This page is a guide to the papers and other publications written and/or presented by the members of the Integrated Manufacturing Process Automation and Control Technologies group. Most of the publications are available in both postscript format and as a .PDF file, which is viewable on the Adobe Acrobat Reader. The Acrobat Reader is available free and can be downloaded from Adobe's homepage. This page will be updated as future papers are authored and made available.
Publications of the Cell Automation Group Categories:
Inter-Process Control and Active Databases
Paul G. Otanez, Jonathan T. Parrott, James R. Moyne, and Dawn M. Tilbury,
"The Implications of Ethernet as a Control Network,"
Global Powertrain Conference, Ann Arbor, MI, September 2002.
Open as a PDF file.
Paul G. Otanez, James R. Moyne, and Dawn M. Tilbury,
"Using Deadbands to Reduce Communication in Networked Control Systems,"
the 2002 American Control Conference, May 2002.
Open as a PDF file.
Paul G. Otanez, Jonathan Parrott, James R. Moyne, and Dawn M. Tilbury,
"Analysis of Distributed Control Networks for Reconfigurable Machining Systems,"
ERC/ITIA Workshop on Control of Manufacturing Systems, Milan, Italy, February 2002.
Open as a PDF file.
Paul G. Otanez,
"Performance Optimization of Networked Control Systems,"
Master of Science Thesis, The University of Michigan, April 2002.
Open as a PDF file.
Feng-Li Lian, James R. Moyne, and Dawn M. Tilbury,
"Optimal Controller Design and Evaluation for a Class of Networked
Control Systems with Distributed Constant Delays,"
the 2002 American Control Conference, May 2002.
Open as a PDF file.
Feng-Li Lian, James R. Moyne, and Dawn M. Tilbury,
"Time-Delay Modeling and Optimal Controller Design of Networked
Control Systems,"
submitted to International Journal of Control, August, 2001.
Open as a PDF file.
Feng-Li Lian, James R. Moyne, and Dawn M. Tilbury,
"Time Delay Modeling And Ssample Time Selection For Nnetworked Control
Systems,"
Proceedings of the ASME, Dynamics Systems and Control Division,
November 2001, New York, NY.
Open as a PDF file.
Feng-Li Lian, James R. Moyne, Dawn M. Tilbury, and Paul Otanez
"A Software Toolkit for Design and Optimization of Sensor Bus Systems in
Semiconductor Manufacturing Systems,"
Proceedings of the Advanced Equipment Control and Advanced Process Control Symposium XIII,
Octocber 2001, Banff Canada.
(Honorable Mention Paper)
Open as a PPT file.
Feng-Li Lian, James Moyne, and Dawn M. Tilbury.
"Networked Control Systems Toolkit: A Simulation Package for
Analysis and Design of Control Systems with Network Communication"
Technical Report UM-ME-01-04, July, 2001
Open as a PDF file.
Feng-Li Lian, James R. Moyne, and Dawn M. Tilbury,
"Analysis and modeling of networked control systems: MIMO case
with multiple time delays,"
Proceedings of the American Control Conference, June 2001,
Arlington, VA.
Open as a PDF file.
Feng-Li Lian,
"Analysis, Design, Modeling, and Control of Networked Control Systems,"
Ph.D. Dissertation, The University of Michigan, May 2001.
Open as a PDF file.
Feng-Li Lian, James R. Moyne, and Dawn M. Tilbury,
"Network Design Consideration for Distributed Control Systems,"
to appear on IEEE Transactions on Control Systems Technology,
Open as a PDF file.
Feng-Li Lian, James R. Moyne, and Dawn M. Tilbury,
"Performance evaluation
of control networks: Ethernet, ControlNet, and DeviceNet,"
IEEE Control Systems Magazine, Vol. 21, No. 1, Page(s): 66-83, February, 2001,
Open as a PDF file.
Feng-Li Lian, James R. Moyne, and Dawn M. Tilbury,
"Implementation of
Networked Machine Tools in Reconfigurable Manufacturing Systems,"
Proceedings of the 2000 Japan-USA Symposium on Flexible Automation, July 2000, Ann Arbor,
MI
Open as a PDF file.
Feng-Li Lian, James R. Moyne, and Dawn M. Tilbury,
"Control Performance
Study of a Networked Machining Cell,"
Proceedings of the American Control
Conference, June 2000, Chicago, IL
Open as a PDF file.
James Moyne - MiTeX Solutions / University of Michigan Gayatri Rao - University of
Michigan John Conway - Schneider Electric Jeff Seward - IBM "Developing a
Multi-level SEMI Standard Sensor Bus Solution and Applying It at a Semiconductor
Manufacturing Site"
Open as a PPT file.
Feng-Li Lian, James Moyne, and Dawn M. Tilbury.
"Performance Evaluation of
Control Networks for Manufacturing Systems,"
Proceedings of the
ASME-Dynamics Systems and Control Division, November 1999, Nashville TN
Open as aPDF file.
Feng-Li Lian, James Moyne, and Dawn M. Tilbury. "Performance Evaluation of
Control Networks"
Technical Report UM-MEAN-99-02, Febuary 15, 1999
Open as a PDF file.
J. Moyne, N. Najafi, D. Judd, A. Stock."A Process for Selecting a Commercial
Sensor Actuator 'Bus' as an Industry Operability Standard". Sensors Expo '95,
Boston, May 1995.
Open as a PDF file.
J. Moyne, N. Najafil, D. Judd, A. Stock. "Analysis of Sensor / Actuator Bus
Interoperability Standard Alternatives for Semiconductor Manufacturing". Center
for Display and Technology Manufacturing, University of Michigan, Sensors Expo 1994.
Open as a PDF file.
Jiyoun Kim, James Moyne and Chadi El Chemali: University of Michigan
Rock Nadeau, Paul Smith, John Colt, and Jonathan Chapple-Sokol: IBM Burlington
Tarun Parikh: SEMATECH "
Gradient and Radial Uniformity Control of a CMP Process
Utilizing a Pre- and Post- Measurement Strategy" Date, Location,
Open as DOC file
Chadi El Chemali, James Moyne and Kareemullah Khan: University of Michigan
Rock Nadeau, Paul Smith, John Colt, and Jonathan Chapple-Sokol: IBM Burlington Tarun
Parikh: SEMATECH "Multizone Uniformity Control of a CMP Process
Utilizing a Pre and Post-Measurement Strategy" October 25 – 29, Seattle,
Washington
Open as DOC file
Open as DOC file.
James Moyne and Chadi El Chemali - University of Michigan John Colt and Jonathan
Chapple-Sokol - IBM Tarun Parikh - SEMATECH "Yield Improvement @ Contact
Through Run-to-Run Control SEMATECH Defect Reduction Technology DRTB001 Project"
Open as a PPT file.
Kareem Khan, Chadi El Chemali and James Moyne "Yield Improvement at the Contact
Process Through Run-to-Run Control"
Open as a PPT file.
Kareemullah Khan, Victor Solakhain, Anthony Ricci, Tier Gu, and James Moyne
"Run-to-Run Control of ITO Deposition Process".SID 1998
Open as a PDF file.
J. Moyne, H. Etemad, M. Elta."Run-to-Run Control Framework for VLSI
Manufacturing". Microelectronic Processing '93 Conference proceedings, Sept 1993.
Open as a PDF file.
J. Moyne, R. Telfeyan, A. Hurwitz, J. Taylor."A Process Independent Run-To-Run
Cell Controller and its Application to Chemical-Mechanical Planarization".
Proceedings of the Sixth Annual SEMI/IEEE ASMC, Boston, Oct 1995.
Open as a PDF file.
J. Moyne, N. Chaudhry, R. Telfeyan."Adaptive Extensions to a Multi-Branch
Run-to-Run Controller for Plasma Etching". 41st National Symposium of the
American Vacuum Society, Oct 1994, and Journal of Vacuum Science and Technology, May/June
1995.
Open as a PDF file.
R. Telfeyan, J.Moyne, A. Hurwitz, J. Taylor."Demonstration of a Process
Independent Run-to-Run Controller". 187th Meeting of the electrochemical Society,
May 1995.
Open as a PDF file.
Boning, D., A. Hurwitz, J. Moyne, W. Moyne, S. Shellman, T. Smith, J. Taylor, and R.
Telfeyan, "Run by Run Control of Chemical Mechanical Polishing", IEEE
Trans. on Components, Packaging and Manufacturing Technology, Vol. 19, No. 4, pp. 307-314,
Oct. 1996
Open as PDF file.
James R. Moyne, Nauman A. Chaudhry, R. Telfeyan, "Adaptive Extensions to
a Mulit-Branch Run-to-Run Controller
for Plasma Etching," Journal of Vacuum Science and Technology - A , 13, 3,
pt 2, May-June 1995, 1787-91.
Open as PDF file.
Nauman A. Chaudhry, R. Telfeyan, B. Moore, H. Etemad, J. Moyne, "A
Run-to-Run Control Framework for VLSI
Manufacturing," SRC TECHCON '93 Atlanta, GA, Septemeber 1993, 31-33
Inter-Process Control and Active Databases
N. Chaudhry, J. Moyne, E. Rundensteiner."A Design Methodology for Databases
with uncertain Data". 7th International Working Conference on Scientific and
Statistical Database Management, Charlottesville, VA, Sept 1994.
Open as a PDF file.
N. Chaudhry, J. Moyne, E. Rundensteiner."Designing Databases with Fuzzy Data and
Rules for Application to Discrete Control". Electrical Engineering and Computer
Science Dept., Computer Science and Engineering Division, University of Michigan, Ann
Arbor, Tech. Rep. CSE-TR-224-94, Nov 1994.
Open as a PDF file.
Nauman A. Chaudhry, James R. Moyne, Elke A. Rundensteiner, "Active
Controller: Utilizing Active Databases for
Implementing Multi-Step Control of Semiconductor Manufacturing," to appear
in IEEE Transactions on Components,
Packaging and Manufacturing Technology, Part C: Manufacturing Technology, July 1998. Abstract
Open as a PDF file.
Nauman A. Chaudhry, James R. Moyne, Elke A. Rundensteiner, "Rule Inheritance
and Overriding in Active
Object-Oriented Databases," to appear in Current Trends in Database
Technology, IDEA Group Publishing, USA,
November 1998.
Open as a PDF file.
Nauman A. Chaudhry, James R. Moyne, Elke A. Rundensteiner, "A Formal Model
for Rule Inheritance and
Overriding in Active Object-Oriented Databases," International Workshop on
Issues and Applications of Database
Technology (IADT '98), Berlin, Germany, July 1998. Abstract.
Open as a PDF file.
Nauman A. Chaudhry, James R. Moyne, Elke A. Rundensteiner, " Utilizing
Fuzzy Data and Rules for Discrete Control
of Semiconductor Manufacturing Processes, " Fifth International Conference
on Data and Knowledge Systems for
Manufacturing and Engineering (DKSME `96), Phoenix, Arizona, October 24-25, 1996, 199-222.
Abstract.
Open as a PDF file.
Nauman A. Chaudhry, James R. Moyne, Elke A. Rundensteiner, " A Design
Methodology for Databases with
Uncertain Data," 7th International Working Conference on Scientific and
Statistical Database Management,
Charlottesville, VA, September 28-30, 1994, 32-41. Abstract.
Open as a PDF file.
Nauman A. Chaudhry, James R. Moyne, Elke A. Rundensteiner, " A Generic
Framework for Inter-Cell Control of a
Semiconductor Manufacturing Facility," 42nd National Symposium of the
American Vacuum Society, Minneapolis,
MN, October 16-20, 1995, 300. Abstract
Nauman A. Chaudhry, James R. Moyne, Elke A. Rundensteiner, "PSOM: A
Methodology for Process Automation
& Control Using Active Object-Oriented Databases." Abstract
Nauman A. Chaudhry, James R. Moyne, Elke A. Rundensteiner, "Aggregation and
Inheritance Relationships for
Process Specification in Object-Oriented Databases." Abstract
Nauman A. Chaudhry, James R. Moyne, Elke A. Rundensteiner, "An Extended
Database Design Methodology for
Uncertain Data Management." Abstract
Nauman A. Chaudhry, James R. Moyne, Elke A. Rundensteiner, "Extended
Aggregation Relationships for Process
Specification and Enactment in Active Databases," Tech. Rep. CSE-TR-315-96,
EECS Dept., CSE Division,
University of Michigan, Ann Arbor, November 1996. Abstract
Open as a PDF file.
J. Moyne and J. Curry, "A Fully Automated Chemical-Mechanical
Planarization Process," VLSI Multilevel Interconnection (V-MIC) Conference,
Santa Clara, C (June 1998)
Open as a PDF file.
R. Telfeyan, J. Moyne, N. Chaudhry, J. Pugmire, S. Shellman, D. Boning, W. Moyne, A.
Hurwitz, J. Taylor."A Multi-Level Approach to the Control of a Chemical-Mechanical
Planarization Process". 42nd National Symposium of the American Vacuum Society,
Minneapolis, Oct 1995.
Open as a PDF file.
N. Chaudhry, J. Moyne, E. Rundensteiner."A Generic Framework for Inter-Cell
Control of a Semiconductor Manufacturing Facility". 42nd national Symposium of
hte American Vacuum Society, Minneapolis, Oct 1995.
Open as a PDF file.
R. Telfeyan, J. Moyne, Nauman Chaudhry, et.al., "A Multi-Level Approach to
the Control of Chemical-Mechanical
Planarization Process," Journal of Vacuum Science and Technology - A, 14, 3,
pt 2, May-June 1996, 1907-13.
Open as a PDF file.
Nauman A. Chaudhry, James R. Moyne, Elke A. Rundensteiner, "Process
Automation in Semiconductor
Manufactruing: Issues and Solutions," Unpublished Tech. Rep. Abstract
Open as a PDF file.
Maintained by Paul Otanez at potanez@umich.edu
Updated: Friday, 07-Jun-2002 01:41:24 EDT