Electrical Engineering and Computer Science

MEMS and Microsystems Faculty


Ethem Erkan Aktakka
Division: ECE
Address: 2411 EECS
Phone: 734-272-3170
Email:
Title: Assistant Research Scientist
Research Interests: Micro Electromechanical Systems (MEMS), micro actuators and sensors, mechatronics, micro fabrication and packaging technologies, energy harvesting, power management circuits, acoustic and ultrasonic transducers, smart materials and structures, piezoelectric devices.
Research Areas: MEMS and Microsystems; Solid-State Devices and Nanotechnology; Integrated Circuits and VLSI; Energy Science and Engineering.
Areas of Specialty: Environmental Sensors; MEMS Technology and Packaging; Power Sources and Energy Harvesting; Electromechanical Energy Conversion and Energy Harvesting; Solid-State Energy Conversion Technologies; Renewable Energy (Solar Cells, Wind, Energy Scavenging); Energy harvesting; Sensing systems.
 
 
David T. Blaauw
Division: ECE
Address: 2417C EECS
Phone: (734) 763-4526
Email:
Degree: PhD. University of Illinois
Title: Professor, Electrical Engineering and Computer Science
Research Interests: Low power and high performance VLSI design; Low power wireless sensors.
Research Areas: MEMS and Microsystems; Integrated Circuits and VLSI; Chip Design, Architecture, and Emerging Devices.
Areas of Specialty: Digital circuits; Energy harvesting; Hardware DSP implementation; Low power circuits; Sensing systems.
 
 
Yu-Chih Chen
Division: ECE
Address: 2322 EECS
Phone: 734-763-5914
Email:
Degree: PhD
Title: Assistant Research Scientist
Research Interests: Microfluidic high-throughput single-cell assays, next generation sequencing, and data mining based on cell properties and public databases. Using this integrated approach we can discover novel genes and regulators in cancer development and metastasis.
Research Areas: MEMS and Microsystems.
 
 
Cynthia Chestek
Division: ECE
Address: B10-A171 NCRC
Phone: 763-1759
Email:
Degree: PhD
Title: Assistant Professor, Biomedical Engineering; Assistant Professor (courtesy), Electrical Engineering and Computer Science
Research Areas: MEMS and Microsystems; Signal & Image Processing and Machine Learning; Embedded Systems.
 
 
Jae Yoong Cho
Division: ECE
Address: 2227 EECS
Phone: 734-647-3984
Email:
Title: Assistant Research Scientist
Research Interests: Micro Electromechanical Systems (MEMS), micro fabrication and packaging technologies, and control algorithms for microsystems.
Research Areas: MEMS and Microsystems.
 
 
Parag Deotare
Division: ECE
Address: 6104 ERB II
Phone: 734-647-3119
Email:
Degree: PhD Harvard University
Title: Assistant Professor; Assistant Professor (courtesy), Applied Physics
Research Interests: Research includes light-matter interaction in nanoscale systems and the development of low energy photonic and excitonic devices for applications in data communication and life sciences.
Research Areas: Communications; MEMS and Microsystems; Optics and Photonics; Quantum Science and Technology; Solid-State Devices and Nanotechnology; Theory of Computation; Energy Science and Engineering; Embedded Systems; Chip Design, Architecture, and Emerging Devices.
Areas of Specialty: Optical Communications; Microfluidics and Gas/Chemical; Environmental Sensors; Nonlinear Optics and MEMS; Ultrafast Optics; Fiber and Integrated Photonics and Lasers; Optoelectronics; Quantum Optics and Information; Nanophotonics; Displays and Detectors; Nanotechnology and Nanofabrication; Quantum Information Processing; Integrated Photonics and Optoelectronics with Quantum Confined Heterostructures; Materials for Solid State Electronic and Optoelectronic Devices; Power Sources and Energy Harvesting; Electromechanical Energy Conversion and Energy Harvesting; Renewable Energy (Solar Cells, Wind, Energy Scavenging).
 
 
Michael P. Flynn
Division: ECE
Address: 2417F EECS
Phone: (734) 936-2966
Fax: (734) 763-9324
Email:
Degree: Ph.D. Carnegie Mellon University
Title: Professor, Electrical Engineering and Computer Science; Associate Chair of ECE Graduate Affairs
Research Interests: Analog circuits, analog-to-digital conversion, RF and wireless circuits. high-speed serial transceivers.
Research Areas: MEMS and Microsystems; Integrated Circuits and VLSI.
Areas of Specialty: Analog Circuits; Data converters; Low power circuits; RF circuits; Sensing systems.
 
 
Yogesh B. Gianchandani
Division: ECE
Address: 2403 EECS
Phone: (734) 615-6407
Fax: (734) 763-9324
Email:
Degree: Ph.D. U. Michigan
Title: Professor, Electrical Engineering and Computer Science; Professor (courtesy), Applied Physics; Mechanical Engineering; Director, Center for Wireless Integrated MicroSensing & Systems
Research Interests: Design and fabrication of microsensors, microactuators, and micro-electro-mechanical systems (MEMS) for a variety of applications such as inertial sensing, environmental sensing, scanning microscopy, microfluidics, microoptics, and biomedical instrumentation; Development of manufacturing processes using combinations of traditional and novel materials and techniques, for example, micro-electro-discharge machining and microplasmas; Design of interface circuits for MEMS and development of co-fabrication techniques for circuits and MEMS.
Research Areas: MEMS and Microsystems; Plasma Science and Engineering.
Areas of Specialty: Microfluidics and Gas/Chemical; Implantable Devices; Environmental Sensors; MEMS Technology and Packaging; Plasma Fabrication and Plasma Based MEMS Devices; Plasma Materials Processing of Microelectronics.
 
 
Katsuo Kurabayashi
Division: ECE
Address: 2272 G.G.Bown Lab
Phone: (734) 615-5211
Fax: (734) 647-3170
Email:
Degree: Ph.D. Stanford University
Title: Associate Professor, Mechanical Engineering; Associate Professor (courtesy), Electrical Engineering and Computer Science
Research Interests: Micro/nano engineering, including micro/nano optical devices, microactuators, MEMS/Bio hybrid technology, polymer-MEMS, nanoscale electron/phonon transport phenomena, and nanofabrication.
Research Areas: MEMS and Microsystems.
 
 
Mark J. Kushner
Division: ECE
Address: 2236 EECS
Phone: (734) 647-1695
Email:
Degree: Ph.D. California Institute of Technology
Title: George I. Haddad Professor of Electrical Engineering and Computer Science; Professor, Electrical Engineering and Computer Science; Professor (courtesy), Nuclear Engineering and Radiological Sciences; Chemical Engineering; Applied Physics
Research Interests: Plasma science and technology: materials processing, propulsion, lasers, electromagnetics, plasma chemistry, microelectronics/MEMS fabrication, polymer functionalization, biocompatibility
Research Areas: Applied Electromagnetics and RF Circuits; MEMS and Microsystems; Optics and Photonics; Solid-State Devices and Nanotechnology; Plasma Science and Engineering.
Areas of Specialty: Space Plasma Electro-Dynamics; Nanotechnology and Nanofabrication; Materials for Solid State Electronic and Optoelectronic Devices; Plasma Fabrication and Plasma Based MEMS Devices; Plasma Materials Processing of Microelectronics; Plasma Science and Engineering; Environmental, Biotechnology and Medical applications of plasmas; Computational and theoretical plasma science; Plasma photonic sources.
 
 
Tao Li
Division: ECE
Address: 2408 EECS
Phone: (734) 615-7983
Fax: (734) 763-9324
Email:
Degree: Ph.D., University of Michigan
Title: Assistant Research Scientist
Research Interests: Microsensors; Microactuators; analog and digital interfaces for MEMS devices; Micromachining technologies, such as micro electro-discharge machining (micro-EDM) and micro ultrasonic machining (micro-USM), and their applications
Research Areas: MEMS and Microsystems; Integrated Circuits and VLSI.
Areas of Specialty: Implantable Devices; Environmental Sensors; MEMS Technology and Packaging; Power Sources and Energy Harvesting; Sensing systems.
 
 
Jerome P. Lynch
Division: ECE
Address: 2328 GG Brown
Phone: (734) 615-5290
Email:
Degree: Ph.D. Stanford University
Title: Professor and Chair, Civil and Environmental Engineering; Professor (courtesy), Electrical Engineering and Computer Science
Research Interests: Wireless sensor networks, distributed computing, decentralized control theory, microsensors, microactuators, microelectromechanical systems (MEMS),carbon nanotube composites and sensors
Research Areas: MEMS and Microsystems; Signal & Image Processing and Machine Learning.
 
 
Khalil Najafi
Division: CSE ECE
Address: 3303 EECS
Phone: (734) 763-6650
Fax: (734) 763-9324
Email:
Degree: Ph.D. U-Michigan
Title: Peter and Evelyn Fuss Chair of Electrical and Computer Engineering; Schlumberger Professor of Engineering; Arthur F. Thurnau Professor; Professor, Electrical Engineering and Computer Science; Professor (courtesy), Biomedical Engineering
Research Interests: Solid-state integrated sensors, Microactuators, Micromechanics, Analog and digital integrated circuits
Research Areas: MEMS and Microsystems; Integrated Circuits and VLSI; Energy Science and Engineering.
Areas of Specialty: RF MEMS; Implantable Devices; Environmental Sensors; MEMS Technology and Packaging; Power Sources and Energy Harvesting; Electromechanical Energy Conversion and Energy Harvesting; Renewable Energy (Solar Cells, Wind, Energy Scavenging); Energy harvesting; Low power circuits; Sensing systems.
 
 
Becky (R.L.) Peterson
Division: ECE
Address: 2302 EECS
Phone: (734)615-3105
Fax: (734)763-9324
Email:
Degree: Ph.D., Princeton University
Title: Assistant Professor, Electrical Engineering and Computer Science
Research Interests: Thin film devices and circuits, including power devices; hetero-integration with MEMS/CMOS; flexible and transparent electronics; amorphous oxide semiconductors; solution-processed inorganic electronic materials
Research Areas: MEMS and Microsystems; Optics and Photonics; Solid-State Devices and Nanotechnology; Energy Science and Engineering.
Areas of Specialty: MEMS Technology and Packaging; Optoelectronics; Integrated Photonics and Optoelectronics with Quantum Confined Heterostructures; Displays and Detectors; Nanotechnology and Nanofabrication; Materials for Solid State Electronic and Optoelectronic Devices; Power Sources and Energy Harvesting; Solid-State Energy Conversion Technologies; Renewable Energy (Solar Cells, Wind, Energy Scavenging).
 
 
Yutao Qin
Division: ECE
Address: 2213 EECS
Phone: 734-936-0069
Email:
Degree: PhD
Title: Assistant Research Scientist
Research Interests: Microscale gas chromatographs, gas sensors, and gas pumps.
Research Areas: MEMS and Microsystems.
Areas of Specialty: Microfluidics and Gas/Chemical; Environmental Sensors.
 
 
Mina Rais-Zadeh
Division: ECE
Address: 2406 EECS
Phone: (734) 764-4249
Email:
Degree: Ph.D. Georgia Institute of Technology
Title: Associate Professor, Electrical Engineering and Computer Science; Associate Professor (courtesy), Mechanical Engineering
Research Interests: Integrated RF MEMS, MEMS-enabled ICs, wafer-level packaging and micro/nano-fabrication techniques
Research Areas: Applied Electromagnetics and RF Circuits; MEMS and Microsystems; Integrated Circuits and VLSI.
Areas of Specialty: Radio Frequency (RF), Microwave, and Millimeter-wave Circuits; RF MEMS; Environmental Sensors; MEMS Technology and Packaging; Power Sources and Energy Harvesting.
 
 
Kamal Sarabandi
Division: ECE
Address: 3228B EECS
Phone: (734) 936-1575
Fax: (734) 647-2106
Email:
Degree: Ph.D. U-Michigan
Title: Rufus S. Teesdale Professor of Engineering; Director, Radiation Laboratory; Director, COM-BAT Center; Professor, Electrical Engineering and Computer Science
Research Interests: Microwave and millimeter wave radar technology; Geoscience and remote sensing; Antennas and wave propagation; Metamaterials.
Research Areas: Applied Electromagnetics and RF Circuits; MEMS and Microsystems.
Areas of Specialty: Radio Frequency (RF), Microwave, and Millimeter-wave Circuits; Remote Sensing; Antennas; Wave Propagation.
 
 
John Seymour
Division: ECE
Address: 2227 EECS
Phone: 734-647-3984
Email:
Degree: PhD
Title: Assistant Research Scientist
Research Interests: MEMS and microsystems for biomedical implants, with expertise in electrodes and optoelectrodes for neuroscience applications.
Research Areas: MEMS and Microsystems.
Areas of Specialty: Implantable Devices; MEMS Technology and Packaging.
 
 
Dennis Sylvester
Division: ECE
Address: 2417B EECS
Phone: (734) 615-8783
Fax: (734) 763-9324
Email:
Degree: Ph.D. UC-Berkeley
Title: Director, Michigan Integrated Circuits Lab; Professor, Electrical Engineering and Computer Science
Research Interests: Low power integrated circuit design, computer-aided design for VLSI
Research Areas: MEMS and Microsystems; Integrated Circuits and VLSI; Energy Science and Engineering.
Areas of Specialty: Data converters; Digital circuits; Energy harvesting; Low power circuits; Sensing systems.
 
 
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Jong-Kwan Woo
Division: ECE
Address: 2407 EECS
Phone: (734) 764-5160
Email:
Title: Assistant Research Scientist
Research Interests: Low power and low noise circuits; MEMS and Microsystems; Device and circuit co-design.
Research Areas: MEMS and Microsystems; Integrated Circuits and VLSI.
 
 
Euisik Yoon
Division: ECE
Address: 2400 EECS
Phone: (734) 615-4469
Email:
Degree: Ph.D., University of Michigan
Title: Professor, Electrical Engineering and Computer Science; Professor (courtesy), Biomedical Engineering
Research Interests: Integrated circuits and microsystems; BioMEMS and lab-on-chips; Implantable biomedical sensors; low-power mixed-mode circuits
Research Areas: MEMS and Microsystems; Integrated Circuits and VLSI.
Areas of Specialty: RF MEMS; Microfluidics and Gas/Chemical; Implantable Devices; MEMS Technology and Packaging; Analog Circuits; Data converters; Low power circuits; RF circuits; Sensing systems.