V. High-Q MEMS Varactors, MEMS Tunable Filters and Low-Phase Noise Tunable
Oscillators

Fig. 1: Layout of an interdigital tunable filter at 0.7-1.2 GHz. The varactors used were high-Q GaAs devices.
(file: tunable filter layout..)

Fig. 2: Picture of the tunable RF filter.

Fig. 3: Measured performance of the tunable RF filter.