Title: Professor, EECS; Professor of Applied Physics, Mechanical Engineering (courtesy)
Address: 2403 EECS
Phone: (734) 615-6407
Fax: (734) 763-9324
Degree: Ph.D. U. Michigan
Research Interests: Design and fabrication of microsensors, microactuators, and micro-electro-mechanical systems (MEMS) for a variety of applications such as inertial sensing, environmental sensing, scanning microscopy, microfluidics, microoptics, and biomedical instrumentation; Development of manufacturing processes using combinations of traditional and novel materials and techniques, for example, micro-electro-discharge machining and microplasmas; Design of interface circuits for MEMS and development of co-fabrication techniques for circuits and MEMS.
Research Areas: MEMS and Microsystems; Plasma Science and Engineering.
Areas of Specialty: Microfluidics and Gas/Chemical; Implantable Devices; Environmental Sensors; MEMS Technology and Packaging; Plasma Fabrication and Plasma Based MEMS Devices; Plasma Materials Processing of Microelectronics.