Journal Publications:
1. K. Najafi, K.D. Wise, T. Mochizuki, "A High-Yield
IC-Compatible Multichannel Recording Array," IEEE Trans. Electron
Devices, Vol. ED-32, No. 7, pp. 1206-1211, July 1985
2. S.L. BeMent, D.J. Anderson, K.D. Wise, K. Najafi,
K.L. Drake, "Solid-State Electrodes for Multiplexed Multichannel
Intracortical Neuronal Recording," IEEE Trans. Biomed.
Eng., Vol. BME-33, No. 2, pp. 230-241, February 1986
3. K. Najafi, K.D. Wise, "An Implantable Multielectrode
Array with On-Chip Signal Processing," IEEE J. Solid-State Ckts.,
Vol. SC-21, No. 6, pp. 1035-1044, December 1986
4. D.J. Anderson, K. Najafi, S.J. Tanghe, D.A. Evans,
K.L. Levy, J.F. Hetke, X. Xue, J.J. Zappia, K.D. Wise, "Batch-Fabricated
Thin-Film Electrodes for Stimulation of the Central Auditory System,"
IEEE Trans. Biomed. Eng., Vol. BME-36, No. 7, pp. 693-704, July 1989
5. K. Najafi, K. Suzuki, "Measurement of Fracture
Stress, Young's Modulus, and Intrinsic Stress of Heavily Boron-Doped
Silicon Microstructures," J. Thin Solid Films, 181, pp. 251-258,
December 1989
6. S.J. Tanghe, K. Najafi, K.D. Wise, "A Planar
IrO Multichannel Stimulating Electrode for Use in Neural Prosthesis,"
Sensors and Actuators, pp. 464-467, B1, 1990
7 . J. Ji, K. Najafi, K.D. Wise, "A Scaled Electronically-Configurable
Multichannel Recording Array," Sensors and Actuators, pp. 589-591,
A21-A23, 1990
8. K. Suzuki, K. Najafi, K.D. Wise, "Process Alternatives
and Scaling Limits for High-Density Silicon Tactile Imagers," Sensors
and Actuators, pp. 915-918, A21-A23, 1990
9. K. Najafi, "Integrated Sensors in Biological
Environments," Invited Paper, Sensors and Actuators, pp. 453-459,
B1, 1990
10. J.F. Hetke, K. Najafi, K.D. Wise, "Flexible
Miniature Ribbon Cables for Long-Term Connection to Implantable Sensors,"
Sensors and Actuators, pp. 999-1002, A21-A23, 1990
11. K. Najafi, J. Ji, K.D. Wise, "Scaling Limitations
of Silicon Multichannel Recording Probes," IEEE Trans. Biomed.
Eng., Vol. BME-37, No. 1, pp. 1-11, January 1990
12. K. Najafi, J.F. Hetke, "Strength Characterization
of Silicon Microprobes in Neurophysiological Tissues," IEEE Trans.
on Biomedical Engineering, Vol. BME-37, No. 5, pp. 474-481, May 1990
13. K. Suzuki, K. Najafi, K.D. Wise, "A 1024-Element
High-Performance Silicon Tactile Imager," IEEE Trans. Electron
Devices, Vol. ED-37, No. 8, pp. 1852-1860, August 1990 (Winner of the
Paul Rappaport Award for the best paper published in an Electron Device
Society publication in 1990)
14. Jin Ji, K. Najafi, Kensall Wise, “A Low-Noise
Demultiplexing System Active Multichannel Microelectrode Arrays,”
IEEE Transactions of Biomedical Engineering, Vol. 38, #1 January 1991
15. K. Najafi, "Smart Sensors," Invited Paper,
J. Micromech. & Microeng., 1, pp. 86-102, June 1991
16. K.D. Wise, K. Najafi, "Microfabrication Techniques
for Integrated Sensors and Microsystems," Invited Paper, Science,
Vol. 254, pp. 1335-1342, November 1991
17. S.T. Cho, K. Najafi, C.L. Lowman, K.D. Wise, "An
Ultrasensitive Silicon Pressure-Based Microflow Sensor," IEEE Trans.
Electron Devices, Vol. ED-39, No. 4, pp. 825-835, April 1992
18. S.T. Cho, K. Najafi, K.D. Wise, "Internal
Stress Compensation and Scaling in Ultrasensitive Silicon Pressure Sensors,"
IEEE Trans. Electron Devices, Vol. ED-39, No. 4, pp. 836-842, April
1992
19. Y. Gianchandani, K. Najafi, "Batch-Assembled
Multi-Level Micromachined Mechanisms from Bulk Silicon," Journal
of Micromechanics and Microengineering, Vol. 2, No. 2, pp. 80-85, June
1992
20. J. Ji, S.T. Cho, Y. Zhang, K. Najafi, K.D. Wise,
"An Ultra-miniature CMOS Pressure Sensor for a Multiplexed Cardiovascular
Catheter," IEEE Trans. on Electron Devices, Vol. ED-39, No. 10,
pp. 2260-2267, October 1992
21. Y. Gianchandani, K. Najafi, "A Bulk Silicon
Dissolved Wafer Process for Microelectromechanical Devices," IEEE/ASME
J. Micro Electro Mechanical Systems (J-MEMS), Vol. 1, No. 2, pp. 77-85,
June 1992
22. R.M. Bradley, R.H. Smoke, T. Akin, K. Najafi, "Functional
Regeneration of Glossopharyngeal Nerve Through Micromachined Sieve Electrode
Arrays," Brain Research, 594, pp. 84-90, 1992
23. S. Bouwstra, J. van Rooijen, H.A.C. Tilmans, A.
Selvakumar, and K. Najafi, "Thermal-Base Drive for Micromechanical
Resonators Employing Deep-Diffusion Bases," Sensors and Actuators,
A, 37-38, pp. 38-44, 1993
24. R. Aroca, H. Bolourchi, D. Battisti, and K. Najafi,
"Gas Adsorption and Electrical Properties of Two Langmuir-Blodgett
Layers of Cerium Bisphthalocyanine," Langmuir Journal of the American
Chemical Society, 1993
25. J.F. Hetke, J.L. Lund, K. Najafi, K.D. Wise, and
D.J. Anderson, "Silicon Ribbon Cables for Chronically Implantable
Microelectrode Arrays," IEEE Trans. on Biomedical Engineering,
Vol. 41, No. 4, pp. 314-321, April 1994
26. T. Akin, K. Najafi, Richard H. Smoke, Robert M.
Bradley, "A Micromachined Silicon Sieve Electrode for Nerve Regeneration
Applications," IEEE Trans. Biomedical Engineering, Vol. 41, No.
4, pp. 305-313, April 1994
27. K. Najafi, "Solid-State Microsensors for Cortical
Nerve Recordings," (Invited paper) IEEE Eng. in Medicine and Biology
Magazine, pp. 375-387, June/July Issue, 1994
28. W.G. Baer, K. Najafi, K.D. Wise, and R.S. Toth,
"A 32-Element Micromachined Thermal Imager with On-Chip Multiplexing,"
Sensors and Actuators, Vol. 48, No. 1, pp. 47-54, 1995
29. Y. Gianchandani, and K. Najafi, "Bent-Beam
Strain Sensors," IEEE/ASME J. Micro Electro Mechanical Systems
(JMEMS), pp. 52-58, Vol. 5, No. 1, March 1996
30. B. Ziaie, J. A. V. Arx, M.R. Dokmeci, and K. Najafi,
“A Hermetic Glass-Silicon Micropackage with High-Density On-Chip
Feedthroughs for Sensors & Actuators,” IEEE Journal of Microelectromechanical
Systems, Vol. 5, No. 3, pp. 166-179, September 1996
31. R.M. Bradley, X. Cao, T. Akin, and K. Najafi, “Long-Term
Chronic Recordings From Peripheral Sensory Fibers Using a Sieve Electrode,”
J. Neuroscience Methods, 73, pp. 177-186, 1997
32. B. Ziaie, M.D. Nardin, A.R. Coghlan, and K. Najafi,
“A Single-Channel Implantable Microstimulator for Functional Neuromuscular
Stimulation,” IEEE Trans. on Biomedical Engineering, Vol. BME-44,
No. 10, October 1997
33. Y. Gianchandani, and K. Najafi, "A Silicon Micromachined
Scanning Thermal Profiler with Integrated Elements for Sensing and Actuation,” IEEE
Trans. Electron Devices, Vol. 44, No. 11, pp. 1857-1868, November 1997
34. C. Yeh, and K. Najafi, “A Low-Voltage Tunneling
Based Silicon Microaccelerometer,” IEEE Transactions on Electron
Devices, Vol. 44, No. 11, pp. 1875-1882, November 1997
35. J.S. Walter, L. Riedy, W. King, J.S. Wheeler, K.
Najafi, C.L. Anderson, T.M. Gudausky, and M. Dokmeci, “Short-Term
Bladder-Wall Response to Implantation of Microstimulators,” J.
of Spinal Cord Medicine, Vol. 20, No. 3, pp. 319-323, 1997
36. T. Akin, K. Najafi, and R.M. Bradley, “A Wireless
Implantable Multichannel Digital Neural Recording System for a Micromachined
Sieve Electrode,” IEEE J. Solid-State Circuits, January 1998
37. Y. Gianchandani, M. Shinn, and K. Najafi, "Impact
of High Thermal Budget Anneals on Polysilicon as a Micromechanical Material,"
IEEE/ASME J. Micro Electro Mechanical Systems (JMEMS), March 1998
38. C. Yeh, and K. Najafi, “CMOS Interface Circuitry
For A Low-Voltage Micromachined Tunneling Accelerometer,” IEEE/ASME
J. Micro Electro Mechanical Systems (JMEMS), March 1998
39. A. Selvakumar, F. Ayazi, and K. Najafi, "A
High Sensitivity Z-Axis Capacitive Silicon Microaccelerometer With A
Torsional Suspension,” IEEE/ASME Journal of Microelectromechanical
Systems, Vol. 7, No. 2, June 1998
40. N. Yazdi, F. Ayazi, and K. Najafi, “Micromachined
Inertial Sensors,” Invited Paper, Special Issue of IEEE Proceedings,
vol. 86, no. 8, pp. 1640-1659, August 1998
41. A.J. Mason, N. Yazdi, A.V. Chavan, K. Najafi, and
K.D. Wise, “A Generic Multi-Element Microsystem For Portable Wireless
Applications,” Invited Paper, Special Issue of IEEE Proceedings,
vol. 86, no. 8, pp. 1733-1746, August 1998
42. L. Lin, Y.T. Cheng, and K. Najafi, “Formation
of Silicon-Gold Eutectic Bond Using Localized Heating Method,”
Japanese Journal of Applied Physics, Part II, vol. 11B, pp. 1412-1414,
Nov. 1998
43. T. Akin, B. Ziaie, S. A. Nikles, and K. Najafi,
"A Modular Micromachined High-Density Connector for Implantable
Biomedical Systems," IEEE Transactions on Biomedical Engineering,
vol. 46, no. 4, pp. 471-480, April 1999
44. Y.T. Cheng, Liwei Lin and K. Najafi, "Localized
Silicon Fusion and Eutectic Bonding for MEMS Fabrication and Packaging,"
IEEE/ASME Journal of Microelectromechanical Systems, Vol. 9, pp. 3-8,
March, 2000
45. B. Ziaie, and K. Najafi, "A Generic Micromachined
Silicon Platform for High-Performance RF Passive Components," J.
Micromachanics & Microengineering, vol. 10, No. 3, pp. 365-371,
Sept. 2000
46. Y. Gianchandani, H. Kim, M. Shinn, B. Ha, B. Lee,
K. Najafi, and C.S. Song, “A Fabrication Process for Integrating
polysilicon Microstructures with Post-Processed CMOS Circuits,”
J. Micromachanics and Microengineering, vol. 10, No. 3, pp. 380-386,
Sept. 2000
47. F. Ayazi, and K. Najafi, "High Aspect-ratio
Combined Poly and Single-Crystal (HARPSS) MEMS Technology,” IEEE
J. Micro Electro Mechanical Systems, vol. 9, No. 3, pp. 288-294, Sept.
2000
48. F. Ayazi, and K. Najafi, "High Aspect-Ratio
Polysilicon Micromachining Technology,” Sensors and Actuators,Vol
87, No. 1-2, pp. 46-51, December 2000
49. N. Yazdi, A. Mason, K. Najafi, and K.D. Wise, "A
Generic Interface Chip for Capacitive Sensors in Low-Power Multi-Parameter
Microsystems," Sensors & Actuators, A: Physical, 84 (3) pp.
351-361, 2000
50. N. Yazdi, K. Najafi, "An All-Silicon Single-Wafer
Micro-g Accelerometer with a Combined Surface and Bulk Micromachining
Process," IEEE/ASME Journal of Microelectromechanical Systems,
vol. 9, no. 4, December 2000, pp. 1-8.
51. A. Selvakumar, N. Yazdi, K. Najafi, "A
Wide-Range Micromachined Threshold Accelerometer Array and Interface
Circuit," Journal of Micromechanics and Microengineering, vol.
11, 2001, pp. 118-125.
52. B. Ziaie, S.C. Rose, M.D. Nardin, and K. Najafi,
“A Self-Oscillating, Detuning-Insensitive Class-E Transmitter for
Implantable Microsystems,” IEEE Transactions on Biomedical Engineering,
Vol. 48, No. 3, pp. 397-399, March 2001
53. B. Ziaie, and K. Najafi, "An Implantable Microsystem
for Tonometric Blood Pressure Measurement," Journal of Biomedical
Microdevices, Biomedical Microdevices, Vol. 3, pp. 285-292, December
2001.
54. F. Ayazi, and K. Najafi, “A HARPSS polysiliocn
Vibrating Ring Gyroscope,” IEEE/ASME J. Micro Electro Mechanical
Systems, vol. 10, no. 2, pp. 169-179, June 2001
55. P. Mohseni, K. Nagarajan, B. Ziaie, K. Najafi,
and S.B. Crary, "An Ultralight Biotelemetry Biotelemetry Backpack
for Recording EMG Signals in Moths,” IEEE Transactions on Biomedical
Engineering, Vol. 48, pp. 734-737, June 2001
56. M. Dokmeci and K. Najafi, "A High-Sensitivity
Polyimide Capacitive Relative Humidity Sensor For Monitoring Anodically
Bonded Hermetic Micropackages,” IEEE/ASME Journal of Microelectromechanical
Systems, Vol.10, No.2, June 2001
57. D. L. Zealear, K. C. Garren, R. Rodriguez,
J. Reyes, S. Huang, M. Dokmeci, K. Najafi, "The biocompatibility,
positional stability, and potential application of an injectable wireless
micromachined microstimulator for reanimation of the paralyzed larynx,”
IEEE Trans. On Biomedical Engineering (TBME), Vol. 48, No.8, August
2001
58. T. Cheng, L. Lin, K. Najafi, "Fabrication
and Hermeticity Testing of A Glass-Silicon Packaging Formed Using Localized
Aluminum/Silicon-to-Glass Bonding," IEEE/ASME Journal of Microelectromechanical
Systems, September, 2001
59. J. W. Weigold, K. Najafi, and S. W. Pang, “Design
and Fabrication of Submicrometer, Single Crystal Si Accelerometer,”
IEEE/ASME Journal of Microelectromechanical Systems, Vol. 10, No. 4,
pp. 518-524, December 2001
60. C. Huang, K. Najafi, “Fabrication
of Ultra-Thin P++ Silicon Microstructures Using Ion-Implantation and
Boron Etch-Stop,” IEEE/ASME Journal Of Microelectromechanical Systems
(JMEMS), Vol. 10, No. 4, pp 532-537, December 2001
61. B. Ziaie, and K. Najafi, "An Implantable Microsystem for Tonometric Blood Pressure Measurement," Journal of Biomedical Microdevices, Vol. 3, pp. 285-292, December 2001.
62. O. Akar, T. Akin, And K. Najafi, “A
Wireless Batch Sealed Absolute Capacitive Pressure Sensor,” Sensors
and Actuators A: Physical, 95 (1), pp. 29-38, 2001
63. T. J. Harpster, B. Stark, and K. Najafi, “A
Passive Wireless Integrated Humidity Sensor,” Sensors and Actuators
A: Physical, Volume 95, Issues 2-3, pp. 100-107, 1 January 2002
64. T. J. Harpster, S. Hauvespre, M. Dokmeci, and K.
Najafi, “A Passive Humidity Monitoring System for In-Situ Remote
Wireless Testing of Micropackages,” IEEE/ASME J. Micro Electro
Mechanical Systems (JMEMS}, Vol. 11, no. 1, pp. 61-67, February 2002.
65. Y. T. Cheng, W. T. Hsu, L. Lin, C. T. Nguyen,
K. Najafi, "Vacuum Packaging Using Localized Aluminum/Silicon-to-Glass
Bonding", IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), Vol. 11, No. 1, pp. 61-67, February 2002
66. C. Huang, C. Christophorou, K. Najafi, A. Naguib and H. Nagib, “An Electrostatic Microactuator System in High Speed Jets,” IEEE/ASME Journal Of Micro Electro Mechanical Systems (JMEMS), Vol. 11, No. 3, pp. 222-235, June 2002
67. C. Huang, A. Naguib, E. Soupos, and K. Najafi, “A Silicon Micromachined Microphone For Fluid Mechanics Research,” Journal of Micromechanics and Microengineering, Vol. 12, No. 6, pp. 767-774, November 2002
68. K. Ma, Y. Gianchandani, and K. Najafi, “The Active Dissolved Wafer Process (ADWP) for Integrating Single-Crystal Silicon MEMS with CMOS,” J. of Semiconductor Technology and Science, Vol. 2, No. 4, pp. 273-279, December 2002
69. A. Selvakumar, and K. Najafi, “Vertical Comb Array Microactuators,” IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), Volume: 12 Issue: 4, pp. 440-449, Aug. 2003
70. N. Yazdi, A. Salian, and K. Najafi, “A High-Sensitivity Silicon Accelerometer with a Folded-Electrode Structure,” IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), Volume: 12 Issue: 4, pp. 479-486, Aug. 2003
71. B. H. Stark, M. R. Dokmeci, and K. Najafi, "Improving Corrosion-Resistance of Polysilicon Using Boron Doping and Self-Induced Galvanic Bias," IEEE Transactions on Advanced Packaging, vol. 26, No. 3, pp. 295-301, 2003.
72. Y. Shimatani, S. A. Nikles, K.Najafi, and R. M. Bradley, "Long-term recordings from afferent taste fibers" J. Physiology & Behavior, Vol. 80, Issues 2-3, pp. 309-315, November 2003
73. K.D. Wise, D.J. Anderson, J.F. Hetke, K, D.R. Kipke, K. Najafi, “Wireless implantable microsystems: high-density electronic interfaces to the nervous system,” Proceedings of the IEEE, Volume: 92, Issue: 1, pp. 76-97, Jan. 2004
74. C. Zhang, and K. Najafi, “Fabrication of Thick Silicon Dioxide Layers For Thermal Isolation,” Journal of Micromechanics and Microengineering, volume 14, issue 6, pages 769 – 774, 2004
75. P. Mohseni and K. Najafi, "A Fully Integrated Neural Recording Amplifier With DC Input Stabilization," IEEE Transactions on Biomedical Engineering, Vol. 51, No. 5, pp. 832-837, May 2004
76. B. H. Stark and K. Najafi, "A Low Temperature Thin Film Electroplated Metal Vacuum Package," IEEE/ASME J. Micro Electro Mechanical Systems (JMEMS), Vol. 13, No. 2, pp. 147-157, April 2004
77. T. Lisby, S.A. Nikles, K. Najafi, O. Hansen, S. Bouwstra, J.A. Branebjerg, “Mechanical Characterization and Design of Flexible Silicon Microstructures,” IEEE/ASME J. of Microelectromechanical Systems (JMEMS), Volume: 13, Issue: 3, pp. 452-464, June 2004
78. X. Zhu, D.S. Aslam, Y. Tang, B.H. Stark, K. Najafi, “The Fabrication of All-Diamond Packaging Panels With Built-In Interconnects for Wireless Integrated Microsystems,” IEEE/ASME J. of Microelectromechanical Systems (JMEMS), Volume: 13, Issue: 3, pp. 396-405, June 2004
79. S. Nikles, R.M. Bradley, S. Bledsoe, and K. Najafi, “Design and Testing of Conductive Polysilicon Beam Leads for Use in a High-Density Biomedical Connector,” J. Micromechanics and Microengineering, 14, No. 7, pp. 957-968, July 2004
80. J. Chae, H. Kulah, and K. Najafi, “An In-Plane High-Sensitivity, Low-Noise Micro-g Silicon Accelerometer with CMOS Readout Circuitry,” IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), vol. 13, no. 4, p 628-635, August, 2004
81. Y. Mei, J.S. Mitchell, G. Roientan Lahiji, and K. Najafi, “Wafer Bonding Technology For Vacuum Packaging Using Gold-Silicon Eutectic,” Journal of Iranian Association for Electrical and Electronics Engineers (IAEEE), Vol.1, No.2, pp. 27-32, Fall 2004
82. M. Ghovanloo, K. Najafi, “Fully Integrated Wideband High-current rectifiers for Inductively Powered Devices,” IEEE J. Solid-State Circuits, Vol. 39, No. 11, pp. 1976-1984, Nov. 2004
83. M. Ghovanloo, K. Najafi, “A Modular 32-site Wireless Neural Stimulation Microsystem,” IEEE J. Solid-State Circuits, Vol. 39, No. 12, pp. 2457-2466, Dec. 2004
84. M. Ghovanloo, K. Najafi, “A Wideband Frequency-Shift Keying Wireless Link for Inductively Powered Biomedical Implants,” IEEE Trans. On Circuits and Systems I: Fundamental Theory and Applications, Vol. 51, No. 12, pp. 2374-2383, Dec. 2004
85. M. Ghovanloo, K. Najafi, “A Compact Large Voltage-Compliance High Output Impedance Programmable Current Source for Implantable Microstimulators,” IEEE Trans. Biomedical Engineering, vol. 52, No. 1, pp. 97-105, Jan. 2005
86. J. Chae, H. Kulah, and K. Najafi, “A CMOS-compatible high aspect ratio silicon-on-glass in-plane micro-accelerometer,” J. Micromechanics and Microengineering, 15, No. 2, pp. 336-345, February 2005
87. J. Chae, H. Kulah, K. Najafi, “A Monolithic Three-Axis Micro-g Micromachined Silicon Capacitive Accelerometer,” IEEE Journal of Microelectromechanical Systems (JMEMS), vol. 14, No. 2, pp. 235-242, April 2005
88. P. Mohseni and K. Najafi, "A 1.48-mW Low-Phase-Noise Analog Frequency Modulator for Wireless Biotelemetry," IEEE Trans. Biomedical Eng., vol. 52, no. 5, pp. 938-942, May 2005
89. P. Mohseni, K. Najafi, S. J. Eliades, and X. Wang, “Wireless multichannel biopotential recording using an integrated FM telemetry circuit,” IEEE Trans. on Neural Systems and Rehabilitation Engineering, (see also IEEE Trans. on Rehabilitation Engineering), vol. 13, Issue 3, pp. 263-271, Sept. 2005
90. T.J. Harpster, S.A. Nikles, M.R. Dokmeci, K. Najafi, “Long-Term Hermeticity and Biological Performance of Anodically Bonded Glass-Silicon Implantable Packages,” IEEE Transactions on Device and Materials Reliability, vol. 5, Issue 3, pp. 458-466, Sept. 2005
91. B. A. Parviz, K. Najafi, M. O. Muller, L. P. Bernal, P. D. Washabaugh, “Electrostatically-Driven Synthetic Microjet Arrays As A Propulsion Method For Micro Flight Part I: Principles Of Operation, Modeling, and Simulation,” J. Microsystem Technologies, vol. 11, No. 11, pp. 1214-1222, Oct. 2005
92. B. A. Parviz, K. Najafi, M. O. Muller, L. P. Bernal, P. D. Washabaugh, “Electrostatically-Driven Synthetic Microjet Arrays As A Propulsion Method For Micro Flight Part II: Microfabrication and Initial Characterization,” J. Microsystem Technologies, vol. 11, No. 12, pp. 1292-1300, Oct. 2005
93. W.C. Welch, III, J. Chae, and K. Najafi, “Transfer of metal MEMS packages using a wafer-level solder transfer technique,” IEEE Transactions on Advanced Packaging (IEEE Transactions on Components, Packaging and Manufacturing Technology, Part B: Advanced Packaging), vol. 28, Issue 4, pp. 643-649, Nov. 2005
94. J. Chae, B.H. Stark, and K. Najafi,”A micromachined Pirani gauge with dual heat sinks,” IEEE Transactions on Advanced Packaging (IEEE Transactions on Components, Packaging and Manufacturing Technology, Part B: Advanced Packaging), vol. 28, Issue 4, pp. 619-625, Nov. 2005
95. H. Kim, and K. Najafi, “Characterization of Low-Temperature Wafer Bonding Using Thin Film Parylene,” IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), vol. 14, Issue 6, pp. 1347-1355, Dec. 2005
96. H. Kulah, J. Chae, N. Yazdi and K. Najafi, "Noise Analysis and Characterization of a Sigma-Delta Capacitive Microaccelerometer," IEEE Journal of Solid-State Circuits,vol. 41, No. 2, February 2006
97. A. M. Sodagar, K. Najafi, “Extremely-Wide-Range Supply-Independent CMOS Voltage References for Telemetry-Powering Applications,” Journal for Analog Integrated Circuits and Signal Processing, An International Journal, Kluwer Academic Publishers, 46:3 March 2006
98. S. W. Yoon, N. Yazdi, N. C. Perkins, K. Najafi, “Micromachined Integrated Shock Protection for MEMS,” Sensors and Actuators A: Phyisal, vol. 130-131, pp. 166-175, August 2006
99. B. H. Stark and K. Najafi, "A Mold and Transfer Process for Lead-Free Fluxless Soldering and Application to MEMS Packaging," IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), vol. 15, No. 4, pp. 849-858, August 2006
100. A. Astle, H. Kim, L. Bernal, K. Najafi, and P. Washabaugh, “Theoretical and experimental performance of a high frequency gas micropump”, Sensors and Actuators A: Physical, vol. 134, Issue 1, Pages 245-256, Feb. 2007
101. A. M. Sodagar, K. D. Wise, K. Najafi, “A Fully-Integrated Mixed-Signal Neural Processor for Implantable Multi-Channel Cortical Recording,” IEEE Transactions on Biomedical Engineering, vol. 54, Issue 6, Part 1, pp. 1075-1088, June 2007
102. M. Ghovanloo, and K. Najafi, “A Wireless Implantable Multicahnnel Microstimulating System-on-a-Chip with Modular Architecture,” IEEE Transactions on Neural Systems and Rehabilitation Engineering, vol. 15, No. 3, pp. 449-457, September 2007
103. H. Kim, and K. Najafi, “Characterization of Aligned Wafer-Level Transfer of Thin and Flexible Parylene Membranes,"IEEE /ASME J. of Microelectromechanical Systems (JMEMS),vol. 16, No. 6, pp. 1386 – 1396, Dec. 2007
104. K. King, S.W. Yooin, N.C. Perkins, and K. Najafi, “Wireless MEMS inertial System foir Golf Swing Dynamics,” Sensors and Actuators A: Physical, 141, pp. 619-630, 2008
105. H. Kulah, and K. Najafi, “Energy Scavenging from Low Frequency Vibrations By Using Frequency Up Conversion for Wireless Sensor Applications,” IEEE J. Sensors, vol. 8, no. 3, pp. 261-268, March 2008
Conference Publications:
1. K.D. Wise,
K. Najafi, "A Micromachined Integrated Sensor with On-Chip Self-Test
Capability," Invited Paper, Digest, Solid-State Sensors Conf.,
pp. 12-16, Hilton Head, SC, June 1984
2. K.D. Wise, K. Najafi, K.L. Drake, "A Multichannel
Intracortical Microprobe for Single-Unit Recording," Digest, IEEE/NSF
Biosensors Conf., pp. 87-89, Los Angeles, CA, September 1984
3. S.L. BeMent, D.J. Anderson, K.D. Wise, K.L. Drake,
K. Najafi, L. Xue, "Silicon Multielectrode Impedance, Geometry,
and Neural Cell Recording Ability," Digest, IEEE/Seventh Annual
Conf. Eng. Medicine and Biology Society, pp. 159-162, September 1985
4. K. Najafi, K.D. Wise, "An Implantable Multielectrode
Array with On-Chip Signal Processing," Digest, Int. Solid-State
Ckts. Conf., pp. 98-99, February 1986 (Beatrice Winner Award for Editorial
Excellence)
5. S.L. BeMent, K.L. Drake, D.J. Anderson, K.D. Wise,
K. Najafi, "Semiconductor Microprobes- Recording/Biocompatibility
Properties," Invited Paper, IEEE/EMBS Eighth Annual Conf., Dallas,
pp. 1622-1625, Texas, November 1986
6. K. Najafi, "Silicon Micromachining: Key to
Silicon Integrated Sensors," Proc. of Symp. on Sensors and Technology,
pp. 152-164, Vol. 87-15, Cleveland, April 1987
7. K. Najafi, "Sensor-System Interface: The Influence
of On-Chip Electronics," Digest, Int. Symp. Circuits and Systems,
pp. 233-236, Philadelphia, PA, May 1987
8. K. Najafi, J. Ji, K.D. Wise, "Multichannel
Intracortical Recording Microprobes: Scaling Limitations, Device Characteristics,
and Circuit Encapsulation," Digest, 4th Int. Conf. on Solid-State
Sensors and Actuators, Transducers '87, pp. 65-68, Japan, June 1987
9. N. Najafi, K.W. Clayton, W.G. Baer, K. Najafi, K.D.
Wise, "An Architecture and Interface for VLSI Sensors," Digest,
Solid-State Sensor and Actuator Workshop, Hilton Head, SC, pp. 76-79,
June 1988
10. K.D. Wise, N. Najafi, C.L. Johnson, J. Cowles,
S. Cho, K. Najafi, "An Integrated VLSI Sensor for Semiconductor
Process Control," Technical Digest, TECHCON '88, pp. 345-348, Dallas,
TX, October 1988 (Best Paper in Session)
11. K. Suzuki, K. Najafi, K.D. Wise, "A 1024-Element
High-Performance Silicon Tactile Imager," Digest, Int. Electron
Device Meeting, IEDM 1988, pp. 674-677, San Francisco, December 1988
12. K. Najafi, K. Suzuki, "A Novel Technique and
Structure for the Measurement of Intrinsic Stress and Young's Modulus
of Thin Films," Digest, IEEE Workshop on Micro Electromechanical
Systems, pp. 96-97, Salt Lake City, UT, February 1989
13. J.F. Hetke, K. Najafi, K.D. Wise, "Flexible
Miniature Ribbon Cables for Long-Term Connection to Implantable Sensors,"
Book of Abstracts, 5th Int. Conf. on Solid-State Sensors and Actuators,
Transducers '89, pp. 277-278, Montreux, Switzerland, June 1989
14. S.J. Tanghe, K. Najafi, K.D. Wise, "A Planar
IrO Multichannel Stimulating Electrode for Use in Neural Prosthesis,"
Book of Abstracts, 5th Int. Conf. on Solid-State Sensors and Actuators,
Transducers '89, pp. 297-298, Montreux, Switzerland, June 1989
15. J. Ji, K. Najafi, K.D. Wise, "A Scaled Electronically-Configurable
Multichannel Recording Array," Book of Abstracts, 5th Int. Conf.
on Solid-State Sensors and Actuators, Transducers '89, pp. 195-196,
Montreux, Switzerland, June 1989
16. K. Suzuki, K. Najafi, K.D. Wise, "Process
Alternatives and Scaling Limits for High-Density Silicon Tactile Imagers,"
Book of Abstracts, 5th Int. Conf. on Solid-State Sensors and Actuators,
Transducers '89, pp. 260-262, Montreux, Switzerland, June 1989
17. K. Najafi, "Integrated Sensors in Biological
Environments," Invited Paper, Book of Abstracts, 5th Int. Conf.
on Solid-State Sensors and Actuators, Transducers '89, pp. 295-296,
Montreux, Switzerland, June 1989
18. S.T. Cho, K. Najafi, K.D. Wise, "An Ultrasensitive
Silicon Pressure-Based Flowmeter," Digest, International Electron
Device Meeting, pp. 499-502, Washington, December 1989 (Winner of the
Best Student Paper Award, Student: S.T. Cho)
19. S.T. Cho, K. Najafi, K.D. Wise, "Scaling and
Dielectric Stress Compensation of Ultrasensitive Boron-Doped Silicon
Microstructures," Digest, IEEE Workshop on Micro Electromechanical
Systems, pp. 50-55, Napa Valley, California, February 1990
20. T. Akin, B. Ziaie, K. Najafi, "RF Telemetry
Powering and Control of Hermetically-Sealed Integrated Sensors and Actuators,"
Digest, IEEE Solid-State Sensor and Actuator Workshop, pp. 145-148,
Hilton-Head, SC, June 1990
21. S.T. Cho, K. Najafi, K.D. Wise, "Secondary
Sensitivities and Stability of Ultrasensitive Pressure Sensors,"
Digest, IEEE Solid-State Sensor and Actuator Workshop, pp. 184-187,
Hilton-Head, SC, June 1990
22. K.D. Wise, K. Najafi, J. Ji, J.F. Hetke, S.T. Tanghe,
A. Hoogerwerf, D.J. Anderson, S.L. BeMent, M. Ghazzi, W. Baer, T. Hull,
Y. Yang, "Micromachined Silicon Microprobes for CNS Recording and
Stimulation," Invited Paper, Digest, IEEE Eng. in Medicine and
Biol. Soc. Conf., Philadelphia, November 1990
23. T. Akin, K. Najafi, "A Micromachined Silicon
Sieve Electrode for Nerve Regeneration Applications," 6th Int.
Conf. on Solid-State Sensors and Actuators, pp. 128-131, San Francisco,
CA, June 1991
24. B. Ziaie, Y. Gianchandani, K. Najafi, "A High-Current
Thin-Film Neuromuscular Microstimulator," 6th Int. Conf. on Solid-State
Sensors and Actuators, pp. 124-127, San Francisco, CA, June 1991
25. W.G. Baer, T. Hull, K.D. Wise, K. Najafi, K.D.
Wise, "A Multiplexed Silicon Infrared Thermal Imager," 6th
Int. Conf. Solid-State Sensors & Actuators, pp. 631-634, San Francisco,
CA, June 1991
26. J.F. Hetke, K. Najafi, K.D. Wise, "Flexible
Silicon Interconnects for Microelectromechanical Systems," 6th
Int. Conf. Solid-State Sensors & Actuators, pp. 764-767, San Francisco,
CA, June 1991
27. J. Ji, S.T. Cho, Y. Zhang, K. Najafi, K.D. Wise,
"An Ultraminiature CMOS Pressure Sensor For a Multiplexed Cardiovascular
Catheter," 6th Int. Conf. on Solid-State Sensors and Actuators,
pp. 1018-1021, San Francisco, CA, June 1991
28. Y. Gianchandani, K. Najafi, "A Bulk Silicon
Dissolved Wafer Process for Microelectromechanical Systems," Technical
Digest, Int. Electron Devices Meeting, pp. 757-760, Washington D.C.,
December 1991
29. Y. Gianchandani, K. Najafi, "Micron-Sized
High Aspect Ratio Bulk Silicon Micromechanical Devices," Proceedings,
IEEE Micro Electro Mechanical Systems Workshop, pp. 208-213, Travemunde,
Germany, February 1992
30. Y. Gianchandani, K. Najafi, "Batch Fabrication
and Assembly of Micromotor-Driven Mechanisms With Multi-Level Linkages,"
Proceedings, IEEE Micro Electro Mechanical Systems Workshop, pp. 141-146,
Travemunde, Germany, February 1992
31. S. Wang, S.B. Crary, K. Najafi, "Electronic
Determination of the Modulus of Elasticity and Intrinsic Stress of Thin
Films Using Capacitive Bridges," Proceedings, Symposium of the
Materials Research Society (MRS), 1992 Spring Meeting, San Francisco,
CA, April 27-May 1, 1992
32. S. Bouwstra, H.A.C. Tilmans, A. Selvakumar, and
K. Najafi, "Base-Driven Micromechanical Resonators," Digest,
IEEE Solid-State Sensors and Actuators Workshop, pp. 148-152, Hilton-Head,
S.C., June 1992
33. K. Najafi, "Silicon Integrated Microsensors,"
Invited Paper, Proceedings, International Society for Optical Engineering
(SPIE) Symposium, OE/FIBERS '92, Boston, MA, September 1992
34. S. Bouwstra, H.A.C. Tilmans, A. Selvakumar, and
K. Najafi, "Base-Driven Micromechanical Resonators," Book
of Abstracts, Eurosensors VI, pp. 65, San Sebastian, Spain, October
5-7, 1992
35. K. Najafi, "Solid-State Integrated Microsensors,"
Invited Paper, 124th Meeting of the Acoustical Society of America, New
Orleans, LA, October 31-November 4, 1992
36. D.J. Anderson, K.D. Wise, and K. Najafi, "Micromachined
Silicon Substrate Electrodes for Extracellular Recording," Invited
Paper, Proceedings, IEEE Engineering in Medicine and Biology Conference,
Paris, France, October 1992
37. B. Ziaie, M. Nardin, J. Von Arx, and K. Najafi,
" A Single Channel Implantable Microstimulator for Functional Neuromuscular
Stimulation (FNS)," Proceedings, 7th Int. Conference on Solid-State
Sensors and Actuators (Transducers '93), pp. 266-269, Yokohama, Japan,
June 1993
38. B. Ziaie, J. Von Arx, M. Nardin, and K. Najafi,
"A Hermetic Packaging Technology with Multiple Feedthrough For
Integrated Sensors and Actuators," Proceedings, 7th Int. Conference
on Solid-State Sensors and Actuators (Transducers '93), Yokohama, Japan,
June 1993
39. A.D. Oliver, W.G. Baer, K. Najafi, and K.D. Wise,
"Precision Measurement of Process Temperature Uniformity in Semiconductor
Manufacturing," Proceedings, SRC TECHCON '93, 1993
40. K. Najafi, and C.H. Mastrangelo, "Solid-State
Microsensors and Smart Structures," Invited Paper Proceedings,
IEEE Ultrasonics, Ferroelectrics, and Frequency Control Symposium, Baltimore,
Maryland, November 1993
41. Y. Gianchandani, and K. Najafi, "Silicon Micromachined
Thermal Profilers," Digest, Int. Electron Devices Meeting, IEDM
'93, pp. 191-194, Washington, DC, December 1993
42. Tayfun Akin, Khalil Najafi, Robert Bradley, “A
LowPower Implantable Multichannel Digital Neural Record System,”
VLSI Symposium, Hawaii, January 1994
43. K. Ma, and K. Najafi, "A New Capacitive Electrochemical
Etch-Stop Technique," Proceedings, IEEE/ASME Micro Electro Mechanical
Systems, Workshop, pp. 158-163, Oiso, Japan, January 1994
44. Tayfun Akin, and K. Najafi, "A Telemetrically Powered
and Controlled Implantable Neural Recording System with CMOS Interface
Circuitry," Proceedings, IEEE 7th Mediterranean Electrotechnical
Conf., pp. 545-548, Antalya, Turkey, April 1994
45. W.H. Juan, S.W. Pang, A. Selvakumar, and K. Najafi, "Using
Electron Cyclotron Resonance (ECR) Source to Etch Polyimide Molds for
Fabrication of Electroplated Microstructures," Digest, Solid-State
Sensors and Actuators Workshop, pp. 82-85, Hilton Head, SC, June 1994
46. C.W. Yeh, and K. Najafi, "Bulk-Silicon Tunneling-Based
Pressure Sensors," Digest, Solid-State Sensors and Actuators Workshop,
pp. 201-204, Hilton Head, SC, June 1994
47. Y.B. Gianchandani, and K. Najafi, "A Compact
Strain Sensor with a Bent Beam Deformation Multiplier and a Complementary
Motion Vernier," Digest, Solid-State Sensors and Actuators Workshop,
pp. 116-119, Hilton Head, SC, June 1994
48. K.J. Ma, N. Yazdi, and K. Najafi, "A Bulk-Silicon
Capacitive Microaccelerometer with Built-In Overrange and Force Feedback
Electrodes," Digest, Solid-State Sensors and Actuators Workshop,
pp. 160-163, Hilton Head, SC, June 1994
49. A. Selvakumar, and K. Najafi, "High Density
Vertical Comb Array Microactuators Fabricated Using A Novel Bulk/Poly-Silicon
Trench Refill Technology," Digest, Solid-State Sensors and Actuators
Workshop, pp. 138-141, Hilton Head, SC, June 1994
50. M.W. Putty, and K. Najafi, "A Micromachined
Vibrating Ring Gyroscope," Invited Paper, Technical Digest, Solid-State
Sensors and Actuators Workshop, pp. 213-220, Hilton Head, SC, June 1994
51. Y.B. Gianchandani, and K. Najafi, "Bulk Silicon
Micromachining for the Scanning Thermal Profiler and Other Applications,"
Int. Symposium on Optics, Imaging, and Instrumentation, SPIE, San Diego,
CA, July 1994
52. K. Najafi, "Integrated Sensing Systems in Closed Loop
Neural Prosthesis," Invited Keynote Speaker, European Solid-State
Sensors and Actuators Conf., EUROSENSORS, Toulouse, France, September
1994
53. K. Najafi, "Sensor/Circuit Integration in
Biomedical Applications," Invited Presentation, European NEXUS
Workshop on Sensor/Circuit Integration, Toulouse, France, Sept. 29-30,
1994
54. A. Selvakumar, K. Najafi, W.H. Juan, and S. Pang,
"Vertical Comb Array Microactuators," Proceedings, IEEE Micro
Electro Mechanical Systems (MEMS) Workshop, pp. 43-48, Amsterdam, Netherlands,
February 1995
55. M. Nardin, B. Ziaie, J. Von Arx, A. Coghlan, M.
Dokmeci, and K. Najafi, "An Inductively Powered Microstimulator
for Functional Neuromuscular Stimulation," 13th International Symposium
on Biotelemetry, pp. 99-104, Williamsburg, VA, April 1995
56. R.M. Bradley, T. Akin, S. Gurkan, X. Cao, and K.
Najafi, "Chronic Recordings from Fibers of Rat Glossopharyngeal
Nerve Regenerated Through a Micromachined Sieve Electrode Array,"
17th annual meeting of the Association for Chemoreception Sciences,
Sarasota FL, April 19-23, 1995
57. K. Najafi, "Silicon-Based Electronic Interfaces
to Biological Systems," Invited Speaker at the Workshop on "Bio-Mechatronics"
held as part of the 1995 IEEE Int. Conference on Robotics and Automation,
Nagoya, Japan, May 22-27, 1995
58. T. Akin, K. Najafi, and R.M. Bradley, "An
Implantable Multichannel Digital Neural Recording System for a Micromachined
Sieve Electrode,” 1995 Int. Conference on Solid-State Sensors and
Actuators, Transducers '95, Stockholm, Sweden, June 1995
59. M. Nardin, and K. Najafi, "A Multichannel
Neuromuscular Microstimulator With Bi-Directional Telemetry,” 1995
Int. Conference on Solid-State Sensors and Actuators, Transducers '95,
pp. 59-62, Stockholm, Sweden, June 1995
60. J. Von Arx, B. Ziaie, M. Dokmeci, And K. Najafi,
"Hermeticity Testing of Glass-Silicon Packages with On-Chip Feedthroughs,”
1995 Int. Conference on Solid-State Sensors and Actuators, Transducers
'95, pp. 244-247, Stockholm, Sweden, June 1995
61. A. Mason, N. Yazdi, K. Najafi, and K.D. Wise, "A
Low-Power Wireless Microinstrumentation System for Environmental Monitoring,”
1995 Int. Conference on Solid-State Sensors and Actuators, Transducers
'95, Stockholm, Sweden, June 1995
62. Y.B. Gianchandani, K.J. Ma, and K. Najafi, "A
CMOS Dissolved Wafer Process for Integrated p++ Microelectromechanical
Systems,” 1995 Int. Conference on Solid-State Sensors and Actuators,
Transducers '95, Stockholm, Sweden, June 1995
63. K. Najafi, “Recent Progress in Micromachining
Technology and Applications in Implantable Biomedical Systems,”
Invited Lecture, Proceedings, Sixth Int. Symp. on Micro Machine and
Human Science, MHS ‘95, pp. 11-20, Nagoya, Japan, October 1995
64. K. Najafi, “Microinstrumentation Systems for
Environmental Monitoring,” Invited Paper, Proceedings, Int. Symp.
on Micro Systems, Intelligent Materials and Robots, pp. 142-145, Sendai,
Japan, September 1995
65. K.D. Wise, C.H. Mastrangelo, K. Najafi, and Clark
T.C. Nguyen, “Research in Integrated Sensors and Microsystems at
the University of Michigan”, Invited Paper, Disgest, Sensors Expo,
Chicago, September 1995
66. C. Yeh, and K. Najafi, “A Low-Voltage Bulk
Silicon Tunneling-Based Microaccelerometer,” Proceedings, 1995
Int. Electron Devices Meeting (IEDM ‘95), pp. 593-596, Washington
D.C., December 1995
67. B. Ziaie and K. Najafi, "Biomedical Microdevices:
A Micromachining Approach," Invited Paper, Proceedings, 1995 International
Semiconductor Device Research Symposium, pp. 401-404, Charlottesville,
VA, December 5-8, 1995
68. A. Selvakumar, N. Yazdi, and K. Najafi, “A
Low-Power Wide Range Threshold Acceleration Sensing System,” Proceedings,
1996 Micro Electromechanical Systems Workshop (MEMS ‘96), San Diego,
California, February 1996
69. T. Akin, B. Ziaie, and K. Najafi, “A Modular,
Micromachined High-Density Connector for Implantable Biomedical Systems,”
Proceedings, 1996 Micro Electromechanical Systems Workshop (MEMS ‘96),
San Diego, California, February 1996
70. C. Huang, J. Papp, K. Najafi, and H.M. Nagib, “A
Microactuator System for the Study and Control of Screech in High-Speed
Jets,” Proceedings,1996 Micro Electromechanical Systems Workshop
(MEMS ‘96), San Diego, California, February 1996
71. N. Yazdi, A. Mason, K. Najafi, and K.D. Wise, “A
Smart Sensing Microsystem with a Capacitive Sensor Interface,”
Proceedings, 1996 IEEE Int. Conf. on Circuits and Systems, Vol. 4, pp.
336-339, Atlanta, Georgia, May 1996
72. N. Yazdi, A. Mason, K. Najafi, K.D. Wise, “A
Low-Power Generic Interface Circuit for Capacitive Sensors,” Technical
Digest, Solid-State Sensor and Actuator Workshop, Hilton Head, SC, June
1996
73. K. Najafi, “Silicon Micromachining Technologies:
Future Needs and Challenges,” Invited Speaker SPIE, Micromaching
& Microfabrication Process Technology II Conference, October 1996
74. B. Ziaie, J. Von Arx, K. Najafi, “A Micro-Fabricated
Planar High-Current IrOx Stimulating Microelectrode,” IEEE Eng.
in Medicine and Biology (EMBS) Conf., Amsterdam, October 1996
75. E. Alnajjar, A. Naguib, H. Nagib, C.C. Huang, K.
Najafi, “Receptivity of the Shear Layer of an Axi-Symmetric Jet
to Excitation Using MEMS-Based Mechanical Actuators,” Meeting of
the Division of Fluid Dynamics, New York, November 1996
76. A. Selvakumar, F. Ayazi, and K. Najafi, “A
High-Sensitivity Z-Axis Silicon Accelerometer,” Technical Digest,
IEEE Int. Electron Devices Meeting, San Francisco, December 1996
77. N. Yazdi, and K. Najafi, “An All-Silicon Single-Wafer
Fabrication Technology for Precision Microaccelerometers,” Ninth
IEEE Int. Conference on Solid-State Sensors and Actuators, Transducers
‘97, Chicago, June 1997
78. C. Yeh, and K. Najafi, “Micromachined Tunneling
Accelerometer with a Low-Voltage CMOS Interface Circuit,” Ninth
IEEE Int. Conference on Solid-State Sensors and Actuators, Transducers
‘97, Chicago, June 1997
79. J. Von Arx, and K. Najafi, “On-Chip Coils
with Integrated Cores for Remote Inductive Powering of Integrated Microsystems,”
Ninth IEEE Int. Conference on Solid-State Sensors and Actuators, Transducers
‘97, Chicago, June 1997
80. M. Dokmeci, J. Von Arx, and K. Najafi, “Accelerated
Testing of Anodically Bonded Glass-Silicon Packages in Salt Water,”
Ninth IEEE Int. Conference on Solid-State Sensors and Actuators, Transducers
‘97, Chicago, June 1997
81. B. Ziaie, N. Kocaman, and K. Najafi, “A Generic
Micromachined Silicon Platform for Low-Power, Low-Loss Miniature Transceivers,”
Ninth IEEE Int. Conference on Solid-State Sensors and Actuators, Transducers
‘97, Chicago, June 1997
82. Y. Gianchandani, M. Shinn, K. Najafi, “Impact
of Long, High Temperature Anneals on Residual Stress in Polysilicon,”
Ninth IEEE Int. Conference on Solid-State Sensors and Actuators, Transducers
‘97, Chicago, June 1997
83. A. Naguib, C. Christophorou, E. Alnajjar, H. Nagib,
C.C. Huang, and K. Najafi, “Arrays of MEMS-Based Actuators for
Control of Supersonic Jet Screech,” Meeting of the American Institute
of Aeronautics and Astronautics, Paper AIAA 97-1963, July 1997
84.
B. Ziaie, K. Najafi, and D. J. Anderson, "A
Low-Power Miniature Transmitter Using a Low-Loss Silicon Platform for
Biotelemetry," Proc. 19th Ann. International IEEE Engineering in
Medicine and Biology Conference, Chicago, 4 pages, October 1997
85. E. Alnajjar, H. Nagib, A. Naguib, C. Christophorou,
C. Huang, and K. Najafi, "Receptivity of High-Speed Jets to Excitation
Using an Array of MEMS-Based Mechanical Actuators," ASME, FEDSM'97,
1997
86. F. Ayazi and K. Najafi, "Design and fabrication
of a high-performance polysilicon vibrating ring gyroscope," Proceedings,
IEEE Micro Electro Mechanical Systems Workshop (MEMS'98), Heidelberg,
Germany, pp. 621-626, Jan. 1998.
87. Y. Gianchandani, H. Kim, M Shinn, B. Ha, B. Lee,
K. Najafi, and C. Song, "A MEMS-First Fabrication Process for Integrating
CMOS Circuits with Polysilicon Microstructures," Proc. Eleventh
IEEE International Workshop on Micro Electro Mechanical Systems (MEMS),
Heidelberg, Germany, pp. 257-262, Jan. 1998
88. C. Huang, K. Najafi, E. Alnajjar, C. Christophorou,
A. Naguib, and H.M. Nagib, “Operation and Testing of Electrostatic
Microactuators and Micromachined Sound Detectors for Active Control
of High Speed Flows,” Proceedings, IEEE/ASME Micro Electro Mechanical
Systems Workshop, Heidelberg, Germany, pp. 81-86, January 1998
89. C. Huang, and K. Najafi, “Ultra-Thin p++ Monocrystalline
Silicon Microstructures,” Technical Digest, Solid-State Sensor
and Actuator Workshop, Hilton-Head, S.C., June 1998
90. B. Ziaie, T.W. Wu, N. Kocaman, K. Najafi, and D.J.
Anderson, “An Implantable Pressure Sensor Cuff For Tonometric Blood
Pressure Measurement,” Technical Digest, Solid-State Sensor and
Actuator Workshop, Hilton-Head, S.C., June 1998
91. Y.T. Cheng, L. Lin, and K. Najafi, “Localized Silicon
Fusion and Eutectic Bonding for MEMS Fabrication and Packaging,”
Technical Digest, Solid-State Sensor and Actuator Workshop, pp. 233-236,
Hilton-Head, S.C., June 1998
92. N. Yazdi, K. Najafi, “Modeling and Noise Analysis
of A Silicon Micro-g Accelerometer with Direct Digital Output,”
Proceedings of The 2nd International Conference on Integrated Nano/Microtechnology
for Space Applications (NanoSpace98), Houston, TX, USA, November 1998
93. Y.T. Cheng, L. Lin, and K. Najafi, “Localized Bonding
with PSG or Indium Solder as Intermediate Layer,” Digest, IEEE
Micro Electro Mechanical Systems (MEMS) Conference, pp. 285-289, Orlando,
Florida, Jan. 1999
94. M. Dokmeci, and K. Najafi,”A High Sensitivity
Polyimide Humidity Sensor For Monitoring Hermetic Micropackages,”
Digest, IEEE Micro Electro Mechanical Systems (MEMS) Conference, Orlando,
Florida, Jan. 1999
95. N. Yazdi, A. Salian, and K. Najafi, “A High-Sensitivity
Capacitive Microaccelerometer With a Folded-Electrode Structure,”
Digest, IEEE Micro Electro Mechanical Systems (MEMS) Conference, Orlando,
Florida, Jan. 1999
96. J.A. Von Arx, and K. Najafi, “A Single-Chip Fully-Integrated
Telemetry-Powered System For Peripheral Nerve Stimulation,” Digest,
IEEE Int. Conf. On Solid-State Circuits (ISSCC ‘99), pp. 214-215,
San Francisco, February 1999
97. N. Yazdi, and K. Najafi, “An Interface IC For Capacitive
Silicon µg Accelerometers,” Digest, IEEE Int. Conf. On Solid-State
Circuits (ISSCC ‘99), pp. 132-133, San Francisco, February 1999
98. A. Naguib, E. Soupos, H. Nagib, C. Huang, and K.
Najafi, “A Piezoresistive MEMS Sensor for Acoustic Noise Measurements,”
5th AIAA/CEASAeroacoustic Conference and Exhibit, May 10-12, Bellevue,
WA, 1999
99. Babak Amir Parviz, L. Bernal, and K. Najafi, “A
Micromachined Helmholtz Resonator For Generation of Microjet Flows,”
Technical Digest, Tenth Int. Conf. On Solid-State Sensors and Actuators
(Transducers ’99), pp. 1788-1791, Sendai, Japan, June 1999
100. B. Amir Parviz, and K. Najafi, Fabrication of
Bulk-Silicon Microstructures Using a Trench-Assisted Etch-Stop Process,”
Technical Digest, Tenth Int. Conf. On Solid-State Sensors and Actuators
(Transducers ’99), pp. 534-537, Sendai, Japan, June 1999
101. F. Ayazi, and K. Najafi, “High Aspect-Ratio
Polysilicon Micromachining Technology,” Technical Digest, Tenth
Int. Conf. Solid-State Sensors & Actuators (Transducers ’99),
Sendai, Japan, June 1999
102. R. Vogt, K. Najafi, Ralph Steiner, and H. Baltes,
“A Low-Drift Differential Double Hall Sensor with On-Chip CMOS
Circuitry,” Technical Digest, Tenth Int. Conf. On Solid-State Sensors
and Actuators (Transducers ’99), Sendai, Japan, June 1999
103. A. Naguib, D. Benson, H. Nagib, C. Huang, and K. Najafi,
“Assessment of MEMS-Based Hot Wires,” Proceedings of the 3rd
ASME/JSME Joint Fluids Engineering Conference, San Francisco, CA July
1999
104. K. Najafi, B.A. Parviz, L.P. Bernal, P. Washabaugh,
A.K. Chou, C. Zhang, M. Muller, and R. Moran, “Micromachined Resonators
and Their Application in Micro Propulsion Systems,” Proceedings,
6th Annual Strategic and Technical Symposium on Vehicular Applications
of Displays and Micro Sensors, pp. 189-192, Ypsilanti, Michigan, Sept.
1999
105. D. Aslam, V. Papageorgiou, F. Ayazi, and K. Najafi,
“IC-Compatible Technology of Poly-Diamond MEMS,” Proceedings,
6th Annual Strategic and Technical Symposium on Vehicular Applications
of Displays and Micro Sensors, pp. 113-116, Ypsilanti, Michigan, Sept.
1999
106. F. Ayazi, H.H. Chen, and K. Najafi,” High-Performance
Vibratory Silicon Microgyroscope,” Proceedings, 6th Annual Strategic
and Technical Symposium on Vehicular Applications of Displays and Micro
Sensors, pp. 153-158, Ypsilanti, Michigan, Sept. 1999
107. A. Salian, H. Kulah, N. Yazdi, and K. Najafi,“A
Micro-g Capacitive Silicon Microaccelerometer,” Proceedings, 6th
Annual Strategic and Technical Symposium on Vehicular Applications of
Displays and Micro Sensors, pp. 165-172, Ypsilanti, Michigan, Sept.
1999
108. M. Dokmeci, K. Najafi, “Glass-Silicon Hermetic
Micro Packages for Implantable Biomedical Microsystems,” Proceedings,
6th Annual Strategic and Technical Symposium on Vehicular Applications
of Displays and Micro Sensors, pp. 159-164, Ypsilanti, Michigan, Sept.
1999
109. Arjun Chandran, K. Najafi, and K.D. Wise, “A
New DC Baseline Stabilization Scheme for Neural Recording Microprobes,”
1999 First Joint BMES/EMBS Conference, Annual Fall Meeting of the Biomedical
Engineering Society, 21st Annual International Conference of the Engineering
in Medicine and Biology Society, pp. 386-387, Atlanta, Georgia, October
1999
110. S. Hauvespre, M. Dokmeci, and K. Najafi , “Wireless
Humidity Monitoring in Hermetic Biomedical Micropackages,” 1999
First Joint BMES/EMBS Conference, Annual Fall Meeting of the Biomedical
Engineering Society, 21st Annual International Conference of the Engineering
in Medicine and Biology Society, pp. 487-488, Atlanta, Georgia, October
1999
111. P. Mohseni, K. Nagarajan, B. Ziaie, K. Najafi,
and S. B. Crary, “Robotics at the Interface of Microsystems Technology
and Biology: Biobotics,” International Advanced Robotics Program's
Workshop on Micro Robots, Micro Machines and Systems, The Institute
for Problems in Mechanics, Russian Academy of Sciences, Moscow, Russia,
pp. 78-82, 24-25 November 1999
112. Michael O. Muller, Luis P. Bernal, Robert P. Moran,
Peter D. Washabaugh, Babak Amir Parviz, and Khalil Najafi, " Micromachined
acoustic resonators for microjet propulsion", AIAA 38th Aerospace
Science Conference, January 10-13, 2000, Reno Nevada, AIAA-2000-0547
113. Robert P. Moran, Peter D. Washabaugh, Michael O. Muller,
Luis P. Bernal, Babak Amir Parviz, and Khalil Najafi, "Numerical
simulation of micromachined acoustic resonators", AIAA 38th Aerospace
Science Conference, January 10-13, 2000, Reno Nevada, AIAA-2000-0546
114. Michael O. Muller, Luis P. Bernal, Robert P. Moran,
Peter D. Washabaugh, Babak Amir Parviz, Allen T. -K. Chou, Chunbo Zhang,
and Khalil Najafi, "Thrust performance of micromachined synthetic
jets,” AIAA Fluids 2000 Conference, January 19-22, 2000, Denver
Colorado, AIAA-2000-2404
115. J. Chae, H. Kulah, A. Salian, and K. Najafi, "A
High-Sensitivity Silicon-On-Glass Lateral Micro-g Microaccelerometer,"
Third Annual Micro/NanoTechnology Conference, Nanospace 2000, Houston,
Texas, January 2000
116. B.A. Parviz, T.K. Chou, C. Zhang, K. Najafi, M.O.
Muller, L.P. Bernal, and P. Washabaugh, “A Wafer-Integratedf Array
of Micromachined Electrostatically-Driven Ultrasonic Resonators for
Microfluidic Applications,” Technical Digest, 13th IEEE International
Conference on Micro Electro Mechanical Systems (MEMS), pp. 34-39, Myazaki,
Japan, January 2000
117. T. Harpster, S. Hauvespre, M. Dokmeci, B. Stark, A. Vosoughi,
and K. Najafi, “A Passive Humidity Monitoring System for In-Situ
remote Wireless Testing of Micropackages,” Technical Digest, 13th
IEEE International Conference on Micro Electro Mechanical Systems (MEMS),
pp. 335-340, Myazaki, Japan, January 2000
118. Y.T. Cheng, L. Lin, and K. Najafi, “Fabrication
and Hermeticity Testing of A Glass-Silicon Package Formed Using Localized
Aluminum/Silicon-To-Glass Bonding,” Technical Digest, 13th IEEE
International Conference on Micro Electro Mechanical Systems (MEMS),
pp. 757-762, Miyazaki, Japan, January 2000
119. F. Ayazi and K. Najafi, “High Aspect-Ratio
Dry-Release Poly-Silicon MEMS Technology for Inertial-Grade Microgyroscopes,”
in Proc. IEEE 2000 Position Location and Navigation Symposium (PLANS
2000), San Diego, CA, March 2000, pp. 304-308.
120. P.D. Washabaugh, T. MacDermid, M.O. Muller, L.P.
Bernal, B. Amir Parviz, T.K. Chou, C. Zhang, and K. Najafi, “An
Approach Toward a Wafer Integrated Micro Air Vehicle,” Proceedings,
Fifteenth International Conference on Unmanned Air Vehicle Systems,
pp. 33.1-33.11, Bristol, UK, April 2000
121. Arvind Salian, Haluk Kulah, Navid Yazdi, Guohong
He and Khalil Najafi, "A High-Performance Hybrid CMOS Microaccelerometer,
" Technical Digest, Hilton Head 2000 Solid-State Sensor & Actuator
Workshop, pp. 285-288, Hilton Head Island, SC, June 2000
122. F. Ayazi, H.H Chen, F. Kocer, G. He, and K. Najafi,
“A High Aspect-Ratio Polysilicon Vibrating Ring Gyroscope,”
in Tech. Dig. Solid-State Sensors and Actuators Workshop, Hilton Head,
SC, June 2000, pp. 289-292.
123. Michael O. Müller, Luis P. Bernal, Robert
P. Moran, Peter D. Washabaugh, Babak Amir Parviz, Tsung-Kuan Allen Chou,
Chunbo Zhang, Khalil Najafi, “Thrust Performance of Micromachined
Synthetic Jets,” Fluids 2000 Conference and Exhibit, AIAA Paper
2000-2404, Denver, CO, June 19-22 2000
124. K. Najafi, “Micromachined Micro Systems:
Miniaturization Beyond Microelectronics,” Keynote Plenary Talk,
IEEE VLSI Circuits Symposium, Hawaii, June 12-16, 2000
125. K. Najafi, “Low-Power Micromachined Micro
Systems,” Keynote Speaker, Int. Symposium on Low-Power Electronics
and Devices (ISLPED ’00), Portofino, Italy, July 2000
126. R. Rangarajan, J.A. Von Arx, S. Rose, B. Ziaie,
K. Najafi, "Fully Integrated Nerve Electrical Stimulation System,”
IEEE Midwest Symposium for Circuits and Systems, 2000, Lansing, MI,
Aug. 8-11, 2000
127. A. Salian, H. Kulah, N. Yazdi, G. He, and K. Najafi,
"A Hybrid Silicon Microaccelerometer System with CMOS Interface
Circuit," IEEE Midwest Symposium for Circuits and Systems, Lansing
MI, August 8-11 2000
128. H. Kulah, N. Yazdi, and K. Najafi, "A CMOS
Switched-Capacitor Interface Circuit for an Integrated Acclerometer,"
IEEE Midwest Symposium for Circuits and Systems, Lansing MI, August
8-11 2000
129. T. Lisby, S. Nikles, K. Najafi, O. Hansen, S.
Bouwstra and J. Branebjerg, “Mechanical characterization of flexible
silicon microstructures,” Eurosensors 2000, The 14th European Conference
on Solid-State Transducers, 27-30 August 2000, Copenhagen, Denmark
130. Orhan Akar, Tayfun Akin, Tim Harpster, and Khalil
Najafi, “A Wireless Batch Sealed Absolute Capacitive Pressure Sensor,”
Eurosensors 2000, The 14th European Conference on Solid-State Transducers,
Copenhagen, Denmark , pp. 585-588, 27-30 August 2000
131. N. Yazdi, K. Najafi, "Performance limits of a closed-loop
micro-G silicon accelerometer with deposited rigid electrodes," Proceedings of the 12th IEEE International Conference on Microelectronics
(ICM 2000), Tehran, Iran, October 2000, pp. 313 -316
132. M.O. Müller, L.P. Bernal, P.K. Miska, P.D.
Washabaugh, T.-K.A. Chou, B.A. Parviz, C. Zhang & K. Najafi, “Flow
structure and performance of axisymmetric synthetic jets,” AIAA
39th Aerospace Sciences Meeting & Exhibit, January 8-11, 2001, Reno,
Nevada, AIAA Paper 2001-1008
133. Y. T. Cheng, W.T. Hsu, Liwei Lin, C.T. Nguyen,
and K. Najafi, "Vacuum Packaging Technology Using Localized Aluminum/Silicon-To-Glass
Bonding,” Proceedings of 14th IEEE Micro Electro Mechanical Systems
Conference (MEMS 2001), pp.18-21, Interlaken, Switzerland, Jan. 2001
134. B.A. Parviz, T.K. Chou, C. Zhang, K. Najafi, M.O.
Müller, L.P. Bernal & P. Washabaugh, “Performance of ultrasonic
electrostatic resonators for use in micro propulsion,” Proceedings
of 14th IEEE Micro Electro Mechanical Systems Conference (MEMS 2001),
pp. 586-589, Interlaken, Switzerland, Jan. 2001
135. T. Harpster, B. Stark, and K. Najafi, "A
Passive Wireless Integrated Humidity Sensor,” Proceedings of 14th
IEEE Micro Electro Mechanical Systems Conference (MEMS 2001), Miyazaki,
Japan, pp.335-340., Jan. 2001
136. Stefan Nikles, Sanford Bledsoe, Robert Bradley,
and Khalil Najafi, "Reliability and Contact Resistance of Polysilicon
Beams Leads for Use in a High-Density Connector", Proceedings of
14th IEEE Micro Electro Mechanical Systems Conference (MEMS 2001), pp.
65-67, Interlaken, Switzerland, January 21-25, 2001
137. B. H. Stark, M. Dockmeci, T. J. Harspter, and
K. Najafi, "Improving Corrosion resitance and Silicon Glass Micropackages
Using Boron Doping and/or Self-Induced Galvanic Bias", Proceedings
of International Reliability Physics Symposium, Orlando, Fl, pp. 455-462,
April 2001
138. K. D. Wise, K. Najafi, D. M. Aslam, R. B. Brown,
J. M. Giachino, L. C. McAfee, C. T.-C. Nguyen, R. O. Warrington, and
E. T. Zellers, "Wireless Integrated MicroSystems (WIMS): The Coming
Revolution in the Remote Gathering of Information, Digest SensorsExpo,
(Symposium Keynote), Chicago, June 2001
139. Tsung-Kuan A. Chou, Khalil Najafi, “3D MEMS
Fabrication Using Low-Temperature Wafer Bonding With Benzocyclobutene
(BCB),” Digest, Twelft IEEE Int. Conf. On Solid-State Sensors and
Actuators (Transducers '01), Munich, Germany, June 2001
140. C. Zhang, K. Najafi, L.P. Bernal & P. Washabaugh,
“An integrated combustor-thermoelectric micro power generato,”
Technical Digest, Digest, Twelft IEEE Int. Conf. On Solid-State Sensors
and Actuators (Transducers '01), Munich, Germany, June 2001
141. T.K. Chou, K. Najafi, M.O. Müller, L.P. Bernal
& P. Washabaugh, “High-Density micromachined ejector array
for micro propulsion,” Technical Digest, Twelft IEEE Int. Conf.
On Solid-State Sensors and Actuators (Transducers '01), Munich, Germany,
June 2001
142. Brian H. Stark and Khalil Najafi, “An Ultra-Thin
Hermetic Package Utilizing Electroplated Gold,” Technical Digest,
Twelft IEEE Int. Conf. On Solid-State Sensors and Actuators (Transducers
'01), Munich, Germany, June 2001
143. H. Yu, and K. Najafi, Circuitry For A Wireless
Microsystem For Neural Recording Microprobes," Proceedings, International
IEEE Engineering in Medicine and Biology Conference (EMBC), Istanbul,
Turkey, October 2001
144. G. J. O‚Brien, D. J. Monk, and K. Najafi, “Submicron
High Aspect Ratio Silicon Beam Etch," Proceedings, SPIE MEMS Symposium,
Vol. 4592, pp. 41-48, Australia, December 2001
145. M.O. Müller, L.P. Bernal, P.D. Washabaugh,
T-K A. Chou, And K. Najafi, Flow Field And Performance of High Frequency
Micromachined Synthetic Jets," 40th AIAA Aerospace Sciences Meeting
and Exhibit, paper # 2002-0974, Reno, Nevada, January 2002
146. J. Chae, H. Kulah, and K. Najafi, "A Hybrid
Silicon-On-Glass (Sog) Lateral Micro-Accelerometer With CMOS Readout
Circuitry," Technical Digest, IEEE 2002 Int. Conference on Micro
Electro Mechanical Systems (MEMS 2002), Las Vegas, January 2002
147. T-K A. Chou and K. Najafi, "Fabrication Of
Out-Of-Plane Curved Surfaces In Si By Utilizing RIE Lag," Technical
Digest, IEEE 2002 Int. Conference on Micro Electro Mechanical Systems
(MEMS 2002), Las Vegas, January 2002
148. G. He, and K. Najafi, "A Single-Crystal Silicon
Vibrating Ring Gyroscope," Technical Digest, IEEE 2002 Int. Conference
on Micro Electro Mechanical Systems (MEMS 2002), Las Vegas, January
2002
149. T-K A. Chou, K. Najafi, M.O. Muller, L.P. Bernal,
and P.D. Washabaugh, "Characterization Of Micromachined Acoustic
Ejector And Its Applications," Technical Digest, IEEE 2002 Int.
Conference on Micro Electro Mechanical Systems (MEMS 2002), Las Vegas,
January 2002
150. T. J. Harpster and K. Najafi, "Long-Term Testing
Of Hermetic Anodically Bonded Glass-Silicon Packages," Technical
Digest, IEEE 2002 Int. Conference on Micro Electro Mechanical Systems
(MEMS 2002), Las Vegas, January 2002
151. C. Zhang, and K. Najafi, "Fabrication Of
Thick Silicon Dioxide Layers Using DRIE, Oxidation And Trench Refill,"
Technical Digest, IEEE 2002 Int. Conference on Micro Electro Mechanical
Systems (MEMS 2002), Las Vegas, January 2002
152. T-K A. Chou, K. Najafi, M.O. Muller, L.P. Bernal, P.D.
Washabaugh, and B. Amirparviz, "Micromachined E-Jet for IC Chip
Cooling," Technical Digest, IEEE International Solid-State Circuits
Conference, pp. 356-357, San Francisco, CA, February 2002
153. T. Harpster and K. Najafi, "Long-Term Testing Of Hermetic Anodically Bonded Glass-Silicon Packages," Technical Digest, IEEE 2002 Int. Conference on Micro Electro Mechanical Systems (MEMS 2002), pp. 423-426, Las Vegas NV, January 2002
154. C. Zhang, and K. Najafi, "Fabrication Of Thick Silicon Dioxide Layers Using DRIE, Oxidation And Trench Refill," Technical Digest, IEEE 2002 Int. Conference on Micro Electro Mechanical Systems (MEMS 2002), pp. 160-163, Las Vegas NV, January 2002
155. T.-K. Chou, K. Najafi, M. Muller, L. Bernal, P. Washabaugh, and B. Amirparviz, "Micromachined E-Jet for IC Chip Cooling," Technical Digest, IEEE International Solid-State Circuits Conference, pp. 356-357, San Francisco CA, February 2002
156. M. Ghovanloo, K. Beach, K. D. Wise, and K. Najafi, "A BiCMOS wireless interface chip for micromachined stimulating microprobes," Proceedings, IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology, pp. 277-282, Madison WI, May 2002
157. M. Ghovanloo and K. Najafi, "Fully integrated power supply design for wireless biomedical implants," Proceedings,IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology, pp. 414-419, Madison WI, May 2002
158. K. Najafi, “Power and Integrated Microsystems," Plenary Presentation, SPIE International Symposium on Design, Test, Integration, and Packaging of MEMS and MOEMS, Cannes, France, May 6-8, 2002
159. H. Kulah, A. Salian, N. Yazdi, and K. Najafi, "A 5V Closed-Loop Second-Order Sigma-Delta Micro-G Microaccelerometer," Technical Digest, Solid-State Sensor & Actuator Workshop, pp. 219-222, Hilton Head SC, June 2002
160. Y. Mei, G. R. Lahiji, and K. Najafi, “A Robust Gold-Silicon Eutectic Wafer Bonding Technology for Vacuum Packaging,” Technical Digest, Solid-State Sensor and Actuator Workshop, pp. 86-89, Hilton Head SC, June 2002
161. G. O’Brien, D. J. Monk, and K. Najafi, “Angular Rate Gyroscope with Dual Anchor Support,” Technical Digest, Solid-State Sensor and Actuator Workshop, pp. 285-288, Hilton Head SC, June 2002
162. M. Ghovanloo, K. Najafi, “A High Data Transfer Rate Frequency Shift Keying Demodulator Chip for the Wireless Biomedical Implants,” in IEEE 45th Midwest Symposium on Circuits and Systems Proc., Tulsa OK, August 4-7 2002
163. H. Kulah and K. Najafi, "A Low Noise Switched-Capacitor Interface Circuit for Sub-Micro Gravity Resolution Micromachined Accelerometers," European Solid-State Circuits Conference ESSCIRC'02, pp. 635-639, Florence, Italy, Sept. 2002
164. A. Sodagar, K. Najafi, “A Wide-Range Supply-Independent CMOS Voltage Reference for Telemetry-Powering Applications,” Proceedings,2002 IEEE International Conference on Electronics, Circuits, and Systems (ICECS'02), pp. 401-404, Dubrovnik, Croatia, September 15-18, 2002
165. M. Ghovanloo, K. Najafi, “A BiCMOS Wireless Stimulator Chip for Micromachined Stimulating Microprobes,” in The IEEE 2nd Joint EMBS-BMES Conference Proceedings, pp. 2113-2114, Houston, Texas, October 2002
166. P. Mohseni and K. Najafi, "A Low-Power Fully Integrated Bandpass Operational Amplifier For Biomedical Neural Recording Applications," Proceedings of the 2nd Joint IEEE EMBS/BMES Conference, pp. 2111-2112, Houston, TX, October 23-26, 2002
167. C. Zhang, L. Bernal, P. Washabaugh, K. Najafi "A Micromachined Combustor and its Application to Thermoelectric Power Generation", Proceedings of theASME 2002Vol. 2, IMECE2002-33272, New Orleans LA, Nov. 2002
168. B. Stark and K. Najafi, "A Wafer Level Vacuum Packaging Technology Utilizing Electroplated Nickel," Proceedings of the ASME IMECE 2002 Vol. 2, IMECE2002-34268, New Orleans LA, November 18-22, 2002
169. M. Muller, L. Bernal, P. Washabaugh, T.-K. Chou, H. Kim, and K. Najafi, “Acoustically Generated Micromachined Jet Arrays For Micropropulsion Applications,” Proceedings of the ASME IMECE 2002 Vol. 2, IMECE2002-33630, New Orleans LA, November 18-22, 2002
170. A. Astle, A. Paige, L. Bernal, J. Munfakh, H. Kim, and K. Najafi, “Analysis And Design Of Multistage Electrostatically-Actuated Micro Vacuum Pumps,” Proceedings of the ASME IMECE 2002 Vol. 2, IMECE2002-34308, New Orleans LA, November 18-22, 2002
171. E. Zellers, K. Wise, K. Najafi, D. Aslam, R. Brown, Q. Cai, J. Driscoll, M. Flynn, J. Giachino, R. Gordenker, M. Hsieh, C. Nguyen, P. Bergstrom, J. Drelich, C. Friedrich, E. Gamble, M Kaviany, C. Lu, A. Matzger, M. Oborny, S. Pang, J. Potkay, R. Sacks, W.-C. Tian, W. Steinecker, J. Whiting, Q. Zhong, "Determinations of Complex Vapor Mixtures in Ambient Air with a Wireless Microanalytical System: Vision, Progress, and Homeland Security Applications," Technical Digest of the IEEE Conference on Technologies for Homeland Security, pp. 92-95, Waltham MA, IEEE, November 13-14, 2002
172. K. Wise and K. Najafi, “Fully-Implantable Auditory Prostheses: Restoring Hearing to the Profoundly Deaf,” Invited Paper, 2002 IEEE International Electron Devices Meeting (IEDM), pp. 499-502, San Francisco CA, December 2002
173. M. Muller, L. Bernal, P. Washabaugh, H. Kim, K. Najafi, “Resonance Effects of Electrostatically Actuated Acoustic Jets,” 41st Aerospace Sciences Meeting and Exhibit (AIAA), AIAA Paper 2003-1272. Reno NV, January 6-9, 2003
174. J. Chae, H. Kulah, and K. Najafi, "An In-Plane High-Sensitivity, Low-Noise Micro-G Silicon Accelerometer", Proceedings of the 16th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2003), pp. 466-469, Kyoto, Japan, January 2003
175. T. J. Harpster, and K. Najafi, "Field-Assisted Bonding of Glass to Si-Au Eutectic Solder For Packaging Applications," Proceedings of the 16th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2003), pp. 630-633, Kyoto, Japan, January 2003
176. B. Stark, Y. Mei, C. Zhang, and K. Najafi, "A Doubly Anchored Surface Micromachined Pirani Gauge for Vacuum Package Characterization," Proceedings of the 16th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2003), pp. 506-509, Kyoto, Japan, January 2003
177. Xiangwei Zhu, Steve Guillaudeu, Dean M. Aslam, Ungsik Kim, Brian Stark, and Khalil Najafi, “All Diamond Packaging For Wireless Integrated Micro-Systems Using Ultra-Fast Diamond Growth,” Proceedings of the 16th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2003), pp. 658-661, Kyoto, Japan, January 2003
178. K. Najafi, “Micropackaging Technologies for Integrated Microsystems: Applications to MEMS and MOEMS,” Invited Plenary Talk, Proceedings of SPIE’s Micromachining and Microfabrication Symposium, pp. 1-19, San Jose, CA, USA, January 27-29, 2003
179. H. Kulah, J. Chae, N. Yazdi and K. Najafi, "A Multi-Step Electromechanical Sigma-Delta Converter for Micro-g Capacitive Accelerometers," Technical Digest, IEEE International Conference on Solid-State Circuits Conference (ISSCC 2003), pp. 202-203, San Francisco CA, February 2003
180. H. Yu, K. Najafi, "Low-Power Interface Circuits for Bio-Implantable Microsystems", Technical Digest, IEEE International Conference on Solid-State Circuits Conference (ISSCC 2003), San Francisco CA, February 2003
181. P. Mohseni and K. Najafi, "A Wireless FM Multi-Channel Microsystem for Biomedical Neural Recording Applications," Proceedings, IEEE Southwest Symposium on Mixed-Signal Design (SSMSD 2003), pp. 217-222, Las Vegas NV, February 23-25, 2003
182. M. Ghovanloo, K. Najafi, “A Fully Digital Frequency Shift Keying Demodulator Chip for Wireless Biomedical Implants,” Proceedings, IEEE Southwest Symposium on Mixed-Signal Design (SSMSD 2003), pp. 223-227, Las Vegas NV, February 23-25, 2003
183. M. Ghovanloo, K. D. Wise, K. Najafi, “Towards a Button-Sized 1024-Site Wireless Cortical Microstimulating Array,” 1st International IEEE/EMBS Conference on Neural Engineering (NE 2003), pp. 138-141, Capri, Italy, March 2003
184. M. Ghovanloo, K. Najafi, “A High Data-Rate Frequency Shift keying Demodulator Chip for the Wireless Biomedical Implants,” Proceedings, IEEE International Symposium on Circuits and Systems (ISCAS 2003), Vol. 5, pp. 45-48, Bangkok, Thailand, May 2003.
185. H. Kulah, J. Chae and K. Najafi, “Noise Analysis and Characterization of A Sigma-Delta Capacitive Silicon Microaccelerometer,” IEEE International Conference on Solid State Sensors and Actuators Conference (Transducers 2003), pp. 92-95, Boston MA, June 2003
186. B. Stark and K. Najafi, “An Integrated Process for Post-Packaging Release and Vacuum Sealing of Electroplated Nickel Packages,” IEEE International Conference on Solid State Sensors and Actuators Conference (Transducers 2003), pp. 1911-1914, Boston MA, June 2003
187. C. Zhang, L. Bernal, P. Washabaugh, K. Najafi, “Micro Combustion-Thermionic Power Generation: Feasibility, Design and Initial Results,” IEEE International Conference on Solid State Sensors and Actuators Conference (Transducers 2003), Boston MA, June 2003
188. Asli B. Ucok, J. Giachino, and K. Najafi, “Compact, Modular Assembly and Packaging of Multi-Substrate Microsystems” IEEE International Conference on Solid State Sensors and Actuators Conference (Transducers 2003), pp. 1877-1878, Boston MA, June 2003
189. G. O’Brien, D. Monk, and K. Najafi, “Angular Accelerometer with Dual Anchor Support,” IEEE International Conference on Solid State Sensors and Actuators Conference (Transducers 2003),pp. 1371-1374, Boston MA, June 2003
190. J. Chae, H. Kulah and K. Najafi, “A Monolithic Three-Axis Silicon Capacitive Accelerometer with Micro-G Resolution,”IEEE International Conference on Solid State Sensors and Actuators Conference (Transducers 2003), pp. 81-84, Boston MA, June 2003
191. H. Kim, K. Najafi, P. Washabaugh, and L. Bernal, “Large-Deflection Out-of-Plane Electrostatic Buckled-Electrode Actuators,” IEEE International Conference on Solid State Sensors and Actuators Conference (Transducers 2003), pp. 794-797, Boston MA, June 2003
192. H. Kim and K, Najafi, “Wafer Bonding Using Parylene and Wafer-Level Transfer of Free-Standing Parylene Membranes,” IEEE International Conference on Solid State Sensors and Actuators Conference (Transducers 2003), pp. 790-793, Boston MA, June 2003
193. Amir M. Sodagar, and Khalil Najafi, “A Multi-Output Supply-Independent Voltage Reference in Standard CMOS Process for Telemetry-Powering Applications,” Proceedings of the IEEE Int. Symposium on Signals, Circuits and Systems, Volume: 2, pp. 493 –496, July 10-11, 2003
194. M. Ghovanloo, and K. Najafi, “A Small Size Large Voltage Compliance Programmable Current Source for Biomedical Implantable Microstimulators,” 25th Annual International Conference of the IEEE Engineering In Medicine And Biology Society, pp. 1979-1982, Cancun, Mexico, September 2003
195. S. Nikles, D.S. Pellinen, J. Kitagawa, D. Kipke, RoM. Bradley, and K. Najafi, “Long Term In Vitro Monitoring of Polyimide Microprobe Electrical Properties,” Proceedings, 25th Annual International Conference of the IEEE Engineering In Medicine And Biology Society, pp. 3340-3343, Cancun, Mexico, September 2003
196. Khalil Najafi, Junseok Chae, Haluk Kulah and Guohong He, “Micromachined Silicon Accelerometers And Gyroscopes,” Invited Paper, IROS - IEEE International Robotics and Systems Conference, Las Vegas, October 27-31, 2003
197. A. Astle, L.P. Bernal, P. Washabaugh, H. Kim and K. Najafi, “Dynamic Modeling And Design Of A High Frequency Micro Vacuum Pump,” 2003 ASME International Mechanical Engineering Congress & Exposition Washington, DC, IMECE 2003-41493, November 15-21, 2003
198. C. Zhang, K. Najafi, L.P. Bernal and P. Washabaugh, “Mechanical And Thermal Design Of A Combustion-Based Thermionic Micro Power Generator,” 2003 ASME International Mechanical Engineering Congress & Exposition, Washington, DC, IMECE 2003-41531, November 15-21, 2003
199. A.B. Ucok, J. Giachino, and K. Najafi, “A High-Density Flexible Connector Array For Multi-Substrate Packages,” 2003 ASME International Mechanical Engineering Congress & Exposition, Washington, DC, IMECE2003-41562, November 15-21, 2003
200. B. H. Stark and K. Najafi, "A Mold and Transfer Technique for Lead-Free Fluxless Soldering and Application to Wafer-Level Low-Temperature Thin-Film Packages," Proceedings of the 17th IEEE International Conference on Microelectromechanical Systems (MEMS '04), pp. 16-19, Maastricht, The Netherlands, January 2004
201. H. Kulah and K. Najafi, “An Electromagnetic Micro Power Generator for Low-Frequency Environmental Vibrations,” Proceedings of the 17th IEEE International Conference on Microelectromechanical Systems (MEMS '04, pp. 237-240, Maastricht, Netherlands, January 2004
202. J. Chae, B.H. Stark, and K. Najafi, “A Micromachined Pirani Gauge with Dual Heat Sinks,” Proceedings of the 17th IEEE International Conference on Microelectromechanical Systems (MEMS '04, pp. 532-535, Maastricht, Netherlands, January 2004
203. M. Ghovanloo and K. Najafi, “A Modular 32-site Wireless Neural Stimulation Microsystem,” Technical Digest, IEEE Int. Solid-State Circuits Conference, pp. 226-227, San Francisco, CA, Feb. 2004
204. K. D. Wise, K. Najafi, R. Sacks, and E. T. Zellers, “A Wireless Integrated Microsystem for Environmental Monitoring,” Invited Technology Directions Paper, Technical Digest, IEEE Int. Solid-State Circuits Conference, pp. 434-435, San Francisco, CA, Feb. 2004
205. H. S. Kim, A. B. Ucok, and K. Najafi, "Large deflection stacked multi-electrode electrostatic Actuator," Technical Digest, Solid State Sensor, Actuator and Microsystems Workshop (Hilton Head 2004), pp. 340-343, Hilton Head Island, South Carolina, June 2004
206. H. Yu, R. Olsson, K.D. Wise, and K. Najafi, "A wireless microsystem for multichannel neural recording microprobes", Technical Digest, Solid State Sensor, Actuator and Microsystems Workshop (Hilton Head 2004), Hilton Head Island, South Carolina, June 2004
207. Asli B. Ucok, Joseph M. Giachino, and Khalil Najafi, “The WIMS Cube: A Microsystem Package With Actuated Flexible Connections And Re-Workable Assembly,” Technical Digest, Solid State Sensor, Actuator and Microsystems Workshop (Hilton Head 2004), pp. 117-120, Hilton Head Island, South Carolina, June 2004
208. E. T. Zellers, W. H. Steinecker, G. R. Lambertus, M. Agah, C.-J. Lu, H. K. L. Chan, J. A. Potkay, M.C. Oborny, J. M. Nichols, A. Astle, H. S. Kim, M. P. Rowe, J. Kim, L. W. da Silva, J. Zheng, J. J. Whiting, R. D. Sacks, S. W. Pang, M. Kaviany, P. L. Bergstrom, A. J. Matzger, Ç. Kurdak, L. P. Bernal, K. Najafi, K. D. Wise, “A Versatile MEMS Gas Chromatograph For Determinations Of Environmental Vapor Mixtures,” Invited Paper and Talk, Technical Digest, Solid State Sensor, Actuator and Microsystems Workshop (Hilton Head 2004), pp. 61-66, Hilton Head Island, South Carolina, June 2004
209. K. King, S.W. Yoon, N.C. Perkins, and K. Najafi, “The Dynamics of the Golf Swing as Measured by Strapdown Inertial Sensors,” Proceedings 5th International Conference on the Engineering of Sport, vol. 2, pp. 276-282, (Eds. Hubbard, Mehta, Pallis), Sep. 2004
210. P. Mohseni, and K. Najafi, “Wireless Multichannel Biopotential Recording Using an Integrated FM Telemetry Circuit,” 26th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBS), San Francisco, CA., Sept. 1-4, 2004
211. M. Ghovanloo, K.J. Otto, D.R. Kipke, and K. Najafi, “In Vitro and In Vivo Testing of a Wireless Multichannel Stimulating Telemetry Microsystem,” 26th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBS), pp. 4294-4297, San Francisco, CA., Sept. 1-4, 2004
212. K. Najafi, and M. Ghovanloo, “A Multichannel Monolithic Wireless Microstimulator,” 26th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBS), pp. 4197-4200, San Francisco, CA., Sept. 1-4, 2004
213. N. Yazdi, H. Kulah, and K. Najafi, “Precision Readout Circuits for Capacitive Microaccelerometers", Third IEEE International Conference on Sensors, pp. 28-31, Vienna, Austria, October 24-27, 2004
214. S. A. Nikles, S. Bledsoe, R. M. Bradley, and K. Najafi, "A 32-Channel Active High-Density Connector for Biomedical Applications,” Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), pp. 580-583, Miami, Florida Jan. 2005
215. A.B. Ucok, J. Giachino, and K. Najafi, “Modular Assembly/Packaging Of Multi-Substrate Microsystems (WIMS Cube) Using Thermo-Magnetically Actuated Cables,” Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), pp. 536-539, Miami, Florida Jan. 2005
216. S. Lee, J. Chae, S. Yoon, N. Yazdi, and K. Najafi, "Low-power Thermal Isolation for Environmentally Resistant Microinstruments", Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), pp. 532-535, Miami, USA, Jan. 2005
217. W.C. Welch III and K. Najafi, "Transfer of Metal MEMS Packages Using a Wafer-Level Solder Sacrificial Layer," Proceedings, 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 584-587, Miami, USA, January 2005
218. J. Chae, J. Giachino, and K. Najafi, “Wafer-level Vacuum Package with Vertical Feedthroughs,” Proceedings, 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 548-551, Miami, USA, January 2005
219. J.S. Mitchell, G.R. Lahiji and K. Najafi, "An Improved Performance Poly Si Pirani Vacuum Gauge Using Heat Distributing Structural Supports," Proceedings, 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 291-294, Miami, USA, January 2005
220. B.H. Stark, J. Chae, A. Kuo, A. Oliver, and K. Najafi, “A High-Performance Surface-Micromachined Pirani Gauge in SUMMIT V™,” Proceedings, 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp.295-298, Miami, USA, January 2005
221. P. Mohseni and K. Najafi, "A Battery-Powered 8-channel Wireless FM IC for Biopotential Recording Applications," Technical Digest, IEEE Int. Solid-State Circuits Conference (ISSCC), pp. 560-561, San Francisco, CA, February 6-10, 2005
222. M. Ghovanloo and K. Najafi, “A Tri-state FSK Demodulator for Asynchronous Timing of High-rate Stimulation Pulses in Wireless Implantable Microstimulators,” Proceedings, 2nd Intl. IEEE/EMBS Conf. on Neural Engineering, pp. 116-119, Mar. 2005
223. H. Kulah, and K. Najafi, “An Electromagnetic Micro Power Generator for Low-Frequency Environmental Vibrations,” Paper #05MV-35, 2005 SAE World Congress, Detroit, Michigan, April 11-15, 2005
224. H. Kulah, J. Chae, and K. Najafi, “Micromachined Accelerometers for Inertial Navigation Applications,” Paper #05MV-36, 2005 SAE World Congress, Detroit, Michigan, April 11-15, 2005
225. M. Ghovanloo, and K. Najafi, “A Three-Dimensional Microassembly Structure for Micromachined Planar Microelectrode Arrays,” 3rd Annual IEEE EMBS Special Topic Conference on Microtechnologies in Medicine and Biology, pp. 112-115, Oahu, Hawaii, May 2005
226. M. Ghovanloo and K. Najafi, "A tri-state FSK demodulator for asynchronous timing of high-rate stimulation pulses in wireless implantable microstimulators," Proc. 2nd Intl. IEEE/EMBS Conf. on Neural Engineering, pp. 116-119, Mar. 2005
227. S.W. Yoon, N. Yazdi, N.C. Perkins, and K. Najafi, "Novel Integrated Shock Protection for MEMS", Technical Digest, IEEE Int. Conference on Solid-State Sensors, Actuators, and Microsystems (TRANSDUCERS 2005), Seoul, Korea, June 2005
228. W.C. Welch III, J. Chae, S. Lee, and K. Najafi, “Transient Liquid Phase (TLP) Bonding for MEMS Packaging Applications,” Technical Digest, IEEE Int. Conference on Solid-State Sensors, Actuators, and Microsystems (TRANSDUCERS 2005), Seoul, Korea, June 2005
229. J.S. Mitchell, G.R. Lahiji and K. Najafi, "Encapsulation of vacuum sensors on a wafer level package using a gold-silicon eutectic," Technical Digest, IEEE Int. Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers ‘05), Seoul, Korea, June 2005
230. H. Kim, and K. Najafi, “Characterization of Parylene-assisted wafer bonding: Long-term stability and influence of process chemicals,” Technical Digest, 13th International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers ’05), pp. 2015-2018, Seoul, Korea, June, 2005
231. W.C. Welch III, M. Dokmeci, N. Yazdi, and K. Najafi, “A Flux-Free Pb-Sn Solder Bonding Technology for Wafer-Level Chip-Scale Vacuum Packaging,” Proceedings,ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems (InterPack05), San Francisco, CA, July 2005
232. J.S. Mitchell, G.R. Lahiji and K. Najafi, "Reliability and Characterization of Micro-Packages in a Wafer Level Au-Si Eutectic Vacuum Bonding Process," Proceedings,ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems (InterPack05), San Francisco, CA, July 2005
233. A. Astle, L.P. Bernal, H. Kim, K. Najafi, P.D. Washabaugh, C. Morrison, “Theoretical and Experimental Performance of a High Frequency Micro Pump,” 2004 ASME International Mechanical Engineering Congress & Exposition, Paper Number: IMECE2005-81626, Orlando, Fl., Nov. 2005
234. H. Kim, K. Najafi, A. Astle, L. Bernal, and P. Washabaugh “Fabrication And Performance Of A Dual-Electrode Electrostatic Peristaltic Gas Micropump,” Proceedings, The Ninth International Conference on Miniaturized Chemical and Biochemical Analysis Systems (MicroTAS 2005), pp. 1173-1176, Boston, Massachusetts, USA, October, 2005
235. R. Panday, X.A. Fu, S. Rajgopal, T. Lisby, S.A. Nikles, K. Najafi, and M. Mehregany, “Mechanical Testing of Flexible Silicon Carbide Interconnect Ribbons,” 2005 International Conference on Silicon Carbide and Related Materials, Pittsburg, USA, Sept. 2005
236. H. Kim, A. Astle, K. Najafi, L. Bernal, P. Washabaugh, and F. Cheng, "Bi-directional electrostatic microspeaker with two large-deflection flexible membranes actuated by single/dual electrodes", in Proc. 4th IEEE Conf. on Sensors (Sensors '05), Irvine, CA, Oct. 31-Nov. 3, 2005
237. S. Yoon, N. Yazdi, J. Chae, N. Perkins, and K. Najafi, “Shock Protection Using Integrated Nonlinear Spring Shock Stops,” Proceedings, 19th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 702-705, Istanbul, Turkey, January 2006
238. S-H Lee, J. Chae, N. Yazdi, and K. Najafi, “Micro-Brush Press-On Contact: A New Technique For Room Temperature Electrical And Mechanical Attachment,” Proceedings, 19th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 342-345, Istanbul, Turkey, January 2006
239. J.S. Mitchell, G.R. Lahiji, and K. Najafi, “Au-Si Eutectic For Wafer Bonding and Wafer-Level Vacuum Packaging,” Book of Abstracts, 2nd Int. Workshop on Wafer Bonding for MEMS Technologies, pp. 63-64, Halle, Germany, Apr. 2006
240. H. Kim, A.A. Astle, K. Najafi, L.P. Bernal, and P.D. Washabaugh, “Integrated Peristaltic 18-Stage Electrostatic Gas Micro Pump With Active Microvalves,” Tech. Digest, Hilton Head Solid-State Sensor, Actuator, and Microsystems Workshop, pp. 292-295, Hilton Head Island, SC, June 2006
241. T. Galchev, W.C. Welch III, and K. Najafi, “Silicon-On-Silicon (SOS): A New CMOS Compatible Low-Temperature MEMS Process Using Plasma Activated Fusion Bonding,” Tech. Digest, Hilton Head Solid-State Sensor, Actuator, and Microsystems Workshop, pp. 100-101, Hilton Head Island, SC, June 2006
242. H. Kim, A.H. Jauregui, C. Morrison, K. Najafi, L.P. Bernal, and P.D. Washabaugh, “Low Power Electrostatic Helmholtz-Resonance Microjet Generator For Propulsion And Cooling,” Tech. Digest, Hilton Head Solid-State Sensor, Actuator, and Microsystems Workshop, pp. 296-299, Hilton Head Island, SC, June 2006
243. A.B. Ucok, J.M. Giachino, and K. Najafi, “Testing And Assembly Of WIMS Cubes Containing Passive And Active Integrated Cables,” Tech. Digest, Hilton Head Solid-State Sensor, Actuator, and Microsystems Workshop, pp. 400-403, Hilton Head Island, SC, June 2006
244. S.W. Yoon, S. Lee, N.C. Perkins, and K. Najafi, “Shock Protection Using Soft Coatings As Shock Stops,” Tech. Digest, Hilton Head Solid-State Sensor, Actuator, and Microsystems Workshop, pp. 396-399, Hilton Head Island, SC, June 2006
245. J.S. Mitchell, and K. Najafi, “Backside Resistive Localized Heating For Low Temperature Wafer-Level Bonding And Packaging,” Tech. Digest, Hilton Head Solid-State Sensor, Actuator, and Microsystems Workshop, pp. 352-355, Hilton Head Island, SC, June 2006
246. J.S. Mitchell, G.R. Lahiji, and K. Najafi, “Long-Term Reliability, Burn-In And Analysis Of Outgassing In Au-Si Eutectic Wafer-Level Vacuum Packages,” Tech. Digest, Hilton Head Solid-State Sensor, Actuator, and Microsystems Workshop, pp. 376-379, Hilton Head Island, SC, June 2006
247. G. J. O’Brien, D. J. Monk And K. Najafi, “SOI MEMS Process Insensitive To Sacrificial Oxide Etch Induced Substrate Anchor Variation With Selectable Substrate Isolation And Low Resistance Substrate Contact,” Tech. Digest, Hilton Head Solid-State Sensor, Actuator, and Microsystems Workshop, pp. 47-50, Hilton Head Island, SC, June 2006
248. K. Najafi, and M. Maharbiz, “What Should A First College Course On Mems Be?” Educational Poster Digest, Hilton Head Solid-State Sensor, Actuator, and Microsystems Workshop, pp. 55-58, Hilton Head Island, SC, June 2006
249. L. C. McAfee, K. Najafi, Y.B. Gianchandani, K. D. Wise, and M. M. Maharbiz, D.M. Aslam, P.L. Bergstrom, C.R. Friedrich, “A MEMS/Microsystem Curriculum With International Dissemination,” Digest of Educational Posters, Hilton Head Solid-State Sensor, Actuator, and Microsystems Workshop, pp. 1-6, Hilton Head Island, SC, June 2006
250. L. C. McAfee, K. Najafi, Y.B. Gianchandani, K. D. Wise, and M. M. Maharbiz, D.M. Aslam, P.L. Bergstrom, C.R. Friedrich, “MEMS and Microsystem Courses with National and International Dissemination,” American Society for Engineering Education, 2006 ASEE Annual Conference and Exposition
251. A. M. Sodagar, K. Najafi, “Wireless Interfaces for Implantable Biomedical Microsystems,” 49th IEEE International Midwest Symposium on Circuits and Systems (MWSCAS’06), Puerto Rico, Aug. 6-9, 2006
252. A.M. Sodagar, M. Ghovanloo, K. Najafi, and K.D. Wise, “Fully-Integrated CMOS Power Regulator for Telemetry-Powered Implantable Biomedical Microsystems,” IEEE Custom Integrated Circuits Conference, San Jose, California, Sept. 10-13, 2006
253. A. M. Sodagar, K. D. Wise, K. Najafi, “A Neural Signal Processor for an Implantable Multi-Channel Cortical Recording Microsystem,” 28th IEEE International Engineering in Medicine and Biology Conference (EMBC’06), New York City, Aug. 30- Sept. 3, 2006
254. A. Sodagar, K.D. Wise, and K. Najafi, “Generic Controller Dedicated to Telemetry-Controlled Microsystems,” 28th Annual International Conference of the IEEE Engineering in Medicine and Biology Society, New York, Sept., 2006
255. P. Mohseni, and K. Najafi, “A 1-MHz, 5-kb/s Wireless Command Receiver for Electronic Site Selection in Multichannel Neural Biopotential Recording, 28th Annual International Conference of the IEEE Engineering in Medicine and Biology Society, New York, Sept., 2006
256. H. Kim, W. Steinecker, G. Lambertus, A. Astle, K. Najafi, E. Zellers, L. Bernal, and K. Wise, “Integrated high-pressure 4-stage micro gas pump for high-speed micro gas chromatography”, in Proc. 10th Int. Conf. on Miniaturized Systems for Chemistry and Life Sciences (µTAS ’06), pp. 1037-1039, Tokyo, Japan, Nov. 5-9, 2006
257. H. Kim, A. Astle, L. Bernal, K. Najafi, and P. Washabaugh, “Directional pumping performance of an electrostatic checkerboard microvalve”, in Proc. 2006 ASME Int. Mechanical Engineering Congress & Exposition (ASME ’06), IMECE 2006-16211, Chicago, IL, Nov. 5-10, 2006
258. A. M. Sodagar, K. D. Wise, K. Najafi, “Fully-Integrated Mixed-Signal Neural Processor for Implantable Multi-Channel Cortical Recording,” 2006 IEEE Biomedical Circuits and Systems Conference (BioCAS’06), London, U.K., Nov. 2006
259. A. M. Sodagar, K. D. Wise, K. Najafi, “Wireless Interface Chip for Power and Bidirectional Data Telemetry Dedicated to a Cochlear Implantable Microsystem,” 2006 IEEE Biomedical Circuits and Systems Conference (BioCAS’06), London, U.K., Nov. 2006
260. S. Lee, J. Cho, and K. Najafi, "Fabrication of Vertical Comb Electrodes Using Selective Anodic Bonding," in Proceedings of IEEE 20th Int. Conf. Micro Electro-Mechanical Systems Workshop (MEMS 2007), pp. 349-352, Kobe, Japan, Jan. 2007
261. H. Kim, A. Astle, K. Najafi, L. Bernal, and P. Washabaugh, “A fully integrated high-efficiency peristaltic 18-stage gas micropump with active microvalves”, in Proc. 20th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS ‘07), pp. 131-134, Kobe, Japan, Jan. 2007
262. H. Kim, A. Jaregui, C. Morrison, K. Najafi, L. Bernal, and P. Washabaugh, “Low-power electrostatic microthruster for propulsion based on Helmholtz-resonance”, in Proc. 20th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS ‘07), pp. 127-130, Kobe, Japan, Jan. 2007
263. T. Galchev, W. C. Welch III, and K. Najafi, "Low-Temperature MEMS Process Using Plasma Activated Silicon-On-Silicon (SOS) Bonding" in Proc. 20th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS ‘07), pp. 309-312, Kobe, Japan, Jan. 2007
264. J.S. Mitchell and K. Najafi, "Localized Back-Side Heating for Low -Temperature Wafer-Level Bonding," in Proc. 20th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS ‘07), pp. 377-380, Kobe, Japan, Jan. 2007
265. K. Najafi, “Micromachined Gas Chromatography Microsystem for Complex Gas Analysis,” Invited Talk, DARPA Microsystems Technologies Office Symposium, San Jose, CA, March 2007
266. A.M. Sodagar, G. E. Perlin, Y. Yao, K. Najafi, K. D. Wise, “Chronic Neural Recording with a 64-Channel Cortical Microsystem,” Proceedings2007 IEEE EMBS Conference on Neural Engineering, pp. 402-405, Hawaii, USA, May 2007
267. E.T. Zellers, S. Reidy, R.A. Veeneman, R. Gordenker, W.H. Steinecker, G.R. Lambertus, H. Kim, J.A. Potkay, M.P. Rowe, Q. Zhong,C. Avery, H.K. L. Chan, R.D. Sacks, K. Najafi, K.D. Wise, “An Integrated Micro-Analytical System For Complex Vapor Mixtures,” Invited Paper, Proceedings of The Int. Conf. on Solid-State Sensors, Actuators, and Microsystems, Transducers '07, Lyon, France, June 10-14, 2007
268. A.M. Sodagar, G. E. Perlin, Y. Yao, K. D. Wise, K. Najafi, “An Implantable Microsystem for Wireless Multi-Channel Cortical Recording,” Proc.,2007 IEEE International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers’07), Lyon, France, June 2007
269. W. C. Welch, K. Najafi, “Nickel-Tin Transient Liquid Phase (TLP) Wafer BondingFor MEMS Vacuum Packaging,” Proc.,2007 IEEE International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers’07), Lyon, France, June 2007
270. S-H. Lee, S.W. Lee, and K. Najafi, “A Generic Environment-Resistant Packaging Technology For MEMS,” Proc.,IEEE International Conference on Solid-State Sensors, Actuators, and Microsystems (Transducers’07), Lyon, France, June 2007
271. H. Kim, William H. Steinecker, S. Reidy, Gordon R. Lambertus, A.A. Astle
K. Najafi, Edward T. Zellers, L.P. Bernal, P.D. Washabaugh, and K.D. Wise, “A Micropump-Driven High-Speed MEMS Gas Chromatography System,” Proc.,2007 IEEE International Conf. on Solid-State Sensors, Actuators, & Microsystems (Transducers’07), Lyon, France, June 2007
272. J.S. Mitchell, J.M. Giachino and K. Najafi, ‘Wafer Level Vacuum/Hermetic Packaging of MEMS Devices,” 2007 Sensors Expo and Conference, Illinois, June 2007
273. K. Najafi, “Packaging of Implantable Microsystems,” Proceedings, IEEE Int. Sensors Conference, Atlanta, Georgia, October 2007
Other Conference or Symposium
Presentations:
1.
K.D. Wise, K. Najafi, "A Micromachined Integrated Sensor with On-Chip Self-Test Capability," Invited Paper, Digest, Solid-State Sensors Conf., pp. 12-16, Hilton Head, SC, June 1984
2. K. Najafi, K.D. Wise, "An
Integrated Multielectrode Microprobe for Intracortical Recording," Invited Talk, BMES 1985 Annual Meeting, Los Angeles, April 1985
3. K. Najafi, "Silicon
Micromachining: Key to Silicon Integrated Sensors," Symposium on
Sensors and Technology, Case Western Reserve University, Cleveland,
Oh., April 1987
4. K. Najafi, "Solid-State
Integrated Sensors and Their Application in Instrumentation and Measurement
Systems," Symp. for Innovation in Measurement Science, Instrument
Society of America, Geneva, New York, August 1987
5. K. Najafi, "Organic
and Inorganic Coatings for Protection of Integrated Circuit Electrodes,"
18th Annual Neural Prosthesis Workshop, National Institutes of Health,
Bethesda, MD., October 28-30, 1987
6. K. Najafi, "Control
and Measurement with Integrated Solid-State Sensors," Fourth Regional
Symp., Int. Society for Hybrid Microelectronics, Dallas, April 11-12,
1988
7. K. Najafi, "Implantable
Sensors," Symp. for Innovation in Measurement Science, Instrument
Society of America, Geneva, New York, August 1988
8. J.F. Hetke, D.J. Anderson,
D.A. Evans, J.A. Wiler, K. Najafi, R.A. Altschuler, "Tissue Volume
Selectivity in the Cochlear Nucleus to Electrical Stimulation with Multichannel
Silicon Substrate Arrays," Association for Res. in Otolaryngology,
Midwinter Meeting, Florida, February 7, 1989
9. K. Najafi, "Fabrication
of Microstructures and Integrated Sensors Using a Dissolved-Wafer Silicon-On-Insulator
Process," General Motors Research Labs Solid-State Sensor Workshop,
February 10, 1989
10.
K. Najafi, "Integrated Sensors in Biological Environments," Invited Paper, Book of Abstracts, 5th Int. Conf. on Solid-State Sensors and Actuators, Transducers '89, pp. 295-296, Montreux, Switzerland, June 1989
11. K.D. Wise, K. Najafi, and
W.G. Baer, "A Silicon Thermopile-Based Sensor for Non-Contact Thermal
Imaging in Industrial process Control," Temperature Measurement
Workshop, Santa Fe, CA., February 20, 1990
12. K. Najafi, "A Dissolved-Wafer
Silicon-On-Insulator Technology and Its Applications to Integrated Sensors
and Actuators," ASME Design Engineering Show and Conference, Anaheim,
CA., September 1990
13. J.F. Hetke, D.J. Anderson,
J.A. Wiler, K. Najafi, K.D. Wise, "An Implantable Multichannel
Silicon-Substrate Array for Chronic Stimulation of the Central Nervous
System," Midwinter Meeting, Association for Research in Otolaryngology,
St. Petersburg, FL., February 1991
14. K. Najafi, "Solid-State
Sensor and Actuator Research at the University of Michigan," Meeting
of the Michigan Chapter of the American Vacuum Society, Ann Arbor, Michigan,
February 1991
15. R.M. Bradley, S. Gurkan,
B.E. Bradley, K. Najafi, "Regeneration of Rat Glossopharyngeal
Nerve Through Sieve Electrodes," AChemS XIII Conf., April 1991
16. K. Najafi,
"Solid-State Integrated Sensors, Fundamentals and Applications,"
Symposium on Electrochemical Science and Technology of the Michigan Chapter
of the Electrochemical Society, Warren, Michigan, May 1991
17. R.M. Bradley, R.H.
Smoke, T.A. Akin, K. Najafi, "Functional Regeneration of
Glossopharyngeal Nerve Through Micromachined Sieve Electrodes," AChemS
XIV Conf., April 1992
18. K. Najafi,
"Present Advances and Future Needs in Integrated Sensors and
Microsystems," National Materials Advisory Board (of the National
Research Council) Workshop on Microengineering, Washington D.C., April 30-May
1, 1992
19. K. Najafi,
"Integrated Sensors and Microsystems: Communication Links to a
Non-Electronic World," Invited Talk, presented at the Eastern
Communications Forum, an Educational Meeting Conducted by the National
Engineering Consortium, Rye, New York, May 5, 1992
20. K. Najafi,
"Packaging and Interconnect Technologies for Solid-State
Microsensors," Invited Talk, 181st Meeting of the Electrochemical
Society, St. Louis, Missouri, May 19, 1992
21. K. Najafi, "A
Review of Solid-State Integrated Microsensors and Their Future Application in
Space Systems," Invited Talk, NASA SATWG Sensors and Software Workshop,
New Orleans, LA, June 1992
22.
K. Najafi, "Silicon Integrated Microsensors," Invited Paper, Proceedings, International Society for Optical Engineering (SPIE) Symposium, OE/FIBERS '92, Boston, MA, September 1992
23. K. Najafi, "Solid-State Integrated Microsensors," Invited Paper, 124th Meeting of the Acoustical Society of America, New Orleans, LA, October 31-November 4, 1992
24. K. Najafi, and C.H. Mastrangelo, "Solid-State Microsensors and Smart Structures," Invited Paper, Proceedings, IEEE Ultrasonics, Ferroelectrics, and Frequency Control Symposium, Baltimore, Maryland, November 1993
25. M.W. Putty, and K. Najafi, "A Micromachined Vibrating Ring Gyroscope," Invited Paper, Technical Digest, Solid-State Sensors and Actuators Workshop, pp. 213-220, Hilton Head, SC, June 1994
26. K. Najafi, "Integrated Sensing Systems in Closed Loop Neural Prosthesis," Invited Keynote Speaker,European Solid-State Sensors and Actuators Conf., EUROSENSORS, Toulouse, France, September 1994
27. K. Najafi, "Sensor/Circuit Integration in Biomedical Applications," Invited Presentation, European NEXUS Workshop on Sensor/Circuit Integration, Toulouse, France, Sept. 29-30, 1994
28. K. Najafi, "Silicon-Based Electronic Interfaces to Biological Systems," Invited Speaker at the Workshop on "Bio-Mechatronics" held as part of the 1995 IEEE Int. Conference on Robotics and Automation, Nagoya, Japan, May 22-27, 1995
29. K. Najafi, “Microinstrumentation Systems for Environmental Monitoring,” Invited Paper, Proceedings, Int. Symp. on Micro Systems, Intelligent Materials and Robots, pp. 142-145, Sendai, Japan, September 1995
30. K.D. Wise, C.H. Mastrangelo, K. Najafi, and Clark T.C. Nguyen, “Research in Integrated Sensors and Microsystems at the University of Michigan”, Invited Paper, Digest, Sensors Expo, Chicago, September 1995
31. K. Najafi, "Research in Integrated Sensors and Microsystems at the University of Michigan," Invited Speaker, Technical Digest of the IEEJ Seminar on MEMS, MST and Micromachines, Tokyo, Japan, October 1995
32. K. Najafi, “Recent Progress in Micromachining Technology and Applications in Implantable Biomedical Systems,” Invited Lecture, Proceedings, Sixth Int. Symp. on Micro Machine and Human Science, MHS ‘95, pp. 11-20, Nagoya, Japan, October 1995
33. K. Najafi, "MEMS
Research Activities at the University of Michigan," Invited Talk,
Technical Digest, IEEJ Seminar on MEMS, MST, and Micromachines, University of
Tokyo, Tokyo, Japan, October 2, 1995
34. K. Najafi, "Microinstrumentation Cluster for Environmental Sensing," GE MEMS
and Advanced Packaging Workshop, Schenectady, NY, November 28-29, 1995
35. B. Ziaie and K. Najafi, "Biomedical Microdevices: A Micromachining Approach," Invited Paper, Proceedings, 1995 International Semiconductor Device Research Symposium, pp. 401-404, Charlottesville, VA, December 5-8, 1995
36. K. Najafi, “Silicon Micromachining Technologies: Future Needs and Challenges,” Invited Speaker, SPIE, Micromachining & Microfabrication Process Technology II Conference, October 1996
37.
K. Najafi, “Integrated Biomedical Microsystems,” Invited Speaker, World Congress on Medical Physics and Biomedical Engineering, Nice, France, September 14-19, 1997
38. K. Najafi, “Research in Wireless Integrated Micro Systems (WIMS) at University of Michigan,” Invited Talk, Sensors Expo, Invited Talk, Detroit, Michigan, September 19-21, 2000
39.
Muller, M. O., Bernal, L.P., Chou, T.-K. A, Najafi, K., and Washabaugh, P. D. 2001 “On Propulsion Efficiency And Vortical Structure Of Synthetic Jet Flows.” APS Division Of Fluid Dynamics 54th Annual Meeting, San Diego, Ca, November 18-20, 2001
40.
K. Najafi, "MEMS and Microsystems," Plenary Presentation, International Semiconductor Device Research Symposium, Washington DC, December 2001
41.
Y. Shimatani, S.A. Nikles, K. Najafi, and R.M. Bradley, “Simultaneous chronic recording from multiple single fibers of the chorda tympani nerve using an implantable sieve electrode array,” Presented at the XXIV annual meeting of the Association for Chemoreception Sciences, Sarasota, FL, April 24-28, 2002
42. K. Najafi, “Power and Integrated Microsystems," Plenary Presentation, SPIE International Symposium on Design, Test, Integration, and Packaging of MEMS and MOEMS, Cannes, France, May 6-8, 2002
43. K. Wise and K. Najafi, “Fully-Implantable Auditory Prostheses: Restoring Hearing to the Profoundly Deaf,” Invited Paper, 2002 IEEE International Electron Devices Meeting (IEDM), pp. 499-502, San Francisco CA, December 2002
44. K. Najafi, “Micropackaging Technologies for Integrated Microsystems: Applications to MEMS and MOEMS,” Invited Plenary Talk, Proceedings of SPIE’s Micromachining and Microfabrication Symposium, pp. 1-19, San Jose, CA, January 27-29, 2003
45.
P. Mohseni and K. Najafi, “Bi-directional wireless microsystems for biomedical in vivo recording applications,” SIGDA Ph.D. Forum at 40th Design Automation Conf. (DAC’03), Anaheim, CA, June 3, 2003
46. K. Najafi, J. Chae, H. Kulah and G. He, “Micromachined Silicon Accelerometers And Gyroscopes,” Invited Paper, IROS - IEEE International Robotics and Systems Conference, Las Vegas, October 27-31, 2003
47. K. D. Wise, K. Najafi, R. Sacks, and E. T. Zellers, “A Wireless Integrated Microsystem for Environmental Monitoring,” Invited Technology Directions Paper, Technical Digest, IEEE Int. Solid-State Circuits Conference, pp. 434-435, San Francisco, CA, Feb. 2004
48. E. T. Zellers, W. H. Steinecker, G. R. Lambertus, M. Agah, C.-J. Lu, H. K. L. Chan, J. A. Potkay, M.C. Oborny, J. M. Nichols, A. Astle, H. S. Kim, M. P. Rowe, J. Kim, L. W. da Silva, J. Zheng, J. J. Whiting, R. D. Sacks, S. W. Pang, M. Kaviany, P. L. Bergstrom, A. J. Matzger, Ç. Kurdak, L. P. Bernal, K. Najafi, K. D. Wise, “A Versatile MEMS Gas Chromatograph For Determinations Of Environmental Vapor Mixtures,” Invited Paper and Talk, Technical Digest, Solid State Sensor, Actuator and Microsystems Workshop (Hilton Head 2004), Hilton Head Island, South Carolina, June 2004.
49. K. Najafi, “Packaging of Implantable Microsystems,” IEEE Int. Sensors Conference, Atlanta, Georgia, October 2006
50. P. Mohseni, and K. Najafi, “Single-Chip Wireless Microsystems for Multichannel Neural Biopotential Recording,” 2006 NIH-NINDS Neural Prosthesis Workshop, Bethesda, Maryland, October 2006
51. K. Najafi, “Micromachined Gas Chromatography Microsystem for Complex Gas Analysis,” Invited Talk, DARPA Microsystems Technologies Office Symposium, San Jose, CA, March 2007
52. K. Najafi, Wireless Integrated Microsystems for Environmental Monitoring and Implantable Prostheses,” Canadian Workshop on MEMS, Montreal, Canada, Aug. 13, 2007
Chapters in Books:
1. K.D. Wise, K. Najafi,
"VLSI Sensors in Medicine," in VLSI In Medicine, Norman G.
Einspruch and Robert D. Gold, eds., Academic Press, 1988
2. K. Najafi, K.D. Wise, N.
Najafi, "Integrated Sensors," Published in "Semiconductor Sensors,"
Edited by Simon Sze, John Wiley, 1994
3. K. Najafi, "Sensor
and Circuit Integration in Biomedical Applications," in Silicon Sensors
and Circuits: On-Chip Compatibility, Ed. R.F. Wolffenbuttel, pp. 211-257,
Chapman and Hall, 1996
4. K. Najafi, "Micromachined
Systems For Neurophysiological Applications," in Handbook of
Microlithography, Micromachining and Microfabrication, Volume II:
Micromachining and Microfabrication, SPIE, 1997
5. G. K. Fedder, J. Chae, H. Kulah, K. Najafi, T. Denison, J. Kuang, and S. Lewis, “Monolithically Integrated Inertial Sensors,” Chapter in “CMOS MEMS,” Edited by H. Baltes, O. Brand, G.K. Fedder, C. Hierold, J.G. Korvink, and O. Tabata, Volume 2 of a series of books entitled "Advanced Micro- and Nanosystems,” Publisher: Wiley-VCH, 2005
6. M. Ghovanloo, K.D. Wise, and K. Najafi, "Towards a button-sized 1024-site wireless cortical microstimulating array," Neuro-Nano Technology, Artificial Implants, and Neural Prostheses, Book of the1st Intl. IEEE/EMBS Conf. on Neural Engineering, Ed. M. Akay, in press.
7. H. Kim, K. Najafi, and L.P. Bernal, “Gas Micropumps,” chapter in Comprehensive Microsystems, edited by Y. Gianchandani, Hans Zappe, and O. Tabata, Elsevier Publishers
8. K. Najafi, T.J. Harpster, H. Kim, J.S. Mitchell, W.C. Welch III, “Wafer Bonding,” chapter in Comprehensive Microsystems, edited by Y. Gianchandani, Hans Zappe, and O. Tabata, Elsevier Publishers
Webpage updates by: Trasa Burkhardt
Last Updated: 4/3/08
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