Research

Contact Us


Euisik Yoon, Director
2400 EECS
Ann Arbor, MI 48109-2122
PH: (734) 615-4469
FX: 734-763-9324 esyoon@umich.edu

Barb Rice
Senior Research Administrator
2114B EECS
Ann Arbor, MI 48109-2121
PH: 734-936-1956
FX: 734-647-2342 rice@eecs.umich.edu

Plasma Fabrication and Plasma Based MEMS Devices

 
Faculty
Gianchandani, Yogesh
Kushner, Mark J.


Related Labs, Centers, and Groups
DOE Center for Predictive Control of Plasma Kinetics
Michigan Institute for Plasma Science and Engineering
Radiation Laboratory