Workshop on Thin Film
Metrology – WISE 2000
Attendee List and E-Mail
Addresses
Presentation Title |
Presenter |
Tutorial: Thin Film Characterization by SE and Modeling
Techniques (240 KB) |
G.E. Jellison |
P. Hess |
|
Modeling the
Optical Constants of Diamond-and Zincblende-type Semiconductors: Discrete and
Continuum Exciton Effects at E0 and
E1 |
F. H. Pollak |
J. Bao |
|
Spectroscopic Ellipsometric
Measurement of SiGe Film Stacks (work-in-progress talk, not posted) |
C. Hayzelden |
Application of Real
Time Stokes Vector Spectroscopy for Characterization of Inhomogeneous Thin
Film Growth |
P. Rovira |
Phase Modulated Ellipsometry
with Digital Signal Processing |
J. Blanco |
Multichannel Muller
Matrix Ellipsometer for Real Time Spectroscopy (1.5-5.3eV) of Anisotropic
Film Growth |
J. Lee |
Integrated
Metrology: review of applications |
J-L Stehle |
Overview
of Thin Film Characterization:Semiconductor and related industries |
T. Ogawa |
Characterization of
Thin Gate Dielectrics |
A. Diebold |
J. N. Cox |
|
P. Schiavone |
|
C. Pickering |
|
H. Hovel |
|
P. Boher |
|
In
Situ Measurements of Patterned Structures (1.49 MB, viegraphs only) |
F.L. Terry |
Broad Spectral
Range (1.5 to 6.5eV) Multichannel Ellipsometry for Real Time Characterization
of Wide Band Gap Thin Film Growth |
J. A. Zapien |
In Situ Spectral Transmission Measurements of Thin Films
(354 KB) |
L. Kamlet |
In Situ Monitoring
Techniques for MBE |
R. Clarke |