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McCorquodale Authors Michael S. McCorquodale, Fadi H. Gebara, Keith L. Kraver, Eric D. Marsman, Robert M. Senger, and Richard B. Brown 2 |   Outline  Motivation Microsystems: Anatomy Bottom-Up Design Methodology WIMS Microcontroller Design Framework Top-Down Design Methodology Gaps and Solutions Conclusions@ ddL    Motivation  Discuss design trends and challenges in microsystems technology Leverage advances in mixed-signal SoC design automation Determine a design methodology and framework appropriate for microsystems technology Implement methodology in a microsystem design Demonstrate increased design efficiency and verification Identify gaps in tool suite and promote development of required capabilities PP( .P '  Microsystems: Anatomy  ! Microsystems: Anatomy  "Microsystems: Anatomy  #Microsystems: Anatomy  $Microsystems: Anatomy  Bottom-Up Design Methodology  %Bottom-Up Design Methodology  &Bottom-Up Design Methodology  'Bottom-Up Design Methodology  (Bottom-Up Design Methodology  )Bottom-Up Design Methodology  The Problems No opportunity for architectural studies Time-consuming design iteration Cross-domain verification at top level only Time-consuming system level simulation, if it is even possible   WIMS Microcontroller  Design Framework: Requirements  &System level simulation support (HDL) Cross-domain verification at any level for MEMS, analog, and digital electronics Finite element simulation Active device and HDL simulation Parasitic extraction Co-simulation of primitives and HDL Timing verification HDL synthesis Automatic place and route''*Design Framework: Employed  Cadence AMS System modeling, primitive/HDL co-simulation, and MEMS modeling Spectre Analog device level simulation Coventorware Finite element analysis Synopsys Digital synthesis Cadence Silicon Ensemble Automatic place and route Mentor Graphics Calibre DRC, ERC, and LVS A  PM V+Top-Down Design Methodology  ,Top-Down Design Methodology  -Top-Down Design Methodology  .Top-Down Design Methodology  Gaps and Solutions  7Gaps in the Tool Suite MEMS and analog simulation results not automatically extracted to behavioral model Lack of physical verification for MEMS components No synthesis capabilities for MEMS and analog subsystems from topological or behavioral models Inability to port designs between process technologies8     ConclusionsMicrosystem design methodologies are in their infancy Current methodologies have originated from the disparate nature of the technology The proposed top-down methodology leverages advances in mixed-signal design automation The proposed methodology is efficient and offers superior verification as compared to current methodologies Gaps in tool suites exist and must be addressed for future microsystems developments Tool suites are disparate and can be built into a single framework$ { Qv  ` ̙33` 3` 3333f` 999MMM` f` f3` 3>?" dW.(? " dZ0.   " Y 6 n?" dd@   @@``PR    @ L `p>>  K0 p(  p~ p B?#" `x p B?" p T pPpP ?"0  KTitel  p Tt pPpP?" v*a   .;;XXvvF p T AA ?"p   XKlicken Sie, um die Formate des Vorlagentextes zu bearbeiten Zweite Ebene Dritte Ebene=Y  p 64 "0* .Michael S. McCorquodale University of Michigan//  H p 0޽h? ? 3(33y___PPT10Y+D=' = @B + AVParis010921W  K0 0t(  t t N pPpP ?"V   s;Klicken Sie, um das Format des Titel-Masters zu bearbeiten.<<" t T AA ?" `     x@Klicken Sie, um das Format des Untertitel-Masters zu bearbeiten.AAx t B?"~ t B?#" `H t 0޽h? ? 3(33/ 0 (?(  ( ( 0 P    T*   ( 0     V*  d ( c $ ?  ; ( 0  @  sKlicken Sie, um die Textformatierung des Masters zu bearbeiten. Zweite Ebene Dritte Ebene Vierte Ebene Fnfte Ebene@    t  ( 6  `P   T*   ( 6 `   V*  H ( 0޽h ? ̙3380___PPT10..у K0   d\(  dr d S  t    d  d C <A$OfficialSealSmallT @r`r  d S $U t@D     d N ?  &Solid State Electronics Laboratory Center for Wireless Integrated Microsystems Department of Electrical Engineering and Computer Science University of Michigan Ann Arbor, MI USA 48109-2122.     d N ?0 J Design Automation and Test Europe Conference, Munich, Germany, March 2003KKJ H d 0޽h ? ̙33y___PPT10Y+D=' = @B +  K0 ~@ (     Nxaxa?` e l$0 lW2;<pxr  S p0   r  S 0p@  H  0޽h ? #d 2___PPT10e.+D=' = @B +P   K0 S K P `(  `x ` c $sp0    ` s lAA p#" 0e `  ,@ @` ` T >?"`  D Motivation    ` T쐝>?"`  F Microsystems    ` Tؕ>?"``  C Bottom-Up    ` Tx>?"``  IMicrocontroller  ` T<>?"`  C Framework    ` TD>?"`@ BTop-Down    ` Tझ>?"`@ i Gaps & Solns.   ` T|>?"` E Conclusions   H ` 0޽h ? #d 2___PPT10e.+D=' = @B +:  K0 99`Xu4 M9(  4n 4 T ֳֳֳֳ?G The anatomy of a generalized wireless integrated microsystem (WIMS). Key technologies and associated development tools are shown 0 Z(&1 D r 4 S  p0    4 <(}E~ JMEMS*G 4 < G~ HAnalog&G 4 < m~ GMixed&G 4 < ~ C-&G 4 < % ~ HSignal&G 4 <p  w ~ N Digital/VLSI& G 4 < Y} IAntenna&G F 4 S >^  4 <  -  PMicroprocessor&G F 4 S >4 &'  4 < | w  JWireless& G  4 <  uM  K Interface& G  4 <@   HClock &G :B 4 3 > \ F 4 S > " w \ :B  4 3 > \ :B !4 3 > M  :B "4@ 3 > L  :B #4 3 > \ F $4 S > " w \ :B %4 3 > \ :B &4 3 > M  :B '4@ 3 > L  :B (4 3 > M N  :B )4 3 > L M   *4 <v   RSensor/Actuator &G  +4 <H  G  K Interface& G Z2 ,4 c $>"`  -4 <~` RSensor0G  Z2 .4 c $>"`[   /4 <x Bj  TActuator0 G   04  B+CVDEF>+V+ @`rZ  14  B+CWDEF>++W @` r F 24 S >4 yz  34 <L| S  dBaseband& G  44 < M  GModem&G  54  BCDE F>@-(  64  BCDEF>VV @`~W :B 74 3 >1 r2 :B 84 3 >r:B 94 3 >:B :4 3 >1 2 :B ;4 3 > :B <4 3 >1 2 :B =4 3 > y :B >4 3 > z&  ?4 <&~ M RFIC/RFMEMS& G @4 # BC DE<F$> CN;f S C @    "` A4  BCDE<F$>!SLnLLnF!@     B4  BCDE<F$>!,nn4 !@    IK  C4  BCDE<F$>!N;nnf S !@      D4  BtCDE<F$>d5ddd:7::7dod@ d dtt@    N~ E4 # BCDE<F$>nKB!!3*n@    "`)   F4  BCDE<F$>oN;""f S o@     v  G4  BtCDE<F$>7d5ddd:::dod@ d dt7t@     N~v  H4 <- Uh IFE *G I4 <T2lY KTools*G J4 <\1 j_ FAHDL&G K4 <,;b4 ICustom &G L4 <$@'r JIC Tools& G M4 <E _ GVHDL &G N4 <Kb: h  L Synthesis & G O4 <4 r GTools&G P4 <S _ GAHDL &G Q4 <XbQ ICustom &G R4 <T^9r L RFIC Tools& G S4  BCDEF">uuu@`[    T4 <b Y k  EDAC&G  U4  BCDEF">uuu@`  V4 <dgY  EADC&G  W4  BCDE<F$>oKB""3*o@    2 G  X4  B CDE<F$>ox 6@"@@"Kv o @    2 s  Y4 <l _ DMS&G Z4 <(q _ C-&G [4 <v  _ FHDL &G \4 <zb  ICustom &G ]4 < r JIC Tools& G n4 Tl>?"`  D Motivation    o4 T>?"`  F Microsystems    p4 T>?"``  C Bottom-Up    q4 T>?"``  IMicrocontroller  r4 T>?"`  C Framework    s4 T>?"`@ BTop-Down    t4 T>?"`@ i Gaps & Solns.  u4 T>?"` E Conclusions   H 4 0޽h ? #d 2___PPT10e.+D=' = @B +h9  K0 k8c8pXh7(  h  N`ֳֳֳֳ?G The anatomy of a generalized wireless integrated microsystem (WIMS). Key technologies and associated development tools are shown 0 Z(&1 D x  c $p0     6(E~ FMEMS&G  6lG~ LAnalog*G  6Lm~ GMixed&G  6~ C-&G  6% ~ HSignal&G  6 w ~ N Digital/VLSI& G  6Y} IAntenna&G @  C >^   6 -  PMicroprocessor&G @  C >4 &'   6| w  JWireless& G   6d uM  K Interface& G   6  HClock &G 4B  # > \ @  C > " w \ 4B  # > \ 4B  # > M  4B @ # > L  4B  # > \ @  C > " w \ 4B  # > \ 4B  # > M  4B @ # > L  4B  # > M N  4B  # > L M    6v   VSensor/Actuator *G   6 G  O Interface* G @2  C >   60~` HSensor&G @2 ! C >[   " 6  Bj  JActuator& G  # C B+CVDEF>+V+ @`"`rZ  $ C B+CWDEF>++W @`"` r @ % C >4 yz  & 6| S  dBaseband& G  ' 6 M  GModem&G  (  BCDE F>@-(  )  BCDEF>VV @`~W 4B * # >1 r2 4B + # >r4B , # >4B - # >1 2 4B . # > 4B / # >1 2 4B 0 # > y 4B 1 # > z&  2 6~ M RFIC/RFMEMS& G 3  BC DE<F$> CN;f S C @     4 # BCDE<F$>!SLnLLnF!@    "` 5  BCDE<F$>!,nn4 !@    IK  6  BCDE<F$>!N;nnf S !@      7  BtCDE<F$>d5ddd:7::7dod@ d dtt@    N~ 8  BCDE<F$>nKB!!3*n@    )   9  BCDE<F$>oN;""f S o@     v  :  BtCDE<F$>7d5ddd:::dod@ d dt7t@     N~v  ; 6< Uh EFE &G < 6lY GTools&G = 6 j_ JAHDL*G > 6b4 MCustom *G ? 6!'r NIC Tools* G @ 68& _ GVHDL &G A 6$+b: h  L Synthesis & G B 6/ r GTools&G C 6H5 _ GAHDL &G D 6$:bQ ICustom &G E 6|>9r L RFIC Tools& G F  BCDEF">uuu@`[    G 68= Y k  EDAC&G  H  BCDEF">uuu@`  I 6HY  EADC&G  J # BCDE<F$>oKB""3*o@    "`2 G  K  B CDE<F$>ox 6@"@@"Kv o @    2 s  L 6N _ DMS&G M 6R _ C-&G N 6xW  _ FHDL &G O 6 \b  ICustom &G P 6` r JIC Tools& G a TLe>?"`  D Motivation    b T j>?"`  F Microsystems    c T(n>?"``  C Bottom-Up    d Tq>?"``  IMicrocontroller  e Tu>?"`  C Framework    f Ty>?"`@ BTop-Down    g Tl}>?"`@ i Gaps & Solns.  h T0>?"` E Conclusions   H  0޽h ? #d 2___PPT10e.+D=' = @B +9  K0 88X`8(  h  N ֳֳֳֳ?G The anatomy of a generalized wireless integrated microsystem (WIMS). Key technologies and associated development tools are shown 0 Z(&1 D x  c $8p0     6dE~ FMEMS&G  6G~ HAnalog&G  6m~ KMixed*G  60~ G-*G  6% ~ LSignal*G  6 w ~ N Digital/VLSI& G  6TY} IAntenna&G @  C >^   6t -  PMicroprocessor&G @  C >4 &'   6| w  JWireless& G   6 uM  K Interface& G   6P  HClock &G 4B  # > \ @  C > " w \ 4B  # > \ 4B  # > M  4B @ # > L  4B  # > \ @  C > " w \ 4B  # > \ 4B  # > M  4B @ # > L  4B  # > M N  4B  # > L M    6v   RSensor/Actuator &G   6, G  K Interface& G @2  C >   6d~` HSensor&G @2 ! C >[   " 6, Bj  JActuator& G  #  B+CVDEF>+V+ @`rZ  $  B+CWDEF>++W @` r @ % C >4 yz  & 6,| S  dBaseband& G  ' 6 M  GModem&G  (  BCDE F>@-(  )  BCDEF>VV @`~W 4B * # >1 r2 4B + # >r4B , # >4B - # >1 2 4B . # > 4B / # >1 2 4B 0 # > y 4B 1 # > z&  2 6|~ M RFIC/RFMEMS& G 3  BC DE<F$> CN;f S C @     4  BCDE<F$>!SLnLLnF!@     5 # BCDE<F$>!,nn4 !@    "`IK  6  BCDE<F$>!N;nnf S !@      7  BtCDE<F$>d5ddd:7::7dod@ d dtt@    N~ 8  BCDE<F$>nKB!!3*n@    )   9  BCDE<F$>oN;""f S o@     v  :  BtCDE<F$>7d5ddd:::dod@ d dt7t@     N~v  ; 6 Uh EFE &G < 6x lY GTools&G = 6 j_ FAHDL&G > 6Xb4 ICustom &G ? 6P'r JIC Tools& G @ 6 _ GVHDL &G A 64%b: h  L Synthesis & G B 6d) r GTools&G C 6. _ GAHDL &G D 6,2bQ ICustom &G E 6$79r L RFIC Tools& G F C BCDEF">uuu@`"`[    G 6< Y k  ODAC0G   H C BCDEF">uuu@`"`  I 6\AY  OADC0G   J  BCDE<F$>oKB""3*o@    2 G  K # B CDE<F$>ox 6@"@@"Kv o @    "`2 s  L 6F _ HMS*G M 6 K _ G-*G N 6O  _ JHDL *G O 6Sb  MCustom *G P 6Q r NIC Tools* G Y TTV>?"`  D Motivation    Z TZ>?"`  F Microsystems    [ T$_>?"``  C Bottom-Up    \ Tb>?"``  IMicrocontroller  ] Tk>?"`  C Framework    ^ Tf>?"`@ BTop-Down    _ T8s>?"`@ i Gaps & Solns.  ` Tv>?"` E Conclusions   H  0޽h ? #d 2___PPT10e.+D=' = @B +J9  K0 M8E8X`7(  h  N~ֳֳֳֳ?G The anatomy of a generalized wireless integrated microsystem (WIMS). Key technologies and associated development tools are shown 0 Z(&1 D x  c $p0     60E~ FMEMS&G  6G~ HAnalog&G  6 m~ GMixed&G  6@~ C-&G  6|% ~ HSignal&G  6ț w ~ R Digital/VLSI* G  6<Y} IAntenna&G T  S >"`^   6 -  ZMicroprocessor0G  @  C >4 &'   6| w  JWireless& G   6, uM  K Interface& G   6\  LClock *G 4B  # > \ @  C > " w \ 4B  # > \ 4B  # > M  4B @ # > L  4B  # > \ T  S >"` " w \ 4B  # > \ 4B  # > M  4B @ # > L  4B  # > M N  4B  # > L M    6<v   RSensor/Actuator &G   6 G  K Interface& G @2  C >   6~` HSensor&G @2 ! C >[   " 6 Bj  JActuator& G  #  B+CVDEF>+V+ @`rZ  $  B+CWDEF>++W @` r @ % C >4 yz  & 6| S  dBaseband& G  ' 60 M  GModem&G  (  BCDE F>@-(  )  BCDEF>VV @`~W 4B * # >1 r2 4B + # >r4B , # >4B - # >1 2 4B . # > 4B / # >1 2 4B 0 # > y 4B 1 # > z&  2 6~ M RFIC/RFMEMS& G 3  BC DE<F$> CN;f S C @     4  BCDE<F$>!SLnLLnF!@     5  BCDE<F$>!,nn4 !@    IK  6 # BCDE<F$>!N;nnf S !@    "`  7  BtCDE<F$>d5ddd:7::7dod@ d dtt@    N~ 8  BCDE<F$>nKB!!3*n@    )   9 # BCDE<F$>oN;""f S o@    "` v  :  BtCDE<F$>7d5ddd:::dod@ d dt7t@     N~v  ; 6 Uh EFE &G < 6hlY GTools&G = 6P j_ FAHDL&G > 6b4 ICustom &G ? 6'r JIC Tools& G @ 6 _ KVHDL *G A 6b: h  P Synthesis * G B 6| r KTools*G C 6 _ GAHDL &G D 6bQ ICustom &G E 69r L RFIC Tools& G F  BCDEF">uuu@`[    G 6X Y k  EDAC&G  H  BCDEF">uuu@`  I 6Y  EADC&G  J  BCDE<F$>oKB""3*o@    2 G  K  B CDE<F$>ox 6@"@@"Kv o @    2 s  L 6# _ DMS&G M 6( _ C-&G N 6x,  _ FHDL &G O 60b  ICustom &G P 65 r JIC Tools& G Y T;>?"`  D Motivation    Z T @>?"`  F Microsystems    [ T@D>?"``  C Bottom-Up    \ T`H>?"``  IMicrocontroller  ] TM>?"`  C Framework    ^ TQ>?"`@ BTop-Down    _ T4L>?"`@ i Gaps & Solns.  ` T$Y>?"` E Conclusions   H  0޽h ? #d 2___PPT10e.+D=' = @B +v9  K0 y8q8X` 8(  h  N_ֳֳֳֳ?G The anatomy of a generalized wireless integrated microsystem (WIMS). Key technologies and associated development tools are shown 0 Z(&1 D x  c $dp0     6TfE~ FMEMS&G  6jG~ HAnalog&G  6om~ GMixed&G  6t~ C-&G  6tx% ~ HSignal&G  6|} w ~ N Digital/VLSI& G  6hY} MAntenna*G @  C >^   6 -  PMicroprocessor&G T  S >"`4 &'   6,| w  NWireless* G   6 uM  O Interface* G   6  HClock &G 4B  # > \ @  C > " w \ 4B  # > \ 4B  # > M  4B @ # > L  4B  # > \ @  C > " w \ 4B  # > \ 4B  # > M  4B @ # > L  4B  # > M N  4B  # > L M    6v   RSensor/Actuator &G   6 G  K Interface& G @2  C >   6~` HSensor&G @2 ! C >[   " 6 Bj  JActuator& G  #  B+CVDEF>+V+ @`rZ  $  B+CWDEF>++W @` r T % S >"`4 yz  & 6| S  hBaseband* G  ' 6 M  KModem*G  (  BCDE F>@-(  ) C BCDEF>VV @`"`~W 4B * # >1 r2 4B + # >r4B , # >4B - # >1 2 4B . # > 4B / # >1 2 4B 0 # > y 4B 1 # > z&  2 6p~ Q RFIC/RFMEMS* G 3  BC DE<F$> CN;f S C @     4  BCDE<F$>!SLnLLnF!@     5  BCDE<F$>!,nn4 !@    IK  6  BCDE<F$>!N;nnf S !@      7 # BtCDE<F$>d5ddd:7::7dod@ d dtt@    "`N~ 8  BCDE<F$>nKB!!3*n@    )   9  BCDE<F$>oN;""f S o@     v  : # BtCDE<F$>7d5ddd:::dod@ d dt7t@    "` N~v  ; 6 Uh EFE &G < 6tlY GTools&G = 6` j_ FAHDL&G > 6b4 ICustom &G ? 6'r JIC Tools& G @ 6L _ GVHDL &G A 6b: h  L Synthesis & G B 6 r GTools&G C 6T _ KAHDL *G D 6bQ MCustom *G E 69r P RFIC Tools* G F  BCDEF">uuu@`[    G 6 Y k  EDAC&G  H  BCDEF">uuu@`  I 6H!Y  EADC&G  J  BCDE<F$>oKB""3*o@    2 G  K  B CDE<F$>ox 6@"@@"Kv o @    2 s  L 6! _ DMS&G M 68 ! _ C-&G N 6!  _ FHDL &G O 6`!b  ICustom &G P 6$! r JIC Tools& G Y TT!>?"`  D Motivation    Z T!>?"`  F Microsystems    [ T$$!>?"``  C Bottom-Up    \ TD(!>?"``  IMicrocontroller  ] Th-!>?"`  C Framework    ^ Tp1!>?"`@ BTop-Down    _ T,!>?"`@ i Gaps & Solns.  ` T9!>?"` E Conclusions   H  0޽h ? #d 2___PPT10e.+D=' = @B +6;  K0 9:1:p>9(  <r < S A!p0  ! :B z< 3 1L k  <# k V {< C 1"`k V |< C A1"`l V }< C 1"`k V ~< C 1"`l :B < 3 1b L k  <# k V < C 1"`k V < C A1"`l V < C 1"`k V < C 1"`l :B < 3 1 L k  <# k V < C 1"`k V < C A1"`l V < C 1"`k V < C 1"`l :B < 3 1L M L  <#  < B CDEF&155 5@`"` < B C5DEF15 5 55 @`"` < B5CDEF15555 @`"` <  B CDEF&155 5@`"` <  B C5DE F15 5 @"`BB < 3 1 < B$K!1"`9 @Verification: DRC, LVS (Top Routing Only), Parasitic Extraction &A@G < BP!1"`09 Fand &G < BT!1"`9 jBackannotation&G < BY!1"`4@ C  K (IC Tool)& GL G g  <# G g  < BCDEF&155Y5@`"`G g  < BC5DEF15Y555 @`"`G g|  < B5CDEF15555 @`"`2G g  <  BCDEF&155Y5@`"`G g  <  BC5DE F15Y5@"`G g| BB < 3 12| 3  < B`!1"` f  WDigital Specification&GL  G   <# G    < BCDEF&155X5@`"` G   < BC5DEF15X555 @`"` G |  < B6CDEF15665 @`"`g G   <  BCDEF&155X5@`"` G   <  BC5DE F15X5@"` G | BB < 3 1g | h   < Bf!1"`  VAnalog Specification&GL EG   <# G E  < BCDEF&155X5@`"`EG   < BC5DEF15X555 @`"`EG |  < B5CDEF15555 @`"`G   <  BCDEF&155X5@`"`EG   <  BC5DE F15X5@"`EG | BB < 3 1|   < Bm!1"`   ZMechanical Specification&GL   <#    < BCDEF&155X5@`"`  < BC5DEF15X555 @`"`   < B6CDEF15665 @`"`g  <  BCDEF&155X5@`"`  <  BC5DE F15X5@"`  BB < 3 1g  h  < Bt!1"`# p 1 p  VCustom Analog Design&G < Bz!1"`l N 9  I(SPICE)&GL E   <#  E  < BCDEF&155X5@`"`E   < BC5DEF15X555 @`"`E   < B5CDEF15555 @`"`   <  BCDEF&155X5@`"`E   <  BC5DE F15X5@"`E  BB < 3 1   < B!1"`# jp  ZCustom Mechanical Design&G < B!1"`l 5  F(FE)&GL ogC  <# ogC  < BCDEF&155Y5@`"`ogC  < BC5DEF15Y555 @`"`og < B5CDEF15555 @`"`2ogC  <  BCDEF&155Y5@`"`ogC  <  BC5DE F15Y5@"`ogBB < 3 123C  < B،!1"`D VSynthesis/APR/Timing&G < B!1"`]>  O (Synthesizer)& GL  o C  <# o C  < BCDEF&155X5@`"` o C  < BC5DEF15X555 @`"` o  < B6CDEF15665 @`"`g o C  <  BCDEF&155X5@`"` o C  <  BC5DE F15X5@"` o BB < 3 1g h C  < B!1"`f ?  XAnalog Physical Design&G < Bĝ!1"`B E >  K (IC Tool)& G < S BC"DE$F01 ." " ..333@`@`"` L C #  <# C #  <  BC` DE<F&1,4` ` ` 4,@    `"`C # P2 < 3 1"`C #  <  BC` DE<F&1,4` ` ` 4,@    `"`C #  <  B/C-DEF1D---//@  "`q #  < B!1"`   IDigital&G  < BШ!1"`  f  ILibrary&G :B < 3 1  < S BMCDE$F01 4 4 /M//@`@`"`L W <# W <  BCDE<F&1Dm mD @    `"`WP2 < 3 1"`W <  BCDE<F&1Dm mD @    `"`W <  B0C-DEF1D---00@  "` < Bȯ!1"`P cTapeout&G  < S BCDE$F01   @`@`"`L j v  <#  jv  <  BCDE<F&1Dm mD @    `"`j v P2 < 3 1"`j e  <  BCDE<F&1Dm mD @    `"`j v  <  B/C.DEF1D...//@  "`j7 e  < B !1"` y  IProcess&G  < BԹ!1"` ~-  ILibrary&G  < S BNCDE$F01  N N @`@`"`E c  < S BCDE$F01 . ..333@`@`"`C :B < 3 1T G L  g  <#  g  < BCDEF&155Y5@`"` g  < BC5DEF15Y555 @`"` g  < B5CDEF15555 @`"`2 g  <  BCDEF&155Y5@`"` g  <  BC5DE F15Y5@"` g BB < 3 12 3  < B!1"`# ip  PDigital Design&G < B!1"`l 6  G(HDL)&G < S BCDE$F01 . ..333@`@`"`r < S BCDE$F01 . ..333@`@`"`C r  < H!1"`  PDigital Domain&G < HH!1"`   O Analog Domain& G < Hx!1"`,  SMechanical Domain&GL    =#   < BCDEF&155X5@`"`   < BC5DEF15X555 @`"`  8 < B6CDEF15665 @`"`g   =  BCDEF&155X5@`"`   =  BC5DE F15X5@"`  8BB = 3 1g 8h  = B=!1"`a  N Analog Macro& GL E  =# E = BCDEF&155X5@`"`E = BC5DEF15X555 @`"`E8 = B5CDEF15555 @`"` =  BCDEF&155X5@`"`E  =  BC5DE F15X5@"`E8BB  = 3 18  = B81"`a RMechanical Macro&GL g =# g  = BCDEF&155Y5@`"`g = BC5DEF15Y555 @`"`g8 = B5CDEF15555 @`"`2g =  BCDEF&155Y5@`"`g =  BC5DE F15Y5@"`g8BB = 3 1283 = B1"`a] O Digital Macro& G = S BCDE$F01 - --222@`@`"` r  = S BCDE$F01 -- 222@`@`"` rr  = S BCDE$F01 -- 222@`@`"` r L    =#    = B CDEF&155 5@`"`   = B C5DEF15 5 55 @`"` B  = B5CDEF15555 @`"`   =  B CDEF&155 5@`"`   =  B C5DE F15 5 @"` B BB = 3 1B   = B 1"`k [ d  k)System Specification and Design Partition&*)GL  &=#   = B CDEF&155 5@`"` != B C5DEF15 5 55 @`"`S "= B5CDEF15555 @`"` #=  B CDEF&155 5@`"` $=  B C5DE F15 5 @"`SBB %= 3 1S '= B81"`W  aMacro Automatic Place and Route& G (= B}1"`  S(APR and IC Tool)&G )= S BCDE$F01 -  --333@`@`"` r,  *= S BCDE$F01 -  --333@`@`"` ,  += S BCDE$F01 -  --333@`@`"` ,  ,= S BC/DE$F01 ./ / ..333@`@`"`r! -= S BC/DE$F01 ./ / ..333@`@`"` ! .= S BC/DE$F01 ./ / ..333@`@`"`! /= S BCDE$F01 . ..333@`@`"`  0= S BCDE$F01 . ..333@`@`"` <. 1= S B8CDEF1uu1U>EL T4\Ze}oz"~1iASR;c!k%!KuAXwM$>={WjpZI9*    umlkj\[ZYL?5+d"= \1U85@        `@`"`r H  . 2= S BC DEF1uu+Y#p&*.38=CBIGKNMQOTQVTYW\Z`diou{uV6&;PxkEPfQ<'Bcwpid c b b ] \ [ [ V U T T O N M L H G F F BA@@;7665..--&  s].+BBpBB@        `@`"`r ~ . 3= S B8CDEF1uu1U>EL T4\Ze}oz"~1iASR;c!k%!KuAXwM$>={WjpZI9*    umlkj\[ZYL?5+d"= \1U85@        `@`"`  . 4= S B8CDEF1uu1U>EL T4\Ze}oz"~1iASR;c!k%!KuAXwM$>={WjpZI9*    umlkj\[ZYL?5+d"= \1U85@        `@`"` U. 5= S B9CDEF1uu9\,&=e   vtsrgYK<-pW=c<>Xm7cA@%hk!;Si~&5BO\fqz}Z4 U9\@        `@`"` t :B 7= 3 >L k  <=# k V 8= C 1"`k V 9= C A1"`l V := C 1"`k V ;= C 1"`l :B == 3 >b L k  B=# k V >= C 1"`k V ?= C A1"`l V @= C 1"`k V A= C 1"`l :B C= 3 > L k  H=# k V D= C 1"`k V E= C A 1"`l V F= C 1"`k V G= C 1"`l :B I= 3 >L M L  P=#  J= B CDEF&155 5@`"` K= B C5DEF15 5 55 @`"` L= B5CDEF15555 @`"` M=  B CDEF&155 5@`"` N=  B C5DE F15 5 @"`BB O= 3 1 Q= BL!1"`9 @Verification: DRC, LVS (Top Routing Only), Parasitic Extraction &A@G R= B$!1"`9 Fand &G S= BDd1"`9 jBackannotation&G T= B\d1"`4@ C  K (IC Tool)& GL G g  [=# G g  U= BCDEF&155Y5@`"`G g  V= BC5DEF15Y555 @`"`G g|  W= B5CDEF15555 @`"`2G g  X=  BCDEF&155Y5@`"`G g  Y=  BC5DE F15Y5@"`G g| BB Z= 3 12| 3  \= B d1"` f  WDigital Specification&GL  G   c=# G    ]= BCDEF&155X5@`"` G   ^= BC5DEF15X555 @`"` G |  _= B6CDEF15665 @`"`g G   `=  BCDEF&155X5@`"` G   a=  BC5DE F15X5@"` G | BB b= 3 1g | h   d= BLd1"`  VAnalog Specification&GL EG   k=# G E  e= BCDEF&155X5@`"`EG   f= BC5DEF15X555 @`"`EG |  g= B5CDEF15555 @`"`G   h=  BCDEF&155X5@`"`EG   i=  BC5DE F15X5@"`EG | BB j= 3 1|   l= BPd1"`   ZMechanical Specification&GL   s=#    m= BCDEF&155X5@`"`  n= BC5DEF15X555 @`"`   o= B6CDEF15665 @`"`g  p=  BCDEF&155X5@`"`  q=  BC5DE F15X5@"`  BB r= 3 1g  h  t= B$d1"`# p 1 p  VCustom Analog Design&G u= B#d1"`l N 9  I(SPICE)&GL E   |=#  E  v= BCDEF&155X5@`"`E   w= BC5DEF15X555 @`"`E   x= B5CDEF15555 @`"`   y=  BCDEF&155X5@`"`E   z=  BC5DE F15X5@"`E  BB {= 3 1   }= Bp*d1"`# Np  ZCustom Mechanical Design&G ~= Bx/d1"`l 5  F(FE)&GL ogC  =# ogC  = BCDEF&155Y5@`"`ogC  = BC5DEF15Y555 @`"`og = B5CDEF15555 @`"`2ogC  =  BCDEF&155Y5@`"`ogC  =  BC5DE F15Y5@"`ogBB = 3 123C  = Bh6d1"`D VSynthesis/APR/Timing&G = B,  O (Synthesizer)& GL  o C  =# o C  = BCDEF&155X5@`"` o C  = BC5DEF15X555 @`"` o  = B6CDEF15665 @`"`g o C  =  BCDEF&155X5@`"` o C  =  BC5DE F15X5@"` o BB = 3 1g h C  = B0Bd1"`f ?  XAnalog Physical Design&G = BTGd1"`B E >  K (IC Tool)& G = S BC"DE$F01 ." " ..333@`@`"` L C #  =# C #  =  BC` DE<F&1,4` ` ` 4,@    `"`C # P2 = 3 1"`C #  =  BC` DE<F&1,4` ` ` 4,@    `"`C #  =  B/C-DEF1D---//@  "`q #  = BLd1"`   IDigital&G  = BQd1"` f  ILibrary&G :B = 3 >  = S BMCDE$F01 4 4 /M//@`@`"`L W =# W =  BCDE<F&1Dm mD @    `"`WP2 = 3 1"`W =  BCDE<F&1Dm mD @    `"`W =  B0C-DEF1D---00@  "` = BT G L  g  =#  g  = BCDEF&155Y5@`"` g  = BC5DEF15Y555 @`"` g  = B5CDEF15555 @`"`2 g  =  BCDEF&155Y5@`"` g  =  BC5DE F15Y5@"` g BB = 3 12 3  = Bd1"`# ip  PDigital Design&G = BDd1"`l 6  G(HDL)&G = S BCDE$F01 . ..333@`@`"`r = S BCDE$F01 . ..333@`@`"`C r  = Hd1"`  PDigital Domain&G = Hd1"`   O Analog Domain& G = Hؽd1"`,  SMechanical Domain&GL    =#   = BCDEF&155X5@`"`   = BC5DEF15X555 @`"`  8 = B6CDEF15665 @`"`g   =  BCDEF&155X5@`"`   =  BC5DE F15X5@"`  8BB = 3 1g 8h  = Bd1"`a  N Analog Macro& GL E =# E = BCDEF&155X5@`"`E = BC5DEF15X555 @`"`E8 = B5CDEF15555 @`"` =  BCDEF&155X5@`"`E =  BC5DE F15X5@"`E8BB = 3 18 = B0d1"`a RMechanical Macro&GL g =# g = BCDEF&155Y5@`"`g = BC5DEF15Y555 @`"`g8 = B5CDEF15555 @`"`2g =  BCDEF&155Y5@`"`g =  BC5DE F15Y5@"`g8BB = 3 1283 = B8d1"`a] O Digital Macro& G = S BCDE$F01 - --222@`@`"` r  = S BCDE$F01 -- 222@`@`"` rr  = S BCDE$F01 -- 222@`@`"` r L    =#    = B CDEF&155 5@`"`   = B C5DEF15 5 55 @`"` B  = B5CDEF15555 @`"`   = # B CDEF&155 5@`"`   = # B C5DE F15 5 @"` B BB = 3 1B   = B,d1"`k [ d  k)System Specification and Design Partition&*)GL  =#  = B CDEF&155 5@`"` = B C5DEF15 5 55 @`"`S = B5CDEF15555 @`"` =  B CDEF&155 5@`"` =  B C5DE F15 5 @"`SBB = 3 1S = B@d1"`W  aMacro Automatic Place and Route& G = Bdd1"`  S(APR and IC Tool)&G = S BCDE$F01 -  --333@`@`"` r,  = S BCDE$F01 -  --333@`@`"` ,  = S BCDE$F01 -  --333@`@`"` ,  = S BC/DE$F01 ./ / ..333@`@`"`r! = S BC/DE$F01 ./ / ..333@`@`"` ! = S BC/DE$F01 ./ / ..333@`@`"`! = S BCDE$F01 . ..333@`@`"`  = S BCDE$F01 . ..333@`@`"` <. = S B8CDEF1uu1U>EL T4\Ze}oz"~1iASR;c!k%!KuAXwM$>={WjpZI9*    umlkj\[ZYL?5+d"= \1U85@        `@`"`q H  . = S BC DEF1uu+Y#p&*.38=CBIGKNMQOTQVTYW\Z`diou{uV6&;PxkEPfQ<'Bcwpid c b b ] \ [ [ V U T T O N M L H G F F BA@@;7665..--&  s].+BBpBB@        `@`"`q ~ . = S B8CDEF1uu1U>EL T4\Ze}oz"~1iASR;c!k%!KuAXwM$>={WjpZI9*    umlkj\[ZYL?5+d"= \1U85@        `@`"` . = S B8CDEF1uu1U>EL T4\Ze}oz"~1iASR;c!k%!KuAXwM$>={WjpZI9*    umlkj\[ZYL?5+d"= \1U85@        `@`"` U. = S B9CDEF1uu9\,&=e   vtsrgYK<-pW=c<>Xm7cA@%hk!;Si~&5BO\fqz}Z4 U9\@        `@`"`t  = Td>?"`  D Motivation    = Td>?"`  F Microsystems    = T(d>?"``  C Bottom-Up    = THd>?"``  IMicrocontroller  > Tg>?"`  C Framework    > Tg>?"`@ BTop-Down    > T0 g>?"`@ i Gaps & Solns.  > T8 g>?"` E Conclusions   H < 0޽h ? #d 2___PPT10e.+D=' = @B +=  K0 <<;(  x  c $gp0  g 4B  # 1L k  # k V  C 1"`k V  C A1"`l V  C 1"`k V  C 1"`l 4B  # 1b L k   # k V   C 1"`k V   C A1"`l V   C 1"`k V  C 1"`l 4B  # 1 L k  # k V  C 1"`k V  C A1"`l V  C 1"`k V  C 1"`l 4B  # 1L M L  #   B CDEF&155 5@`"`  B C5DEF15 5 55 @`"`  B5CDEF15555 @`"`   B CDEF&155 5@`"`   B C5DE F15 5 @"`BB  3 1  <Tg1"`9 @Verification: DRC, LVS (Top Routing Only), Parasitic Extraction &A@G  <g1"`09 Fand &G  <tg1"`9 jBackannotation&G  <g1"`4@ C  K (IC Tool)& GL G g  !# G g  " BCDEF&155Y5@`"`G g  # BC5DEF15Y555 @`"`G g|  $ B5CDEF15555 @`"`2G g  %  BCDEF&155Y5@`"`G g  &  BC5DE F15Y5@"`G g| BB ' 3 12| 3  ( <|r1"` f  WDigital Specification&GL  G   )# G    * BCDEF&155X5@`"` G   + BC5DEF15X555 @`"` G |  , B6CDEF15665 @`"`g G   -  BCDEF&155X5@`"` G   .  BC5DE F15X5@"` G | BB / 3 1g | h   0 <hr1"`  VAnalog Specification&GL EG   1# G E  2 BCDEF&155X5@`"`EG   3 BC5DEF15X555 @`"`EG |  4 B5CDEF15555 @`"`G   5  BCDEF&155X5@`"`EG   6  BC5DE F15X5@"`EG | BB 7 3 1|   8 <`/r1"`   ZMechanical Specification&GL   9#    : BCDEF&155X5@`"`  ; BC5DEF15X555 @`"`   < B6CDEF15665 @`"`g  =  BCDEF&155X5@`"`  >  BC5DE F15X5@"`  BB ? 3 1g  h  @ <6r1"`# p 1 p  VCustom Analog Design&G A <  O (Synthesizer)& GL  o C  T# o C  U BCDEF&155X5@`"` o C  V BC5DEF15X555 @`"` o  W B6CDEF15665 @`"`g o C  X  BCDEF&155X5@`"` o C  Y  BC5DE F15X5@"` o BB Z 3 1g h C  [ <Yr1"`f ?  XAnalog Physical Design&G \ <X_r1"`B E >  K (IC Tool)& G ] S BC"DE$F01 ." " ..333@`@`"` L C #  ^# C #   _  BC` DE<F&1,4` ` ` 4,@    `"`C # P2 ` 3 1"`C #   a  BC` DE<F&1,4` ` ` 4,@    `"`C #  b  B/C-DEF1D---//@  "`q #  c <er1"`   IDigital&G  d <Tjr1"`  f  ILibrary&G 4B e # 1  f S BMCDE$F01 4 4 /M//@`@`"`L W g# W  h  BCDE<F&1Dm mD @    `"`WP2 i 3 1"`W  j  BCDE<F&1Dm mD @    `"`W k  B0C-DEF1D---00@  "` l <pr1"`P cTapeout&G  m S BCDE$F01   @`@`"`L j v  n#  jv   o  BCDE<F&1Dm mD @    `"`j v P2 p 3 1"`j e   q  BCDE<F&1Dm mD @    `"`j v  r  B/C.DEF1D...//@  "`j7 e  s <wr1"` y  IProcess&G  t <zr1"` ~-  ILibrary&G  u S BNCDE$F01  N N @`@`"`E c  v S BCDE$F01 . ..333@`@`"`C 4B w # 1T G L  g  x#  g  y BCDEF&155Y5@`"` g  z BC5DEF15Y555 @`"` g  { B5CDEF15555 @`"`2 g  |  BCDEF&155Y5@`"` g  }  BC5DE F15Y5@"` g BB ~ 3 12 3   <r1"`# ip  PDigital Design&G  <r1"`l 6  G(HDL)&G  S BCDE$F01 . ..333@`@`"`r  S BCDE$F01 . ..333@`@`"`C r   Bpr1"`  PDigital Domain&G  B4r1"`   O Analog Domain& G  Bdr1"`,  SMechanical Domain&GL    #    BCDEF&155X5@`"`    BC5DEF15X555 @`"`  8  B6CDEF15665 @`"`g     BCDEF&155X5@`"`     BC5DE F15X5@"`  8BB  3 1g 8h   <r1"`a  N Analog Macro& GL E # E  BCDEF&155X5@`"`E  BC5DEF15X555 @`"`E8  B5CDEF15555 @`"`   BCDEF&155X5@`"`E   BC5DE F15X5@"`E8BB  3 18  <r1"`a RMechanical Macro&GL g # g  BCDEF&155Y5@`"`g  BC5DEF15Y555 @`"`g8  B5CDEF15555 @`"`2g   BCDEF&155Y5@`"`g   BC5DE F15Y5@"`g8BB  3 1283  <r1"`a] O Digital Macro& G  S BCDE$F01 - --222@`@`"` r   S BCDE$F01 -- 222@`@`"` rr   S BCDE$F01 -- 222@`@`"` r L    #     B CDEF&155 5@`"`    B C5DEF15 5 55 @`"` B   B5CDEF15555 @`"`     B CDEF&155 5@`"`     B C5DE F15 5 @"` B BB  3 1B    <̳r1"`k [ d  k)System Specification and Design Partition&*)GL  #   B CDEF&155 5@`"`  B C5DEF15 5 55 @`"`S  B5CDEF15555 @`"`   B CDEF&155 5@`"`   B C5DE F15 5 @"`SBB  3 1S  <r1"`W  aMacro Automatic Place and Route& G  <r1"`  S(APR and IC Tool)&G  S BCDE$F01 -  --333@`@`"` r,   S BCDE$F01 -  --333@`@`"` ,   S BCDE$F01 -  --333@`@`"` ,   S BC/DE$F01 ./ / ..333@`@`"`r!  S BC/DE$F01 ./ / ..333@`@`"` !  S BC/DE$F01 ./ / ..333@`@`"`!  S BCDE$F01 . ..333@`@`"`   S BCDE$F01 . ..333@`@`"` <.  S B8CDEF1uu1U>EL T4\Ze}oz"~1iASR;c!k%!KuAXwM$>={WjpZI9*    umlkj\[ZYL?5+d"= \1U85@        `@`"`r H  .  S BC DEF1uu+Y#p&*.38=CBIGKNMQOTQVTYW\Z`diou{uV6&;PxkEPfQ<'Bcwpid c b b ] \ [ [ V U T T O N M L H G F F BA@@;7665..--&  s].+BBpBB@        `@`"`r ~ .  S B8CDEF1uu1U>EL T4\Ze}oz"~1iASR;c!k%!KuAXwM$>={WjpZI9*    umlkj\[ZYL?5+d"= \1U85@        `@`"`  .  S B8CDEF1uu1U>EL T4\Ze}oz"~1iASR;c!k%!KuAXwM$>={WjpZI9*    umlkj\[ZYL?5+d"= \1U85@        `@`"` U.  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XAnalog Physical Design&G  <u1"`B E >  K (IC Tool)& G  S BC"DE$F01 ." " ..333@`@`"` L C #  # C #     BC` DE<F&1,4` ` ` 4,@    `"`C # P2  3 1"`C #     BC` DE<F&1,4` ` ` 4,@    `"`C #    B/C-DEF1D---//@  "`q #   <lu1"`   IDigital&G   <u1"` f  ILibrary&G 4B ! # >  " S BMCDE$F01 4 4 /M//@`@`"`L W ## W  $  BCDE<F&1Dm mD @    `"`WP2 % 3 1"`W  &  BCDE<F&1Dm mD @    `"`W '  B0C-DEF1D---00@  "` ( <u1"`P cTapeout&G  ) S BCDE$F01   @`@`"`L j v  *#  jv   +  BCDE<F&1Dm mD @    `"`j v P2 , 3 1"`j e   -  BCDE<F&1Dm mD @    `"`j v  .  B/C.DEF1D...//@  "`j7 e  / <u1"` y  IProcess&G  0 <u1"` ~-  ILibrary&G  1 S BNCDE$F01  N N @`@`"`E c  2 S BCDE$F01 . ..333@`@`"`C 4B 3 # >T G L  g  4#  g  5 BCDEF&155Y5@`"` g  6 BC5DEF15Y555 @`"` g  7 B5CDEF15555 @`"`2 g  8  BCDEF&155Y5@`"` g  9  BC5DE F15Y5@"` g BB : 3 12 3  ; <u1"`# ip  PDigital Design&G < <ȫu1"`l 6  G(HDL)&G = S BCDE$F01 . ..333@`@`"`r > S BCDE$F01 . ..333@`@`"`C r  ? 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