glass-Silicon Packages," IEEE 2002 Int. Conference on Micro Electro Mechanical Systems (MEMS 2002), Las Vegas, NV, pp.423-426, 01/2002

  147. C. Zhang, and K. Najafi, "Fabrication Of Thick Silicon Dioxide Layers Using DRIE, Oxidation And Trench Refill," IEEE 2002 Int. Conference on Micro Electro Mechanical Systems (MEMS 2002), Las Vegas, NV, pp. 160-163, 01/2002

  148. T-K A. Chou, K. Najafi, M.O. Muller, L.P. Bernal, P.D. Washabaugh, and B. Amirparviz, "Micromachined E-Jet for IC Chip Cooling," IEEE International Solid-State Circuits Conference, San Francisco CA, pp. 356-357, 02/2002

  149. M. Ghovanloo, K. Beach, K. D. Wise, and K. Najafi, "A BiCMOS wireless interface chip for micromachined stimulating microprobes," IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology, Madison WI, pp. 277-282, 05/2002

  150. M. Ghovanloo and K. Najafi, "Fully integrated power supply design for wireless biomedical implants," IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology, Madison WI, pp. 414-419, 05/2002

  151. K. Najafi, "Power and Integrated Microsystems," SPIE International Symposium on Design, Test, Integration, and Packaging of MEMS and MOEMS, Cannes, France, 05/2002

  152. H. Kulah, A. Salian, N. Yazdi, and K. Najafi, "A 5V Closed-Loop Second-Order Sigma-Delta Micro-G Microaccelerometer," Solid-State Sensor & Actuator Workshop, Hilton Head Island SC, pp. 219-222, 06/2002

  153. Y. Mei, G. R. Lahiji, and K. Najafi, "A Robust Gold-Silicon Eutectic Wafer Bonding Technology for Vacuum Packaging," Solid-State Sensor and Actuator Workshop, Hilton-Head, S.C., pp. 86-89, 06/2002

  154. G. O’Brien, D. J. Monk, and K. Najafi, "Angular Rate Gyroscope with Dual Anchor Support," Solid-State Sensor and Actuator Workshop, Hilton-Head, S.C., pp. 285-288, 06/2002

  155. M. Ghovanloo, K. Najafi, "A High Data Transfer Rate Frequency Shift Keying Demodulator Chip for the Wireless Biomedical Implants," IEEE 45th Midwest Symposium on Circuits and Systems, Tulsa OK, 08/2002

  156. H. Kulah and K. Najafi, "A Low Noise Switched-Capacitor Interface Circuit for Sub-Micro Gravity Resolution Micromachined Accelerometers," European Solid-State Circuits Conference ESSCIRC'02, Florence Italy, pp. 635-639, 09/2002

  157. A. Sodagar, K. Najafi, "A Wide-Range Supply-Independent CMOS Voltage Reference for Telemetry-Powering Applications," IEEE International Conference on Electronics, Circuits, and Systems (ICECS'02), Dubrovnik, Croatia, pp. 401-404, 09/2002

  158. M. Ghovanloo, K. Najafi, "A BiCMOS Wireless Stimulator Chip for Micromachined Stimulating Microprobes," The IEEE 2nd Joint EMBS-BMES Conference, Houston TX, pp. 2113-2114, 10/2002

  159. P. Mohseni and K. Najafi, "A Low-Power Fully Integrated Bandpass Operational Amplifier For Biomedical Neural Recording Applications," 2nd Joint IEEE EMBS/BMES Conference, Houston TX, pp. 2111-2112, 10/2002

  160. C. Zhang, L. Bernal, P. Washabaugh, K. Najafi, "A Micromachined Combustor and its Application to Thermoelectric Power Generation," ASME IMECE, New Orleans LA, Vol. 2, IMECE2002-33272, 11/2002

  161. B. Stark and K. Najafi, "A Wafer Level Vacuum Packaging Technique Utilizing Electroplated Nickel," ASME IMECE, New Orleans LA, Vol. 2, IMECE2002-34268, 11/2002

  162. M. Muller, L. Bernal, P. Washabaugh, T.-K. Chou, H. Kim, and K. Najafi, "Acoustically Generated Micromachined Jet Arrays For Micropropulsion Applications," ASME IMECE, New Orleans LA, Vol. 2, IMECE2002-33630, 11/2002

  163. A. Astle, A. Paige, L. Bernal, J. Munfakh, H. Kim, and K. Najafi, "Analysis And Design Of Multistage Electrostatically-Actuated Micro Vacuum Pumps," ASME IMECE, New Orleans LA, Vol. 2, IMECE2002-34308, 11/2002

  164. E. Zellers, K. Wise, K. Najafi, D. Aslam, R. Brown, Q. Cai, J. Driscoll, M. Flynn, J. Giachino, R. Gordenker, M. Hsieh, C. Nguyen, P. Bergstrom, J. Drelich, C. Friedrich, E. Gamble, M Kaviany, C. Lu, A. Matzger, M. Oborny, S. Pang, J. Potkay, R. Sacks, W.-C. Tian, W. Steinecker, J. Whiting, Q. Zhong, "Determinations of Complex Vapor Mixtures in Ambient Air with a Wireless Microanalytical System: Vision, Progress, and Homeland Security Applications," IEEE Conference on Technologies for Homeland Security, Waltham MA, pp. 92-95, 11/2002

  165. K. Wise and K. Najafi, "Fully-Implantable Auditory Prostheses: Restoring Hearing to the Profoundly Deaf," IEEE International Electron Devices Meeting (IEDM), San Francisco CA, pp. 499-502, 12/2002

  166. J. Chae, H. Kulah, and K. Najafi, "An In-Plane High-Sensitivity, Low-Noise Micro-G Silicon Accelerometer," EEE International Conference on Micro Electro Mechanical Systems (MEMS 2003), Kyoto Japan, pp. 466-469, 01/2003

  167. T. J. Harpster, and K. Najafi, "Field-Assisted Bonding of Glass to Si-Au Eutectic Solder For Packaging Applications," IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2003), Kyoto Japan, pp. 630-633, 01/2003

  168. B. Stark, Y. Mei, C. Zhang, and K. Najafi, " Doubly Anchored Surface Micromachined Pirani Gauge for Vacuum Package Characterization," IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2003), Kyoto Japan, pp. 506-509, 01/2003

  169. X. Zhu, S. Guillaudeu, D. M. Aslam, U. Kim, B. Stark, and K. Najafi, "All Diamond Packaging For Wireless Integrated Micro-Systems Using Ultra-Fast Diamond Growth," IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2003), Kyoto Japan, pp. 658-661, 01/2003

  170. M. Muller, L. Bernal, P. Washabaugh, H. Kim, K. Najafi, "Resonance Effects of Electrostatically Actuated Acoustic Jets," 41st Aerospace Sciences Meeting and Exhibit (AIAA), Reno NV, AIAA Paper 2003-1272, 01/2003

  171. K. Najafi, "Micropackaging Technologies for Integrated Microsystems: Applications to MEMS and MOEMS," SPIE’s Micromachining and Microfabrication Symposium, San Jose CA, pp. 1-19, 01/2003

  172. H. Kulah, J. Chae, N. Yazdi and K. Najafi, "A Multi-Step Electromechanical Sigma-Delta Converter for Micro-g Capacitive Accelerometers," IEEE International Conference on Solid-State Circuits Conference (ISSCC 2003), San Francisco CA, pp. 202-203, 02/2003

  173. H. Yu, K. Najafi, "Low-Power Interface Circuits for Bio-Implantable Microsystems," IEEE International Conference on Solid-State Circuits Conference (ISSCC 2003), San Francisco CA, pp. 194-195, 02/2003

  174. P. Mohseni and K. Najafi, "A Wireless FM Multi-Channel Microsystem for Biomedical Neural Recording Applications," IEEE Southwest Symposium on Mixed-Signal Design (SSMSD 2003), Las Vegas NV, pp. 217-222, 02/2003

  175. M. Ghovanloo, K. Najafi, "A Fully Digital Frequency Shift Keying Demodulator Chip for Wireless Biomedical Implants," IEEE Southwest Symposium on Mixed-Signal Design (SSMSD 2003), Las Vegas NV, pp. 223-227, 02/2003

  176. M. Ghovanloo, K. D. Wise, K. Najafi, "Towards a Button-Sized 1024-Site Wireless Cortical Microstimulating Array," 1st International IEEE/EMBS Conference on Neural Engineering (NE 2003), Capri Italy, pp. 138-141, 03/2003

  177. M. Ghovanloo, K. Najafi, "A High Data-Rate Frequency Shift keying Demodulator Chip for the Wireless Biomedical Implants," IEEE International Symposium on Circuits and Systems (ISCAS 2003), Bangkok, Thailand, Vol. 5, pp. 45-48, 05/2003

  178. A.B. Ucok, J. Giachino, and K. Najafi, "Compact, Modular Assembly and Packaging of Multi-Substrate Microsystems," IEEE International Conference on Solid State Sensors and Actuators Conference (Transducers 2003), Boston MA, pp. 1877-1878, 06/2003

  179. H. Kulah, J. Chae and K. Najafi, "Noise Analysis and Characterization of A Sigma-Delta Capacitive Silicon Microaccelerometer," IEEE International Conference on Solid State Sensors and Actuators Conference (Transducers 2003), Boston MA, pp. 92-95, 06/2003

  180. B. Stark and K. Najafi, "An Integrated Process for Post-Packaging Release and Vacuum Sealing of Electroplated Nickel Packages," IEEE International Conference on Solid State Sensors and Actuators Conference (Transducers 2003), Boston MA, pp. 1911-1914, 06/2003

  181. C. Zhang, L. Bernal, P. Washabaugh, K. Najafi, "Micro Combustion-Thermionic Power Generation: Feasibility, Design and Initial Results," IEEE International Conference on Solid State Sensors and Actuators Conference (Transducers 2003), Boston MA, pp. 40-44, 06/2003

  182. G. O’Brien, D. Monk, and K. Najafi, "Angular Accelerometer with Dual Anchor Support," IEEE International Conference on Solid State Sensors and Actuators Conference (Transducers 2003), Boston MA, pp. 1371-1374, 06/2003

  183. J. Chae, H. Kulah and K. Najafi, "A Monolithic Three-Axis Silicon Capacitive Accelerometer with Micro-G Resolution," IEEE International Conference on Solid State Sensors and Actuators Conference (Transducers 2003), Boston MA, pp. 81-84, 06/2003

  184. H. Kim, K. Najafi, P. Washabaugh, and L. Bernal, "Large-Deflection Out-of-Plane Electrostatic Buckled-Electrode Actuators," IEEE International Conference on Solid State Sensors and Actuators Conference (Transducers 2003), Boston MA, pp. 794-797, 06/2003

  185. H. Kim and K, Najafi, "Wafer Bonding Using Parylene and Wafer-Level Transfer of Free-Standing Parylene Membranes," IEEE International Conference on Solid State Sensors and Actuators Conference (Transducers 2003), Boston MA, pp. 790-793, 06/2003

  186. A. M. Sodagar, and K. Najafi, "A Multi-Output Supply-Independent Voltage Reference in Standard CMOS Process for Telemetry-Powering Applications," IEEE Int. Symposium on Signals, Circuits and Systems, Lasi, Romania, Volume: 2, pp. 493 –496, 07/2003

  187. M. Ghovanloo, and K. Najafi, "A Small Size Large Voltage Compliance Programmable Current Source for Biomedical Implantable Microstimulators," 25th Annual International Conference of the IEEE Engineering In Medicine And Biology Society, Cancun, Mexico, pp. 1979-1982, 09/2003

  188. S. Nikles, D.S. Pellinen, J. Kitagawa, D. Kipke, RoM. Bradley, and K. Najafi, "Long Term In Vitro Monitoring of Polyimide Microprobe Electrical Properties," 25th Annual International Conference of the IEEE Engineering In Medicine And Biology Society, Cancun, Mexico, pp. 3340-3343, 09/2003

  189. K. Najafi, J. Chae, H. Kulah and G. He, "Micromachined Silicon Accelerometers And Gyroscopes," IROS - IEEE International Robotics and Systems Conference , Las Vegas NV, 10/2003

  190. A. Astle, L.P. Bernal, P. Washabaugh, H. Kim and K. Najafi, "Dynamic Modeling And Design Of A High Frequency Micro Vacuum Pump," ASME International Mechanical Engineering Congress & Exposition Washington, DC, IMECE 2003-41493, 11/2003

  191. C. Zhang, K. Najafi, L.P. Bernal and P. Washabaugh, "Mechanical And Thermal Design Of A Combustion-Based Thermionic Micro Power Generator," ASME International Mechanical Engineering Congress & Exposition Washington, DC, IMECE 2003-41531, 11/2003

  192. A.B. Ucok, J. Giachino, and K. Najafi, "A High-Density Flexible Connector Array For Multi-Substrate Packages," ASME International Mechanical Engineering Congress & Exposition Washington, DC, IMECE2003-41562, 11/2003

  193. B. H. Stark and K. Najafi, "A Mold and Transfer Technique for Lead-Free Fluxless Soldering and Application to Wafer-Level Low-Temperature Thin-Film Packages," 17th IEEE International Conference on Microelectromechanical Systems (MEMS '04), Maastricht, The Netherlands, pp. 16-19, 01/2004

  194. H. Kulah and K. Najafi, "An Electromagnetic Micro Power Generator for Low-Frequency Environmental Vibrations," 17th IEEE International Conference on Microelectromechanical Systems (MEMS '04), Maastricht, The Netherlands, pp. 237-240, 01/2004

  195. J. Chae, B.H. Stark, and K. Najafi, "A Micromachined Pirani Gauge with Dual Heat Sinks," 17th IEEE International Conference on Microelectromechanical Systems (MEMS '04), Maastricht, The Netherlands, pp. 532-535, 01/2004

  196. M. Ghovanloo and K. Najafi, "A Modular 32-site Wireless Neural Stimulation Microsystem," IEEE Int. Solid-State Circuits Conference, San Francisco, pp. 226-227, 02/2004

  197. K. D. Wise, K. Najafi, R. Sacks, and E. T. Zellers, "A Wireless Integrated Microsystem for Environmental Monitoring," IEEE Int. Solid-State Circuits Conference, San Francisco, pp. 434-435, 02/2004

  198. H. S. Kim, A. B. Ucok, and K. Najafi, "Large deflection stacked multi-electrode electrostatic Actuator," Solid State Sensor, Actuator and Microsystems Workshop (Hilton Head 2004), Hilton Head Island SC, pp. 340-343, 06/2004

  199. H. Yu, R. Olsson, K.D. Wise, and K. Najafi, "A wireless microsystem for multichannel neural recording microprobes," Solid State Sensor, Actuator and Microsystems Workshop (Hilton Head 2004), Hilton Head Island SC, pp. 107-110, 06/2004

  200. A. B. Ucok, J. M. Giachino, and K. Najafi, "The WIMS Cube: A Microsystem Package With Actuated Flexible Connections And Re-Workable Assembly," Solid State Sensor, Actuator and Microsystems Workshop (Hilton Head 2004), Hilton Head Island SC, pp. 117-120, 06/2004

  201. E. T. Zellers, W. H. Steinecker, G. R. Lambertus, M. Agah, C.-J. Lu, H. K. L. Chan, J. A. Potkay, M.C. Oborny, J. M. Nichols, A. Astle, H. S. Kim, M. P. Rowe, J. Kim, L. W. da Silva, J. Zheng, J. J. Whiting, R. D. Sacks, S. W. Pang, M. Kaviany, P. L. Bergstrom, A. J. Matzger, Ç. Kurdak, L. P. Bernal, K. Najafi, K. D. Wise, "A Versatile MEMS Gas Chromatograph For Determinations Of Environmental Vapor Mixtures," Solid State Sensor, Actuator and Microsystems Workshop (Hilton Head 2004), Hilton Head Island SC, pp. 61-66, 06/2004

  202. K. King, S.W. Yoon, N.C. Perkins, and K. Najafi, "The Dynamics of the Golf Swing as Measured by Strapdown Inertial Sensors," 5th International Conference on the Engineering of Sport, Davis CA, vol. 2, pp. 276-282, 09/2004

  203. P. Mohseni, and K. Najafi, "Wireless Multichannel Biopotential Recording Using an Integrated FM Telemetry Circuit," 26th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBS), San Francisco, CA, 09/2004

  204. M. Ghovanloo, K.J. Otto, D.R. Kipke, and K. Najafi, "In Vitro and In Vivo Testing of a Wireless Multichannel Stimulating Telemetry Microsystem,," 26th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBS), San Francisco CA, pp. 4294-4297, 09/2004

  205. K. Najafi, and M. Ghovanloo, "A Multichannel Monolithic Wireless Microstimulator," 26th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBS), San Francisco CA, pp. 4197-4200, 09/2004

  206. N. Yazdi, H. Kulah, and K. Najafi, "Precision Readout Circuits for Capacitive Microaccelerometers," Third IEEE International Conference on Sensors, Vienna, Austria, pp. 28-31, 10/2004

  207. S. A. Nikles, S. Bledsoe, R. M. Bradley, and K. Najafi, "A 32-Channel Active High-Density Connector for Biomedical Applications," IEEE Micro Electro Mechanical Systems (MEMS), Miami FL, pp. 580-583, 01/2005

  208. A.B. Ucok, J. Giachino, and K. Najafi, "Modular Assembly/Packaging Of Multi-Substrate Microsystems (WIMS Cube) Using Thermo-Magnetically Actuated Cables," IEEE Micro Electro Mechanical Systems (MEMS), Miami FL, pp. 536-539, 01/2005

  209. S. Lee, J. Chae, S. Yoon, N. Yazdi, and K. Najafi, "Low-power Thermal Isolation for Environmentally Resistant Microinstruments," IEEE Micro Electro Mechanical Systems (MEMS), Miami FL, pp. 532-535, 01/2005

  210. W.C. Welch III and K. Najafi, "Transfer of Metal MEMS Packages Using a Wafer-Level Solder Sacrificial Layer," IEEE Micro Electro Mechanical Systems (MEMS), Miami FL, pp. 584-587, 01/2005

  211. J. Chae, J. Giachino, and K. Najafi, "Wafer-level Vacuum Package with Vertical Feedthroughs," IEEE Micro Electro Mechanical Systems (MEMS), Miami FL, pp. 548-551, 01/2005

  212. J.S. Mitchell, G.R. Lahiji and K. Najafi, "An Improved Performance Poly Si Pirani Vacuum Gauge Using Heat Distributing Structural Supports," IEEE Micro Electro Mechanical Systems (MEMS), Miami FL, pp. 291-294, 01/2005

  213. B.H. Stark, J. Chae, A. Kuo, A. Oliver, and K. Najafi, "A High-Performance Surface-Micromachined Pirani Gauge in SUMMIT V™," IEEE Micro Electro Mechanical Systems (MEMS), Miami FL, pp.295-298, 01/2005

  214. P. Mohseni and K. Najafi, "A Battery-Powered 8-channel Wireless FM IC for Biopotential Recording Applications," IEEE Int. Solid-State Circuits Conference (ISSCC), San Francisco CA, pp. 560-561, 01/2005

  215. M. Ghovanloo and K. Najafi, "A Tri-state FSK Demodulator for Asynchronous Timing of High-rate Stimulation Pulses in Wireless Implantable Microstimulators," IEEE/EMBS Conf. on Neural Engineering, pp. 116-119, 03/2005

  216. H. Kulah, and K. Najafi, "An Electromagnetic Micro Power Generator for Low-Frequency Environmental Vibrations," 2005 SAE World Congress, Detroit MI, Paper #05MV-35, 04/2005

  217. H. Kulah, J. Chae, and K. Najafi, "Micromachined Accelerometers for Inertial Navigation Applications," 2005 SAE World Congress, Detroit MI, Paper #05MV-36, 04/2005

  218. M. Ghovanloo, and K. Najafi, "A Three-Dimensional Microassembly Structure for Micromachined Planar Microelectrode Arrays," 3rd Annual IEEE EMBS Special Topic Conference on Microtechnologies in Medicine and Biology, Oahu HI, pp. 112-115, 05/2005

  219. W.C. Welch III, J. Chae, S. Lee, and K. Najafi, "Transient Liquid Phase (TLP) Bonding for MEMS Packaging Applications," IEEE Int. Conference on Solid-State Sensors, Actuators, and Microsystems (TRANSDUCERS 2005), Seoul, Korea, Vol. 2, pp. 1350-1353 (3E4.9), 06/2005

  220. J.S. Mitchell, G.R. Lahiji and K. Najafi, "Encapsulation of vacuum sensors on a wafer level package using a gold-silicon eutectic," IEEE Int. Conference on Solid-State Sensors, Actuators, and Microsystems (TRANSDUCERS 2005), Seoul, Korea, Vol. 1, pp. 928-931 (2E4.119), 06/2005

  221. H. Kim, and K. Najafi, "Characterization of Parylene-assisted wafer bonding: Long-term stability and influence of process chemicals," IEEE Int. Conference on Solid-State Sensors, Actuators, and Microsystems (TRANSDUCERS 2005), Seoul, Korea, Vol. 1, pp. 2015-2018 (4A2.1), 06/2005

  222. S.W. Yoon, N. Yazdi, N.C. Perkins, and K. Najafi, "Novel Integrated Shock Protection for MEMS," IEEE Int. Conference on Solid-State Sensors, Actuators, and Microsystems (TRANSDUCERS 2005), Vol. 1, pp. 396-400 (2B3.2), 06/2005

  223. W.C. Welch III, M. Dokmeci, N. Yazdi, and K. Najafi, "A Flux-Free Pb-Sn Solder Bonding Technology for Wafer-Level Chip-Scale Vacuum Packaging," ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems (InterPack05), San Francisco CA, 07/2005

  224. J.S. Mitchell, G.R. Lahiji and K. Najafi, "Reliability and Characterization of Micro-Packages in a Wafer Level Au-Si Eutectic Vacuum Bonding Process," ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems (InterPack05), IPACK2005-73341, 07/2005

  225. R. Panday, X.A. Fu, S. Rajgopal, T. Lisby, S.A. Nikles, K. Najafi, and M. Mehregany, "Mechanical Testing of Flexible Silicon Carbide Interconnect Ribbons," International Conference on Silicon Carbide and Related Materials, Pittsburgh PA, 09/2005

  226. H. Kim, K. Najafi, A. Astle, L. Bernal, and P. Washabaugh, "Fabrication And Performance Of A Dual-Electrode Electrostatic Peristaltic Gas Micropump," The Ninth International Conference on Miniaturized Chemical and Biochemical Analysis Systems (MicroTAS 2005), Boston MA, pp. 1173-1176, 10/2005

  227. A. Astle, L.P. Bernal, H. Kim, K. Najafi, P.D. Washabaugh, C. Morrison, "Theoretical and Experimental Performance of a High Frequency Micro Pump," ASME International Mechanical Engineering Congress & Exposition, Orlando FL, IMECE2005-81626, 11/2005

  228. H. Kim, A. Astle, K. Najafi, L. Bernal, P. Washabaugh, and F. Cheng, "Bi-directional electrostatic microspeaker with two large-deflection flexible membranes actuated by single/dual electrodes," 4th IEEE Conf. on Sensors (Sensors '05), Irvine CA, 11/2005

  229. S. Yoon, N. Yazdi, J. Chae, N. Perkins, and K. Najafi, "Shock Protection Using Integrated Nonlinear Spring Shock Stops," 19th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Istanbul, Turkey, pp. 702-705, 01/2006

  230. S-H Lee, J. Chae, N. Yazdi, and K. Najafi, "Micro-Brush Press-On Contact: A New Technique For Room Temperature Electrical And Mechanical Attachment," 19th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Istanbul, Turkey, pp. 342-345, 01/2006

  231. J.S. Mitchell, G.R. Lahiji, and K. Najafi, "Au-Si Eutectic For Wafer Bonding and Wafer-Level Vacuum Packaging," 2nd Int. Workshop on Wafer Bonding for MEMS Technologies, Halle, Germany, pp. 63-64, 04/2006

  232. H. Kim, A.A. Astle, K. Najafi, L.P. Bernal, and P.D. Washabaugh, "Integrated Peristaltic 18-Stage Electrostatic Gas Micro Pump With Active Microvalves," Hilton Head Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head Island SC, pp. 292-295, 06/2006

  233. T. Galchev, W.C. Welch III, and K. Najafi, "Silicon-On-Silicon (SOS): A New CMOS Compatible Low-Temperature MEMS Process Using Plasma Activated Fusion Bonding," Hilton Head Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head Island SC, pp. 100-101, 06/2006

  234. H. Kim, A.H. Jauregui, C. Morrison, K. Najafi, L.P. Bernal, and P.D. Washabaugh, "Low Power Electrostatic Helmholtz-Resonance Microjet Generator For Propulsion And Cooling," Hilton Head Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head Island SC, pp. 296-299, 06/2006

  235. A.B. Ucok, J.M. Giachino, and K. Najafi, "Testing And Assembly Of WIMS Cubes Containing Passive And Active Integrated Cables," Hilton Head Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head Island SC, pp. 400-403, 06/2006

  236. S.W. Yoon, S. Lee, N.C. Perkins, and K. Najafi, "Shock Protection Using Soft Coatings As Shock Stops," Hilton Head Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head Island SC, pp. 396-399, 06/2006

  237. J.S. Mitchell, and K. Najafi, "Backside Resistive Localized Heating For Low Temperature Wafer-Level Bonding And Packaging," Hilton Head Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head Island SC, pp. 352-355, 06/2006

  238. J.S. Mitchell, G.R. Lahiji, and K. Najafi, "Long-Term Reliability, Burn-In And Analysis Of Outgassing In Au-Si Eutectic Wafer-Level Vacuum Packages," Hilton Head Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head Island SC, pp. 376-379, 06/2006

  239. G. J. O’Brien, D. J. Monk And K. Najafi, "SOI MEMS Process Insensitive To Sacrificial Oxide Etch Induced Substrate Anchor Variation With Selectable Substrate Isolation And Low Resistance Substrate Contact," Hilton Head Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head Island SC, pp. 47-50, 06/2006

  240. K. Najafi, and M. Maharbiz, "What Should A First College Course On Mems Be?," Hilton Head Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head Island SC, pp. 55-58, 06/2006

  241. L. C. McAfee, K. Najafi, Y.B. Gianchandani, K. D. Wise, and M. M. Maharbiz, D.M. Aslam, P.L. Bergstrom, C.R. Friedrich, "A MEMS/Microsystem Curriculum With International Dissemination," Hilton Head Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head Island SC, pp. 1-6, 06/2006

  242. L. C. McAfee, K. Najafi, Y.B. Gianchandani, K. D. Wise, and M. M. Maharbiz, D.M. Aslam, P.L. Bergstrom, C.R. Friedrich, "MEMS and Microsystem Courses with National and International Dissemination," American Society for Engineering Education, 2006 ASEE Annual Conference and Exposition, Chicago IL, 2006-2332, 06/2006

  243. A. M. Sodagar, K. Najafi, "Wireless Interfaces for Implantable Biomedical Microsystems," 49th IEEE International Midwest Symposium on Circuits and Systems (MWSCAS’06), pp. 265-269, 08/2006

  244. A.M. Sodagar, M. Ghovanloo, K. Najafi, and K.D. Wise, "Fully-Integrated CMOS Power Regulator for Telemetry-Powered Implantable Biomedical Microsystems," Fully-Integrated CMOS Power Regulator for Telemetry-Powered Implantable Biomedical Microsystems, San Jose, CA, pp. 659-662, 08/2006

  245. A. M. Sodagar, K. D. Wise, K. Najafi, "A Neural Signal Processor for an Implantable Multi-Channel Cortical Recording Microsystem," 28th IEEE International Engineering in Medicine and Biology Conference (EMBC’06), New York City NY, 08/2006

  246. A. Sodagar, K.D. Wise, and K. Najafi, "Generic Controller Dedicated to Telemetry-Controlled Microsystems," 28th IEEE International Engineering in Medicine and Biology Conference (EMBC’06), New York City NY, 08/2006

  247. P. Mohseni, and K. Najafi, "A 1-MHz, 5-kb/s Wireless Command Receiver for Electronic Site Selection in Multichannel Neural Biopotential Recording," 28th IEEE International Engineering in Medicine and Biology Conference (EMBC’06), New York City NY, 08/2006

  248. H. Kim, W. Steinecker, G. Lambertus, A. Astle, K. Najafi, E. Zellers, L. Bernal, and K. Wise, "Integrated high-pressure 4-stage micro gas pump for high-speed micro gas chromatography," 10th Int. Conf. on Miniaturized Systems for Chemistry and Life Sciences (µTAS ’06), Tokyo, Japan, pp. 1037-1039, 11/2006

  249. H. Kim, A. Astle, L. Bernal, K. Najafi, and P. Washabaugh, "Directional pumping performance of an electrostatic checkerboard microvalve," ASME Int. Mechanical Engineering Congress & Exposition (ASME ’06), Chicago IL, IMECE 2006-16211, 11/2006

  250. A. M. Sodagar, K. D. Wise, K. Najafi, "Fully-Integrated Mixed-Signal Neural Processor for Implantable Multi-Channel Cortical Recording," IEEE Biomedical Circuits and Systems Conference (BioCAS’06), London, United Kingdom, pp. 37-40, 11/2006

  251. A. M. Sodagar, K. D. Wise, K. Najafi, "An Interface Chip for Power and Bidirectional Data Telemetry in an Implantable Cochlear Microsystem," IEEE Biomedical Circuits and Systems Conference (BioCAS’06), London, United Kingdom, pp. 1-4, 11/2006

  252. S. Lee, J. Cho, and K. Najafi, "Fabrication of Vertical Comb Electrodes Using Selective Anodic Bonding," IEEE 20th Int. Conf. Micro Electro-Mechanical Systems Workshop (MEMS 2007), Kobe, Japan, pp. 349-352, 01/2007

  253. H. Kim, A. Astle, K. Najafi, L. Bernal, and P. Washabaugh, "A fully integrated high-efficiency peristaltic 18-stage gas micropump with active microvalves," iEEE 20th Int. Conf. Micro Electro-Mechanical Systems Workshop (MEMS 2007), Kobe, Japan, pp. 131-134, 01/2007

  254. H. Kim, A. Jaregui, C. Morrison, K. Najafi, L. Bernal, and P. Washabaugh, "Low-power electrostatic microthruster for propulsion based on Helmholtz-resonance," IEEE 20th Int. Conf. Micro Electro-Mechanical Systems Workshop (MEMS 2007), Kobe, Japan, pp. 127-130, 01/2007

  255. T. Galchev, W. C. Welch III, and K. Najafi, "Low-Temperature MEMS Process Using Plasma Activated Silicon-On-Silicon (SOS) Bonding," IEEE 20th Int. Conf. Micro Electro-Mechanical Systems Workshop (MEMS 2007), Kobe, Japan, pp. 309-312, 01/2007

  256. J.S. Mitchell and K. Najafi, "Localized Back-Side Heating for Low -Temperature Wafer-Level Bonding," IEEE 20th Int. Conf. Micro Electro-Mechanical Systems Workshop (MEMS 2007), Kobe, Japan, pp. 377-380, 01/2007

  257. K. Najafi, "Micromachined Gas Chromatography Microsystem for Complex Gas Analysis," DARPA Microsystems Technologies Office Symposium, San Jose CA, 03/2007

  258. A.M. Sodagar, G. E. Perlin, Y. Yao, K. Najafi, K. D. Wise, "Chronic Neural Recording with a 64-Channel Cortical Microsystem," IEEE EMBS Conference on Neural Engineering, The Kohala Coast, HI, pp. 402-405, 05/2007

  259. E.T. Zellers, S. Reidy, R.A. Veeneman, R. Gordenker, W.H. Steinecker, G.R. Lambertus, H. Kim, J.A. Potkay, M.P. Rowe, Q. Zhong,C. Avery, H.K. L. Chan, R.D. Sacks, K. Najafi, K.D. Wise, "An Integrated Micro-Analytical System For Complex Vapor Mixtures," Int. Conf. on Solid-State Sensors, Actuators, and Microsystems (Transducers '07), Lyon, France, Vol. 2, pp. 1491-1496 (3A3.1), 06/2007

  260. A.M. Sodagar, G. E. Perlin, Y. Yao, K. D. Wise, K. Najafi, "An Implantable Microsystem for Wireless Multi-Channel Cortical Recording," Int. Conf. on Solid-State Sensors, Actuators, and Microsystems (Transducers '07), Lyon, France, Vol. 1, pp. 69-76 (1C4.5), 06/2007

  261. W. C. Welch, K. Najafi, "Nickel-Tin Transient Liquid Phase (TLP) Wafer BondingFor MEMS Vacuum Packaging," Int. Conf. on Solid-State Sensors, Actuators, and Microsystems (Transducers '07), Lyon, France, Vol. 1, pp. 1327-1332, 06/2007

  262. S-H. Lee, S.W. Lee, and K. Najafi, "A Generic Environment-Resistant Packaging Technology For MEMS," Int. Conf. on Solid-State Sensors, Actuators, and Microsystems (Transducers '07), Lyon, France, Vol. 1, pp. 335-340 (2A2.3), 06/2007

  263. H. Kim, William H. Steinecker, S. Reidy, Gordon R. Lambertus, A.A. Astle, K. Najafi, Edward T. Zellers, L.P. Bernal, P.D. Washabaugh, and K.D. Wise, "A Micropump-Driven High-Speed MEMS Gas Chromatography System," Int. Conf. on Solid-State Sensors, Actuators, and Microsystems (Transducers '07), Lyon, France, Vol. 2, pp. 1505-1508, 06/2007

  264. J.S. Mitchell, J.M. Giachino and K. Najafi, "Wafer Level Vacuum/Hermetic Packaging of MEMS Devices," Sensors Expo and Conference, Rosemont IL, 06/2007

  265. K. Najafi, "Packaging of Implantable Microsystems," IEEE Int. Sensors Conference, Atlanta GA, 10/2007

  266. S.W. Yoon, S.W. Lee, N.C. Perkins, K. Najafi, "Vibration Sensitivity of MEMS Tuning Fork Gyroscopes," IEEE Int. Sensors Conference, Atlanta GA, pp. 115-119, 10/2007

  267. H. Kim, S. Lee, and K. Najafi, "High-force liquid-gap electrostatic hydraulic micro actuators," . 11th Int. Conf. on Miniaturized Systems for Chemistry and Life Sciences (µTAS ’07), Paris, France, Vol. 2, pp. 1735-1737, 10/2007

  268. A. Gross, G-S Hwang, C. Lawrence, S-W Lee, H. Kim, C. Uher, M. Kaviany, K. Najafi, "A Multistage In-Plane Micro-Thermoelectric Cooler," , IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS), Tucson AZ, pp. 840-843, 01/2008

  269. Warren C. Welch III and K. Najafi, "Gold-Indium Transient Liquid Phase (TLP) Wafer Bonding For MEMS Vacuum Packaging," IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS), Tucson AZ, pp. 806-809, 01/2008

  270. E.E. Aktakka, H. Kim, M., and K. Najafi, "Mechanical Energy Scavenging from Flying Insects," Hilton Head Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head Island SC, pp.382-383, 06/2008

  271. K. Najafi, "Wireless implantable microsystems for neural recording and stimulation," 2008 Joint 6th International IEEE Northeast Workshop on Circuits and Systems and TAISA Conference, NEWCAS-TAISA 2008, Montreal, Canada, pp. iv-iv, 06/2008

  272. E. Romero, T. Galchev, E. Aktakka, N. Ghafouri, H. Kim, M. Neuman, K. Najafi, and R. Warrington, "Micro Energy Scavengers," Int. Conference on Commercialization of Micro and Nano Systems (COMS 2008), Puerto Vallarta, 09/2008

  273. D. Egert, H. Kim, and K. Najafi, "Characterization of Parylene bonding for vacuum packaging," Int. Conf. on Solid-State Sensors and Actuators, EUROSENSORS (EUROSENSORS 2008), Dresden, Germany, 09/2008

  274. N. Ghafouri, H. Kim, M.Z. Atashbar, K. Najafi, "A micro thermoelectric energy scavenger for a hybrid insect," 2008 IEEE International Sensors Conference, Italy, pp. 1249 – 1252, 10/2008

  275. S. -H. Lee, J. Cho, S. W. Lee, M. F. Zaman, F. Ayazi, and K. Najafi, "A Low-Power Oven-Controlled Vacuum Package Technology For High-Performance MEMS," IEEE Int. Conference on Micro Electro Mechanical Systems (MEMS), Sorrento, Italy, pp. 753-756, 01/2009

  276. H. Kim, and K. Najafi, "An Electrically-Driven, Large-Deflection, High-Force Micro Piston Hydraulic Actuator Array For Large-Scale Microfluidic Systems," IEEE Int. Conference on Micro Electro Mechanical Systems (MEMS), Sorrento, Italy, pp. 483-486, 01/2009

  277. Lynch, J. P., Kamat, K., Li, V. C., Flynn, M. P., Sylvester, D., Najafi, K., Gordon, T., Lepech, M., Emami-Naeini, A., Krimotat, A., Ettouney, M., Alampalli, S., and Ozdemir, T., "Overview of a Cyber-enabled Wireless Monitoring System for the Protection and Management of Critical Infrastructure Systems," SPIE Smart Structures and Materials, San Diego CA, 03/2009

  278. E. E. Aktakka, H. Kim, and K. Najafi, "Wafer Level Fabrication of High Performance MEMS Using Bonded and Thinned Bulk Piezoelectric Substrates," IEEE International Conference on Solid-State Sensors and Actuators (Transducers 2009), Denver CO, pp. 849–852, 06/2009

  279. T. V. Galchev, H. Kim, and K. Najafi, "Non-Resonant Bi-Stable Frequency- Increased Power Scavenger From Low Frequency Ambient Vibration," IEEE International Conference on Solid-State Sensors and Actuators (Transducers 2009), Denver CO, pp. 632–635, 06/2009

  280. A. Gross, G. S. Hwang, B. Huang, H. Yang, N. Ghafouri, H. Kim, C. Uher, M. Kaviany, and K. Najafi, "High- Performance Micro Scale Thermoelectric Cooler: An Optimized 6-Stage Cooler," IEEE International Conference on Solid-State Sensors and Actuators (Transducers 2009), Denver CO, pp. 2413–2416, 06/2009

  281. S. Lee, S. Y. Yee, A. Besharatian, H. Kim, L. P. Bernal, and K. Najafi, "Adaptive Gas Pumping by Controlled Timing of Active Microvalves in Peristaltic Micropumps," IEEE International Conference on Solid-State Sensors and Actuators (Transducers 2009), Denver CO, pp. 2294–2297, 06/2009

  282. J. S. Mitchell and K. Najafi, "A Detailed Study of Yield and Reliability for Vacuum Packages Fabricated in a Wafer-Level Au-Si Eutectic Bonding Process," IEEE International Conference on Solid-State Sensors and Actuators (Transducers 2009), Denver CO, pp. 841–844, 06/2009

  283. A. Borna, T. Marzullob, G. Gage, K. Najafi, "A Small, Light-Weight, Low-Power, Multichannel Wireless Neural Recording Microsystem," The 31st Annual International IEEE EMBS Conference, Minneapolis MN, pp. 5413-5416, 09/2009

  284. T. Galchev, H. Kim, and K. Najafi, "A Parametric Frequency Increased Power Generator for Scavenging Low-Frequency Ambient Vibrations," Eurosensors XXIII, Lausanne, Switzerland, 09/2009

  285. H. Kim, K. Najafi, and J.W. Park, "Micro hydraulic piston arrays for hydraulic actuator array for pneumatic-less portable large-scale microfluidic systems," 5th Conf. of NanoUtah (NANO UTAH ’09), Salt Lake City UT, 10/2009

  286. K. Najafi, "Wireless Integrated Microsystems for Neural Prostheses," 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Xiamen, China, 01/2010

  287. S-H. Lee, J. Mitchell, W. Welch III, S. Lee, K. Najafi, "Wafer-level vacuum/hermetic packaging technologies for MEMS," SPIE MEMS-MOEMS Symposium, San Francisco CA, Vol. 7592, 759205, 01/2010

  288. T. Galchev, E.E. Aktakka, H. Kim and K. Najafi, "A Piezoelectric Frequency-increased Power Generator for Scavenging Low-frequency Ambient Vibration," IEEE Int. Conference on Micro Electro Mechanical Systems (MEMS), Hong Kong, pp. 1203-1206, 01/2010

  289. M. Sadeghi, H. Kim and K. Najafi, "Electrostatically Driven Micro-Hydraulic Actuator Arrays," IEEE Int. Conference on Micro Electro Mechanical Systems (MEMS), Hong Kong, pp. 15-18, 01/2010

  290. M. Kurata, J.P. Lynch, T. Galchev, M.P. Flynn, P. Hipley, V. Jacob, G. van der Linden, A. Mortazawi, K. Najafi, R. L. Peterson, L.-H. Sheng, D. Sylvester, E. Thometz, , "Two-Tiered Self-Powered Wireless Monitoring System Architecture for Bridge Health Management," SPIE Smart Structures and Materials, San Diego CA, 03/2010

  291. E.E. Aktakka, R.L. Peterson, K. Najafi, "A CMOS-Compatible Piezoelectric Vibration Energy Scavenger Based on the Integration of Bulk PZT Films on Silicon," IEEE International Electron Devices Meeting (IEDM’10), San Francisco, USA, pp. 31.5.1-31.5.4, 12/2010

  292. E.E. Aktakka, R.L. Peterson, K. Najafi, "A Self-Supplied Inertial Piezoelectric Energy Harvester with Power Management IC," IEEE International Solid-State Circuits Conference (ISSCC’11), San Francisco, USA, pp.120-121, 02/2011

  293. J. Cho, J.A. Gregory, K. Najafi, "Single-Crystal-Silicon Vibratory Cylindrical Rate Integrating Gyroscope (CING)," 16th International Conference on Solid-State Sensors, Actuators, and Microsystems (IEEE TRANSDUCERS), Beijing, China, pp. 2813-2816, 06/2011

  294. J. Gregory, J. Cho, K. Najafi, "MEMS Rate and Rate-integrating Gyroscope Control with Commercial Software Defined Radio Hardware," 16th International Conference on Solid-State Sensors, Actuators, and Microsystems (IEEE Transducers), Beijing China, pp. 2394-2397, 06/2011

  295. K. Najafi, T. Galchev, E.E. Aktakka, R.L. Peterson, J. McCullagh, "Microsystems for Energy Harvesting," 16th International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers'11), Beijing, China, pp. 1845-1850, 06/2011

  296. D. Egert and K. Najafi, "Parylene Microprobes with Engineered Stiffness and Shape for Improved Insertion," 16th International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers'11), Beijing, China, pp. 198-201, 06/2011

  297. D. Egert, R.L. Peterson, K. Najafi, "New Class of Chronic Recording Multichannel Neural Probes with Post-Implant Self-Deployed Satellite Recording Sites," 16th International Conference on Solid-State Sensors, Actuators, and Microsystems (IEEE Transducers), Beijing China, pp. 958-961, 06/2011

  298. E.E. Aktakka, R.L. Peterson K. Najafi, "Thinned PZT on SOI Process and Design Optimization for Piezoelectric Inertial Energy Harvesting," 16th International Conference on Solid-State Sensors, Actuators, and Microsystems (IEEE Transducers), Beijing China, pp. 1649-1652, 06/2011

  299. T. Galchev, J. McCullagh, R.L. Peterson, and K. Najafi, "Harvesting Traffic Induced Bridge Vibrations," 16th International Conference on Solid-State Sensors, Actuators, and Microsystems (IEEE TRANSDUCERS), Beijing, China, pp. 1661-1664, 06/2011

  300. N. Ghafouri, R.L. Peterson, C. Uher, and K. Najafi, "Effect of Substrates on Co-evaporated Bi2Te3 and Sb2Te3 Thin Films," 30th International Conference on Thermoelectrics, Traverse City MI, 07/2011

  301. N. Ghafouri, R.L. Peterson, C. Uher, and K. Najafi, "Thermoelectric Properties Optimization of Thermally Co-evaporated P-type (Bi0.25Sb0.75)2Te3 Thin Films," 30th International Conference on Thermoelectrics, Traverse City MI, 07/2011

  302. A. Borna, K. Najafi, "A Low Power, Low Voltage, User-Programmable, Wireless Interface for Reliable Neural Recording," IEEE Biomedical Circuits and Systems Conference, San Diego CA, 11/2011

  303. E.E. Aktakka, R.L. Peterson, K. Najafi, "Multi-Layer PZT Stacking Process for Piezoelectric Bimorph Energy Harvesters," 11th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS'11), Seoul, Republic of Korea, pp. 139-142, 11/2011

  304. M. M. Sadeghi, R. L. Peterson, K.Najafi, "Micro-Hydraulic Structure for High Performance Bio-Mimetic Air Flow Sensor Arrays," IEEE International Electron Devices Meeting (IEDM’11), Washington, DC, pp. 673-676, 12/2011

  305. A. Besharatian, K. Kumar, R. L. Peterson, L. P. Bernal, K. Najafi, "A Scalable, Modular, Multi-stage, Peristaltic, Electrostatic Gas Micro-pump," IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Paris, France,, pp. 1001-1004, 01/2012

  306. K. J. Owen, B. VanDerElzen, R. L. Peterson, K. Najafi, "High Aspect Ratio Deep Silicon Etching," IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Paris, France,, pp. 251-254, 01/2012

  307. J. Y. Cho, J. A. Gregory, K. Najafi, "High-Q, 3KHz Single-crystal-silicon Cylindrical Rate-integrating Gyro (CING)," IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Paris, France,, pp. 172-175, 01/2012

  308. M. M. Sadeghi, R. L. Peterson, K. Najafi, "Hair-based Sensors for Micro-autonomous Systems," SPIE Defense, Security, and Sensing 2012, Baltimore, MD, 83731L-1-8, 04/2012

  309. J. A. Gregory, J. Cho, K. Najafi, "Characterization and Control of a High-Q MEMS Inertial Sensor using Low-Cost Hardware," IEEE/ION PLANS 2012 , Myrtle Beach, SC, 05/2012

  310. J. A. Gregory, J. Cho, K. Najafi, "Novel Mismatch Compensation Methods for Rate-integrating Gyroscopes," IEEE/ION PLANS 2012 , Myrtle Beach, SC, 05/2012

  311. S. Y. Yee, R. L. Peterson, L. P. Bernal, K. Najafi, "High-frequency Large-deflection Electrostatic Diaphragm Actuators with Maximized Volume Displacement," Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head), Hilton Head Island, SC, pp. 393-396, 06/2012

  312. E. E. Aktakka, R. L. Peterson, K. Najafi, "Wet Etching & Uniform Wafer-level Thinning of Bulk Piezoelectric Ceramics on Silicon," Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head), Hilton Head Island, SC, pp. 256-259, 06/2012

  313. K. Najafi, "Biomimetic Hair Sensors: Utilizing the Third Dimension," IEEE Sensors Conference, Taipei, Taiwan, Proceedings, 10/2012

  314. K. Najafi, "Biomimetic Hair Sensors: Utilizing the Third Dimension," Sensors 2012, Taipei, Taiwan, Plenary, 10/2012

  315. K. Kumar, A. Besharatian, L. P. Bernal, R. L. Peterson, and K. Najafi, "A Multiphysics Reduced Order Model of Valve Pumping in a 4-Stage Vacuum MicroPump," ASME 2012 International Mechanical Congress & Exposition (IMECE 2012), Houston, Texas, Proceedings, 11/2012

  316. E.E. Aktakka, C.E. Smith, N. Ghafouri, R.L. Peterson, M.M. Hussain, K. Najafi, "Heterogeneous Integration of Co-Evaporated Bismuth/Antimony Telluride Thin Films Based Thermoelectric Harvesters on FinFET CMOS Chip," PowerMEMS, Atlanta, GA, pp. 97-100, 12/2012

  317. J. McCullagh, R. L. Peterson, T. Galchev, R. Gordenker, Y. Zhang, J. Lynch, and K. Najafi, "Short-Term and Long-Term Testing of a Vibration Harvesting System for Bridge Health Monitoring," PowerMEMS, Atlanta, GA, pp. 109-112, 12/2012

  318. M. Sadeghi, R. L. Peterson, K. Najafi, "High-Speed Electrostatic Micro-Hydraulics for Sensing and Actuation," IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1191-1194, 01/2013

  319. Z. Z. Wu, A. Peczalski, V. A. Thakar, Z. Cao, Y. Yuan, G. He, R. L. Peterson, M. Rais-Zadeh, K. Najafi, "Piezoelectrically Transduced High-Q Silica Micro Resonators," IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Tapei, Taiwan, pp. 122-125, 01/2013

  320. J. Cho, J. Yan, J. A. Gregory, H. Eberhart, R. L. Peterson, K. Najafi, "High-Q Fused Silica Birdbath and Hemispherical 3-D Resonators Made by Blow Torch Molding," IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Tapei, Taiwan, pp. 177-180, 01/2013

  321. D. Egert, J. Kaplan, R. L. Peterson, K. Najafi, "Iodine-Treated Starch as Easy-to-use, Biodegradable Material with Controllable Swelling and Stiffening Properties," IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Tapei, Taiwan, pp. 217-220, 01/2013

  322. Y. Tang, R. L. Peterson, K. Najafi, "Technology for Fabricating Dense 3-D Microstructure Arrays for Biomimetic Hair-Like Sensors," IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Tapei, Taiwan, pp. 355-358, 01/2013

  323. Z. Cao, B. VanDerElzen, K. Owen, J. Yan, G. He, R. L. Peterson, D. Grimard, K. Najafi, "DRIE of Fused Silica," IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Tapei, Taiwan, pp. 361-364, 01/2013

  324. E. E. Aktakka, R. L. Peterson, K. Najafi, "A 3-DOF Piezoelectric Micro Vibratory Stage Based on Bulk-PZT/Silicon Crab-Leg Suspensions," IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Tapei, Taiwan, pp. 576-579, 01/2013

  325. M. Sadeghi, K. Dowling, R. L. Peterson, K. Najafi, "High Sensitivity, High Density Micro-Hydraulic Force Sensor Array Utilizing Stereo-Lithography Fabrication Technique," IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Tapei, Taiwan, pp. 673-676, 01/2013

Other Publications

  1. K. Najafi, "Fabrication of Microstructures and Integrated Sensors Using a Dissolved-Wafer Silicon-On-Insulator Process," General Motors Research Labs Solid-State Sensor Workshop, Warren MI, 02/0198

  2. K.D. Wise, K. Najafi, "A Micromachined Integrated Sensor with On-Chip Self-Test Capability," Solid-State Sensors Conf, Hilton Head Island SC, pp. 12-16, 06/1984

  3. K. Najafi, K.D. Wise, "An Integrated Multielectrode Microprobe for Intracortical Recording," BMES 1985 Annual Meeting, Los Angeles CA, 04/1985

  4. K. Najafi, "Silicon Micromachining: Key to Silicon Integrated Sensors," Symposium on Sensors and Technology, Case Western Reserve University, Cleveland OH, 04/1987

  5. K. Najafi, "Solid-State Integrated Sensors and Their Application in Instrumentation and Measurement Systems," Symposium for Innovation in Measurement Science, Instrument Society of America, Geneva, NY, 08/1987

  6. K. Najafi, "Organic and Inorganic Coatings for Protection of Integrated Circuit Electrodes," 18th Annual Neural Prosthesis Workshop, National Institutes of Health, Bethesda MD, 10/1987

  7. K. Najafi, K.D. Wise, "An Integrated Multielectrode Microprobe for Intracortical Recording," Invited Talk, BMES 1985 Annual Meeting, Los Angeles, 01/1988

  8. K. Najafi, "Control and Measurement with Integrated Solid-State Sensors," Fourth Regional Symp., Int. Society for Hybrid Microelectronics, Dallas TX, 04/1988

  9. J.F. Hetke, D.J. Anderson, D.A. Evans, J.A. Wiler, K. Najafi, R.A. Altschuler, "Tissue Volume Selectivity in the Cochlear Nucleus to Electrical Stimulation with Multichannel Silicon Substrate Arrays," Association for Res. in Otolaryngology, Midwinter Meeting, Florida, 02/1989

  10. K. Najafi, "Integrated Sensors in Biological Environments," 5th Int. Conf. on Solid-State Sensors and Actuators (Transducers '89), Montreux, Switzerland, pp. 295-296, 06/1989

  11. K.D. Wise, K. Najafi, and W.G. Baer,, "A Silicon Thermopile-Based Sensor for Non-Contact Thermal Imaging in Industrial process Control," Temperature Measurement Workshop, Sante Fe CA, 02/1990

  12. K. Najafi, "A Dissolved-Wafer Silicon-On-Insulator Technology and Its Applications to Integrated Sensors and Actuators," ASME Design Engineering Show and Conference, Anaheim CA, 09/1990

  13. J.F. Hetke, D.J. Anderson, J.A. Wiler, K. Najafi, K.D. Wise, "An Implantable Multichannel Silicon-Substrate Array for Chronic Stimulation of the Central Nervous System," Midwinter Meeting, Association for Research in Otolaryngology, St. Petersburg FL, 02/1991

  14. K. Najafi, "Solid-State Sensor and Actuator Research at the University of Michigan," Meeting of the Michigan Chapter of the American Vacuum Society, Ann Arbor MI, 02/1991

  15. R.M. Bradley, S. Gurkan, B.E. Bradley, K. Najafi, "Regeneration of Rat Glossopharyngeal Nerve Through Sieve Electrodes," The 13th Annual meeting of the Association for Chemoreception Sciences (AChemS XIII), Sarasota FL, 04/1991

  16. K. Najafi, "Solid-State Integrated Sensors, Fundamentals and Applications," Symposium on Electrochemical Science and Technology of the Michigan Chapter of the Electrochemical Society, Warren MI, 05/1991

  17. R.M. Bradley, R.H. Smoke, T.A. Akin, K. Najafi, "Functional Regeneration of Glossopharyngeal Nerve Through Micromachined Sieve Electrodes," The 14th Annual meeting of the Association for Chemoreception Sciences (AChemS XIV), Sarasota FL, 04/1992

  18. K. Najafi, "Present Advances and Future Needs in Integrated Sensors and Microsystems," National Materials Advisory Board (of the National Research Council) Workshop on Microengineering, Washington DC, 04/1992

  19. K. Najafi, "Integrated Sensors and Microsystems: Communication Links to a Non-Electronic World," Eastern Communications Forum, an Educational Meeting Conducted by the National Engineering Consortium, Rye NY, 05/1992

  20. K. Najafi, "Packaging and Interconnect Technologies for Solid-State Microsensors," 181st Meeting of the Electrochemical Society, St. Louis MO, 05/1992

  21. K. Najafi, "A Review of Solid-State Integrated Microsensors and Their Future Application in Space Systems," NASA SATWG Sensors and Software Workshop, New Orleans LA, 06/1992

  22. K. Najafi, "Silicon Integrated Microsensors," International Society for Optical Engineering (SPIE) Symposium, OE/FIBERS '92, Boston MA, 09/1992

  23. K. Najafi, "Solid-State Integrated Microsensors," 124th Meeting of the Acoustical Society of America, New Orleans LA, 10/1992

  24. K. Najafi, and C.H. Mastrangelo, "Solid-State Microsensors and Smart Structures," IEEE Ultrasonics, Ferroelectrics, and Frequency Control Symposium, Baltimore MD, 11/1993

  25. M.W. Putty, and K. Najafi, "A Micromachined Vibrating Ring Gyroscope," Solid-State Sensors and Actuators Workshop, Hilton Head Island SC, pp. 213-220, 06/1994

  26. K. Najafi, "Integrated Sensing Systems in Closed Loop Neural Prosthesis," European Solid-State Sensors and Actuators Conf., EUROSENSORS, Toulouse, France, 09/1994

  27. K. Najafi, "Sensor/Circuit Integration in Biomedical Applications," European NEXUS Workshop on Sensor/Circuit Integration, Toulouse, France, 09/1994

  28. K. Najafi, "Silicon-Based Electronic Interfaces to Biological Systems," Workshop on "Bio-Mechatronics" held as part of the 1995 IEEE Int. Conference on Robotics and Automation, Nagoya, Japan, 05/1995

  29. K. Najafi, "Microinstrumentation Systems for Environmental Monitoring," Int. Symp. on Micro Systems, Intelligent Materials and Robots, Sendai, Japan, pp. 142-145, 09/1995

  30. K.D. Wise, C.H. Mastrangelo, K. Najafi, and Clark T.C. Nguyen, "Research in Integrated Sensors and Microsystems at the University of Michigan," Sensors Expo, Chicago IL, 09/1995

  31. K. Najafi, "Research in Integrated Sensors and Microsystems at the University of Michigan," Technical Digest of the IEEJ Seminar on MEMS, MST and Micromachines, Tpkyo, Japan, 10/1995

  32. K. Najafi, "Recent Progress in Micromachining Technology and Applications in Implantable Biomedical Systems," Sixth Int. Symp. on Micro Machine and Human Science, MHS ‘95, Nagoya, Japan, pp. 11-20, 10/1995

  33. K. Najafi, "MEMS Research Activities at the University of Michigan," IEEJ Seminar on MEMS, MST, and Micromachines, University of Tokyo, Tokyo, Japan, 10/1995

  34. K. Najafi, "Microinstrumentation Cluster for Environmental Sensing," GE MEMS and Advanced Packaging Workshop, Schenectady NY, 11/1995

  35. B. Ziaie and K. Najafi, "Biomedical Microdevices: A Micromachining Approach," 1995 International Semiconductor Device Research Symposium, Charlottesville VA, pp. 401-404, 12/1995

  36. K. Najafi, "Silicon Micromachining Technologies: Future Needs and Challenges," SPIE, Micromachining & Microfabrication Process Technology II Conference, 10/1996

  37. K. Najafi, "Integrated Biomedical Microsystems," World Congress on Medical Physics and Biomedical Engineering, Nice, France, 09/1997

  38. K. Najafi, "Research in Wireless Integrated Micro Systems (WIMS) at University of Michigan," Sensors Expo, Detroit MI, 09/2000

  39. M. O. Muller, L.P. Bernal, T.-K. A. Chou, K. Najafi, and P. D. Washabaugh, "On Propulsion Efficiency And Vortical Structure Of Synthetic Jet Flows," APS Division Of Fluid Dynamics 54th Annual Meeting, San Diego CA, 11/2001

  40. K. Najafi, "MEMS and Microsystems," International Semiconductor Device Research Symposium, Washington DC, 12/2001

  41. Y. Shimatani, S.A. Nikles, K. Najafi, and R.M. Bradley, "Simultaneous chronic recording from multiple single fibers of the chorda tympani nerve using an implantable sieve electrode array," Presented at the XXIV annual meeting of the Association for Chemoreception Sciences, Sarasota FL, 01/2002

  42. K. Najafi, "Power and Integrated Microsystems," SPIE International Symposium on Design, Test, Integration, and Packaging of MEMS and MOEMS, Cannes, France, 05/2002

  43. K. Wise and K. Najafi, "Fully-Implantable Auditory Prostheses: Restoring Hearing to the Profoundly Deaf," IEEE International Electron Devices Meeting (IEDM), San Francisco CA, pp. 499-502, 12/2002

  44. K. Najafi, "Micropackaging Technologies for Integrated Microsystems: Applications to MEMS and MOEMS," PIE’s Micromachining and Microfabrication Symposium, San Jose CA, pp. 1-19, 01/2003

  45. P. Mohseni and K. Najafi, "Bi-directional wireless microsystems for biomedical in vivo recording applications," SIGDA Ph.D. Forum at 40th Design Automation Conf. (DAC’03), Anaheim CA, 06/2003

  46. K. Najafi, J. Chae, H. Kulah and G. He, "Micromachined Silicon Accelerometers And Gyroscopes," IROS - IEEE International Robotics and Systems Conference, Las Vegas NV, 10/2003

  47. K. D. Wise, K. Najafi, R. Sacks, and E. T. Zellers, "A Wireless Integrated Microsystem for Environmental Monitoring," IEEE Int. Solid-State Circuits Conference, San Francisco CA, pp. 434-435, 02/2004

  48. E. T. Zellers, W. H. Steinecker, G. R. Lambertus, M. Agah, C.-J. Lu, H. K. L. Chan, J. A. Potkay, M.C. Oborny, J. M. Nichols, A. Astle, H. S. Kim, M. P. Rowe, J. Kim, L. W. da Silva, J. Zheng, J. J. Whiting, R. D. Sacks, S. W. Pang, M. Kaviany, P. L. Bergstrom, A. J. Matzger, Ç. Kurdak, L. P. Bernal, K. Najafi, K. D. Wise, "A Versatile MEMS Gas Chromatograph For Determinations Of Environmental Vapor Mixtures," Solid State Sensor, Actuator and Microsystems Workshop (Hilton Head 2004), Hilton Head Island SC, 06/2004

  49. K. Najafi, "Packaging of Implantable Microsystems," IEEE Int. Sensors Conference, Atlanta GA, 10/2006

  50. P. Mohseni, and K. Najafi, "Single-Chip Wireless Microsystems for Multichannel Neural Biopotential Recording," NIH-NINDS Neural Prosthesis Workshop, Bethesda MD, 10/2006

  51. K. Najafi, "Micromachined Gas Chromatography Microsystem for Complex Gas Analysis," DARPA Microsystems Technologies Office Symposium, San Jose CA, 03/2007

  52. K. Najafi, "Wireless Integrated Microsystems for Environmental Monitoring and Implantable Prostheses," Canadian Workshop on MEMS, Montreal, Canada, 08/2007

  53. K. Najafi, "Packaging of Implantable Microsystems," IEEE Int. Sensors Conference, Atlanta GA, 10/2007

  54. S.W. Yoon, S. Lee, N.C. Perkins, K. Najafi, "Novel Shock Protection Technologies for MEMS using Nonlinear Springs," 10th Korean MEMS Conference, Jeju island, Korea, pp. 135-136, 04/2008

Book Chapters

  1. K.D. Wise, K. Najafi, "VLSI Sensors in Medicine," Norman G. Einspruch and Robert D. Gold, eds., Academic Press, 01/1988

  2. D.J. Anderson, K.D. Wise, and K. Najafi, "Micromachined Silicon Substrate Electrodes for Extracellular Recording," EEE Engineering in Medicine and Biology Conference, Paris, France, 10/1992

  3. K. Najafi, K.D. Wise, N. Najafi, "Integrated Sensors," Semiconductor Sensors, Edited by Simon Sze, John Wiley, 01/1994

  4. K. Najafi, "Sensor and Circuit Integration in Biomedical Applications," Silicon Sensors and Circuits: On-Chip Compatibility, Ed. R.F. Wolffenbuttel, Chapman and Hall, pp. 211-257, 01/1996

  5. K. Najafi, "Micromachined Systems For Neurophysiological Applications," Handbook of Microlithography, Micromachining and Microfabrication, Volume II: Micromachining and Microfabrication, SPIE, 01/1997

  6. G. K. Fedder, J. Chae, H. Kulah, K. Najafi, T. Denison, J. Kuang, and S. Lewis, "Monolithically Integrated Inertial Sensors," Chapter in “CMOS MEMS,” Edited by H. Baltes, O. Brand, G.K. Fedder, C. Hierold, J.G. Korvink, and O. Tabata, Volume 2 of a series of books entitled "Advanced Micro- and Nanosystems,”, Wiley-VCH, 01/2005

  7. M. Ghovanloo, K.D. Wise, and K. Najafi, "Towards a button-sized 1024-site wireless cortical microstimulating array," euro-Nano Technology, Artificial Implants, and Neural Prostheses, Book of the1st Intl. IEEE/EMBS Conf. on Neural Engineering, Ed. M. Akay, Ch. 23, Hoboken: John Wiley & Sons, Inc., 01/2007

  8. H. Kim, K. Najafi, and L.P. Bernal, "Gas Micropumps," chapter in Comprehensive Microsystems, edited by Y. Gianchandani, Hans Zappe, and O. Tabata, Elsevier Publishers, 01/2008

  9. K. Najafi, T.J. Harpster, H. Kim, J.S. Mitchell, W.C. Welch III, "Wafer Bonding Using Parylene and Wafer-Level Transfer of Free-Standing Parylene Membranes," chapter in Comprehensive Microsystems, edited by Y. Gianchandani, Hans Zappe, and O. Tabata, Elsevier Publishers, 01/2008
  Copyright © 2010 Khalil Najafi
University of Michigan College of Engineering Electrical Engineering and Computer Science