Electrical Engineering and Computer Science

MEMS and Microsystems Faculty

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faculty photo Aktakka, Ethem Erkan
Assistant Research Scientist
Division: ECE
Address: 2411 EECS
Email: aktakka @ umich.edu
Phone: 734-272-3170
Research Interests: Micro Electromechanical Systems (MEMS), micro actuators and sensors, mechatronics, micro fabrication and packaging technologies, energy harvesting, power management circuits, acoustic and ultrasonic transducers, smart materials and structures, piezoelectric devices.
 
faculty photo Blaauw, David T.   
Professor, Electrical Engineering and Computer Science
Division: ECE
Address: 2417C EECS
Email: blaauw @ umich.edu
Phone: (734) 763-4526
Research Interests: Low power and high performance VLSI design; Low power wireless sensors.
 
faculty photo Chen, Yu-Chih
Assistant Research Scientist
Division: ECE
Address: 2322 EECS
Email: yuchchen @ umich.edu
Phone: 734-763-5914
Research Interests: Microfluidic high-throughput single-cell assays, next generation sequencing, and data mining based on cell properties and public databases. Using this integrated approach we can discover novel genes and regulators in cancer development and metastasis.
 
faculty photo Chestek, Cynthia
Assistant Professor, Biomedical Engineering
Assistant Professor (courtesy), Electrical Engineering and Computer Science
Division: ECE
Address: B10-A171 NCRC
Email: cchestek @ umich.edu
Phone: 763-1759
 
faculty photo Cho, Jae Yoong
Assistant Research Scientist
Division: ECE
Address: 2227 EECS
Email: jycho @ umich.edu
Phone: 734-647-3984
Research Interests: Micro Electromechanical Systems (MEMS), micro fabrication and packaging technologies, and control algorithms for microsystems.
 
faculty photo Deotare, Parag
Assistant Professor
Assistant Professor (courtesy), Applied Physics
Division: ECE
Address: 6104 ERB II
Email: pdeotare @ umich.edu
Phone: 734-647-3119
Research Interests: Research includes light-matter interaction in nanoscale systems and the development of low energy photonic and excitonic devices for applications in data communication and life sciences.
 
faculty photo Flynn, Michael P.
Professor, Electrical Engineering and Computer Science
Associate Chair of ECE Graduate Affairs
Division: ECE
Address: 2417F EECS
Email: mpflynn @ umich.edu
Phone: (734) 936-2966
Research Interests: Analog circuits, analog-to-digital conversion, RF and wireless circuits. high-speed serial transceivers.
 
faculty photo Gianchandani, Yogesh B.
Professor, Electrical Engineering and Computer Science
Professor (courtesy), Applied Physics; Mechanical Engineering
Director, Center for Wireless Integrated MicroSensing & Systems
Division: ECE
Address: 2403 EECS
Email: yogesh @ umich.edu
Phone: (734) 615-6407
Research Interests: Design and fabrication of microsensors, microactuators, and micro-electro-mechanical systems (MEMS) for a variety of applications such as inertial sensing, environmental sensing, scanning microscopy, microfluidics, microoptics, and biomedical instrumentation; Development of manufacturing processes using combinations of traditional and novel materials and techniques, for example, micro-electro-discharge machining and microplasmas; Design of interface circuits for MEMS and development of co-fabrication techniques for circuits and MEMS.
 
faculty photo Kurabayashi, Katsuo
Associate Professor, Mechanical Engineering
Associate Professor (courtesy), Electrical Engineering and Computer Science
Division: ECE
Address: 2272 G.G.Bown Lab
Email: katsuo @ umich.edu
Phone: (734) 615-5211
Research Interests: Micro/nano engineering, including micro/nano optical devices, microactuators, MEMS/Bio hybrid technology, polymer-MEMS, nanoscale electron/phonon transport phenomena, and nanofabrication.
 
faculty photo Kushner, Mark J.   
George I. Haddad Professor of Electrical Engineering and Computer Science
Professor, Electrical Engineering and Computer Science
Professor (courtesy), Nuclear Engineering and Radiological Sciences; Chemical Engineering; Applied Physics
Division: ECE
Address: 2236 EECS
Email: mjkush @ umich.edu
Phone: (734) 647-1695
Research Interests: Plasma science and technology: materials processing, propulsion, lasers, electromagnetics, plasma chemistry, microelectronics/MEMS fabrication, polymer functionalization, biocompatibility
 
faculty photo Li, Tao
Assistant Research Scientist
LEO Intermittent Lecturer
Division: ECE
Address: 2408 EECS
Email: litz @ umich.edu
Phone: (734) 615-7983
Research Interests: Microsensors; Microactuators; analog and digital interfaces for MEMS devices; Micromachining technologies, such as micro electro-discharge machining (micro-EDM) and micro ultrasonic machining (micro-USM), and their applications
 
faculty photo Lynch, Jerome P.
Associate Professor, Civil and Environmental Engineering
Associate Professor (courtesy), Electrical Engineering and Computer Science
Division: ECE
Address: 2328 GG Brown
Email: jerlynch @ umich.edu
Phone: (734) 615-5290
Research Interests: Wireless sensor networks, distributed computing, decentralized control theory, microsensors, microactuators, microelectromechanical systems (MEMS),carbon nanotube composites and sensors
 
faculty photo Najafi, Khalil   
Peter and Evelyn Fuss Chair of Electrical and Computer Engineering; Schlumberger Professor of Engineering; Arthur F. Thurnau Professor
Professor, Electrical Engineering and Computer Science
Professor (courtesy), Biomedical Engineering
Division: ECE
Address: 3303 EECS
Email: najafi @ umich.edu
Phone: (734) 763-6650
Research Interests: Solid-state integrated sensors, Microactuators, Micromechanics, Analog and digital integrated circuits
 
faculty photo Peterson, Becky (R.L.)
Assistant Professor, Electrical Engineering and Computer Science
Division: ECE
Address: 2302 EECS
Email: blpeters @ umich.edu
Phone: (734)615-3105
Research Interests: Thin film devices and circuits, including power devices; hetero-integration with MEMS/CMOS; flexible and transparent electronics; amorphous oxide semiconductors; solution-processed inorganic electronic materials
 
faculty photo Qin, Yutao
Assistant Research Scientist
Division: ECE
Address: 2213 EECS
Email: yutaoqin @ umich.edu
Phone: 734-936-0069
Research Interests: Microscale gas chromatographs, gas sensors, and gas pumps.
 
faculty photo Rais-Zadeh, Mina   
Associate Professor, Electrical Engineering and Computer Science
Associate Professor (courtesy), Mechanical Engineering
Division: ECE
Address: 2406 EECS
Email: minar @ umich.edu
Phone: (734) 764-4249
Research Interests: Integrated RF MEMS, MEMS-enabled ICs, wafer-level packaging and micro/nano-fabrication techniques
 
faculty photo Sarabandi, Kamal   
Rufus S. Teesdale Professor of Engineering; Director, Radiation Laboratory; Director, COM-BAT Center
Professor, Electrical Engineering and Computer Science
Division: ECE
Address: 3228B EECS
Email: saraband @ umich.edu
Phone: (734) 936-1575
Research Interests: Microwave and millimeter wave radar technology; Geoscience and remote sensing; Antennas and wave propagation; Metamaterials.
 
faculty photo Seymour, John
Assistant Research Scientist
Division: ECE
Address: 2227 EECS
Email: seymourj @ umich.edu
Phone: 734-647-3984
Research Interests: MEMS and microsystems for biomedical implants, with expertise in electrodes and optoelectrodes for neuroscience applications.
 
faculty photo Sylvester, Dennis   
Director, Michigan Integrated Circuits Lab
Professor, Electrical Engineering and Computer Science
Division: ECE
Address: 2417B EECS
Email: dmcs @ umich.edu
Phone: (734) 615-8783
Research Interests: Low power integrated circuit design, computer-aided design for VLSI
 
faculty photo Yoon, Euisik   
Professor, Electrical Engineering and Computer Science
Professor (courtesy), Biomedical Engineering
Division: ECE
Address: 2400 EECS
Email: esyoon @ umich.edu
Phone: (734) 615-4469
Research Interests: Integrated circuits and microsystems; BioMEMS and lab-on-chips; Implantable biomedical sensors; low-power mixed-mode circuits