III. MEMS PHASE SHIFTERS FOR X-BAND TO W-BAND APPLICATIONS
(AND THE FIRST MECHANICAL 35 GHz BPSK MODULATOR)

Figure 1: An analog distributed MEMS phase shifter.

Figure 2: SEM picture of a digital X-band MEMS phase shifter. The dark areas on the left and right of the center conductor are MIM capacitors.

Figure 3: W-band analog phase shifter measurements at 26 V bias. The loss was 5 dB per 360° phase shift at 70-110 GHz.

Figure 4: X-band digital phase shifter measurements. The loss was 1.8 dB per 360° of phase shift at 10 GHz, and 1.2 dB per 360° phase shift at 18 GHz.