PROFESSOR
KHALIL NAJAFI

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Lurie Nanofabrication Facility

Wireless Integrated Microsystems

 

Professor Khalil Najafi's Publications

Journal Publications

  1. M. Sadeghi, R. L. Peterson, K. Najafi, "Air Flow Sensing Using Microwire Bonded Hair-Like Hot-Wire Anemometry," Journal of Micromechanics and Microengineering, Vol. 23, No. 8, 085017, 08/2013

  2. E. E. Aktakka, R. L. Peterson, K. Najafi, "Wafer-Level Integration of High-Quality Bulk Piezoelectric Ceramics on Silicon," IEEE Transactions of Electron Devices (TED), Vol. 60, pp. 2022-2030, 06/2013

  3. T. Galchev, E. E. Aktakka, K. Najafi, "A Piezoelectric Parametric Frequency Increased Generator for Harvesting Low-Frequency Vibrations," IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), vol. 21(6), pp. 1311-1320, 12/2012

  4. S. W. Yoon, S. Lee, K. Najafi, "Vibration-Induced errors in MEMS Tuning Fork Gyroscopes," Sensors and Actuators A: Physical, vol. 180, pp. 32-44, 06/2012

  5. S. W. Yoon, S. Lee, K. Najafi, "Vibration Sensitivity Analysis of MEMS Vibratory Ring Gyroscopes," Sensors and Actuators A: Physical, vol. 171, no.2, pp. 163-177, 11/2011

  6. T V Galchev, J McCullagh, R L Peterson and K Najafi, "Harvesting traffic-induced vibrations for structural health monitoring of bridges," Journal of Micromechanics and Microengineering, 21, 104005, 10/2011

  7. A. J. Gross, G. S. Hwang, B. Huang, H. Yang, N. Ghafouri, H. Kim, R. L. Peterson, C. Uher, M. Kaviany, K. Najafi, "Multistage Planar Thermoelectric Microcoolers," IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), vol. 20, no. 5, pp. 1201-1210, 10/2011

  8. E. E. Aktakka, H. Kim, K. Najafi, "Energy Scavenging From Insect Flight," Journal of Micromechanics and Microengineering, Vol. 21, No. 095016, 08/2011

  9. S. W. Yoon, S. Lee, N. C. Perkins, K. Najafi, "Shock Protection Improvement Using Integrated Novel Shock Protection Technologies," IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), vol. 20, no. 4, pp. 1016-1031, 08/2011

  10. T. Galchev, H. Kim, K. Najafi, "Micro Power Generator for Harvesting Low-Frequency and Nonperiodic Vibrations," IEEE/ASME Journal of Microelectromechanical Systems, (JMEMS), pp. 852-866, 08/2011

  11. T. V. Galchev, W.C. Welch III, K. Najafi, "A new low-temperature high-aspect-ratio MEMS process using plasma activated wafer bonding," Journal of Micromechanics and Microengineering, v 21, n 4, 04/2011

  12. S.W. Yoon, S. Lee, N.C. Perkins, K. Najafi, "Analysis and wafer-level design of a high-order silicon vibration isolator for resonating MEMS devices," Journal of Micromechanics and Microengineering, Vol. 21, No. 1, 015017, 01/2011

  13. H. Kim, K. Najafi, and L.P. Bernal, "Helmholtz Resonance Based Micro Electrostatic Actuators for Compressible Gas Control: a Microjet Generator and a Gas Micro Pump," Journal of Microelectronics and Electronic Packaging, Vol. 7, No. 1, pp. 1-9, 01/2010

  14. K.D. Wise, G.E. Perlin, Y. Yao, K. Najafi, A.M. Sodagar, "An Implantable 64-Channel Wireless Microsystem for Single-Unit Neural Recording," IEEE Journal of Solid-State Circuits, Vol. 44, Issue 9, pp. 2591 – 2604, 09/2009

  15. G.S. Hwang, A.J. Gross, H. Kim, S.W. Lee, N. Ghafouri, B.L. Huang, C. Lawrence, C. Uher, K. Najafi, M. Kaviany, "Micro thermoelectric cooler: Planar multistage," International Journal of Mass and Heat Transfer, 52, Issues 7-8, pp. 1843–1852, 03/2009

  16. Baoling Huang, Chris Lawrence, Andrew Gross, Gi-Suk Hwang, Niloufar Ghafouri, Sang-Woo Lee, Hanseup Kim, Chang-Peng Li, Ctirad Uher, Khalil Najafi, and Massoud Kaviany, "Low-temperature characterization and micropatterning of coevaporated Bi2Te3 and Sb2Te3 films," J. Applied Physics , 104, Issue 11, 113710-pp. 0-8, 12/2008

  17. K. D. Wise, A. M. Sodagar, Y. Yao, M. N. Gulari, G. E. Perlin, and K. Najafi, "Microelectrodes, Microelectronics, and Implantable Neural Microsystems," Proc. IEEE, Special Issue on Implantable Biomimetic Microelectronic Systems, pp. 1184-1202, 07/2008

  18. K.D. Wise, A.M. Sodagar, Y. Yao; M.N. Gulari, G.E. Perlin, K. Najafi, "Microelectrodes, Microelectronics, and Implantable Neural Microsystems," Proceedings of the IEEE, Vol. 96, Issue 7, pp. 1184 – 1202, 07/2008

  19. H. Kulah, and K. Najafi, "Energy Scavenging from Low Frequency Vibrations By Using Frequency Up Conversion for Wireless Sensor Applications," IEEE J. Sensors, Vol. 8, No. 3, pp. 261-268, 03/2008

  20. K. King, S.W. Yoon, N.C. Perkins, and K. Najafi, "Wireless MEMS inertial System foir Golf Swing Dynamics," Sensors and Actuators A: Physical, Vol. 141, Issue 2, pp. 619-630, 02/2008

  21. J. Chae, J.M. Giachino, K. Najafi, "Fabrication and Characterization of a Wafer-Level MEMS Vacuum Package With Vertical Feedthroughs," IEEE J. of Microelectromechanical Systems (JMEMS), Vol. 17, Issue 1, pp. 193-200, 02/2008

  22. J. Mitchell, G.R. Lahiji, K. Najafi, "An Improved Performance Poly-Si Pirani Vacuum Gauge Using Heat-Distributing Structural Supports," IEEE J. Microelectromechanical Systems (JMEMS), Vol. 17, Issue 1, pp. 93-102, 02/2008

  23. H. Kim, and K. Najafi, "Characterization of Aligned Wafer-Level Transfer of Thin and Flexible Parylene Membranes," IEEE /ASME J. of Microelectromechanical Systems (JMEMS), Vol. 16, No. 6, pp. 1386 – 1396, 12/2007

  24. M. Ghovanloo, and K. Najafi, "A Wireless Implantable Multicahnnel Microstimulating System-on-a-Chip with Modular Architecture," IEEE Transactions on Neural Systems and Rehabilitation Engineering, Vol. 15, No. 3, pp. 449-457, 09/2007

  25. A. M. Sodagar, K. D. Wise, K. Najafi, "A Fully-Integrated Mixed-Signal Neural Processor for Implantable Multi-Channel Cortical Recording," IEEE Transactions on Biomedical Engineering, Vol. 54, Issue 6, Part 1, pp. 1075-1088, 06/2007

  26. A. Astle, H. Kim, L. Bernal, K. Najafi, and P. Washabaugh, "Theoretical and experimental performance of a high frequency gas micropump," Sensors and Actuators A: Physical, Vol. 134, Issue 1, pp. 245-256, 02/2007

  27. S. W. Yoon, N. Yazdi, N. C. Perkins, K. Najafi, "Micromachined Integrated Shock Protection for MEMS," Sensors and Actuators A: Physical, Vol. 130-131, pp. 166-175, 08/2006

  28. B. H. Stark and K. Najafi, "A Mold and Transfer Process for Lead-Free Fluxless Soldering and Application to MEMS Packaging," IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), Vol. 15, No. 4, pp. 849-858, 08/2006

  29. A. M. Sodagar, K. Najafi, "Extremely-Wide-Range Supply-Independent CMOS Voltage References for Telemetry-Powering Applications," Journal for Analog Integrated Circuits and Signal Processing, An International Journal, Kluwer Academic Publishers, 46, pp. 253-261, 03/2006

  30. H. Kulah, J. Chae, N. Yazdi and K. Najafi, "Noise Analysis and Characterization of a Sigma-Delta Capacitive Microaccelerometer," IEEE Journal of Solid-State Circuits, Vol. 41, No. 2, pp. 352-361, 02/2006

  31. H. Kim, and K. Najafi, "Characterization of Low-Temperature Wafer Bonding Using Thin Film Parylene," IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), Vol. 14, No. 6, pp. 1347-1355, 12/2005

  32. J. Chae, B.H. Stark, and K. Najafi, "A micromachined Pirani gauge with dual heat sinks," IEEE Transactions on Advanced Packaging (IEEE Transactions on Components, Packaging and Manufacturing Technology, Part B: Advanced Packaging), Vol. 28, Issue 4, pp. 619-625, 11/2005

  33. W.C. Welch, III, J. Chae, and K. Najafi, "Transfer of metal MEMS packages using a wafer-level solder transfer technique," IEEE Transactions on Advanced Packaging (IEEE Transactions on Components, Packaging and Manufacturing Technology, Part B: Advanced Packaging), Vol. 28, Issue 4, pp. 643-649, 11/2005

  34. B. A. Parviz, K. Najafi, M. O. Muller, L. P. Bernal, P. D. Washabaugh, "Electrostatically-Driven Synthetic Microjet Arrays As A Propulsion Method For Micro Flight Part II: Microfabrication and Initial Characterization," J. Microsystem Technologies, Vol. 11, No. 12, pp. 1292-1300, 10/2005

  35. A. Parviz, K. Najafi, M. O. Muller, L. P. Bernal, P. D. Washabaugh, "Electrostatically-Driven Synthetic Microjet Arrays As A Propulsion Method For Micro Flight Part I: Principles Of Operation, Modeling, and Simulation," J. Microsystem Technologies, Vol. 11, No. 11, pp. 1214-1222, 10/2005

  36. T.J. Harpster, S.A. Nikles, M.R. Dokmeci, K. Najafi, "Long-Term Hermeticity and Biological Performance of Anodically Bonded Glass-Silicon Implantable Packages," IEEE Transactions on Device and Materials Reliability, Vol. 5, Issue 3, pp. 458-466, 09/2005

  37. P. Mohseni, K. Najafi, S. J. Eliades, and X. Wang, "Wireless multichannel biopotential recording using an integrated FM telemetry circuit," IEEE Trans. on Neural Systems and Rehabilitation Engineering, (see also IEEE Trans. on Rehabilitation Engineering), Vol. 13, Issue 3, pp. 263-271, 09/2005

  38. P. Mohseni and K. Najafi, "A 1.48-mW Low-Phase-Noise Analog Frequency Modulator for Wireless Biotelemetry," IEEE Trans. Biomedical Eng., Vol. 52, No. 5, pp. 938-942, 05/2005

  39. J. Chae, H. Kulah, K. Najafi, "A Monolithic Three-Axis Micro-g Micromachined Silicon Capacitive Accelerometer," IEEE Journal of Microelectromechanical Systems (JMEMS), Vol. 14, No. 2, pp. 235-242, 04/2005

  40. J. Chae, H. Kulah, and K. Najafi, "A CMOS-compatible high aspect ratio silicon-on-glass in-plane micro-accelerometer," J. Micromechanics and Microengineering, Vo. 15, No. 2, pp. 336-345, 02/2005

  41. M. Ghovanloo, K. Najafi, "A Compact Large Voltage-Compliance High Output Impedance Programmable Current Source for Implantable Microstimulators," IEEE Trans. Biomedical Engineering, Vol. 52, No. 1, pp. 97-105, 01/2005

  42. M. Ghovanloo, K. Najafi, "A Modular 32-site Wireless Neural Stimulation Microsystem," IEEE J. Solid-State Circuits, Vol. 39, No. 12, pp. 2457-2466, 12/2004

  43. Ghovanloo, K. Najafi, "A Wideband Frequency-Shift Keying Wireless Link for Inductively Powered Biomedical Implants," IEEE Trans. On Circuits and Systems I: Fundamental Theory and Applications, Vol. 51, No. 12, pp. 2374-2383, 12/2004

  44. M. Ghovanloo, K. Najafi, "Fully Integrated Wideband High-current rectifiers for Inductively Powered Devices," IEEE J. Solid-State Circuits, Vol. 39, No. 11, pp. 1976-1984, 11/2004

  45. C. Zhang, and K. Najafi, "Fabrication of Thick Silicon Dioxide Layers For Thermal Isolation," Journal of Micromechanics and Microengineering, Vol. 14, No. 6, pp. 769 – 774, 11/2004

  46. Y. Mei, J.S. Mitchell, G. Roientan Lahiji, and K. Najafi, "Wafer Bonding Technology For Vacuum Packaging Using Gold-Silicon Eutectic," Journal of Iranian Association for Electrical and Electronics Engineers (IAEEE), Vol.1, No.2, pp. 27-32, 09/2004

  47. J. Chae, H. Kulah, and K. Najafi, "An In-Plane High-Sensitivity, Low-Noise Micro-g Silicon Accelerometer with CMOS Readout Circuitry," IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), Vol. 13, No. 4, p 628-635, 08/2004

  48. S. Nikles, R.M. Bradley, S. Bledsoe, and K. Najafi, "Design and Testing of Conductive Polysilicon Beam Leads for Use in a High-Density Biomedical Connector," J. Micromechanics and Microengineering, Vol. 14, No. 7, pp. 957-968, 07/2004

  49. C. Zhang, and K. Najafi, "Fabrication of Thick Silicon Dioxide Layers For Thermal Isolation," Journal of Micromechanics and Microengineering, Vol. 14, Issue 6, pp. 769 – 774, 06/2004

  50. T. Lisby, S.A. Nikles, K. Najafi, O. Hansen, S. Bouwstra, J.A. Branebjerg, "Mechanical Characterization and Design of Flexible Silicon Microstructures," IEEE/ASME J. of Microelectromechanical Systems (JMEMS), Vol. 13, No. 3, pp. 452-464, 06/2004

  51. X. Zhu, D.S. Aslam, Y. Tang, B.H. Stark, K. Najafi, "The Fabrication of All-Diamond Packaging Panels With Built-In Interconnects for Wireless Integrated Microsystems," IEEE/ASME J. of Microelectromechanical Systems (JMEMS), Vol. 13, No. 3, pp. 396-405, 06/2004

  52. P. Mohseni and K. Najafi, "A Fully Integrated Neural Recording Amplifier With DC Input Stabilization," IEEE Transactions on Biomedical Engineering, Vol. 51, No. 5, pp. 832-837, 05/2004

  53. B. H. Stark and K. Najafi, "A Low Temperature Thin Film Electroplated Metal Vacuum Package," IEEE/ASME J. Micro Electro Mechanical Systems (JMEMS), Vol. 13, No. 2, pp. 147-157, 04/2004

  54. K.D. Wise, D.J. Anderson, J.F. Hetke, K, D.R. Kipke, K. Najafi, "Wireless implantable microsystems: high-density electronic interfaces to the nervous system," Proceedings of the IEEE, Vol. 92, Issue: 1, pp. 76-97, 01/2004

  55. Y. Shimatani, S. A. Nikles, K.Najafi, and R. M. Bradley, "Long-term recordings from afferent taste fibers," J. Physiology & Behavior, Vol. 80, Issues 2-3, pp. 309-315, 11/2003

  56. A. Selvakumar, and K. Najafi, "Vertical Comb Array Microactuators," IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), Volume: 12 Issue: 4, pp. 440-449, 08/2003

  57. N. Yazdi, A. Salian, and K. Najafi, "A High-Sensitivity Silicon Accelerometer with a Folded-Electrode Structure," IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), Vol. 12, No. 4, pp. 479-486, 08/2003

  58. B. H. Stark, M. R. Dokmeci, and K. Najafi, "Improving Corrosion-Resistance of Polysilicon Using Boron Doping and Self-Induced Galvanic Bias," IEEE Transactions on Advanced Packaging, Vol. 26, No. 3, pp. 295-301, 08/2003

  59. K. Ma, Y. Gianchandani, and K. Najafi, "The Active Dissolved Wafer Process (ADWP) for Integrating Single-Crystal Silicon MEMS with CMOS," J. of Semiconductor Technology and Science, Vol. 2, No. 4, pp. 273-279, 12/2002

  60. C. Huang, A. Naguib, E. Soupos, and K. Najafi, "A Silicon Micromachined Microphone For Fluid Mechanics Research," Journal of Micromechanics and Microengineering, Vol. 12, No. 6, pp. 767-774, 11/2002

  61. Y. T. Cheng, W. T. Hsu, L. Lin, C. T. Nguyen, K. Najafi, "Vacuum Packaging Using Localized Aluminum/Silicon-to-Glass Bonding," IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), Vol. 11, No. 5, pp. 556-565, 10/2002

  62. C. Huang, C. Christophorou, K. Najafi, A. Naguib and H. Nagib, "An Electrostatic Microactuator System in High Speed Jets," IEEE/ASME Journal Of Micro Electro Mechanical Systems (JMEMS), Vol. 11, No. 3, pp. 222-235, 06/2002

  63. T. J. Harpster, S. Hauvespre, M. Dokmeci, and K. Najafi, "A Passive Humidity Monitoring System for In-Situ Remote Wireless Testing of Micropackages," IEEE/ASME J. Micro Electro Mechanical Systems (JMEMS), Vol. 11, No. 1, pp. 61-67, 02/2002

  64. T. J. Harpster, B. Stark, and K. Najafi, "A Passive Wireless Integrated Humidity Sensor," Sensors and Actuators A: Physical, Volume 95, Issues 2-3, pp. 100-107, 01/2002

  65. O. Akar, T. Akin, And K. Najafi, "A Wireless Batch Sealed Absolute Capacitive Pressure Sensor," Sensors and Actuators A: Physical, 95 (1), pp. 29-38, 12/2001

  66. J. W. Weigold, K. Najafi, and S. W. Pang, "Design and Fabrication of Submicrometer, Single Crystal Si Accelerometer," IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), Vol. 10, No. 4, pp. 518-524, 12/2001

  67. C. Huang, K. Najafi, "Fabrication of Ultra-Thin P++ Silicon Microstructures Using Ion-Implantation and Boron Etch-Stop," IEEE/ASME Journal Of Microelectromechanical Systems (JMEMS), Vol. 10, No. 4, pp 532-537, 12/2001

  68. B. Ziaie, and K. Najafi, "An Implantable Microsystem for Tonometric Blood Pressure Measurement," Journal of Biomedical Microdevices, Vol. 3, pp. 285-292, 12/2001

  69. T. Cheng, L. Lin, K. Najafi, "A Hermetic Glass-Silicon Package Formed Using Localized Aluminum/Silicon-Glass Bonding," IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), Vol. 10, No. 3, pp. 392-399, 09/2001

  70. D. L. Zealear, K. C. Garren, R. Rodriguez, J. Reyes, S. Huang, M. Dokmeci, K. Najafi, "The biocompatibility, positional stability, and potential application of an injectable wireless micromachined microstimulator for reanimation of the paralyzed larynx," IEEE Trans. On Biomedical Engineering (TBME), Vol. 48, No.8, pp. 890-897, 08/2001

  71. F. Ayazi, and K. Najafi, "A HARPSS polysiliocn Vibrating Ring Gyroscope," IEEE/ASME J. Micro Electro Mechanical Systems (JMEMS), Vol. 10, No. 2, pp. 169-179, 06/2001

  72. P. Mohseni, K. Nagarajan, B. Ziaie, K. Najafi, and S.B. Crary, "An Ultralight Biotelemetry Biotelemetry Backpack for Recording EMG Signals in Moths," IEEE Transactions on Biomedical Engineering, Vol. 48, pp. 734-737, 06/2001

  73. M. Dokmeci and K. Najafi, "A High-Sensitivity Polyimide Capacitive Relative Humidity Sensor For Monitoring Anodically Bonded Hermetic Micropackages," IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), Vol.10, No.2, pp. 197-204, 06/2001

  74. A. Selvakumar, N. Yazdi, K. Najafi, "A Wide-Range Micromachined Threshold Accelerometer Array and Interface Circuit," Journal of Micromechanics and Microengineering, Vol. 11, No. 2, pp. 118-125, 03/2001

  75. B. Ziaie, S.C. Rose, M.D. Nardin, and K. Najafi, "A Self-Oscillating, Detuning-Insensitive Class-E Transmitter for Implantable Microsystems," IEEE Transactions on Biomedical Engineering, Vol. 48, No. 3, pp. 397-399, 03/2001

  76. F. Ayazi, and K. Najafi, "High Aspect-Ratio Polysilicon Micromachining Technology," Sensors and Actuators, Vol 87, No. 1-2, pp. 46-51, 12/2000

  77. N. Yazdi, K. Najafi, "An All-Silicon Single-Wafer Micro-g Accelerometer with a Combined Surface and Bulk Micromachining Process," IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), Vol. 9, No. 4, pp. 1-8., 12/2000

  78. B. Ziaie, and K. Najafi, "A Generic Micromachined Silicon Platform for High-Performance RF Passive Components," J. Micromachanics & Microengineering, Vol. 10, No. 3, pp. 365-371, 09/2000

  79. Y. Gianchandani, H. Kim, M. Shinn, B. Ha, B. Lee, K. Najafi, and C.S. Song, "A Fabrication Process for Integrating polysilicon Microstructures with Post-Processed CMOS Circuits," J. Micromachanics and Microengineering, Vol. 10, No. 3, pp. 380-386, 09/2000

  80. F. Ayazi, and K. Najafi, "High Aspect-ratio Combined Poly and Single-Crystal (HARPSS) MEMS Technology," IEEE J. Micro Electro Mechanical Systems, Vol. 9, No. 3, pp. 288-294, 09/2000

  81. N. Yazdi, A. Mason, K. Najafi, and K.D. Wise, "A Generic Interface Chip for Capacitive Sensors in Low-Power Multi-Parameter Microsystems," Sensors & Actuators, A: Physical, 84 (3) pp. 351-361, 09/2000

  82. Y.T. Cheng, Liwei Lin and K. Najafi, "Localized Silicon Fusion and Eutectic Bonding for MEMS Fabrication and Packaging," IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), Vol. 9, No. 1, pp. 3-8, 03/2000

  83. T. Akin, B. Ziaie, S. A. Nikles, and K. Najafi, "A Modular Micromachined High-Density Connector for Implantable Biomedical Systems," IEEE Transactions on Biomedical Engineering, Vol. 46, No. 4, pp. 471-480, 04/1999

  84. L. Lin, Y.T. Cheng, and K. Najafi, "Formation of Silicon-Gold Eutectic Bond Using Localized Heating Method," Japanese Journal of Applied Physics, Part II, Vol. 11B, pp. 1412-1414, 11/1998

  85. N. Yazdi, F. Ayazi, and K. Najafi, "Micromachined Inertial Sensors," Special Issue of IEEE Proceedings, Vol. 86, No. 8, pp. 1640-1659, 08/1998

  86. A.J. Mason, N. Yazdi, A.V. Chavan, K. Najafi, and K.D. Wise, "A Generic Multi-Element Microsystem For Portable Wireless Applications," Special Issue of IEEE Proceedings, Vol. 86, No. 8, pp. 1733-1746, 08/1998

  87. A. Selvakumar, F. Ayazi, and K. Najafi, "A High Sensitivity Z-Axis Capacitive Silicon Microaccelerometer With A Torsional Suspension," IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), Vol. 7, No. 2, pp. 192-200, 06/1998

  88. Y. Gianchandani, M. Shinn, and K. Najafi, "Impact of High Thermal Budget Anneals on Polysilicon as a Micromechanical Material," IEEE/ASME J. Micro Electro Mechanical Systems (JMEMS), Vol. 7, Issue 1, pp. 102-105, 03/1998

  89. C. Yeh, and K. Najafi, "CMOS Interface Circuitry For A Low-Voltage Micromachined Tunneling Accelerometer," IEEE/ASME J. Micro Electro Mechanical Systems (JMEMS), Vol. 7, Issue 1, pp. 6-15, 03/1998

  90. T. Akin, K. Najafi, and R.M. Bradley, "A Wireless Implantable Multichannel Digital Neural Recording System for a Micromachined Sieve Electrode," IEEE J. Solid-State Circuits, Vol. 33, Issue 1, pp. 109-118, 01/1998

  91. Y. Gianchandani, and K. Najafi, "A Silicon Micromachined Scanning Thermal Profiler with Integrated Elements for Sensing and Actuation," IEEE Trans. Electron Devices, Vol. 44, No. 11, pp. 1857-1868, 11/1997

  92. C. Yeh, and K. Najafi, "A Low-Voltage Tunneling Based Silicon Microaccelerometer," IEEE Transactions on Electron Devices, Vol. 44, No. 11, pp. 1875-1882, 11/1997

  93. B. Ziaie, M.D. Nardin, A.R. Coghlan, and K. Najafi, "A Single-Channel Implantable Microstimulator for Functional Neuromuscular Stimulation," IEEE Trans. on Biomedical Engineering, Vol. BME-44, No. 10, 10/1997

  94. R.M. Bradley, X. Cao, T. Akin, and K. Najafi, "Long-Term Chronic Recordings From Peripheral Sensory Fibers Using a Sieve Electrode," J. Neuroscience Methods, 73, Issue 2, pp. 177-186, 05/1997

  95. J.S. Walter, L. Riedy, W. King, J.S. Wheeler, K. Najafi, C.L. Anderson, T.M. Gudausky, and M. Dokmeci, "Short-Term Bladder-Wall Response to Implantation of Microstimulators," J. of Spinal Cord Medicine, Vol. 20, No. 3, pp. 319-323, 01/1997

  96. B. Ziaie, J. A. V. Arx, M.R. Dokmeci, and K. Najafi, "A Hermetic Glass-Silicon Micropackage with High-Density On-Chip Feedthroughs for Sensors & Actuators," IEEE Journal of Microelectromechanical Systems, Vol. 5, No. 3, pp. 166-179, 09/1996

  97. Y. Gianchandani, and K. Najafi, "Bent-Beam Strain Sensors," IEEE/ASME J. Micro Electro Mechanical Systems (JMEMS), pp. 52-58, Vol. 5, No. 1, 03/1996

  98. W.G. Baer, K. Najafi, K.D. Wise, and R.S. Toth, "A 32-Element Micromachined Thermal Imager with On-Chip Multiplexing," Sensors and Actuators, Vol. 48, No. 1, pp. 47-54, 01/1995

  99. K. Najafi, "Solid-State Microsensors for Cortical Nerve Recordings," IEEE Eng. in Medicine and Biology Magazine, pp. 375-387, 06/1994

  100. J.F. Hetke, J.L. Lund, K. Najafi, K.D. Wise, and D.J. Anderson, "Silicon Ribbon Cables for Chronically Implantable Microelectrode Arrays," IEEE Trans. on Biomedical Engineering, Vol. 41, No. 4, pp. 314-321, 04/1994

  101. T. Akin, K. Najafi, Richard H. Smoke, Robert M. Bradley, "A Micromachined Silicon Sieve Electrode for Nerve Regeneration Applications," IEEE Trans. Biomedical Engineering, Vol. 41, No. 4, pp. 305-313, 04/1994

  102. R. Aroca, H. Bolourchi, D. Battisti, and K. Najafi, "Gas Adsorption and Electrical Properties of Two Langmuir-Blodgett Layers of Cerium Bisphthalocyanine," Langmuir Journal of the American Chemical Society, 9 (11), pp. 3138-3141, 11/1993

  103. S. Bouwstra, J. van Rooijen, H.A.C. Tilmans, A. Selvakumar, and K. Najafi, "Thermal-Base Drive for Micromechanical Resonators Employing Deep-Diffusion Bases," Sensors and Actuators, A, 37-38, pp. 38-44, 01/1993

  104. J. Ji, S.T. Cho, Y. Zhang, K. Najafi, K.D. Wise, "An Ultra-miniature CMOS Pressure Sensor for a Multiplexed Cardiovascular Catheter," IEEE Trans. on Electron Devices, Vol. ED-39, No. 10, pp. 2260-2267, 10/1992

  105. Y. Gianchandani, K. Najafi, "Batch-Assembled Multi-Level Micromachined Mechanisms from Bulk Silicon," Journal of Micromechanics and Microengineering, Vol. 2, No. 2, pp. 80-85, 06/1992

  106. Y. Gianchandani, K. Najafi, "A Bulk Silicon Dissolved Wafer Process for Microelectromechanical Devices," IEEE/ASME J. Micro Electro Mechanical Systems (J-MEMS), Vol. 1, No. 2, pp. 77-85, 06/1992

  107. S.T. Cho, K. Najafi, C.L. Lowman, K.D. Wise, "An Ultrasensitive Silicon Pressure-Based Microflow Sensor," IEEE Trans. Electron Devices, Vol. ED-39, No. 4, pp. 825-835, 04/1992

  108. S.T. Cho, K. Najafi, K.D. Wise, "Internal Stress Compensation and Scaling in Ultrasensitive Silicon Pressure Sensors," IEEE Trans. Electron Devices, Vol. ED-39, No. 4, pp. 836-842, 04/1992

  109. R.M. Bradley, R.H. Smoke, T. Akin, K. Najafi, "Functional Regeneration of Glossopharyngeal Nerve Through Micromachined Sieve Electrode Arrays," Brain Research, 594, pp. 84-90, 01/1992

  110. K.D. Wise, K. Najafi, "Microfabrication Techniques for Integrated Sensors and Microsystems," Science, Vol. 254, pp. 1335-1342, 11/1991

  111. K. Najafi, "Smart Sensors," Micromech. & Microeng., 1, pp. 86-102, 06/1991

  112. Jin Ji, K. Najafi, Kensall Wise, "A Low-Noise Demultiplexing System Active Multichannel Microelectrode Arrays," IEEE Transactions of Biomedical Engineering, Vol. 38, #1, 01/1991

  113. K. Suzuki, K. Najafi, K.D. Wise, "A 1024-Element High-Performance Silicon Tactile Imager," IEEE Trans. Electron Devices, Vol. ED-37, No. 8, pp. 1852-1860, 08/1990

  114. K. Najafi, J.F. Hetke, "Strength Characterization of Silicon Microprobes in Neurophysiological Tissues," IEEE Trans. on Biomedical Engineering, Vol. BME-37, No. 5, pp. 474-481, 05/1990

  115. S.J. Tanghe, K. Najafi, K.D. Wise, "A Planar IrO Multichannel Stimulating Electrode for Use in Neural Prosthesis," Sensors and Actuators, pp. 464-467, B1, 01/1990

  116. J. Ji, K. Najafi, K.D. Wise, "A Scaled Electronically-Configurable Multichannel Recording Array," Sensors and Actuators, pp. 589-591, A21-A23, 01/1990

  117. K. Suzuki, K. Najafi, K.D. Wise, "Process Alternatives and Scaling Limits for High-Density Silicon Tactile Imagers," Sensors and Actuators, pp. 915-918, A21-A23, 01/1990

  118. K. Najafi, "Integrated Sensors in Biological Environments," Sensors and Actuators, pp. 453-459, B1, 01/1990

  119. J.F. Hetke, K. Najafi, K.D. Wise, "Flexible Miniature Ribbon Cables for Long-Term Connection to Implantable Sensors," Sensors and Actuators, pp. 999-1002, A21-A23, 01/1990

  120. K. Najafi, J. Ji, K.D. Wise, "Scaling Limitations of Silicon Multichannel Recording Probes," IEEE Trans. Biomed. Eng., Vol. BME-37, No. 1, pp. 1-11, 01/1990

  121. K. Najafi, K. Suzuki, "Measurement of Fracture Stress, Young's Modulus, and Intrinsic Stress of Heavily Boron-Doped Silicon Microstructures," J. Thin Solid Films, 181, pp. 251-258, 12/1989

  122. D.J. Anderson, K. Najafi, S.J. Tanghe, D.A. Evans, K.L. Levy, J.F. Hetke, X. Xue, J.J. Zappia, K.D. Wise, "Batch-Fabricated Thin-Film Electrodes for Stimulation of the Central Auditory System," IEEE Trans. Biomed. Eng., Vol. BME-36, No. 7, pp. 693-704, 07/1989

  123. K. Najafi, K.D. Wise, "An Implantable Multielectrode Array with On-Chip Signal Processing," IEEE J. Solid-State Ckts., Vol. SC-21, No. 6, pp. 1035-1044, 12/1986

  124. S.L. BeMent, D.J. Anderson, K.D. Wise, K. Najafi, K.L. Drake, "Solid-State Electrodes for Multiplexed Multichannel Intracortical Neuronal Recording," IEEE Trans. Biomed. Eng., Vol. BME-33, No. 2, pp. 230-241, 02/1986

  125. K. Najafi, K.D. Wise, T. Mochizuki, "A High-Yield IC-Compatible Multichannel Recording Array," IEEE Trans. Electron Devices, Vol. ED-32, No. 7, pp. 1206-1211, 01/1985

Conference Publications

  1. E. E. Aktakka, J.-K. Woo, D. Egert, R. Gordenker, K. Najafi, "A Micro Vibratory Stage for on Chip Physical Stimulation and Calibration of MEMS Gyroscopes," Proc. 1st IEEE Int. Symposium on Inertial Sensors and Systems (ISISS), Laguna Beach, CA, pp. 151-152, 02/2014

  2. J.-K. Woo, J. Cho, C. Boyd, and K. Najafi,, "Whole-Angle-Mode Micromachined Fused-Silica Birdbath Resonator Gyroscope (WA-BRG)," (MEMS) IEEE International Conference on Micro Electro Mechanical Systems, San Francisco, CA, 01/2014

  3. K. Kumar, A. Besharatian, R. L. Peterson, L. P. Bernal, and K. Najafi,, "Theoretical & Experimental Analysis of Active Valve Pumping for High Flow Rate Applications," ASME IMECE - International Mechanical Engineering Congress & Exposition, , San Diego, CA, 11/2013

  4. E.E. Aktakka, R.L. Peterson, K. Najafi, "A 6-DOF Piezoelectric Micro Vibratory Stage Based on Multi-Axis Distributed-Electrode Excitation of PZT/SI Unimorph T-Beams," Transducers, Barcelona, Spain, pp. 1583-1586, 06/2013

  5. A. Besharatian, K. Kumar, R. L. Peterson, L. P. Bernal, K. Najafi, "Valve-Only Pumping in Mechanical Gas Micropumps," Transducers, Barcelona, Spains, pp. 2640-2643, 06/2013

  6. Z. Cao, Y. Yuan, G. He, R. L. Peterson, K. Najafi, "Fabrication of Multi-Layer Vertically Stacked Fused Silica Microsystems," Transducers, Barcelona, Spain, pp. 810-813, 06/2013

  7. J. Cho, J.-K. Woo, J. Yan, R. L. Peterson, K. Najafi, "A High-Q Birdbath Resonator Gyroscope (BRG)," Transducers, Barcelona, Spain, pp. 1847-1850, 06/2013

  8. M. Sadeghi, R. L. Peterson, K. Najafi, "A 2-D Directional Air Flow Sensor Array Made Using Stereolithography and MEMS Micro-Hydraulic Structures," Transducers, Barcelona, Spain, pp. 722-725, 06/2013

  9. B. Shiari, K. Najafi, "Surface Effect Influence on the Quality Factor of Microresonators," Transducers, Barcelona, Spain, pp. 1715-1718, 06/2013

  10. S. Y. Yee, R. L. Peterson, L. P. Bernal, K. Najafi, "High-Speed Air Microjet Arrays Produced Using Acoustic Streaming For Micro Propulsion," Transducers, Barcelona, Spain, pp. 1595-1598, 06/2013

  11. S. Y. Yee, R. L. Peterson, L. P. Bernal, K. Najafi, "Highly-Reliable Electrostatic Actuator Using Filleted Electrode Made with Photoresist Solvent Reflow," Transducers, Barcelona, Spain, pp. 1617-1620, 06/2013

  12. M. Sadeghi, R. L. Peterson, K. Najafi, "High-Speed Electrostatic Micro-Hydraulics for Sensing and Actuation," IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 1191-1194, 01/2013

  13. Z. Z. Wu, A. Peczalski, V. A. Thakar, Z. Cao, Y. Yuan, G. He, R. L. Peterson, M. Rais-Zadeh, K. Najafi, "Piezoelectrically Transduced High-Q Silica Micro Resonators," IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Tapei, Taiwan, pp. 122-125, 01/2013

  14. J. Cho, J. Yan, J. A. Gregory, H. Eberhart, R. L. Peterson, K. Najafi, "High-Q Fused Silica Birdbath and Hemispherical 3-D Resonators Made by Blow Torch Molding," IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Tapei, Taiwan, pp. 177-180, 01/2013

  15. D. Egert, J. Kaplan, R. L. Peterson, K. Najafi, "Iodine-Treated Starch as Easy-to-use, Biodegradable Material with Controllable Swelling and Stiffening Properties," IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Tapei, Taiwan, pp. 217-220, 01/2013

  16. Y. Tang, R. L. Peterson, K. Najafi, "Technology for Fabricating Dense 3-D Microstructure Arrays for Biomimetic Hair-Like Sensors," IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Tapei, Taiwan, pp. 355-358, 01/2013

  17. Z. Cao, B. VanDerElzen, K. Owen, J. Yan, G. He, R. L. Peterson, D. Grimard, K. Najafi, "DRIE of Fused Silica," IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Tapei, Taiwan, pp. 361-364, 01/2013

  18. E. E. Aktakka, R. L. Peterson, K. Najafi, "A 3-DOF Piezoelectric Micro Vibratory Stage Based on Bulk-PZT/Silicon Crab-Leg Suspensions," IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Tapei, Taiwan, pp. 576-579, 01/2013

  19. M. Sadeghi, K. Dowling, R. L. Peterson, K. Najafi, "High Sensitivity, High Density Micro-Hydraulic Force Sensor Array Utilizing Stereo-Lithography Fabrication Technique," IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Tapei, Taiwan, pp. 673-676, 01/2013

  20. E.E. Aktakka, C.E. Smith, N. Ghafouri, R.L. Peterson, M.M. Hussain, K. Najafi, "Heterogeneous Integration of Co-Evaporated Bismuth/Antimony Telluride Thin Films Based Thermoelectric Harvesters on FinFET CMOS Chip," PowerMEMS, Atlanta, GA, pp. 97-100, 12/2012

  21. J. McCullagh, R. L. Peterson, T. Galchev, R. Gordenker, Y. Zhang, J. Lynch, and K. Najafi, "Short-Term and Long-Term Testing of a Vibration Harvesting System for Bridge Health Monitoring," PowerMEMS, Atlanta, GA, pp. 109-112, 12/2012

  22. K. Kumar, A. Besharatian, L. P. Bernal, R. L. Peterson, and K. Najafi, "A Multiphysics Reduced Order Model of Valve Pumping in a 4-Stage Vacuum MicroPump," ASME 2012 International Mechanical Congress & Exposition (IMECE 2012), Houston, Texas, Proceedings, 11/2012

  23. K. Najafi, "Biomimetic Hair Sensors: Utilizing the Third Dimension," Sensors 2012, Taipei, Taiwan, Plenary, 10/2012

  24. S. Y. Yee, R. L. Peterson, L. P. Bernal, K. Najafi, "High-frequency Large-deflection Electrostatic Diaphragm Actuators with Maximized Volume Displacement," Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head), Hilton Head Island, SC, pp. 393-396, 06/2012

  25. E. E. Aktakka, R. L. Peterson, K. Najafi, "Wet Etching & Uniform Wafer-level Thinning of Bulk Piezoelectric Ceramics on Silicon," Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head), Hilton Head Island, SC, pp. 256-259, 06/2012

  26. J. A. Gregory, J. Cho, K. Najafi, "Characterization and Control of a High-Q MEMS Inertial Sensor using Low-Cost Hardware," IEEE/ION PLANS 2012 , Myrtle Beach, SC, 05/2012

  27. J. A. Gregory, J. Cho, K. Najafi, "Novel Mismatch Compensation Methods for Rate-integrating Gyroscopes," IEEE/ION PLANS 2012 , Myrtle Beach, SC, 05/2012

  28. M. M. Sadeghi, R. L. Peterson, K. Najafi, "Hair-based Sensors for Micro-autonomous Systems," SPIE Defense, Security, and Sensing 2012, Baltimore, MD, 83731L-1-8, 04/2012

  29. A. Besharatian, K. Kumar, R. L. Peterson, L. P. Bernal, K. Najafi, "A Scalable, Modular, Multi-stage, Peristaltic, Electrostatic Gas Micro-pump," IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Paris, France,, pp. 1001-1004, 01/2012

  30. K. J. Owen, B. VanDerElzen, R. L. Peterson, K. Najafi, "High Aspect Ratio Deep Silicon Etching," IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Paris, France,, pp. 251-254, 01/2012

  31. J. Y. Cho, J. A. Gregory, K. Najafi, "High-Q, 3KHz Single-crystal-silicon Cylindrical Rate-integrating Gyro (CING)," IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Paris, France,, pp. 172-175, 01/2012

  32. M. M. Sadeghi, R. L. Peterson, K.Najafi, "Micro-Hydraulic Structure for High Performance Bio-Mimetic Air Flow Sensor Arrays," IEEE International Electron Devices Meeting (IEDM’11), Washington, DC, pp. 673-676, 12/2011

  33. E.E. Aktakka, R.L. Peterson, K. Najafi, "Multi-Layer PZT Stacking Process for Piezoelectric Bimorph Energy Harvesters," 11th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS'11), Seoul, Republic of Korea, pp. 139-142, 11/2011

  34. A. Borna, K. Najafi, "A Low Power, Low Voltage, User-Programmable, Wireless Interface for Reliable Neural Recording," IEEE Biomedical Circuits and Systems Conference, San Diego CA, 11/2011

  35. N. Ghafouri, R.L. Peterson, C. Uher, and K. Najafi, "Effect of Substrates on Co-evaporated Bi2Te3 and Sb2Te3 Thin Films," 30th International Conference on Thermoelectrics, Traverse City MI, 07/2011

  36. N. Ghafouri, R.L. Peterson, C. Uher, and K. Najafi, "Thermoelectric Properties Optimization of Thermally Co-evaporated P-type (Bi0.25Sb0.75)2Te3 Thin Films," 30th International Conference on Thermoelectrics, Traverse City MI, 07/2011

  37. J. Gregory, J. Cho, K. Najafi, "MEMS Rate and Rate-integrating Gyroscope Control with Commercial Software Defined Radio Hardware," 16th International Conference on Solid-State Sensors, Actuators, and Microsystems (IEEE Transducers), Beijing China, pp. 2394-2397, 06/2011

  38. K. Najafi, T. Galchev, E.E. Aktakka, R.L. Peterson, J. McCullagh, "Microsystems for Energy Harvesting," 16th International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers'11), Beijing, China, pp. 1845-1850, 06/2011

  39. D. Egert and K. Najafi, "Parylene Microprobes with Engineered Stiffness and Shape for Improved Insertion," 16th International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers'11), Beijing, China, pp. 198-201, 06/2011

  40. D. Egert, R.L. Peterson, K. Najafi, "New Class of Chronic Recording Multichannel Neural Probes with Post-Implant Self-Deployed Satellite Recording Sites," 16th International Conference on Solid-State Sensors, Actuators, and Microsystems (IEEE Transducers), Beijing China, pp. 958-961, 06/2011

  41. E.E. Aktakka, R.L. Peterson K. Najafi, "Thinned PZT on SOI Process and Design Optimization for Piezoelectric Inertial Energy Harvesting," 16th International Conference on Solid-State Sensors, Actuators, and Microsystems (IEEE Transducers), Beijing China, pp. 1649-1652, 06/2011

  42. T. Galchev, J. McCullagh, R.L. Peterson, and K. Najafi, "Harvesting Traffic Induced Bridge Vibrations," 16th International Conference on Solid-State Sensors, Actuators, and Microsystems (IEEE TRANSDUCERS), Beijing, China, pp. 1661-1664, 06/2011

  43. J. Cho, J.A. Gregory, K. Najafi, "Single-Crystal-Silicon Vibratory Cylindrical Rate Integrating Gyroscope (CING)," 16th International Conference on Solid-State Sensors, Actuators, and Microsystems (IEEE TRANSDUCERS), Beijing, China, pp. 2813-2816, 06/2011

  44. T. Galchev, J. McCullagh, R. L. Peterson, K. Najafi, A. Mortazawi, "Energy Harvesting of Radio Frequency and Vibration Energy to Enable Wireless Sensor Monitoring of Civil Infrastructure," Proc. SPIE Smart Structures/NDE, San Diego, CA, v 7983, p. 798314, 03/2011

  45. E.E. Aktakka, R.L. Peterson, K. Najafi, "A Self-Supplied Inertial Piezoelectric Energy Harvester with Power Management IC," IEEE International Solid-State Circuits Conference (ISSCC’11), San Francisco, USA, pp.120-121, 02/2011

  46. E.E. Aktakka, R.L. Peterson, K. Najafi, "A CMOS-Compatible Piezoelectric Vibration Energy Scavenger Based on the Integration of Bulk PZT Films on Silicon," IEEE International Electron Devices Meeting (IEDM’10), San Francisco, USA, pp. 31.5.1-31.5.4, 12/2010

  47. M. Kurata, J.P. Lynch, T. Galchev, M.P. Flynn, P. Hipley, V. Jacob, G. van der Linden, A. Mortazawi, K. Najafi, R. L. Peterson, L.-H. Sheng, D. Sylvester, E. Thometz, , "Two-Tiered Self-Powered Wireless Monitoring System Architecture for Bridge Health Management," SPIE Smart Structures and Materials, San Diego CA, 03/2010

  48. T. Galchev, E.E. Aktakka, H. Kim and K. Najafi, "A Piezoelectric Frequency-increased Power Generator for Scavenging Low-frequency Ambient Vibration," IEEE Int. Conference on Micro Electro Mechanical Systems (MEMS), Hong Kong, pp. 1203-1206, 01/2010

  49. M. Sadeghi, H. Kim and K. Najafi, "Electrostatically Driven Micro-Hydraulic Actuator Arrays," IEEE Int. Conference on Micro Electro Mechanical Systems (MEMS), Hong Kong, pp. 15-18, 01/2010

  50. S-H. Lee, J. Mitchell, W. Welch III, S. Lee, K. Najafi, "Wafer-level vacuum/hermetic packaging technologies for MEMS," SPIE MEMS-MOEMS Symposium, San Francisco CA, Vol. 7592, 759205, 01/2010

  51. K. Najafi, "Wireless Integrated Microsystems for Neural Prostheses," 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Xiamen, China, 01/2010

  52. H. Kim, K. Najafi, and J.W. Park, "Micro hydraulic piston arrays for hydraulic actuator array for pneumatic-less portable large-scale microfluidic systems," 5th Conf. of NanoUtah (NANO UTAH ’09), Salt Lake City UT, 10/2009

  53. T. Galchev, H. Kim, and K. Najafi, "A Parametric Frequency Increased Power Generator for Scavenging Low-Frequency Ambient Vibrations," Eurosensors XXIII, Lausanne, Switzerland, 09/2009

  54. A. Borna, T. Marzullob, G. Gage, K. Najafi, "A Small, Light-Weight, Low-Power, Multichannel Wireless Neural Recording Microsystem," The 31st Annual International IEEE EMBS Conference, Minneapolis MN, pp. 5413-5416, 09/2009

  55. T. V. Galchev, H. Kim, and K. Najafi, "Non-Resonant Bi-Stable Frequency- Increased Power Scavenger From Low Frequency Ambient Vibration," IEEE International Conference on Solid-State Sensors and Actuators (Transducers 2009), Denver CO, pp. 632–635, 06/2009

  56. A. Gross, G. S. Hwang, B. Huang, H. Yang, N. Ghafouri, H. Kim, C. Uher, M. Kaviany, and K. Najafi, "High- Performance Micro Scale Thermoelectric Cooler: An Optimized 6-Stage Cooler," IEEE International Conference on Solid-State Sensors and Actuators (Transducers 2009), Denver CO, pp. 2413–2416, 06/2009

  57. S. Lee, S. Y. Yee, A. Besharatian, H. Kim, L. P. Bernal, and K. Najafi, "Adaptive Gas Pumping by Controlled Timing of Active Microvalves in Peristaltic Micropumps," IEEE International Conference on Solid-State Sensors and Actuators (Transducers 2009), Denver CO, pp. 2294–2297, 06/2009

  58. J. S. Mitchell and K. Najafi, "A Detailed Study of Yield and Reliability for Vacuum Packages Fabricated in a Wafer-Level Au-Si Eutectic Bonding Process," IEEE International Conference on Solid-State Sensors and Actuators (Transducers 2009), Denver CO, pp. 841–844, 06/2009

  59. E. E. Aktakka, H. Kim, and K. Najafi, "Wafer Level Fabrication of High Performance MEMS Using Bonded and Thinned Bulk Piezoelectric Substrates," IEEE International Conference on Solid-State Sensors and Actuators (Transducers 2009), Denver CO, pp. 849–852, 06/2009

  60. Lynch, J. P., Kamat, K., Li, V. C., Flynn, M. P., Sylvester, D., Najafi, K., Gordon, T., Lepech, M., Emami-Naeini, A., Krimotat, A., Ettouney, M., Alampalli, S., and Ozdemir, T., "Overview of a Cyber-enabled Wireless Monitoring System for the Protection and Management of Critical Infrastructure Systems," SPIE Smart Structures and Materials, San Diego CA, 03/2009

  61. S. -H. Lee, J. Cho, S. W. Lee, M. F. Zaman, F. Ayazi, and K. Najafi, "A Low-Power Oven-Controlled Vacuum Package Technology For High-Performance MEMS," IEEE Int. Conference on Micro Electro Mechanical Systems (MEMS), Sorrento, Italy, pp. 753-756, 01/2009

  62. H. Kim, and K. Najafi, "An Electrically-Driven, Large-Deflection, High-Force Micro Piston Hydraulic Actuator Array For Large-Scale Microfluidic Systems," IEEE Int. Conference on Micro Electro Mechanical Systems (MEMS), Sorrento, Italy, pp. 483-486, 01/2009

  63. N. Ghafouri, H. Kim, M.Z. Atashbar, K. Najafi, "A micro thermoelectric energy scavenger for a hybrid insect," 2008 IEEE International Sensors Conference, Italy, pp. 1249 – 1252, 10/2008

  64. D. Egert, H. Kim, and K. Najafi, "Characterization of Parylene bonding for vacuum packaging," Int. Conf. on Solid-State Sensors and Actuators, EUROSENSORS (EUROSENSORS 2008), Dresden, Germany, 09/2008

  65. E. Romero, T. Galchev, E. Aktakka, N. Ghafouri, H. Kim, M. Neuman, K. Najafi, and R. Warrington, "Micro Energy Scavengers," Int. Conference on Commercialization of Micro and Nano Systems (COMS 2008), Puerto Vallarta, 09/2008

  66. E.E. Aktakka, H. Kim, M., and K. Najafi, "Mechanical Energy Scavenging from Flying Insects," Hilton Head Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head Island SC, pp.382-383, 06/2008

  67. K. Najafi, "Wireless implantable microsystems for neural recording and stimulation," 2008 Joint 6th International IEEE Northeast Workshop on Circuits and Systems and TAISA Conference, NEWCAS-TAISA 2008, Montreal, Canada, pp. iv-iv, 06/2008

  68. A. Gross, G-S Hwang, C. Lawrence, S-W Lee, H. Kim, C. Uher, M. Kaviany, K. Najafi, "A Multistage In-Plane Micro-Thermoelectric Cooler," , IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS), Tucson AZ, pp. 840-843, 01/2008

  69. Warren C. Welch III and K. Najafi, "Gold-Indium Transient Liquid Phase (TLP) Wafer Bonding For MEMS Vacuum Packaging," IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS), Tucson AZ, pp. 806-809, 01/2008

  70. H. Kim, S. Lee, and K. Najafi, "High-force liquid-gap electrostatic hydraulic micro actuators," . 11th Int. Conf. on Miniaturized Systems for Chemistry and Life Sciences (µTAS ’07), Paris, France, Vol. 2, pp. 1735-1737, 10/2007

  71. K. Najafi, "Packaging of Implantable Microsystems," IEEE Int. Sensors Conference, Atlanta GA, 10/2007

  72. S.W. Yoon, S.W. Lee, N.C. Perkins, K. Najafi, "Vibration Sensitivity of MEMS Tuning Fork Gyroscopes," IEEE Int. Sensors Conference, Atlanta GA, pp. 115-119, 10/2007

  73. J.S. Mitchell, J.M. Giachino and K. Najafi, "Wafer Level Vacuum/Hermetic Packaging of MEMS Devices," Sensors Expo and Conference, Rosemont IL, 06/2007

  74. E.T. Zellers, S. Reidy, R.A. Veeneman, R. Gordenker, W.H. Steinecker, G.R. Lambertus, H. Kim, J.A. Potkay, M.P. Rowe, Q. Zhong,C. Avery, H.K. L. Chan, R.D. Sacks, K. Najafi, K.D. Wise, "An Integrated Micro-Analytical System For Complex Vapor Mixtures," Int. Conf. on Solid-State Sensors, Actuators, and Microsystems (Transducers '07), Lyon, France, Vol. 2, pp. 1491-1496 (3A3.1), 06/2007

  75. A.M. Sodagar, G. E. Perlin, Y. Yao, K. D. Wise, K. Najafi, "An Implantable Microsystem for Wireless Multi-Channel Cortical Recording," Int. Conf. on Solid-State Sensors, Actuators, and Microsystems (Transducers '07), Lyon, France, Vol. 1, pp. 69-76 (1C4.5), 06/2007

  76. W. C. Welch, K. Najafi, "Nickel-Tin Transient Liquid Phase (TLP) Wafer BondingFor MEMS Vacuum Packaging," Int. Conf. on Solid-State Sensors, Actuators, and Microsystems (Transducers '07), Lyon, France, Vol. 1, pp. 1327-1332, 06/2007

  77. S-H. Lee, S.W. Lee, and K. Najafi, "A Generic Environment-Resistant Packaging Technology For MEMS," Int. Conf. on Solid-State Sensors, Actuators, and Microsystems (Transducers '07), Lyon, France, Vol. 1, pp. 335-340 (2A2.3), 06/2007

  78. H. Kim, William H. Steinecker, S. Reidy, Gordon R. Lambertus, A.A. Astle, K. Najafi, Edward T. Zellers, L.P. Bernal, P.D. Washabaugh, and K.D. Wise, "A Micropump-Driven High-Speed MEMS Gas Chromatography System," Int. Conf. on Solid-State Sensors, Actuators, and Microsystems (Transducers '07), Lyon, France, Vol. 2, pp. 1505-1508, 06/2007

  79. A.M. Sodagar, G. E. Perlin, Y. Yao, K. Najafi, K. D. Wise, "Chronic Neural Recording with a 64-Channel Cortical Microsystem," IEEE EMBS Conference on Neural Engineering, The Kohala Coast, HI, pp. 402-405, 05/2007

  80. K. Najafi, "Micromachined Gas Chromatography Microsystem for Complex Gas Analysis," DARPA Microsystems Technologies Office Symposium, San Jose CA, 03/2007

  81. S. Lee, J. Cho, and K. Najafi, "Fabrication of Vertical Comb Electrodes Using Selective Anodic Bonding," IEEE 20th Int. Conf. Micro Electro-Mechanical Systems Workshop (MEMS 2007), Kobe, Japan, pp. 349-352, 01/2007

  82. H. Kim, A. Astle, K. Najafi, L. Bernal, and P. Washabaugh, "A fully integrated high-efficiency peristaltic 18-stage gas micropump with active microvalves," iEEE 20th Int. Conf. Micro Electro-Mechanical Systems Workshop (MEMS 2007), Kobe, Japan, pp. 131-134, 01/2007

  83. H. Kim, A. Jaregui, C. Morrison, K. Najafi, L. Bernal, and P. Washabaugh, "Low-power electrostatic microthruster for propulsion based on Helmholtz-resonance," IEEE 20th Int. Conf. Micro Electro-Mechanical Systems Workshop (MEMS 2007), Kobe, Japan, pp. 127-130, 01/2007

  84. T. Galchev, W. C. Welch III, and K. Najafi, "Low-Temperature MEMS Process Using Plasma Activated Silicon-On-Silicon (SOS) Bonding," IEEE 20th Int. Conf. Micro Electro-Mechanical Systems Workshop (MEMS 2007), Kobe, Japan, pp. 309-312, 01/2007

  85. J.S. Mitchell and K. Najafi, "Localized Back-Side Heating for Low -Temperature Wafer-Level Bonding," IEEE 20th Int. Conf. Micro Electro-Mechanical Systems Workshop (MEMS 2007), Kobe, Japan, pp. 377-380, 01/2007

  86. A. M. Sodagar, K. D. Wise, K. Najafi, "Fully-Integrated Mixed-Signal Neural Processor for Implantable Multi-Channel Cortical Recording," IEEE Biomedical Circuits and Systems Conference (BioCAS’06), London, United Kingdom, pp. 37-40, 11/2006

  87. A. M. Sodagar, K. D. Wise, K. Najafi, "An Interface Chip for Power and Bidirectional Data Telemetry in an Implantable Cochlear Microsystem," IEEE Biomedical Circuits and Systems Conference (BioCAS’06), London, United Kingdom, pp. 1-4, 11/2006

  88. H. Kim, W. Steinecker, G. Lambertus, A. Astle, K. Najafi, E. Zellers, L. Bernal, and K. Wise, "Integrated high-pressure 4-stage micro gas pump for high-speed micro gas chromatography," 10th Int. Conf. on Miniaturized Systems for Chemistry and Life Sciences (µTAS ’06), Tokyo, Japan, pp. 1037-1039, 11/2006

  89. H. Kim, A. Astle, L. Bernal, K. Najafi, and P. Washabaugh, "Directional pumping performance of an electrostatic checkerboard microvalve," ASME Int. Mechanical Engineering Congress & Exposition (ASME ’06), Chicago IL, IMECE 2006-16211, 11/2006

  90. A. M. Sodagar, K. D. Wise, K. Najafi, "A Neural Signal Processor for an Implantable Multi-Channel Cortical Recording Microsystem," 28th IEEE International Engineering in Medicine and Biology Conference (EMBC’06), New York City NY, 08/2006

  91. A. Sodagar, K.D. Wise, and K. Najafi, "Generic Controller Dedicated to Telemetry-Controlled Microsystems," 28th IEEE International Engineering in Medicine and Biology Conference (EMBC’06), New York City NY, 08/2006

  92. P. Mohseni, and K. Najafi, "A 1-MHz, 5-kb/s Wireless Command Receiver for Electronic Site Selection in Multichannel Neural Biopotential Recording," 28th IEEE International Engineering in Medicine and Biology Conference (EMBC’06), New York City NY, 08/2006

  93. A.M. Sodagar, M. Ghovanloo, K. Najafi, and K.D. Wise, "Fully-Integrated CMOS Power Regulator for Telemetry-Powered Implantable Biomedical Microsystems," Fully-Integrated CMOS Power Regulator for Telemetry-Powered Implantable Biomedical Microsystems, San Jose, CA, pp. 659-662, 08/2006

  94. A. M. Sodagar, K. Najafi, "Wireless Interfaces for Implantable Biomedical Microsystems," 49th IEEE International Midwest Symposium on Circuits and Systems (MWSCAS’06), pp. 265-269, 08/2006

  95. L. C. McAfee, K. Najafi, Y.B. Gianchandani, K. D. Wise, and M. M. Maharbiz, D.M. Aslam, P.L. Bergstrom, C.R. Friedrich, "MEMS and Microsystem Courses with National and International Dissemination," American Society for Engineering Education, 2006 ASEE Annual Conference and Exposition, Chicago IL, 2006-2332, 06/2006

  96. H. Kim, A.A. Astle, K. Najafi, L.P. Bernal, and P.D. Washabaugh, "Integrated Peristaltic 18-Stage Electrostatic Gas Micro Pump With Active Microvalves," Hilton Head Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head Island SC, pp. 292-295, 06/2006

  97. T. Galchev, W.C. Welch III, and K. Najafi, "Silicon-On-Silicon (SOS): A New CMOS Compatible Low-Temperature MEMS Process Using Plasma Activated Fusion Bonding," Hilton Head Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head Island SC, pp. 100-101, 06/2006

  98. H. Kim, A.H. Jauregui, C. Morrison, K. Najafi, L.P. Bernal, and P.D. Washabaugh, "Low Power Electrostatic Helmholtz-Resonance Microjet Generator For Propulsion And Cooling," Hilton Head Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head Island SC, pp. 296-299, 06/2006

  99. A.B. Ucok, J.M. Giachino, and K. Najafi, "Testing And Assembly Of WIMS Cubes Containing Passive And Active Integrated Cables," Hilton Head Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head Island SC, pp. 400-403, 06/2006

  100. S.W. Yoon, S. Lee, N.C. Perkins, and K. Najafi, "Shock Protection Using Soft Coatings As Shock Stops," Hilton Head Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head Island SC, pp. 396-399, 06/2006

  101. J.S. Mitchell, and K. Najafi, "Backside Resistive Localized Heating For Low Temperature Wafer-Level Bonding And Packaging," Hilton Head Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head Island SC, pp. 352-355, 06/2006

  102. J.S. Mitchell, G.R. Lahiji, and K. Najafi, "Long-Term Reliability, Burn-In And Analysis Of Outgassing In Au-Si Eutectic Wafer-Level Vacuum Packages," Hilton Head Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head Island SC, pp. 376-379, 06/2006

  103. G. J. O’Brien, D. J. Monk And K. Najafi, "SOI MEMS Process Insensitive To Sacrificial Oxide Etch Induced Substrate Anchor Variation With Selectable Substrate Isolation And Low Resistance Substrate Contact," Hilton Head Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head Island SC, pp. 47-50, 06/2006

  104. K. Najafi, and M. Maharbiz, "What Should A First College Course On Mems Be?," Hilton Head Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head Island SC, pp. 55-58, 06/2006

  105. L. C. McAfee, K. Najafi, Y.B. Gianchandani, K. D. Wise, and M. M. Maharbiz, D.M. Aslam, P.L. Bergstrom, C.R. Friedrich, "A MEMS/Microsystem Curriculum With International Dissemination," Hilton Head Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head Island SC, pp. 1-6, 06/2006

  106. J.S. Mitchell, G.R. Lahiji, and K. Najafi, "Au-Si Eutectic For Wafer Bonding and Wafer-Level Vacuum Packaging," 2nd Int. Workshop on Wafer Bonding for MEMS Technologies, Halle, Germany, pp. 63-64, 04/2006

  107. S. Yoon, N. Yazdi, J. Chae, N. Perkins, and K. Najafi, "Shock Protection Using Integrated Nonlinear Spring Shock Stops," 19th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Istanbul, Turkey, pp. 702-705, 01/2006

  108. S-H Lee, J. Chae, N. Yazdi, and K. Najafi, "Micro-Brush Press-On Contact: A New Technique For Room Temperature Electrical And Mechanical Attachment," 19th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Istanbul, Turkey, pp. 342-345, 01/2006

  109. H. Kim, A. Astle, K. Najafi, L. Bernal, P. Washabaugh, and F. Cheng, "Bi-directional electrostatic microspeaker with two large-deflection flexible membranes actuated by single/dual electrodes," 4th IEEE Conf. on Sensors (Sensors '05), Irvine CA, 11/2005

  110. A. Astle, L.P. Bernal, H. Kim, K. Najafi, P.D. Washabaugh, C. Morrison, "Theoretical and Experimental Performance of a High Frequency Micro Pump," ASME International Mechanical Engineering Congress & Exposition, Orlando FL, IMECE2005-81626, 11/2005

  111. H. Kim, K. Najafi, A. Astle, L. Bernal, and P. Washabaugh, "Fabrication And Performance Of A Dual-Electrode Electrostatic Peristaltic Gas Micropump," The Ninth International Conference on Miniaturized Chemical and Biochemical Analysis Systems (MicroTAS 2005), Boston MA, pp. 1173-1176, 10/2005

  112. R. Panday, X.A. Fu, S. Rajgopal, T. Lisby, S.A. Nikles, K. Najafi, and M. Mehregany, "Mechanical Testing of Flexible Silicon Carbide Interconnect Ribbons," International Conference on Silicon Carbide and Related Materials, Pittsburgh PA, 09/2005

  113. W.C. Welch III, M. Dokmeci, N. Yazdi, and K. Najafi, "A Flux-Free Pb-Sn Solder Bonding Technology for Wafer-Level Chip-Scale Vacuum Packaging," ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems (InterPack05), San Francisco CA, 07/2005

  114. J.S. Mitchell, G.R. Lahiji and K. Najafi, "Reliability and Characterization of Micro-Packages in a Wafer Level Au-Si Eutectic Vacuum Bonding Process," ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems (InterPack05), IPACK2005-73341, 07/2005

  115. S.W. Yoon, N. Yazdi, N.C. Perkins, and K. Najafi, "Novel Integrated Shock Protection for MEMS," IEEE Int. Conference on Solid-State Sensors, Actuators, and Microsystems (TRANSDUCERS 2005), Vol. 1, pp. 396-400 (2B3.2), 06/2005

  116. W.C. Welch III, J. Chae, S. Lee, and K. Najafi, "Transient Liquid Phase (TLP) Bonding for MEMS Packaging Applications," IEEE Int. Conference on Solid-State Sensors, Actuators, and Microsystems (TRANSDUCERS 2005), Seoul, Korea, Vol. 2, pp. 1350-1353 (3E4.9), 06/2005

  117. J.S. Mitchell, G.R. Lahiji and K. Najafi, "Encapsulation of vacuum sensors on a wafer level package using a gold-silicon eutectic," IEEE Int. Conference on Solid-State Sensors, Actuators, and Microsystems (TRANSDUCERS 2005), Seoul, Korea, Vol. 1, pp. 928-931 (2E4.119), 06/2005

  118. H. Kim, and K. Najafi, "Characterization of Parylene-assisted wafer bonding: Long-term stability and influence of process chemicals," IEEE Int. Conference on Solid-State Sensors, Actuators, and Microsystems (TRANSDUCERS 2005), Seoul, Korea, Vol. 1, pp. 2015-2018 (4A2.1), 06/2005

  119. M. Ghovanloo, and K. Najafi, "A Three-Dimensional Microassembly Structure for Micromachined Planar Microelectrode Arrays," 3rd Annual IEEE EMBS Special Topic Conference on Microtechnologies in Medicine and Biology, Oahu HI, pp. 112-115, 05/2005

  120. H. Kulah, and K. Najafi, "An Electromagnetic Micro Power Generator for Low-Frequency Environmental Vibrations," 2005 SAE World Congress, Detroit MI, Paper #05MV-35, 04/2005

  121. H. Kulah, J. Chae, and K. Najafi, "Micromachined Accelerometers for Inertial Navigation Applications," 2005 SAE World Congress, Detroit MI, Paper #05MV-36, 04/2005

  122. M. Ghovanloo and K. Najafi, "A Tri-state FSK Demodulator for Asynchronous Timing of High-rate Stimulation Pulses in Wireless Implantable Microstimulators," IEEE/EMBS Conf. on Neural Engineering, pp. 116-119, 03/2005

  123. S. A. Nikles, S. Bledsoe, R. M. Bradley, and K. Najafi, "A 32-Channel Active High-Density Connector for Biomedical Applications," IEEE Micro Electro Mechanical Systems (MEMS), Miami FL, pp. 580-583, 01/2005

  124. A.B. Ucok, J. Giachino, and K. Najafi, "Modular Assembly/Packaging Of Multi-Substrate Microsystems (WIMS Cube) Using Thermo-Magnetically Actuated Cables," IEEE Micro Electro Mechanical Systems (MEMS), Miami FL, pp. 536-539, 01/2005

  125. S. Lee, J. Chae, S. Yoon, N. Yazdi, and K. Najafi, "Low-power Thermal Isolation for Environmentally Resistant Microinstruments," IEEE Micro Electro Mechanical Systems (MEMS), Miami FL, pp. 532-535, 01/2005

  126. W.C. Welch III and K. Najafi, "Transfer of Metal MEMS Packages Using a Wafer-Level Solder Sacrificial Layer," IEEE Micro Electro Mechanical Systems (MEMS), Miami FL, pp. 584-587, 01/2005

  127. J. Chae, J. Giachino, and K. Najafi, "Wafer-level Vacuum Package with Vertical Feedthroughs," IEEE Micro Electro Mechanical Systems (MEMS), Miami FL, pp. 548-551, 01/2005

  128. J.S. Mitchell, G.R. Lahiji and K. Najafi, "An Improved Performance Poly Si Pirani Vacuum Gauge Using Heat Distributing Structural Supports," IEEE Micro Electro Mechanical Systems (MEMS), Miami FL, pp. 291-294, 01/2005

  129. B.H. Stark, J. Chae, A. Kuo, A. Oliver, and K. Najafi, "A High-Performance Surface-Micromachined Pirani Gauge in SUMMIT V™," IEEE Micro Electro Mechanical Systems (MEMS), Miami FL, pp.295-298, 01/2005

  130. P. Mohseni and K. Najafi, "A Battery-Powered 8-channel Wireless FM IC for Biopotential Recording Applications," IEEE Int. Solid-State Circuits Conference (ISSCC), San Francisco CA, pp. 560-561, 01/2005

  131. N. Yazdi, H. Kulah, and K. Najafi, "Precision Readout Circuits for Capacitive Microaccelerometers," Third IEEE International Conference on Sensors, Vienna, Austria, pp. 28-31, 10/2004

  132. K. King, S.W. Yoon, N.C. Perkins, and K. Najafi, "The Dynamics of the Golf Swing as Measured by Strapdown Inertial Sensors," 5th International Conference on the Engineering of Sport, Davis CA, vol. 2, pp. 276-282, 09/2004

  133. P. Mohseni, and K. Najafi, "Wireless Multichannel Biopotential Recording Using an Integrated FM Telemetry Circuit," 26th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBS), San Francisco, CA, 09/2004

  134. M. Ghovanloo, K.J. Otto, D.R. Kipke, and K. Najafi, "In Vitro and In Vivo Testing of a Wireless Multichannel Stimulating Telemetry Microsystem,," 26th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBS), San Francisco CA, pp. 4294-4297, 09/2004

  135. K. Najafi, and M. Ghovanloo, "A Multichannel Monolithic Wireless Microstimulator," 26th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBS), San Francisco CA, pp. 4197-4200, 09/2004

  136. H. S. Kim, A. B. Ucok, and K. Najafi, "Large deflection stacked multi-electrode electrostatic Actuator," Solid State Sensor, Actuator and Microsystems Workshop (Hilton Head 2004), Hilton Head Island SC, pp. 340-343, 06/2004

  137. H. Yu, R. Olsson, K.D. Wise, and K. Najafi, "A wireless microsystem for multichannel neural recording microprobes," Solid State Sensor, Actuator and Microsystems Workshop (Hilton Head 2004), Hilton Head Island SC, pp. 107-110, 06/2004

  138. A. B. Ucok, J. M. Giachino, and K. Najafi, "The WIMS Cube: A Microsystem Package With Actuated Flexible Connections And Re-Workable Assembly," Solid State Sensor, Actuator and Microsystems Workshop (Hilton Head 2004), Hilton Head Island SC, pp. 117-120, 06/2004

  139. E. T. Zellers, W. H. Steinecker, G. R. Lambertus, M. Agah, C.-J. Lu, H. K. L. Chan, J. A. Potkay, M.C. Oborny, J. M. Nichols, A. Astle, H. S. Kim, M. P. Rowe, J. Kim, L. W. da Silva, J. Zheng, J. J. Whiting, R. D. Sacks, S. W. Pang, M. Kaviany, P. L. Bergstrom, A. J. Matzger, Ç. Kurdak, L. P. Bernal, K. Najafi, K. D. Wise, "A Versatile MEMS Gas Chromatograph For Determinations Of Environmental Vapor Mixtures," Solid State Sensor, Actuator and Microsystems Workshop (Hilton Head 2004), Hilton Head Island SC, pp. 61-66, 06/2004

  140. M. Ghovanloo and K. Najafi, "A Modular 32-site Wireless Neural Stimulation Microsystem," IEEE Int. Solid-State Circuits Conference, San Francisco, pp. 226-227, 02/2004

  141. K. D. Wise, K. Najafi, R. Sacks, and E. T. Zellers, "A Wireless Integrated Microsystem for Environmental Monitoring," IEEE Int. Solid-State Circuits Conference, San Francisco, pp. 434-435, 02/2004

  142. B. H. Stark and K. Najafi, "A Mold and Transfer Technique for Lead-Free Fluxless Soldering and Application to Wafer-Level Low-Temperature Thin-Film Packages," 17th IEEE International Conference on Microelectromechanical Systems (MEMS '04), Maastricht, The Netherlands, pp. 16-19, 01/2004

  143. H. Kulah and K. Najafi, "An Electromagnetic Micro Power Generator for Low-Frequency Environmental Vibrations," 17th IEEE International Conference on Microelectromechanical Systems (MEMS '04), Maastricht, The Netherlands, pp. 237-240, 01/2004

  144. J. Chae, B.H. Stark, and K. Najafi, "A Micromachined Pirani Gauge with Dual Heat Sinks," 17th IEEE International Conference on Microelectromechanical Systems (MEMS '04), Maastricht, The Netherlands, pp. 532-535, 01/2004

  145. A. Astle, L.P. Bernal, P. Washabaugh, H. Kim and K. Najafi, "Dynamic Modeling And Design Of A High Frequency Micro Vacuum Pump," ASME International Mechanical Engineering Congress & Exposition Washington, DC, IMECE 2003-41493, 11/2003

  146. C. Zhang, K. Najafi, L.P. Bernal and P. Washabaugh, "Mechanical And Thermal Design Of A Combustion-Based Thermionic Micro Power Generator," ASME International Mechanical Engineering Congress & Exposition Washington, DC, IMECE 2003-41531, 11/2003

  147. A.B. Ucok, J. Giachino, and K. Najafi, "A High-Density Flexible Connector Array For Multi-Substrate Packages," ASME International Mechanical Engineering Congress & Exposition Washington, DC, IMECE2003-41562, 11/2003

  148. K. Najafi, J. Chae, H. Kulah and G. He, "Micromachined Silicon Accelerometers And Gyroscopes," IROS - IEEE International Robotics and Systems Conference , Las Vegas NV, 10/2003

  149. M. Ghovanloo, and K. Najafi, "A Small Size Large Voltage Compliance Programmable Current Source for Biomedical Implantable Microstimulators," 25th Annual International Conference of the IEEE Engineering In Medicine And Biology Society, Cancun, Mexico, pp. 1979-1982, 09/2003

  150. S. Nikles, D.S. Pellinen, J. Kitagawa, D. Kipke, RoM. Bradley, and K. Najafi, "Long Term In Vitro Monitoring of Polyimide Microprobe Electrical Properties," 25th Annual International Conference of the IEEE Engineering In Medicine And Biology Society, Cancun, Mexico, pp. 3340-3343, 09/2003

  151. A. M. Sodagar, and K. Najafi, "A Multi-Output Supply-Independent Voltage Reference in Standard CMOS Process for Telemetry-Powering Applications," IEEE Int. Symposium on Signals, Circuits and Systems, Lasi, Romania, Volume: 2, pp. 493 –496, 07/2003

  152. H. Kulah, J. Chae and K. Najafi, "Noise Analysis and Characterization of A Sigma-Delta Capacitive Silicon Microaccelerometer," IEEE International Conference on Solid State Sensors and Actuators Conference (Transducers 2003), Boston MA, pp. 92-95, 06/2003

  153. B. Stark and K. Najafi, "An Integrated Process for Post-Packaging Release and Vacuum Sealing of Electroplated Nickel Packages," IEEE International Conference on Solid State Sensors and Actuators Conference (Transducers 2003), Boston MA, pp. 1911-1914, 06/2003

  154. C. Zhang, L. Bernal, P. Washabaugh, K. Najafi, "Micro Combustion-Thermionic Power Generation: Feasibility, Design and Initial Results," IEEE International Conference on Solid State Sensors and Actuators Conference (Transducers 2003), Boston MA, pp. 40-44, 06/2003

  155. G. O’Brien, D. Monk, and K. Najafi, "Angular Accelerometer with Dual Anchor Support," IEEE International Conference on Solid State Sensors and Actuators Conference (Transducers 2003), Boston MA, pp. 1371-1374, 06/2003

  156. J. Chae, H. Kulah and K. Najafi, "A Monolithic Three-Axis Silicon Capacitive Accelerometer with Micro-G Resolution," IEEE International Conference on Solid State Sensors and Actuators Conference (Transducers 2003), Boston MA, pp. 81-84, 06/2003

  157. H. Kim, K. Najafi, P. Washabaugh, and L. Bernal, "Large-Deflection Out-of-Plane Electrostatic Buckled-Electrode Actuators," IEEE International Conference on Solid State Sensors and Actuators Conference (Transducers 2003), Boston MA, pp. 794-797, 06/2003

  158. H. Kim and K, Najafi, "Wafer Bonding Using Parylene and Wafer-Level Transfer of Free-Standing Parylene Membranes," IEEE International Conference on Solid State Sensors and Actuators Conference (Transducers 2003), Boston MA, pp. 790-793, 06/2003

  159. A.B. Ucok, J. Giachino, and K. Najafi, "Compact, Modular Assembly and Packaging of Multi-Substrate Microsystems," IEEE International Conference on Solid State Sensors and Actuators Conference (Transducers 2003), Boston MA, pp. 1877-1878, 06/2003

  160. M. Ghovanloo, K. Najafi, "A High Data-Rate Frequency Shift keying Demodulator Chip for the Wireless Biomedical Implants," IEEE International Symposium on Circuits and Systems (ISCAS 2003), Bangkok, Thailand, Vol. 5, pp. 45-48, 05/2003

  161. M. Ghovanloo, K. D. Wise, K. Najafi, "Towards a Button-Sized 1024-Site Wireless Cortical Microstimulating Array," 1st International IEEE/EMBS Conference on Neural Engineering (NE 2003), Capri Italy, pp. 138-141, 03/2003

  162. P. Mohseni and K. Najafi, "A Wireless FM Multi-Channel Microsystem for Biomedical Neural Recording Applications," IEEE Southwest Symposium on Mixed-Signal Design (SSMSD 2003), Las Vegas NV, pp. 217-222, 02/2003

  163. M. Ghovanloo, K. Najafi, "A Fully Digital Frequency Shift Keying Demodulator Chip for Wireless Biomedical Implants," IEEE Southwest Symposium on Mixed-Signal Design (SSMSD 2003), Las Vegas NV, pp. 223-227, 02/2003

  164. H. Kulah, J. Chae, N. Yazdi and K. Najafi, "A Multi-Step Electromechanical Sigma-Delta Converter for Micro-g Capacitive Accelerometers," IEEE International Conference on Solid-State Circuits Conference (ISSCC 2003), San Francisco CA, pp. 202-203, 02/2003

  165. H. Yu, K. Najafi, "Low-Power Interface Circuits for Bio-Implantable Microsystems," IEEE International Conference on Solid-State Circuits Conference (ISSCC 2003), San Francisco CA, pp. 194-195, 02/2003

  166. K. Najafi, "Micropackaging Technologies for Integrated Microsystems: Applications to MEMS and MOEMS," SPIE’s Micromachining and Microfabrication Symposium, San Jose CA, pp. 1-19, 01/2003

  167. M. Muller, L. Bernal, P. Washabaugh, H. Kim, K. Najafi, "Resonance Effects of Electrostatically Actuated Acoustic Jets," 41st Aerospace Sciences Meeting and Exhibit (AIAA), Reno NV, AIAA Paper 2003-1272, 01/2003

  168. J. Chae, H. Kulah, and K. Najafi, "An In-Plane High-Sensitivity, Low-Noise Micro-G Silicon Accelerometer," EEE International Conference on Micro Electro Mechanical Systems (MEMS 2003), Kyoto Japan, pp. 466-469, 01/2003

  169. T. J. Harpster, and K. Najafi, "Field-Assisted Bonding of Glass to Si-Au Eutectic Solder For Packaging Applications," IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2003), Kyoto Japan, pp. 630-633, 01/2003

  170. B. Stark, Y. Mei, C. Zhang, and K. Najafi, " Doubly Anchored Surface Micromachined Pirani Gauge for Vacuum Package Characterization," IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2003), Kyoto Japan, pp. 506-509, 01/2003

  171. X. Zhu, S. Guillaudeu, D. M. Aslam, U. Kim, B. Stark, and K. Najafi, "All Diamond Packaging For Wireless Integrated Micro-Systems Using Ultra-Fast Diamond Growth," IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2003), Kyoto Japan, pp. 658-661, 01/2003

  172. K. Wise and K. Najafi, "Fully-Implantable Auditory Prostheses: Restoring Hearing to the Profoundly Deaf," IEEE International Electron Devices Meeting (IEDM), San Francisco CA, pp. 499-502, 12/2002

  173. E. Zellers, K. Wise, K. Najafi, D. Aslam, R. Brown, Q. Cai, J. Driscoll, M. Flynn, J. Giachino, R. Gordenker, M. Hsieh, C. Nguyen, P. Bergstrom, J. Drelich, C. Friedrich, E. Gamble, M Kaviany, C. Lu, A. Matzger, M. Oborny, S. Pang, J. Potkay, R. Sacks, W.-C. Tian, W. Steinecker, J. Whiting, Q. Zhong, "Determinations of Complex Vapor Mixtures in Ambient Air with a Wireless Microanalytical System: Vision, Progress, and Homeland Security Applications," IEEE Conference on Technologies for Homeland Security, Waltham MA, pp. 92-95, 11/2002

  174. C. Zhang, L. Bernal, P. Washabaugh, K. Najafi, "A Micromachined Combustor and its Application to Thermoelectric Power Generation," ASME IMECE, New Orleans LA, Vol. 2, IMECE2002-33272, 11/2002

  175. B. Stark and K. Najafi, "A Wafer Level Vacuum Packaging Technique Utilizing Electroplated Nickel," ASME IMECE, New Orleans LA, Vol. 2, IMECE2002-34268, 11/2002

  176. M. Muller, L. Bernal, P. Washabaugh, T.-K. Chou, H. Kim, and K. Najafi, "Acoustically Generated Micromachined Jet Arrays For Micropropulsion Applications," ASME IMECE, New Orleans LA, Vol. 2, IMECE2002-33630, 11/2002

  177. A. Astle, A. Paige, L. Bernal, J. Munfakh, H. Kim, and K. Najafi, "Analysis And Design Of Multistage Electrostatically-Actuated Micro Vacuum Pumps," ASME IMECE, New Orleans LA, Vol. 2, IMECE2002-34308, 11/2002

  178. M. Ghovanloo, K. Najafi, "A BiCMOS Wireless Stimulator Chip for Micromachined Stimulating Microprobes," The IEEE 2nd Joint EMBS-BMES Conference, Houston TX, pp. 2113-2114, 10/2002

  179. P. Mohseni and K. Najafi, "A Low-Power Fully Integrated Bandpass Operational Amplifier For Biomedical Neural Recording Applications," 2nd Joint IEEE EMBS/BMES Conference, Houston TX, pp. 2111-2112, 10/2002

  180. A. Sodagar, K. Najafi, "A Wide-Range Supply-Independent CMOS Voltage Reference for Telemetry-Powering Applications," IEEE International Conference on Electronics, Circuits, and Systems (ICECS'02), Dubrovnik, Croatia, pp. 401-404, 09/2002

  181. H. Kulah and K. Najafi, "A Low Noise Switched-Capacitor Interface Circuit for Sub-Micro Gravity Resolution Micromachined Accelerometers," European Solid-State Circuits Conference ESSCIRC'02, Florence Italy, pp. 635-639, 09/2002

  182. M. Ghovanloo, K. Najafi, "A High Data Transfer Rate Frequency Shift Keying Demodulator Chip for the Wireless Biomedical Implants," IEEE 45th Midwest Symposium on Circuits and Systems, Tulsa OK, 08/2002

  183. H. Kulah, A. Salian, N. Yazdi, and K. Najafi, "A 5V Closed-Loop Second-Order Sigma-Delta Micro-G Microaccelerometer," Solid-State Sensor & Actuator Workshop, Hilton Head Island SC, pp. 219-222, 06/2002

  184. Y. Mei, G. R. Lahiji, and K. Najafi, "A Robust Gold-Silicon Eutectic Wafer Bonding Technology for Vacuum Packaging," Solid-State Sensor and Actuator Workshop, Hilton-Head, S.C., pp. 86-89, 06/2002

  185. G. O’Brien, D. J. Monk, and K. Najafi, "Angular Rate Gyroscope with Dual Anchor Support," Solid-State Sensor and Actuator Workshop, Hilton-Head, S.C., pp. 285-288, 06/2002

  186. K. Najafi, "Power and Integrated Microsystems," SPIE International Symposium on Design, Test, Integration, and Packaging of MEMS and MOEMS, Cannes, France, 05/2002

  187. M. Ghovanloo, K. Beach, K. D. Wise, and K. Najafi, "A BiCMOS wireless interface chip for micromachined stimulating microprobes," IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology, Madison WI, pp. 277-282, 05/2002

  188. M. Ghovanloo and K. Najafi, "Fully integrated power supply design for wireless biomedical implants," IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology, Madison WI, pp. 414-419, 05/2002

  189. T-K A. Chou, K. Najafi, M.O. Muller, L.P. Bernal, P.D. Washabaugh, and B. Amirparviz, "Micromachined E-Jet for IC Chip Cooling," IEEE International Solid-State Circuits Conference, San Francisco CA, pp. 356-357, 02/2002

  190. J. Chae, H. Kulah, and K. Najafi, "A Hybrid Silicon-On-Glass (Sog) Lateral Micro-Accelerometer With CMOS Readout Circuitry," IEEE 2002 Int. Conference on Micro Electro Mechanical Systems (MEMS 2002), Las Vegas, NV, pp. 623-626, 01/2002

  191. T-K A. Chou and K. Najafi, "Fabrication Of Out-Of-Plane Curved Surfaces In Si By Utilizing RIE Lag," IEEE 2002 Int. Conference on Micro Electro Mechanical Systems (MEMS 2002), Las Vegas, NV, pp. 145-148, 01/2002

  192. G. He, and K. Najafi, "A Single-Crystal Silicon Vibrating Ring Gyroscope," IEEE 2002 Int. Conference on Micro Electro Mechanical Systems (MEMS 2002), Las Vegas, NV, pp. 718-721, 01/2002

  193. T-K A. Chou, K. Najafi, M.O. Muller, L.P. Bernal, and P.D. Washabaugh, "Characterization Of Micromachined Acoustic Ejector And Its Applications," IEEE 2002 Int. Conference on Micro Electro Mechanical Systems (MEMS 2002), Las Vegas, NV, pp. 264-267, 01/2002

  194. T. J. Harpster and K. Najafi, "Long-Term Testing Of Hermetic Anodically Bonded Glass-Silicon Packages," IEEE 2002 Int. Conference on Micro Electro Mechanical Systems (MEMS 2002), Las Vegas, NV, pp.423-426, 01/2002

  195. C. Zhang, and K. Najafi, "Fabrication Of Thick Silicon Dioxide Layers Using DRIE, Oxidation And Trench Refill," IEEE 2002 Int. Conference on Micro Electro Mechanical Systems (MEMS 2002), Las Vegas, NV, pp. 160-163, 01/2002

  196. M.O. Müller, L.P. Bernal, P.D. Washabaugh, T-K A. Chou, And K. Najafi, "Flow Field And Performance of High Frequency Micromachined Synthetic Jets," 40th AIAA Aerospace Sciences Meeting and Exhibit, Reno Nevada, paper # 2002-0974, 01/2002

  197. G. J. O‚Brien, D. J. Monk, and K. Najafi, "Submicron High Aspect Ratio Silicon Beam Etch," SPIE MEMS Symposium, Australia, Vol. 4592, pp. 41-48, 12/2001

  198. H. Yu, and K. Najafi, "Circuitry For A Wireless Microsystem For Neural Recording Microprobes," International IEEE Engineering in Medicine and Biology Conference (EMBC), Istanbul, Turkey, 10/2001

  199. K. D. Wise, K. Najafi, D. M. Aslam, R. B. Brown, J. M. Giachino, L. C. McAfee, C. T.-C. Nguyen, R. O. Warrington, and E. T. Zellers, "Wireless Integrated MicroSystems (WIMS): The Coming Revolution in the Remote Gathering of Information," SensorsExpo, Chicago, IL, 06/2001

  200. B. H. Stark and K. Najafi, "An Ultra-Thin Hermetic Package Utilizing Electroplated Gold," Twelft IEEE Int. Conf. On Solid-State Sensors and Actuators (Transducers '01), Munich, Germany, Vol. 1, pp. 194-197 (1C3.05P), 06/2001

  201. C. Zhang, K. Najafi, L.P. Bernal & P. Washabaugh, "An integrated combustor-thermoelectric micro power generato," Twelft IEEE Int. Conf. On Solid-State Sensors and Actuators (Transducers '01), Munich, Germany, Vol. 1, pp. 34-37 (1A3.03), 06/2001

  202. T.K. Chou, K. Najafi, M.O. Müller, L.P. Bernal & P. Washabaugh, "High-Density micromachined ejector array for micro propulsion," Twelft IEEE Int. Conf. On Solid-State Sensors and Actuators (Transducers '01), Munich, Germany, Vol. 2, pp. 890-893 (3A1.03), 06/2001

  203. T-K. A. Chou and K. Najafi, "3D MEMS Fabrication Using Low-Temperature Wafer Bonding With Benzocyclobutene (BCB)," Twelft IEEE Int. Conf. On Solid-State Sensors and Actuators (Transducers '01), Munich, Germany, Vol. 2, pp. 1570 - 1573 (4C2.01), 06/2001

  204. B. H. Stark, M. Dockmeci, T. J. Harspter, and K. Najafi, "Improving Corrosion resitance and Silicon Glass Micropackages Using Boron Doping and/or Self-Induced Galvanic Bias," roceedings of International Reliability Physics Symposium, Orlando, Fl, pp, 455-462, 04/2001

  205. M.O. Müller, L.P. Bernal, P.K. Miska, P.D. Washabaugh, T.-K.A. Chou, B.A. Parviz, C. Zhang & K. Najafi, "Flow structure and performance of axisymmetric synthetic jets," AIAA 39th Aerospace Sciences Meeting & Exhibit, Reno Nevada, AIAA Paper 2001-1008, 01/2001

  206. Y. T. Cheng, W.T. Hsu, Liwei Lin, C.T. Nguyen, and K. Najafi, "Vacuum Packaging Technology Using Localized Aluminum/Silicon-To-Glass Bonding," Proceedings of 14th IEEE Micro Electro Mechanical Systems Conference (MEMS 2001), Interlaken Switzerland, pp. 18-21, 01/2001

  207. B.A. Parviz, T.K. Chou, C. Zhang, K. Najafi, M.O. Müller, L.P. Bernal & P. Washabaugh, "Performance of ultrasonic electrostatic resonators for use in micro propulsion," Proceedings of 14th IEEE Micro Electro Mechanical Systems Conference (MEMS 2001), Interlaken Switzerland, pp. 586-589, 01/2001

  208. T. Harpster, B. Stark, and K. Najafi, "A Passive Wireless Integrated Humidity Sensor," Proceedings of 14th IEEE Micro Electro Mechanical Systems Conference (MEMS 2001), Interlaken Switzerland, pp. 553-557, 01/2001

  209. Stefan Nikles, Sanford Bledsoe, Robert Bradley, and Khalil Najafi, "Reliability and Contact Resistance of Polysilicon Beams Leads for Use in a High-Density Connector," Proceedings of 14th IEEE Micro Electro Mechanical Systems Conference (MEMS 2001), Interlaken Switzerland, pp. 65-67, 01/2001

  210. T. Lisby, S. Nikles, K. Najafi, O. Hansen, S. Bouwstra and J. Branebjerg, "Mechanical characterization of flexible silicon microstructures," Eurosensors 2000, The 14th European Conference on Solid-State Transducers, Copenhagen, Denmark, 08/2000

  211. Orhan Akar, Tayfun Akin, Tim Harpster, and Khalil Najafi, "A Wireless Batch Sealed Absolute Capacitive Pressure Sensor," Eurosensors 2000, The 14th European Conference on Solid-State Transducers, Copenhagen, Denmark, pp. 585-588, 08/2000

  212. R. Rangarajan, J.A. Von Arx, S. Rose, B. Ziaie, K. Najafi, "Fully Integrated Nerve Electrical Stimulation System," IEEE Midwest Symposium for Circuits and Systems, Lansing, MI, 08/2000

  213. A. Salian, H. Kulah, N. Yazdi, G. He, and K. Najafi, "A Hybrid Silicon Microaccelerometer System with CMOS Interface Circuit," IEEE Midwest Symposium for Circuits and Systems, Lansing, MI, 08/2000

  214. H. Kulah, N. Yazdi, and K. Najafi, "A CMOS Switched-Capacitor Interface Circuit for an Integrated Acclerometer," IEEE Midwest Symposium for Circuits and Systems, Lansing, MI, 08/2000

  215. N. Yazdi, K. Najafi, "Performance limits of a closed-loop micro-G silicon accelerometer with deposited rigid electrodes," Proceedings of the 12th IEEE International Conference on Microelectronics (ICM 2000), Tehran Iran, pp. 313-316, 08/2000

  216. K. Najafi, "Low-Power Micromachined Micro Systems," Int. Symposium on Low-Power Electronics and Devices (ISLPED ’00), Portofino, Italy, 07/2000

  217. K. Najafi, "Micromachined Micro Systems: Miniaturization Beyond Microelectronics," IEEE VLSI Circuits Symposium, Honolulu Hawaii, pp. 6-13, 06/2000

  218. M.O. Muller, L.P. Bernal, R.P. Moran, P.D. Washabaugh, B.A. Parviz, A. T.-K. Chou, C. Zhang, K. Najafi, "Thrust performance of micromachined synthetic jets," AIAA Fluids 2000 Conference, Denver Colorado, AIAA-2000-2404, 01/2000

  219. M.O. Muller, L.P. Bernal, R.P. Moran, P.D. Washabaugh, B.A. Parviz, K. Najafi, "Micromachined acoustic resonators for microjet propulsion," AIAA 38th Aerospace Science Conference, Reno NV, AIAA-2000-0547, 01/2000

  220. R.P. Moran, P.D. Washabaugh, M.O. Muller, L.P. Bernal, B.A.Parviz, K. Najafi, "Numerical simulation of micromachined acoustic resonators," AIAA 38th Aerospace Science Conference, Reno NV, AIAA-2000-0546, 01/2000

  221. J. Chae, H. Kulah, A. Salian, and K. Najafi, "A High-Sensitivity Silicon-On-Glass Lateral Micro-g Microaccelerometer," Third Annual Micro/NanoTechnology Conference, Houston TX, Nanospace 2000, 01/2000

  222. B.A. Parviz, T.K. Chou, C. Zhang, K. Najafi, M.O. Muller, L.P. Bernal, and P. Washabaugh, "A Wafer-Integrated Array of Micromachined Electrostatically-Driven Ultrasonic Resonators for Microfluidic Applications," 13th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Myazaki, Japan, pp. 34-39, 01/2000

  223. T. Harpster, S. Hauvespre, M. Dokmeci, B. Stark, A. Vosoughi, and K. Najafi, "A Passive Humidity Monitoring System for In-Situ remote Wireless Testing of Micropackages," 13th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Myazaki, Japan, pp. 335-340, 01/2000

  224. Y.T. Cheng, L. Lin, K. Najafi, "Fabrication and Hermeticity Testing of A Glass-Silicon Package Formed Using Localized Aluminum/Silicon-To-Glass Bonding," 13th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Myazaki, Japan, pp. 757-762, 01/2000

  225. P. Mohseni, K. Nagarajan, B. Ziaie, K. Najafi, and S. B. Crary, "Robotics at the Interface of Microsystems Technology and Biology: Biobotics," International Advanced Robotics Program's Workshop on Micro Robots, Micro Machines and Systems, The Institute for Problems in Mechanics, Russian Academy of Sciences, Moscow, Russia, pp. 78-82, 11/1999

  226. A. Chandran, K. Najafi, K.D. Wise, "A New DC Baseline Stabilization Scheme for Neural Recording Microprobes," First Joint BMES/EMBS Conference, Annual Fall Meeting of the Biomedical Engineering Society, 21st Annual International Conference of the Engineering in Medicine and Biology Society, Atlanta GA, pp. 386-387, 10/1999

  227. S. Hauvespre, M. Dokmeci, and K. Najafi, "Wireless Humidity Monitoring in Hermetic Biomedical Micropackages," First Joint BMES/EMBS Conference, Annual Fall Meeting of the Biomedical Engineering Society, 21st Annual International Conference of the Engineering in Medicine and Biology Society, Atlanta GA, pp.487-488, 10/1999

  228. K. Najafi, B.A. Parviz, L.P. Bernal, P. Washabaugh, A.K. Chou, C. Zhang, M. Muller, and R. Moran, "Micromachined Resonators and Their Application in Micro Propulsion Systems," 6th Annual Strategic and Technical Symposium on Vehicular Applications of Displays and Micro Sensors, Ypsilanti MI, pp. 189-192, 09/1999

  229. D. Aslam, V. Papageorgiou, F. Ayazi, and K. Najafi, "IC-Compatible Technology of Poly-Diamond MEMS," 6th Annual Strategic and Technical Symposium on Vehicular Applications of Displays and Micro Sensors, Ypsilanti MI, pp. 113-116, 09/1999

  230. F. Ayazi, H.H. Chen, and K. Najafi, "High-Performance Vibratory Silicon Microgyroscope," 6th Annual Strategic and Technical Symposium on Vehicular Applications of Displays and Micro Sensors, Ypsilanti MI, pp. 153-158, 09/1999

  231. A. Salian, H. Kulah, N. Yazdi, and K. Najafi, "A Micro-g Capacitive Silicon Microaccelerometer," 6th Annual Strategic and Technical Symposium on Vehicular Applications of Displays and Micro Sensors, Ypsilanti MI, pp. 165-172, 09/1999

  232. M. Dokmeci, K. Najafi, "Glass-Silicon Hermetic Micro Packages for Implantable Biomedical Microsystems," 6th Annual Strategic and Technical Symposium on Vehicular Applications of Displays and Micro Sensors, Ypsilanti MI, pp. 159-164, 09/1999

  233. A. Naguib, D. Benson, H. Nagib, C. Huang, and K. Najafi, "Assessment of MEMS-Based Hot Wires," 3rd ASME/JSME Joint Fluids Engineering Conference, San Francisco, CA, Proceedings of the, 07/1999

  234. F. Ayazi, and K. Najafi, "High Aspect-Ratio Polysilicon Micromachining Technology," Tenth Int. Conf. Solid-State Sensors & Actuators (Transducers ’99), Sendai, Japan, pp. 320-323 (2A3.1), 06/1999

  235. R. Vogt, K. Najafi, Ralph Steiner, and H. Baltes, "A Low-Drift Differential Double Hall Sensor with On-Chip CMOS Circuitry," Tenth Int. Conf. On Solid-State Sensors and Actuators (Transducers ’99), Sendai, Japan, pp. 172-175 (1D4.4), 06/1999

  236. Babak Amir Parviz, L. Bernal, and K. Najafi, "A Micromachined Helmholtz Resonator For Generation of Microjet Flows," Tenth Int. Conf. On Solid-State Sensors and Actuators (Transducers ’99), Sendai, Japan, pp. 1788-1791, 06/1999

  237. B. Amir Parviz, and K. Najafi, "Fabrication of Bulk-Silicon Microstructures Using a Trench-Assisted Etch-Stop Process," Tenth Int. Conf. On Solid-State Sensors and Actuators (Transducers ’99), Sendai, Japan, pp. 534-537, 06/1999

  238. A. Naguib, E. Soupos, H. Nagib, C. Huang, and K. Najafi, "A Piezoresistive MEMS Sensor for Acoustic Noise Measurements," 5th AIAA/CEASAeroacoustic Conference and Exhibit,, Bellevue, WA, 05/1999

  239. J.A. Von Arx, and K. Najafi, "A Single-Chip Fully-Integrated Telemetry-Powered System For Peripheral Nerve Stimulation," IEEE Int. Conf. On Solid-State Circuits (ISSCC ‘99), San Francisco CA, pp. 214-215, 02/1999

  240. N. Yazdi, and K. Najafi, "An Interface IC For Capacitive Silicon µg Accelerometers," IEEE Int. Conf. On Solid-State Circuits (ISSCC ‘99), San Francisco CA, pp. 132-133, 02/1999

  241. M. Dokmeci, and K. Najafi, "A High Sensitivity Polyimide Humidity Sensor For Monitoring Hermetic Micropackages," IEEE Micro Electro Mechanical Systems (MEMS) Conference, Orlando, Florida, pp. 279-284, 01/1999

  242. N. Yazdi, A. Salian, and K. Najafi, "A High-Sensitivity Capacitive Microaccelerometer With a Folded-Electrode Structure," IEEE Micro Electro Mechanical Systems (MEMS) Conference, Orlando, Florida, pp. 600-605, 01/1999

  243. Y.T. Cheng, L. Lin, and K. Najafi, "Localized Bonding with PSG or Indium Solder as Intermediate Layer," IEEE Micro Electro Mechanical Systems (MEMS) Conference, Orlando FL, pp. 285-289, 01/1999

  244. N. Yazdi, K. Najafi, "Modeling and Noise Analysis of A Silicon Micro-g Accelerometer with Direct Digital Output," The 2nd International Conference on Integrated Nano/Microtechnology for Space Applications (NanoSpace98), Houston, TX, 11/1998

  245. C. Huang, and K. Najafi, "Ultra-Thin p++ Monocrystalline Silicon Microstructures," Solid-State Sensor and Actuator Workshop, Hilton-Head, S.C., pp. 241-244, 06/1998

  246. B. Ziaie, T.W. Wu, N. Kocaman, K. Najafi, and D.J. Anderson, "An Implantable Pressure Sensor Cuff For Tonometric Blood Pressure Measurement," Solid-State Sensor and Actuator Workshop, Hilton-Head, S.C., pp. 216-219, 06/1998

  247. Y.T. Cheng, L. Lin, and K. Najafi, "Localized Silicon Fusion and Eutectic Bonding for MEMS Fabrication and Packaging," Solid-State Sensor and Actuator Workshop, Hilton-Head, S.C., pp. 233-236, 06/1998

  248. F. Ayazi and K. Najafi, "Design and fabrication of a high-performance polysilicon vibrating ring gyroscope," IEEE Micro Electro Mechanical Systems Workshop (MEMS'98), Heidelberg, Germany, pp. 621-626, 01/1998

  249. Y. Gianchandani, H. Kim, M Shinn, B. Ha, B. Lee, K. Najafi, and C. Song, "A MEMS-First Fabrication Process for Integrating CMOS Circuits with Polysilicon Microstructures," Eleventh IEEE International Workshop on Micro Electro Mechanical Systems (MEMS), Heidelberg, Germany, pp. 257-262, 01/1998

  250. C. Huang, K. Najafi, E. Alnajjar, C. Christophorou, A. Naguib, and H.M. Nagib , "Operation and Testing of Electrostatic Microactuators and Micromachined Sound Detectors for Active Control of High Speed Flows," IEEE/ASME Micro Electro Mechanical Systems Workshop, Heidelberg, Germany, pp. 81-86, 01/1998

  251. A. Naguib, C. Christophorou, E. Alnajjar, H. Nagib, C.C. Huang, and K. Najafi, "Arrays of MEMS-Based Actuators for Control of Supersonic Jet Screech," Meeting of the American Institute of Aeronautics and Astronautics, Paper AIAA 97-1963, 07/1997

  252. N. Yazdi, and K. Najafi, "An All-Silicon Single-Wafer Fabrication Technology for Precision Microaccelerometers," Ninth IEEE Int. Conference on Solid-State Sensors and Actuators, Transducers ‘97, Chicago, Vol. 2, pp. 1181-1184 (4B1.04), 06/1997

  253. C. Yeh, and K. Najafi, "Micromachined Tunneling Accelerometer with a Low-Voltage CMOS Interface Circuit," Ninth IEEE Int. Conference on Solid-State Sensors and Actuators, Transducers ‘97, Chicago, Vol. 2, pp. 1213-1216 (4B2.08P), 06/1997

  254. J. Von Arx, and K. Najafi, "On-Chip Coils with Integrated Cores for Remote Inductive Powering of Integrated Microsystems," Ninth IEEE Int. Conference on Solid-State Sensors and Actuators, Transducers ‘97, Chicago, Vol. 2, pp. 999-1002 (3D1.03), 06/1997

  255. M. Dokmeci, J. Von Arx, and K. Najafi, "Accelerated Testing of Anodically Bonded Glass-Silicon Packages in Salt Water," Ninth IEEE Int. Conference on Solid-State Sensors and Actuators, Transducers ‘97, Chicago, Vol. 1, pp. 283-286 (1D4.08P), 06/1997

  256. B. Ziaie, N. Kocaman, and K. Najafi, "A Generic Micromachined Silicon Platform for Low-Power, Low-Loss Miniature Transceivers," Ninth IEEE Int. Conference on Solid-State Sensors and Actuators, Transducers ‘97, Chicago,, Vol. 1, pp. 257-260 (1D4.01), 06/1997

  257. Y. Gianchandani, M. Shinn, K. Najafi, "Impact of Long, High Temperature Anneals on Residual Stress in Polysilicon," Ninth IEEE Int. Conference on Solid-State Sensors and Actuators, Transducers ‘97, Chicago,, Vol. 1, pp. 623-624 (2D1.09PL), 06/1997

  258. S. Wang, S.B. Crary, K. Najafi, "Electronic Determination of the Modulus of Elasticity and Intrinsic Stress of Thin Films Using Capacitive Bridges," Proceedings, Symposium of the Materials Research Society (MRS), San Francisco CA, Vol. 276, pp. 203-208, 04/1997

  259. B. Ziaie, K. Najafi, and D. J. Anderson , "A Low-Power Miniature Transmitter Using a Low-Loss Silicon Platform for Biotelemetry," 19th Ann. International IEEE Engineering in Medicine and Biology Conference, Chicago,, 4 pages, 01/1997

  260. E. Alnajjar, H. Nagib, A. Naguib, C. Christophorou, C. Huang, and K. Najafi, "Receptivity of High-Speed Jets to Excitation Using an Array of MEMS-Based Mechanical Actuators," ASME, FEDSM'97, 01/1997

  261. A. Selvakumar, F. Ayazi, and K. Najafi, "A High-Sensitivity Z-Axis Silicon Accelerometer," IEEE Int. Electron Devices Meeting, San Francisco, 12/1996

  262. E. Alnajjar, A. Naguib, H. Nagib, C.C. Huang, K. Najafi, "Receptivity of the Shear Layer of an Axi-Symmetric Jet to Excitation Using MEMS-Based Mechanical Actuators," Meeting of the Division of Fluid Dynamics, New York, 11/1996

  263. K. Najafi, "Silicon Micromachining Technologies: Future Needs and Challenges," Micromaching & Microfabrication Process Technology II Conference, SPIE, 10/1996

  264. B. Ziaie, J. Von Arx, K. Najafi, "A Micro-Fabricated Planar High-Current IrOx Stimulating Microelectrode," IEEE Eng. in Medicine and Biology (EMBS) Conf., Amsterdam, 10/1996

  265. N. Yazdi, A. Mason, K. Najafi, K.D. Wise, "A Low-Power Generic Interface Circuit for Capacitive Sensors," Solid-State Sensor and Actuator Workshop, Hilton Head, SC, pp. 215-218, 06/1996

  266. N. Yazdi, A. Mason, K. Najafi, and K.D. Wise, "A Smart Sensing Microsystem with a Capacitive Sensor Interface," IEEE Int. Conf. on Circuits and Systems, Atlanta, Georgia, Vol. 4, pp. 336-339, 05/1996

  267. A. Selvakumar, N. Yazdi, and K. Najafi, "A Low-Power Wide Range Threshold Acceleration Sensing System," Micro Electromechanical Systems Workshop (MEMS ‘96), San Diego, California, pp. 186-191, 02/1996

  268. T. Akin, B. Ziaie, and K. Najafi, "A Modular, Micromachined High-Density Connector for Implantable Biomedical Systems," Micro Electromechanical Systems Workshop (MEMS ‘96), San Diego, California, pp. 497-502, 02/1996

  269. C. Huang, J. Papp, K. Najafi, and H.M. Nagib, "A Microactuator System for the Study and Control of Screech in High-Speed Jets," Micro Electromechanical Systems Workshop (MEMS ‘96), San Diego, California, pp. 19-24, 02/1996

  270. B. Ziaie and K. Najafi, "Biomedical Microdevices: A Micromachining Approach," International Semiconductor Device Research Symposium, Charlottesville, VA, pp. 401-404, 12/1995

  271. C. Yeh, and K. Najafi, "A Low-Voltage Bulk Silicon Tunneling-Based Microaccelerometer," Int. Electron Devices Meeting (IEDM ‘95), Washington D.C., pp. 593-596, 12/1995

  272. K. Najafi, "Recent Progress in Micromachining Technology and Applications in Implantable Biomedical Systems," Sixth Int. Symp. on Micro Machine and Human Science, MHS ‘95, Nagoya, Japan, pp. 11-20, 10/1995

  273. K. Najafi, "Microinstrumentation Systems for Environmental Monitoring," nt. Symp. on Micro Systems, Intelligent Materials and Robots, Sendai, Japan, pp. 142-145, 09/1995

  274. K.D. Wise, C.H. Mastrangelo, K. Najafi, and Clark T.C. Nguyen, "Research in Integrated Sensors and Microsystems at the University of Michigan," Sensors Expo, Chicago, IL, Digest, 09/1995

  275. M. Nardin, and K. Najafi, "A Multichannel Neuromuscular Microstimulator With Bi-Directional Telemetry," Int. Conference on Solid-State Sensors and Actuators, Transducers '95, Stockholm, Sweden, Vol. 1, pp. 59-62 (7-A1), 06/1995

  276. J. Von Arx, B. Ziaie, M. Dokmeci, And K. Najafi, "Hermeticity Testing of Glass-Silicon Packages with On-Chip Feedthroughs," Int. Conference on Solid-State Sensors and Actuators, Transducers '95, Stockholm, Sweden, Vol. 1, pp. 244-247 (54-A6), 06/1995

  277. A. Mason, N. Yazdi, K. Najafi, and K.D. Wise, " Low-Power Wireless Microinstrumentation System for Environmental Monitoring," Int. Conference on Solid-State Sensors and Actuators, Transducers '95, Stockholm, Sweden, Vol. 1, pp. 107-110 (19-A3), 06/1995

  278. Y.B. Gianchandani, K.J. Ma, and K. Najafi, "A CMOS Dissolved Wafer Process for Integrated p++ Microelectromechanical Systems," Int. Conference on Solid-State Sensors and Actuators, Transducers '95, Stockholm, Sweden, Vol. 1, pp. 79-82 (12-A2), 06/1995

  279. T. Akin, K. Najafi, and R.M. Bradley, "An Implantable Multichannel Digital Neural Recording System for a Micromachined Sieve Electrode," Int. Conference on Solid-State Sensors and Actuators, Transducers '95, Stockholm, Sweden, Vol. 1, pp. 51-54 (5-A1), 06/1995

  280. K. Najafi, "Silicon-Based Electronic Interfaces to Biological Systems," 1995 IEEE Int. Conference on Robotics and Automation, Nagoya, Japan, 05/1995

  281. R.M. Bradley, T. Akin, S. Gurkan, X. Cao, and K. Najafi, "Chronic Recordings from Fibers of Rat Glossopharyngeal Nerve Regenerated Through a Micromachined Sieve Electrode Array," 17th annual meeting of the Association for Chemoreception Sciences, Sarasota FL, pp. 231, 04/1995

  282. M. Nardin, B. Ziaie, J. Von Arx, A. Coghlan, M. Dokmeci, and K. Najafi, "An Inductively Powered Microstimulator for Functional Neuromuscular Stimulation," 13th International Symposium on Biotelemetry, Williamsburg, VA, pp. 99-104, 04/1995

  283. A. Selvakumar, K. Najafi, W.H. Juan, and S. Pang, "Vertical Comb Array Microactuators," EEE Micro Electro Mechanical Systems (MEMS) Workshop, Amsterdam, Netherlands, pp. 43-48, 02/1995

  284. K. Najafi, "Sensor/Circuit Integration in Biomedical Applications," European NEXUS Workshop on Sensor/Circuit Integration, Toulouse, France, 09/1994

  285. K. Najafi, "Integrated Sensing Systems in Closed Loop Neural Prosthesis," European Solid-State Sensors and Actuators Conf., EUROSENSORS, Toulouse, France, pp. 5, 09/1994

  286. Y.B. Gianchandani, and K. Najafi, "Bulk Silicon Micromachining for the Scanning Thermal Profiler and Other Applications," Int. Symposium on Optics, Imaging, and Instrumentation, SPIE, San Diego, CA, Digest, 07/1994

  287. W.H. Juan, S.W. Pang, A. Selvakumar, and K. Najafi, "Using Electron Cyclotron Resonance (ECR) Source to Etch Polyimide Molds for Fabrication of Electroplated Microstructures," Solid-State Sensors and Actuators Workshop, Hilton Head, SC, pp. 82-85, 06/1994

  288. C.W. Yeh, and K. Najafi, "Bulk-Silicon Tunneling-Based Pressure Sensors," Solid-State Sensors and Actuators Workshop, Hilton Head, SC, pp. 201-204, 06/1994

  289. Y.B. Gianchandani, and K. Najafi, "A Compact Strain Sensor with a Bent Beam Deformation Multiplier and a Complementary Motion Vernier," Solid-State Sensors and Actuators Workshop, Hilton Head, SC, pp. 116-119, 06/1994

  290. K.J. Ma, N. Yazdi, and K. Najafi, "A Bulk-Silicon Capacitive Microaccelerometer with Built-In Overrange and Force Feedback Electrodes," Solid-State Sensors and Actuators Workshop, Hilton Head, SC, pp. 160-163, 06/1994

  291. A. Selvakumar, and K. Najafi, "High Density Vertical Comb Array Microactuators Fabricated Using A Novel Bulk/Poly-Silicon Trench Refill Technology," Solid-State Sensors and Actuators Workshop, Hilton Head, SC, pp. 138-141, 06/1994

  292. M.W. Putty, and K. Najafi, "A Micromachined Vibrating Ring Gyroscope," Solid-State Sensors and Actuators Workshop, Hilton Head, SC, pp. 213-220, 06/1994

  293. T. Akin, K. Najafi, "A Telemetrically Powered and Controlled Implantable Neural Recording System with CMOS Interface Circuitry," IEEE 7th Mediterranean Electrotechnical Conf., Antalya, Turkey, pp. 545-548, 04/1994

  294. K. Ma, and K. Najafi, "A New Capacitive Electrochemical Etch-Stop Technique," IEEE/ASME Micro Electro Mechanical Systems, Oiso, Japan, pp. 158-163, 01/1994

  295. T. Akin, K. Najafi, R. Bradley, "A LowPower Implantable Multichannel Digital Neural Record System," VLSI Symposium, Hawaii, Proceedings, 01/1994

  296. Y. Gianchandani, and K. Najafi, "Silicon Micromachined Thermal Profilers," Int. Electron Devices Meeting, IEDM '93, Washington, DC, pp. 191-194, 12/1993

  297. K. Najafi, and C.H. Mastrangelo, "Solid-State Microsensors and Smart Structures," IEEE Ultrasonics, Ferroelectrics, and Frequency Control Symposium, Baltimore, Maryland, Proceedings, 11/1993

  298. A.D. Oliver, W.G. Baer, K. Najafi, and K.D. Wise, "Precision Measurement of Process Temperature Uniformity in Semiconductor Manufacturing," SRC TECHCON '93, Proceedings, 10/1993

  299. B. Ziaie, J. Von Arx, M. Nardin, and K. Najafi, "A Hermetic Packaging Technology with Multiple Feedthrough For Integrated Sensors and Actuators," 7th Int. Conference on Solid-State Sensors and Actuators (Transducers '93), Yokohama, Japan, pp. 450-453, 06/1993

  300. B. Ziaie, M. Nardin, J. Von Arx, and K. Najafi, "A Single Channel Implantable Microstimulator for Functional Neuromuscular Stimulation (FNS)," 7th Int. Conference on Solid-State Sensors and Actuators (Transducers '93), Yokohama, Japan, pp. 266-269, 06/1993

  301. K. Najafi, "Solid-State Integrated Microsensors," 124th Meeting of the Acoustical Society of America, New Orleans, LA, 10/1992

  302. S. Bouwstra, H.A.C. Tilmans, A. Selvakumar, and K. Najafi, "Base-Driven Micromechanical Resonators," Eurosensors VI, San Sebastian, Spain, pp. 65, 10/1992

  303. K. Najafi, "Silicon Integrated Microsensors," International Society for Optical Engineering (SPIE) Symposium, OE/FIBERS '92, Boston, MA, OE/FIBERS 92, 09/1992

  304. S. Bouwstra, H.A.C. Tilmans, A. Selvakumar, and K. Najafi, "Base-Driven Micromechanical Resonators," Digest, IEEE Solid-State Sensors and Actuators Workshop, Hilton Head, SC, pp. 148-152, 06/1992

  305. Y. Gianchandani, K. Najafi, "Micron-Sized High Aspect Ratio Bulk Silicon Micromechanical Devices," Proceedings, IEEE Micro Electro Mechanical Systems Workshop, Travermude, Germany, pp. 208-213, 02/1992

  306. Y. Gianchandani, K. Najafi, "Batch Fabrication and Assembly of Micromotor-Driven Mechanisms With Multi-Level Linkages," Proceedings, IEEE Micro Electro Mechanical Systems Workshop, Travermude, Germany, pp. 141-146, 02/1992

  307. Y. Gianchandani, K. Najafi, "A Bulk Silicon Dissolved Wafer Process for Microelectromechanical Systems," Technical Digest, Int. Electron Devices Meeting, Washington DC, pp. 757-760, 12/1991

  308. T. Akin, K. Najafi , "A Micromachined Silicon Sieve Electrode for Nerve Regeneration Applications," 6th Int. Conf. on Solid-State Sensors and Actuators, San Francisco, CA, pp. 128-131, 06/1991

  309. B. Ziaie, Y. Gianchandani, K. Najafi, "A High-Current Thin-Film Neuromuscular Microstimulator," 6th Int. Conf. on Solid-State Sensors and Actuators, San Francisco, CA, pp. 124-127, 06/1991

  310. W.G. Baer, T. Hull, K.D. Wise, K. Najafi, K.D. Wise, "A Multiplexed Silicon Infrared Thermal Imager," 6th Int. Conf. on Solid-State Sensors and Actuators, San Francisco, CA, pp. 631-634, 06/1991

  311. J.F. Hetke, K. Najafi, K.D. Wise, "Flexible Silicon Interconnects for Microelectromechanical Systems," 6th Int. Conf. on Solid-State Sensors and Actuators, San Francisco, CA, pp. 764-767, 06/1991

  312. J. Ji, S.T. Cho, Y. Zhang, K. Najafi, K.D. Wise, "An Ultraminiature CMOS Pressure Sensor For a Multiplexed Cardiovascular Catheter," 6th Int. Conf. on Solid-State Sensors and Actuators, San Francisco, CA, pp. 1018-1021, 06/1991

  313. K.D. Wise, K. Najafi, J. Ji, J.F. Hetke, S.T. Tanghe, A. Hoogerwerf, D.J. Anderson, S.L. BeMent, M. Ghazzi, W. Baer, T. Hull, Y. Yang, "Micromachined Silicon Microprobes for CNS Recording and Stimulation," IEEE Eng. in Medicine and Biol. Soc. Conf., Philadelphia, PA, Digest, 11/1990

  314. T. Akin, B. Ziaie, K. Najafi, "RF Telemetry Powering and Control of Hermetically-Sealed Integrated Sensors and Actuators," IEEE Solid-State Sensor and Actuator Workshop, Hilton-Head, SC, pp. 145-148, 06/1990

  315. S.T. Cho, K. Najafi, K.D. Wise, "Secondary Sensitivities and Stability of Ultrasensitive Pressure Sensors," IEEE Solid-State Sensor and Actuator Workshop, Hilton-Head, SC, pp. 184-187, 06/1990

  316. S.T. Cho, K. Najafi, K.D. Wise, "Scaling and Dielectric Stress Compensation of Ultrasensitive Boron-Doped Silicon Microstructures," IEEE Workshop on Micro Electromechanical Systems, Napa Valley, CA, pp. 50-55, 02/1990

  317. S.T. Cho, K. Najafi, K.D. Wise, "An Ultrasensitive Silicon Pressure-Based Flowmeter," International Electron Device Meeting, Washington, pp. 499-502, 12/1989

  318. J.F. Hetke, K. Najafi, K.D. Wise, "Flexible Miniature Ribbon Cables for Long-Term Connection to Implantable Sensors," 5th Int. Conf. on Solid-State Sensors and Actuators, Transducers '89, Montreux, Switzerland, pp. 277-278, 06/1989

  319. S.J. Tanghe, K. Najafi, K.D. Wise, "A Planar IrO Multichannel Stimulating Electrode for Use in Neural Prosthesis," 5th Int. Conf. on Solid-State Sensors and Actuators, Transducers '89, Montreux, Switzerland, pp. 297-298, 06/1989

  320. J. Ji, K. Najafi, K.D. Wise, "A Scaled Electronically-Configurable Multichannel Recording Array," 5th Int. Conf. on Solid-State Sensors and Actuators, Transducers '89, Montreux, Switzerland, pp. 195-196, 06/1989

  321. K. Suzuki, K. Najafi, K.D. Wise, "Process Alternatives and Scaling Limits for High-Density Silicon Tactile Imagers," 5th Int. Conf. on Solid-State Sensors and Actuators, Transducers '89, Montreux, Switzerland, pp. 260-262, 06/1989

  322. K. Najafi, "Integrated Sensors in Biological Environments," 5th Int. Conf. on Solid-State Sensors and Actuators, Transducers '89, Montreux, Switzerland, pp. 295-296, 06/1989

  323. K. Najafi, K. Suzuki, "A Novel Technique and Structure for the Measurement of Intrinsic Stress and Young's Modulus of Thin Films," IEEE Workshop on Micro Electromechanical Systems, Salt Lake City, UT, pp. 96-97, 02/1989

  324. K. Suzuki, K. Najafi, K.D. Wise, "A 1024-Element High-Performance Silicon Tactile Imager," Int. Electron Device Meeting (IEDM) San Francisco CA, pp. 674-677, 12/1988

  325. K.D. Wise, N. Najafi, C.L. Johnson, J. Cowles, S. Cho, K. Najafi, "An Integrated VLSI Sensor for Semiconductor Process Control," TECHCON '88, Dallas, TX, pp. 345-348, 10/1988

  326. K. Najafi, "Implantable Sensors," Symposium for Innovation in Measurement Science, Instrument Society of America, Geneva NY, 08/1988

  327. N. Najafi, K.W. Clayton, W.G. Baer, K. Najafi, K.D. Wise, "An Architecture and Interface for VLSI Sensors," Solid-State Sensor and Actuator Workshop, Hilton Head, SC, pp. 76-79, 06/1988

  328. K. Najafi, J. Ji, K.D. Wise, "Multichannel Intracortical Recording Microprobes: Scaling Limitations, Device Characteristics, and Circuit Encapsulation," 4th Int. Conf. on Solid-State Sensors and Actuators, Transducers '87, Japan, pp. 65-68, 06/1987

  329. K. Najafi, "Sensor-System Interface: The Influence of On-Chip Electronics," Int. Symp. Circuits and Systems, Philadelphia, PA, pp. 233-236, 05/1987

  330. K. Najafi, "Silicon Micromachining: Key to Silicon Integrated Sensors," Proc. of Symp. on Sensors and Technology, Cleveland, Vol. 87-15, pp. 152-164, 04/1987

  331. S.L. BeMent, K.L. Drake, D.J. Anderson, K.D. Wise, K. Najafi, "Semiconductor Microprobes- Recording/Biocompatibility Properties," IEEE/EMBS Eighth Annual Conference, Dallas, Texas, pp. 1622-1625,, 11/1986

  332. K. Najafi, K.D. Wise, "An Implantable Multielectrode Array with On-Chip Signal Processing," Int. Solid-State Ckts. Conf., pp. 98-99, 02/1986

  333. S.L. BeMent, D.J. Anderson, K.D. Wise, K.L. Drake, K. Najafi, L. Xue, "Silicon Multielectrode Impedance, Geometry, and Neural Cell Recording Ability," IEEE/Seventh Annual Conf. Eng. Medicine and Biology Society, pp. 159-162, 09/1985

  334. K.D. Wise, K. Najafi, K.L. Drake, "A Multichannel Intracortical Microprobe for Single-Unit Recording," IEEE/NSF Biosensors Conference, Los Angeles, CA, pp. 87-89, 09/1984

  335. K.D. Wise, K. Najafi, "A Micromachined Integrated Sensor with On-Chip Self-Test Capability," Solid-State Sensors Conference, Hilton Head, SC, pp. 12-16, 06/1984

Other Publications

  1. S.W. Yoon, S. Lee, N.C. Perkins, K. Najafi, "Novel Shock Protection Technologies for MEMS using Nonlinear Springs," 10th Korean MEMS Conference, Jeju island, Korea, pp. 135-136, 04/2008

  2. K. Najafi, "Packaging of Implantable Microsystems," IEEE Int. Sensors Conference, Atlanta GA, 10/2007

  3. K. Najafi, "Wireless Integrated Microsystems for Environmental Monitoring and Implantable Prostheses," Canadian Workshop on MEMS, Montreal, Canada, 08/2007

  4. K. Najafi, "Micromachined Gas Chromatography Microsystem for Complex Gas Analysis," DARPA Microsystems Technologies Office Symposium, San Jose CA, 03/2007

  5. K. Najafi, "Packaging of Implantable Microsystems," IEEE Int. Sensors Conference, Atlanta GA, 10/2006

  6. P. Mohseni, and K. Najafi, "Single-Chip Wireless Microsystems for Multichannel Neural Biopotential Recording," NIH-NINDS Neural Prosthesis Workshop, Bethesda MD, 10/2006

  7. E. T. Zellers, W. H. Steinecker, G. R. Lambertus, M. Agah, C.-J. Lu, H. K. L. Chan, J. A. Potkay, M.C. Oborny, J. M. Nichols, A. Astle, H. S. Kim, M. P. Rowe, J. Kim, L. W. da Silva, J. Zheng, J. J. Whiting, R. D. Sacks, S. W. Pang, M. Kaviany, P. L. Bergstrom, A. J. Matzger, Ç. Kurdak, L. P. Bernal, K. Najafi, K. D. Wise, "A Versatile MEMS Gas Chromatograph For Determinations Of Environmental Vapor Mixtures," Solid State Sensor, Actuator and Microsystems Workshop (Hilton Head 2004), Hilton Head Island SC, 06/2004

  8. K. D. Wise, K. Najafi, R. Sacks, and E. T. Zellers, "A Wireless Integrated Microsystem for Environmental Monitoring," IEEE Int. Solid-State Circuits Conference, San Francisco CA, pp. 434-435, 02/2004

  9. K. Najafi, J. Chae, H. Kulah and G. He, "Micromachined Silicon Accelerometers And Gyroscopes," IROS - IEEE International Robotics and Systems Conference, Las Vegas NV, 10/2003

  10. P. Mohseni and K. Najafi, "Bi-directional wireless microsystems for biomedical in vivo recording applications," SIGDA Ph.D. Forum at 40th Design Automation Conf. (DAC’03), Anaheim CA, 06/2003

  11. K. Najafi, "Micropackaging Technologies for Integrated Microsystems: Applications to MEMS and MOEMS," PIE’s Micromachining and Microfabrication Symposium, San Jose CA, pp. 1-19, 01/2003

  12. K. Wise and K. Najafi, "Fully-Implantable Auditory Prostheses: Restoring Hearing to the Profoundly Deaf," IEEE International Electron Devices Meeting (IEDM), San Francisco CA, pp. 499-502, 12/2002

  13. K. Najafi, "Power and Integrated Microsystems," SPIE International Symposium on Design, Test, Integration, and Packaging of MEMS and MOEMS, Cannes, France, 05/2002

  14. Y. Shimatani, S.A. Nikles, K. Najafi, and R.M. Bradley, "Simultaneous chronic recording from multiple single fibers of the chorda tympani nerve using an implantable sieve electrode array," Presented at the XXIV annual meeting of the Association for Chemoreception Sciences, Sarasota FL, 01/2002

  15. K. Najafi, "MEMS and Microsystems," International Semiconductor Device Research Symposium, Washington DC, 12/2001

  16. M. O. Muller, L.P. Bernal, T.-K. A. Chou, K. Najafi, and P. D. Washabaugh, "On Propulsion Efficiency And Vortical Structure Of Synthetic Jet Flows," APS Division Of Fluid Dynamics 54th Annual Meeting, San Diego CA, 11/2001

  17. K. Najafi, "Research in Wireless Integrated Micro Systems (WIMS) at University of Michigan," Sensors Expo, Detroit MI, 09/2000

  18. K. Najafi, "Integrated Biomedical Microsystems," World Congress on Medical Physics and Biomedical Engineering, Nice, France, 09/1997

  19. K. Najafi, "Silicon Micromachining Technologies: Future Needs and Challenges," SPIE, Micromachining & Microfabrication Process Technology II Conference, 10/1996

  20. B. Ziaie and K. Najafi, "Biomedical Microdevices: A Micromachining Approach," 1995 International Semiconductor Device Research Symposium, Charlottesville VA, pp. 401-404, 12/1995

  21. K. Najafi, "Microinstrumentation Cluster for Environmental Sensing," GE MEMS and Advanced Packaging Workshop, Schenectady NY, 11/1995

  22. K. Najafi, "MEMS Research Activities at the University of Michigan," IEEJ Seminar on MEMS, MST, and Micromachines, University of Tokyo, Tokyo, Japan, 10/1995

  23. K. Najafi, "Research in Integrated Sensors and Microsystems at the University of Michigan," Technical Digest of the IEEJ Seminar on MEMS, MST and Micromachines, Tpkyo, Japan, 10/1995

  24. K. Najafi, "Recent Progress in Micromachining Technology and Applications in Implantable Biomedical Systems," Sixth Int. Symp. on Micro Machine and Human Science, MHS ‘95, Nagoya, Japan, pp. 11-20, 10/1995

  25. K. Najafi, "Microinstrumentation Systems for Environmental Monitoring," Int. Symp. on Micro Systems, Intelligent Materials and Robots, Sendai, Japan, pp. 142-145, 09/1995

  26. K.D. Wise, C.H. Mastrangelo, K. Najafi, and Clark T.C. Nguyen, "Research in Integrated Sensors and Microsystems at the University of Michigan," Sensors Expo, Chicago IL, 09/1995

  27. K. Najafi, "Silicon-Based Electronic Interfaces to Biological Systems," Workshop on "Bio-Mechatronics" held as part of the 1995 IEEE Int. Conference on Robotics and Automation, Nagoya, Japan, 05/1995

  28. K. Najafi, "Sensor/Circuit Integration in Biomedical Applications," European NEXUS Workshop on Sensor/Circuit Integration, Toulouse, France, 09/1994

  29. K. Najafi, "Integrated Sensing Systems in Closed Loop Neural Prosthesis," European Solid-State Sensors and Actuators Conf., EUROSENSORS, Toulouse, France, 09/1994

  30. M.W. Putty, and K. Najafi, "A Micromachined Vibrating Ring Gyroscope," Solid-State Sensors and Actuators Workshop, Hilton Head Island SC, pp. 213-220, 06/1994

  31. K. Najafi, and C.H. Mastrangelo, "Solid-State Microsensors and Smart Structures," IEEE Ultrasonics, Ferroelectrics, and Frequency Control Symposium, Baltimore MD, 11/1993

  32. K. Najafi, "Solid-State Integrated Microsensors," 124th Meeting of the Acoustical Society of America, New Orleans LA, 10/1992

  33. K. Najafi, "Silicon Integrated Microsensors," International Society for Optical Engineering (SPIE) Symposium, OE/FIBERS '92, Boston MA, 09/1992

  34. K. Najafi, "A Review of Solid-State Integrated Microsensors and Their Future Application in Space Systems," NASA SATWG Sensors and Software Workshop, New Orleans LA, 06/1992

  35. K. Najafi, "Packaging and Interconnect Technologies for Solid-State Microsensors," 181st Meeting of the Electrochemical Society, St. Louis MO, 05/1992

  36. K. Najafi, "Integrated Sensors and Microsystems: Communication Links to a Non-Electronic World," Eastern Communications Forum, an Educational Meeting Conducted by the National Engineering Consortium, Rye NY, 05/1992

  37. K. Najafi, "Present Advances and Future Needs in Integrated Sensors and Microsystems," National Materials Advisory Board (of the National Research Council) Workshop on Microengineering, Washington DC, 04/1992

  38. R.M. Bradley, R.H. Smoke, T.A. Akin, K. Najafi, "Functional Regeneration of Glossopharyngeal Nerve Through Micromachined Sieve Electrodes," The 14th Annual meeting of the Association for Chemoreception Sciences (AChemS XIV), Sarasota FL, 04/1992

  39. K. Najafi, "Solid-State Integrated Sensors, Fundamentals and Applications," Symposium on Electrochemical Science and Technology of the Michigan Chapter of the Electrochemical Society, Warren MI, 05/1991

  40. R.M. Bradley, S. Gurkan, B.E. Bradley, K. Najafi, "Regeneration of Rat Glossopharyngeal Nerve Through Sieve Electrodes," The 13th Annual meeting of the Association for Chemoreception Sciences (AChemS XIII), Sarasota FL, 04/1991

  41. J.F. Hetke, D.J. Anderson, J.A. Wiler, K. Najafi, K.D. Wise, "An Implantable Multichannel Silicon-Substrate Array for Chronic Stimulation of the Central Nervous System," Midwinter Meeting, Association for Research in Otolaryngology, St. Petersburg FL, 02/1991

  42. K. Najafi, "Solid-State Sensor and Actuator Research at the University of Michigan," Meeting of the Michigan Chapter of the American Vacuum Society, Ann Arbor MI, 02/1991

  43. K. Najafi, "A Dissolved-Wafer Silicon-On-Insulator Technology and Its Applications to Integrated Sensors and Actuators," ASME Design Engineering Show and Conference, Anaheim CA, 09/1990

  44. K.D. Wise, K. Najafi, and W.G. Baer,, "A Silicon Thermopile-Based Sensor for Non-Contact Thermal Imaging in Industrial process Control," Temperature Measurement Workshop, Sante Fe CA, 02/1990

  45. K. Najafi, "Integrated Sensors in Biological Environments," 5th Int. Conf. on Solid-State Sensors and Actuators (Transducers '89), Montreux, Switzerland, pp. 295-296, 06/1989

  46. J.F. Hetke, D.J. Anderson, D.A. Evans, J.A. Wiler, K. Najafi, R.A. Altschuler, "Tissue Volume Selectivity in the Cochlear Nucleus to Electrical Stimulation with Multichannel Silicon Substrate Arrays," Association for Res. in Otolaryngology, Midwinter Meeting, Florida, 02/1989

  47. K. Najafi, "Control and Measurement with Integrated Solid-State Sensors," Fourth Regional Symp., Int. Society for Hybrid Microelectronics, Dallas TX, 04/1988

  48. K. Najafi, K.D. Wise, "An Integrated Multielectrode Microprobe for Intracortical Recording," Invited Talk, BMES 1985 Annual Meeting, Los Angeles, 01/1988

  49. K. Najafi, "Organic and Inorganic Coatings for Protection of Integrated Circuit Electrodes," 18th Annual Neural Prosthesis Workshop, National Institutes of Health, Bethesda MD, 10/1987

  50. K. Najafi, "Solid-State Integrated Sensors and Their Application in Instrumentation and Measurement Systems," Symposium for Innovation in Measurement Science, Instrument Society of America, Geneva, NY, 08/1987

  51. K. Najafi, "Silicon Micromachining: Key to Silicon Integrated Sensors," Symposium on Sensors and Technology, Case Western Reserve University, Cleveland OH, 04/1987

  52. K. Najafi, K.D. Wise, "An Integrated Multielectrode Microprobe for Intracortical Recording," BMES 1985 Annual Meeting, Los Angeles CA, 04/1985

  53. K.D. Wise, K. Najafi, "A Micromachined Integrated Sensor with On-Chip Self-Test Capability," Solid-State Sensors Conf, Hilton Head Island SC, pp. 12-16, 06/1984

  54. K. Najafi, "Fabrication of Microstructures and Integrated Sensors Using a Dissolved-Wafer Silicon-On-Insulator Process," General Motors Research Labs Solid-State Sensor Workshop, Warren MI, 02/0198

Book Chapters

  1. H. Kim, K. Najafi, and L.P. Bernal, "Gas Micropumps," chapter in Comprehensive Microsystems, edited by Y. Gianchandani, Hans Zappe, and O. Tabata, Elsevier Publishers, 01/2008

  2. K. Najafi, T.J. Harpster, H. Kim, J.S. Mitchell, W.C. Welch III, "Wafer Bonding Using Parylene and Wafer-Level Transfer of Free-Standing Parylene Membranes," chapter in Comprehensive Microsystems, edited by Y. Gianchandani, Hans Zappe, and O. Tabata, Elsevier Publishers, 01/2008

  3. M. Ghovanloo, K.D. Wise, and K. Najafi, "Towards a button-sized 1024-site wireless cortical microstimulating array," euro-Nano Technology, Artificial Implants, and Neural Prostheses, Book of the1st Intl. IEEE/EMBS Conf. on Neural Engineering, Ed. M. Akay, Ch. 23, Hoboken: John Wiley & Sons, Inc., 01/2007

  4. G. K. Fedder, J. Chae, H. Kulah, K. Najafi, T. Denison, J. Kuang, and S. Lewis, "Monolithically Integrated Inertial Sensors," Chapter in “CMOS MEMS,” Edited by H. Baltes, O. Brand, G.K. Fedder, C. Hierold, J.G. Korvink, and O. Tabata, Volume 2 of a series of books entitled "Advanced Micro- and Nanosystems,”, Wiley-VCH, 01/2005

  5. K. Najafi, "Micromachined Systems For Neurophysiological Applications," Handbook of Microlithography, Micromachining and Microfabrication, Volume II: Micromachining and Microfabrication, SPIE, 01/1997

  6. K. Najafi, "Sensor and Circuit Integration in Biomedical Applications," Silicon Sensors and Circuits: On-Chip Compatibility, Ed. R.F. Wolffenbuttel, Chapman and Hall, pp. 211-257, 01/1996

  7. K. Najafi, K.D. Wise, N. Najafi, "Integrated Sensors," Semiconductor Sensors, Edited by Simon Sze, John Wiley, 01/1994

  8. D.J. Anderson, K.D. Wise, and K. Najafi, "Micromachined Silicon Substrate Electrodes for Extracellular Recording," EEE Engineering in Medicine and Biology Conference, Paris, France, 10/1992

  9. K.D. Wise, K. Najafi, "VLSI Sensors in Medicine," Norman G. Einspruch and Robert D. Gold, eds., Academic Press, 01/1988

  Copyright © 2010 Khalil Najafi
University of Michigan College of Engineering Electrical Engineering and Computer Science