Sunday night: ATOM LITHOGRAPHY

Mara Prentiss - Harvard Atom Lithography
Junichi Fujita  - NEC Fundamental Res. Labs Atomic beam holography for Future Nanofabrication

Toshihiko Kanayama -JRCAT  "Mass Selective Ion Traps for Molecular construction"
Thomas Jung - Paul Scherer Institute Molecular Nanotechnology? Lots of NanoScience with increasing relevance for Technology
Paul Hansma - UCSB "DNA structural Identification with STM"

John Melngailis - University of Maryland  Ion Projection Lithography
J. Alex Liddle - Lucent - "Projection Electron Beam Lithography: SCALPEL - The cutting Edge"

Steve Brueck - Univ. of New Mexico “Imaging Interferometric Lithography - A Novel Approach to Nanoscale Lithography”
Speaker TBA  “EUV Lithography”
Marty Peckerar - Naval Research Labs   “X-RAY Lithography”

Roxann Engelstad- Univ. of Wisconsin   “Modelling of Membrane Masks”
Dieter Kern  Univ. of Tuebingen  “Microcolumn e-beam Lithography”

Ned Seeman -  NYU “Making structures with DNA”
Erik Winfree - Cal Tech  “Algorithmic Self-Assembly of DNA”
John Rief - Duke Univ.  “ DNA Nano-Assemblies for Biomolecular Computation”

Steve Chou - Princeton “Nanoimprint lithography and Nanoelectronic applications”
Bobby Brar - Raytheon TI  Resonant tunneling devices and circuits

Tsen-Hwang Lin - Texas Instruments "Micromachining in RF, Photonic and Data Storage Applications "
Dave Bishop - Lucent Silicon Micromechanics for Science and Technology"
Tom Kenney - Stanford "Recent Activities in the MEMS Community"

Harold Craighead - Cornell Univ. "Fooling Mother Nature with Microfabrication"

If you are interested in Micro- or Nano- Fabrication or are concerned with the future of lithography, there is probably no other single event that would be more beneficial to attend.  No where else will you be able to hear, meet, and discuss detailed information with such a broad range of scientists doing research at the frontiers of Micro- and Nano- Fabrication.   If you have been to other Gordon Conferences, you know about the unique atmosphere of these intimate gatherings.  If you have never been to a Gordon Conference please read the few paragraphs about Gordon Conferences.

Nowhere else will you be able to hear from: Mara Printiss about Atom Lithography, Steve Chou about applications of nano-imprint lithography, John Rief about computation possibilities with DNA, Bobby Brar about resonant tunneling circuits, and  Roxann Engelstad about the stability of membrane masks.  Look at the list of speakers and topics and I believe that you will find something directly relevent to your work, and much more that will be facinating and thought provoking.

In Gordon Conferences you get the afternoon off and the evenings are spent in informal socializing with fellow attendees.   During your afternoon off you can go hiking with Harold Craighead, canoeing with Don Eigler, play tennis with Shalom Wind, or play volley ball or basketball with a crowd of crazed scientists.  Also during the afternoon or later in the evening is an excellent time to enjoy a beverage and ask Jun-ichi Fujita about Atom Holography or get Steve Brueck to explain how he is tricking interference lithography into working with masks.

Plan on bringing a poster about your own work.  All attendees are encouraged to do so.  It is an opportunity to get advice and feedback from the best in the business.

This particular conference identified the importance of this field over 20 years ago and has been quietly but hugely influential.  I attended my first confefrence in 1980 as a graduate student and it has had a profound influence on my career.  I have missed only one since.  Attendence is limited so I urge you to get and send in your application soon.

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Atomic beam holography for Future Nanofabrication   Jun-ichi Fujita Fundamental research Laboratories

Atomic beam holography is a unique technique to realize a direct formation of small objects by passing ultra-cold atoms through a hologram. The ability to generate ultra-cold atoms using lasers has opened new possibilities; because of their long de Broglie waves, cold atoms are amenable to interferometric manipulations, such as deflection by a grating and a focusing Fresnel zone plate. We first demonstrated a holographic manipulation of meta-stable Ne atoms having a wave length of 7 nm to form a "F" pattern by using Lohman type computer generated binary hologram [J.Fujita et al., Nature, 380(1996) 6911]. Our second step was done by introducing a phase correction information into the hologram[M. Morinaga et al., Phys. Rev. Lett., 77(1996)802], which is identical to insert a lens to focus the diffracted atomic wave just on a substrate (micro channel plate detector), the resolution of the reconstructed image was improved to the detection limit of our current system. For all of these holographic manipulation technique, the resolution of the reconstructed image was limeted by the combination of the size of the atomic source, its velocity spread and the resolution of the detector. The resolution can be improved to the minimum hole size of the hologram that can transmit atoms without inelastic collisions. We estimate the value as a few tens of nanometer. To breakthrough the resolution beyond this value we need a good-quality focasing lens which can reduce the size of the rconstructed pattern. Such lens may be constructed by combination of microwave cavity, and/or a concave mirror.

BIO: Jun-ichi Fujita , born in Japan , 1960. Graduated from Tsukuba Univ. Ph.D. 1991, by High Tc superconducting Material. Now works in a Nanofab. Field, resist materials and investigating new technology for nanofab.
After I had found out a good technique to make nice as-grown High Tc thin film, we made SNS Josephson Junctions. The final target was to make ultra small SET with High Tc material. Off course, coexistence with the large gap of HST and Coulomb Blockade was the main interests of our study. But you know such experiment is difficult and hopeless. So I change my strategy for research to a material science under ultimate small feature size. My recent work was done to get to such goal. Material research for nano-EB resist and new concept of nanolithography of atomic beam holography is one of bi-product for the goal.

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Molecular Nanotechnology? Lots of NanoScience with increasing relevance for Technology  Thomas Jung - Paul Scherer Institute - Switzerland

Molecular Properties are essential for all mechanisms of life and of increasing importance in technological processes and devices. First I will give an introduction into the concepts of such "molecular" operation. Second I will demonstrate concepts for self assembly and growth of molecular nanostructures as well as SPM based techniques for molecular positioning (2) and conformational analysis (1) of isolated molecules. The above mentioned methods are then applied towards the study of various properties of individual adsorbed molecules like adsorption strenght, conformation, and charge transfer to the substrate.

This knowledge is then discussed in relation to molecular storage and molecular bistability, negative differential resistivity and switching. In resumee the pro's and con's of molecular nanotechnology will be reviewed with an eye on current and future devices and the opportunities for integration.

Related Web Sites: http://www.zurich.ibm.com/News/Molecule/ - http://www.psi.ch/lmn

BIO: Dr. Jung is a research staff member at the Paul Scherrer Institute (PSI), which is affiliated with the Swiss Federal Institute of Technology. Here he is working in the field of nanometer-scale science and technology. He joined the IBM T.J. Watson Research Laboratory as a Post Doctoral Fellow in 1992 to work on Scanning Tunneling Microscopy and Spectroscopy of metallic wires and islands. Between 1994 and 1997 he explored interfaced Molecular Nanostructures. Here molecular positioning was achieved for the first time at room temperature and unique methods for the identification and analysis of an individual molecules conformation were demonstrated. Dr. Jung received a Diplom degree from the Swiss Federal Institute of Technology in 1987 and a PhD in solid state and surface physics from the University of Basel, Switzerland, in 1992. Highlights of his Ph.D. work include the development of atomic force microscopy as a tool for surface structurin and tribological analysis as well as high sensitivity magnetic force microscopy that proved single flux line sensitivity later on. Before joining IBM, he worked on the implementation of atomic force microscopy in the research and development activities at PSI's Zurich (Formerly RCA) Research Laboratory. He is a member of the American Physical Society and the Swiss Physical Society and acting as Committee Member and Treasurer of the Swiss Physical Society.

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DNA Nanotechnology  Nadrian C. Seeman, Department of Chemistry, New York University, New York, NY 10003 USA, ned.seeman@nyu.edu.

DNA nanotechnology entails assembling objects, networks and devices from molecular building blocks that consist of unusual DNA motifs.  DNA is an extremely favorable construction medium:  The sticky-ended association of DNA molecules occurs with high specificity.  Furthermore, it results in the formation of B-DNA, which we have shown recently, in the crystal structure of d-CGACGATCGT.  The use of stable branched DNA molecules containing sticky ends permits one to make stick-figures.  We have used this strategy to construct a covalently closed DNA molecule whose helix axes have the connectivity of a cube, and a second molecule, whose helix axes have the connectivity of a truncated octahedron.

In addition to branching topology, DNA also affords control of linking topology, because double helical half-turns of B-DNA or Z-DNA can be equated, respectively, with negative or positive crossings of strands.  Consequently, we have been able to use DNA to make trefoil knots of both signs and figure-8 knots.  By making RNA knots, we have discovered the existence of an RNA topoisomerase activity.  DNA-based topological control has also led to the construction of Borromean rings.

The key feature previously lacking in DNA construction has been a rigid component.  This problem has restricted our control to the topological level.  It is only geometrical control that can lead to the control of structure, both in isolated molecules and in periodic matter.  In attempting to extend control to the geometrical level, we have discovered that DNA double crossover molecules can act as a rigid motif.  We have incorporated double crossovers in DNA systems that make use of rigidity to achieve control on the geometrical level.  In addition to structural control, rigid motifs enable us to demonstrate the successful construction of molecular devices.

BIO: Nadrian C. Seeman was born in Chicago in 1945. Following a BS in biochemistry from the University of Chicago, he received his Ph.D. in biological crystallography from the University of Pittsburgh in 1970. His postdoctoral training, at Columbia and MIT, emphasized nucleic acid crystallography. He obtained his first independent position at SUNY/Albany, where his frustrations with the macromolecular crystallization experiment led him one day to the campus pub. There, he realized that the similarity between 6-arm DNA branched junctions and the periodic array of flying fish in Escher's 'Depth' might lead to a rational approach to crystallization. He has been trying to implement it ever since, for the last ten years at NYU.

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Erik Winfree - Cal Tech  “DNA Computation”

Algorithmic Self-Assembly of DNA

Biology makes things far smaller and more complex than anything produced by human engineering.  The challenge of engineering molecular systems as complex as a simple bacterium remains daunting if not impossible.  However, the biotechnology revolution has for the first time given us the tools necessary to consider engineering on the molecular level.  Len Adleman's recent experimental demonstration of a DNA computation has shown how logical information can be mapped into DNA and manipulated by standard laboratory techniques, opening the door for further study of "programmable" biochemical reactions.  My research has focussed on understanding the computational aspects of a single mechanism, the self-assembly of DNA by hybridization and formation of the double helix.  Remarkably, varieties of self-assembly theoretically bear close relation to the Chomsky hierarchy of formal languages, culminating in a "one pot" chemical computer whose self-assembly supports universal computation.  This theory combines the purely mathematical Tiling Problem (proposed in 1961 by Hao Wang and solved in the negative by Richard Berger shortly thereafter) with the branched DNA constructions of Nadrian Seeman, making theoretical use of self-assembled and algorithmically patterned two-dimensional lattices of DNA.  The self-assembly process can be designed to simulate the activity of any one-dimensional cellular automaton, thereby achieving universal computation.  Encouraged by these results, I have begun an experimental investigation of algorithmic self-assembly using DNA.  A competition experiment suggests that an individual logical step can proceed correctly by self-assembly, while a companion experiment suggests that unpatterned two-dimensional lattices of DNA will self-assemble and can be visualized by atomic force microscopy.  We have reason to hope, therefore, that DNA structures can be designed to self-assemble according to programmable rules.  This system represents a first step toward the ability to "program" material at the molecular level.

BIO: A long seven years after graduating in Mathematics from the University of Chicago, Erik Winfree received his PhD degree from the Computation and Neural Systems program at Caltech earlier this month. His interests are in how physical systems compute -- be they electronic circuits, brains, or molecules.

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Compact and Small Depth DNA Nano-Assemblies for Biomolecular Computation

John Reif
Computer Science Dept., Duke University

Seeman has fabricated diverse nano-structures by hybridization of complementary  segments of DNA strands. Winfree has proposed an innovative method for doing  molecular computation using self assembly of $2D$ arrays of tiles, where each  tile is a DNA nano-structure, and the tiles compose by hybridization of  complementary DNA tags on the tiles. We describe various improvements and  applications of these DNA nano-assembly techniques for computation. To initiate  and constrain the assembly, we propose the use of an 'assembly frame' which is a  rigid nano-structure which binds the input DNA strands in place on its boundaries  and constrains the shape of the assembly.  We give assembly algorithms with very  compact assembly size and small assembly depth for a wide variety of the parallel  computation problems, which include integer arithmetic, finite state automata  simulation, and fingerprinting (hashing) a string, data permutation, sorting, and  Boolean circuit evaluation. These nano-assembly techniques for computation can  be combined with distributed molecular parallelism to simultaneously solve large numbers of problems with distinct inputs.

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"Resonant tunneling devices and circuits"  Bobby Brar - Raytheon TI .

BIO: Ph.D. in Electrical Engineering, UC Santa Barbara, 1995
Dr. Brar is a member of the Technical Staff in the Nanoelectronics branch of the Applied Research Laboratory, at Raytheon Systems. He is currently performing research in Si-based tunnel devices and circuits with a view to integration into a commercial Si process. He also involved in developing InP-based high-speed circuits by co-integrating resonant tunneling diodes and heterostructure field-effect transistors. He joined the Nanoelectronics branch in 1995 after completing his doctoral research on the hot-electron properties of InAs/AlSb heterostructure field-effect transistors. Prior to his graduate work at UC Santa Barbara, he was in the Optoelectronics Department at the Rockwell Science Center where he developed integrated optoelectronic laser drivers and receivers to successfully build a 16x16 fiber-optic crossbar switch. He has authored and co-authored over fifty papers and has made presentations on the above subjects.

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Micromachining in RF, Photonic and Data Storage Applications

Tsen-Hwang Lin
Components and Materials Research Center
Texas Instruments, Dallas, Texas 75265

Texas Instruments has developed membrane and micromirror devices since the late 1970's. Torsional micromirror and flexure-beam micromirror devices  were promising for mass production because of the potential for implementing stable support structures for them. TI's digital torsional micromirror device (known as the digital micromirror device, or DMD), is light amplitude modulator,  and is presently in production, reported elsewhere. TI also used a torsional device for fiber-optic crossbar switches. The flexure-beam micromirror device is an analog phase  modulator, and is considered more efficient than amplitude modulators for use in optical processing systems. The use of a membrane in RF switching applications is a rapidly-growing area, because microsecond switching times are readily attained. TI's preliminary results with membrane RF switch test structures promise fast RF switching performance. Recently, TI has become interested in investigating micromachining applications in the field of hard disk drives.
 This presentation will begin with an overview of micromachining materials, processes, and devices. Then TI's developments in metal-based micromechanical devices for RF, photonic, and data storage applications will be briefly described. A short video showing the operation of some of TI's micromachined devices will also be presented.

BIO: Tsen-Hwang Lin received his B.S. degree from National Chiao Tung University, Taiwan, in 1979 and his M.S. and Ph.D. degrees from the University of California, San Diego, in 1985 and 1989.  Dr. Lin joined Texas Instruments in 1989 in the Microsystems Technology Branch of the Components and Materials Research Center. He is currently responsible for new micromachined device development and integration of analog CMOS with micromirror-based spatial light modulator using production facilities. He is in charge of device design and process development of micromachined actuator, such as microactuator for a hard disk drive, membrane/micro-shutter for guided-wave and fiber optic switches and RF/microwave switches in telecommunication applications. His research interests include process integration of microelectromechanical and electro-optic devices, and application of these devices. Dr. Lin haspublished 36 papers and has contributed 4 book chapters. He also holds fifteen patents in his field. He is currently a Senior Member of IEEE, and an Senior Member of Technical Staff of Texas Instruments.

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Silicon Micromechanics for Science and Technology  Dave Bishop - Lucent

Micromechanics is the technology of building small silicon machines using techniques similar to those used to build a silicon integrated circuit. By depositing films and then selectively etching them, one can make structures the size of a human hair that can mimic most known macroscopic machines. These include hinged plates, motors, switches, springs, latches and many other items.

This technology is extremely promising because it allows highly functional, low cost components to be built, especially for optical systems. A key advantage of micromechanics is the opportunity to integrate micromechanical devices with other technologies such as silicon optical bench and analog and digital electronic circuits. We have built a wide variety of optical devices including modulators, switches, interferometers, microscopes and micromirrors, all of which allow us to assemble advanced optical products and systems. In addition to technology, MEMS is also beginning to be applied to experiments in basic science. For example, we have built devices such as magnetometers, vortex viscometers and crack propagation experiments. The phrase "the new physics machine shop" has been coined to describe this type of work. In my talk, I will discuss our effort in MEMS for both technology and science and show a video of some of our devices in operation.

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Recent Activities in the MEMS Community Tom Kenney - Stanford

Silicon Micromachining research groups have continued working on interesting extensions of electronics fabrication technologies. In the last 2 years, much interest has been focused on high-density plasma etching to form high aspect-ratio flexures or other useful structures. In addition, there have been continued advances in the use of chemical-mechanical polishing in the middle of processing to produce controlled interfaces between layers in a process. Other researchers have focused on high-frequency mechanical oscillators. In this talk, I'll review some of the highlights of the last couple of years in MEMS (with a slightly disproportionate emphasis on things in my own group, of course).

BIO: Thomas W. Kenny received the B.S. degree in physics from the University of Minnesota, Minneapolis, MN in 1983 and the M.S. and Ph.D. degrees in physics from the University of California, Berkeley, in 1987 and 1989, respectively. He has worked at the Jet Propulsion Laboratory, where his research focused on the development of electron-tunneling-based high-resolution microsensors. Since 1994, he has been Assistant Professor and Terman Fellow with the Mechanical Engineering Department, Stanford University, Stanford, CA. He currently oversees graduate students in the Microstructures and Sensors Laboratory, whose research activities cover a variety of areas such as advanced tunneling sensors, small student-built spacecraft, novel fabrication techniques for micromechanical structures, and the study of nonclassical phenomena within this context. In addition, his group is also collaborating with researchers from the IBM Almaden Research Center on nuclear magnetic resonance microscopy and AFM thermomechanical data storage. Other collaborations are with NRL, Sandia, JPL, SAIC, Raychem, Medtronic, Perkin-Elmer, and others.

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"Sieving and entropic trapping of long DNA molecule in nanofluidic channels" J. Han and H.G. Craighead, Cornell University

"The Use of Ultrasound Radiation for the Preparation of Amorphous Materials Having Nanometer Size Particles" A. Gedanken, Bar-Ilan University, Israel

"From Physics and Chemistry of Photosynthesis to Its Potential Applications in Nanofabrication and Optoelectronics" James W. Lee, Ida Lee and Elias Greenbaum, Oak Ridge National Laboratory, USA

"Nanostructure Fabrication by Laser Guidance" Michael J. Renn, Michigan Technological University, USA

"The Anisotropic Etching of Silicon in CF4, CF4 + H2 and CF4-x Clx Plasmas" Z. Rutkuniene, A. Grigonis, R. Knizikevicius, A. Galdikas, Kaunas University of Technology, Lithuania

"Nanochannel Glass Replica Membranes" D.H. Pearson and R.J. Tonucci, Naval Research Laboratory, USA

"Formation of visible light emitting porous GaAs micropatterns" P. Schmuki, EPFL, Switzerland L.E. Erickson, D.J. Lockwood, J.W. Fraser, G. Champion and H.J. Labb*, Institute for Microstructural Sciences, NSCC, Canada

"Electron Transport through Individual Nanometer Colloid Conducting Polymer Particles" Siu-Tung Yau, C. Zhang, P. Innis and G. Spinks, University of Wolongon, Australia

"Line width control in low voltage e-beam lithography using a defocused beam" C. David and D. Hambach, Paul Scherrer Institut, Switzerland

"Nanometer-Scale Fabrication by Simultaneous Nanoshaving and Molecular Self-Assembly" Song Xu and Gang-yu Liu, Wayne State University, USA

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