Contact Us

Euisik Yoon, Director
2400 EECS
Ann Arbor, MI 48109-2122
PH: (734) 615-4469
FX: 734-763-9324

Barb Rice
Senior Research Administrator
2114B EECS
Ann Arbor, MI 48109-2121
PH: 734-936-1956
FX: 734-647-2342

Plasma Materials Processing of Microelectronics

Gianchandani, Yogesh
Kushner, Mark J.

Related Labs, Centers, and Groups
DOE Center for Predictive Control of Plasma Kinetics
Michigan Institute for Plasma Science and Engineering
Radiation Laboratory