MEMS and Microsystems Faculty

Yogesh Gianchandani
Division: ECE
Address: 2403 EECS
Phone: (734) 615-6407
Fax: (734) 763-9324
Email:
Degree: Ph.D. U. Michigan
Title: Professor
Research Interests: Design and fabrication of microsensors, microactuators, and micro-electro-mechanical systems (MEMS) for a variety of applications such as inertial sensing, environmental sensing, scanning microscopy, microfluidics, microoptics, and biomedical instrumentation; Development of manufacturing processes using combinations of traditional and novel materials and techniques, for example, micro-electro-discharge machining and microplasmas; Design of interface circuits for MEMS and development of co-fabrication techniques for circuits and MEMS.
Research Areas: MEMS and Microsystems; Plasma Science and Engineering.
Areas of Specialty: Microfluidics and Gas/Chemical; Implantable Devices; Environmental Sensors; MEMS Technology and Packaging; Plasma Fabrication and Plasma Based MEMS Devices; Plasma Materials Processing of Microelectronics.
 
 
Mark J. Kushner
Division: ECE
Address: 2236 EECS
Phone: (734) 647-8148
Email:
Degree: Ph.D. California Institute of Technology
Title: George I. Haddad Professor of Electrical Engineering and Computer Science; Director, Michigan Institute for Plasma Science and Engineering; Professor, EECS, NERS, Chemical Eng, and Applied Physics
Research Interests: Plasma science and technology: materials processing, propulsion, lasers, electromagnetics, plasma chemistry, microelectronics/MEMS fabrication, polymer funtionalization, biocompatibility
Research Areas: Applied Electromagnetics; MEMS and Microsystems; Optics and Photonics; Quantum Science and Devices; Integrated Circuits and VLSI; Plasma Science and Engineering; Energy Science and Engineering.
Areas of Specialty: Computational Electromagnetics; Microfluidics and Gas/Chemical; MEMS Technology and Packaging; Optoelectronics; Plasma Fabrication and Plasma Based MEMS Devices; Plasma Materials Processing of Microelectronics; Plasma Science and Engineering; Solid-State Energy Conversion Technologies; Plasma Science & Engineering.
 
 
Tao Li
Division: ECE
Address: 2408 EECS
Phone: (734) 615-7983
Fax: (734) 763-9324
Email:
Degree: Ph.D., University of Michigan
Title: Assistant Research Scientist
Research Interests: Microsensors; Microactuators; analog and digital interfaces for MEMS devices; Micromachining technologies, such as micro electro-discharge machining (micro-EDM) and micro ultrasonic machining (micro-USM), and their applications
Research Areas: MEMS and Microsystems; Integrated Circuits and VLSI.
 
 
Khalil Najafi
Division: CSE ECE
Address: 2404 EECS
Phone: (734) 763-6650
Fax: (734) 763-9324
Email:
Degree: Ph.D. U-Michigan
Title: Chair, Electrical and Computer Engineering; Schlumberger Professor of Engineering; Arthur F. Thurnau Professor
Research Interests: Solid-state integrated sensors, Microactuators, Micromechanics, Analog and digital integrated circuits
Research Areas: MEMS and Microsystems; Integrated Circuits and VLSI; Energy Science and Engineering.
Areas of Specialty: RF MEMS; Implantable Devices; Environmental Sensors; MEMS Technology and Packaging; Power Sources and Energy Harvesting; Electromechanical Energy Conversion and Energy Harvesting; Renewable Energy (Solar Cells, Wind, Energy Scavenging); Energy harvesting; Low power circuits; Sensing systems.
 
 
Becky (R. L.) Peterson
Division: ECE
Address: 2302 EECS
Phone: (734)615-3105
Fax: (734)763-9324
Email:
Degree: Ph.D., Princeton University
Title: Assistant Professor
Research Interests: novel electronic materials and their use in thin-film or planar field-effect transistors; micro/nano-fabrication techniques, including solution-processing of inorganic films; mechanical and electrical properties of semiconductor thin films
Research Areas: MEMS and Microsystems; Solid-State Devices and Nanotechnology.
Areas of Specialty: MEMS Technology and Packaging; Nanotechnology and Nanofabrication; Materials for Solid State Electronic and Optoelectronic Devices; Power Sources and Energy Harvesting.
 
 
Mina Rais-Zadeh
Division: ECE
Address: 2406 EECS
Phone: (734) 764-4249
Email:
Degree: Ph.D. Georgia Institute of Technology
Title: Assistant Professor of Electrical Engineering and Computer Science; Assistant Professor of Mechanical Engineering
Research Interests: Integrated RF MEMS, MEMS-enabled ICs, wafer-level packaging and micro/nano-fabrication techniques
Research Areas: Applied Electromagnetics; MEMS and Microsystems; Integrated Circuits and VLSI.
Areas of Specialty: Radio Frequency (RF), Microwave, and Millimeter-wave Circuits; RF MEMS; Environmental Sensors; MEMS Technology and Packaging; Power Sources and Energy Harvesting.
 
 
Euisik Yoon
Division: ECE
Address: 2400 EECS
Phone: (734) 615-4469
Email:
Degree: Ph.D., University of Michigan
Title: Professor, Electrical Engineering and Computer Science
Research Interests: Integrated circuits and microsystems; BioMEMS and lab-on-chips; Implantable biomedical sensors; low-power mixed-mode circuits
Research Areas: MEMS and Microsystems; Integrated Circuits and VLSI.
Areas of Specialty: RF MEMS; Microfluidics and Gas/Chemical; Implantable Devices; MEMS Technology and Packaging; Analog Circuits; Data converters; Low power circuits; RF circuits; Sensing systems.