Workshop on Thin Film Metrology – WISE 2000

University of Michigan-Ann Arbor, May 8-9, 2000

Attendee List and E-Mail Addresses

Presentation Title	Presenter
Tutorial: Thin Film Characterization by SE and Modeling Techniques (240 KB)	G.E. Jellison
Ellipsometric Investigation of Ideal Atomically Flat Silicon Crystals: Revisions of Optical Constants (scanned, 7.0 MB)	P. Hess
Modeling the Optical Constants of Diamond-and Zincblende-type Semiconductors: Discrete and Continuum Exciton Effects at E0 and E1	F. H. Pollak
Scatterometry techniques applied to metrology (516 KB)	J. Bao
Spectroscopic Ellipsometric Measurement of SiGe Film Stacks (work-in-progress talk, not posted)	C. Hayzelden
Application of Real Time Stokes Vector Spectroscopy for Characterization of Inhomogeneous Thin Film Growth	P. Rovira
Phase Modulated Ellipsometry with Digital Signal Processing	J. Blanco
Multichannel Muller Matrix Ellipsometer for Real Time Spectroscopy (1.5-5.3eV) of Anisotropic Film Growth	J. Lee
Integrated Metrology: review of applications	J-L Stehle
Overview of Thin Film Characterization:Semiconductor and related industries	T. Ogawa
Characterization of Thin Gate Dielectrics	A. Diebold
Characterization of Porous Dielectric Films (589 KB)	J. N. Cox
Characterization of Photoresist and ARC (389 KB)	P. Schiavone
Characterization of Si:Ge Materials and Layers (834 KB)	C. Pickering
Characterization of SOI (scanned, 7.0 MB)	H. Hovel
DUV (150-350nm) characterization of Materials (582 KB)	P. Boher
In Situ Measurements of Patterned Structures (1.49 MB, viegraphs only) RCWA Topography Extraction Movie (QuickTime)	F.L. Terry
Broad Spectral Range (1.5 to 6.5eV) Multichannel Ellipsometry for Real Time Characterization of Wide Band Gap Thin Film Growth	J. A. Zapien
In Situ Spectral Transmission Measurements of Thin Films (354 KB)	L. Kamlet
In Situ Monitoring Techniques for MBE	R. Clarke