VI. First Generation Micromachined Filters, Transmission Lines, Couplers,
and High-Q Lumped Elements

Figure 1: Micromachined 20 GHz 4-pole interdigital filter. The top wafer is removed for viewing purposes.

Figure 2: W-band micromachined coupled-line filter (*work performed with Prof. Katehi's group).

Figure 3: Micromachined 10-60 GHz coupler (*work performed with Prof. Katehi's group).

Figure 4: Micromachined inductors on thin membranes. The resonant frequency 70 GHz for the 1.1 nH inductor.

Figure 5: Micromachined 17-18 GHz single-sideband mixer (filter+balanced mixer). The diodes are still not placed on the wafer. The SSB rejection is 30-40 dB, and the conversion loss is 8-9 dB.