VII. Micromachined Antennas: 10 GHz to 100 GHz.

Fig. 1: Synthesized low dielectric-constant antenna at 94 GHz.

Fig. 2: Micromachined W-band microstrip antenna on a silicon substrate (dimensions in um). The measured bandwidth is 10% and the measured radiation effiency is 58% at 94 GHz.

Fig. 3: Micromachined W-band tapered-slot antenna on a Duriod substrate. The holes reduce the effective dielectric constant underneath the antenna and improve the radiation patterns.

Fig. 4: Measured 94 GHz radiation patterns of the micromachined tapered slot antenna.