MEMS and Microsystems Faculty

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faculty photo Kurabayashi, Katsuo
Associate Professor, Mechanical Engineering
Associate Professor (courtesy), Electrical Engineering and Computer Science
Division: ECE
Address: 2272 G.G.Bown Lab
Email: katsuo @
Phone: (734) 615-5211
Research Interests: Micro/nano engineering, including micro/nano optical devices, microactuators, MEMS/Bio hybrid technology, polymer-MEMS, nanoscale electron/phonon transport phenomena, and nanofabrication.
faculty photo Kushner, Mark J.   
George I. Haddad Professor of Electrical Engineering and Computer Science
Professor, Electrical Engineering and Computer Science
Professor (courtesy), Nuclear Engineering and Radiological Sciences; Chemical Engineering; Applied Physics
Division: ECE
Address: 2236 EECS
Email: mjkush @
Phone: (734) 647-1695
Research Interests: Computational plasma science and engineering with applications to materials processing, microelectronics, photonics and lasers, biotechnology and medicine, and environment.