Electrical Engineering and Computer Science

Becky (R. L.) Peterson

Division: ECE
Title: Assistant Professor
Address: 2302 EECS
Phone: (734)615-3105
Fax: (734)763-9324
Degree: Ph.D., Princeton University
Research Interests: Thin film devices and circuits, including power devices; hetero-integration with MEMS/CMOS; flexible and transparent electronics; amorphous oxide semiconductors; solution-processed inorganic electronic materials
Research Areas: MEMS and Microsystems; Solid-State Devices and Nanotechnology.
Areas of Specialty: MEMS Technology and Packaging; Nanotechnology and Nanofabrication; Materials for Solid State Electronic and Optoelectronic Devices; Power Sources and Energy Harvesting.