Electrical Engineering and Computer Science

Mark J. Kushner


George I. Haddad Professor of Electrical Engineering and Computer Science
Director, Michigan Institute for Plasma Science and Engineering
Professor of NERS, Chemical Eng, and Applied Physics (courtesy)
Website: http://uigelz.eecs.umich.edu
Division: ECE
Address: 2236 EECS
Email:
Phone: (734) 647-8148
Research Interests: Plasma science and technology: materials processing, propulsion, lasers, electromagnetics, plasma chemistry, microelectronics/MEMS fabrication, polymer funtionalization, biocompatibility
Research Areas: Applied Electromagnetics; MEMS and Microsystems; Optics and Photonics; Quantum Science and Devices; Integrated Circuits and VLSI; Plasma Science and Engineering; Energy Science and Engineering.
Areas of Specialty: Computational Electromagnetics; Microfluidics and Gas/Chemical; MEMS Technology and Packaging; Optoelectronics; Plasma Fabrication and Plasma Based MEMS Devices; Plasma Materials Processing of Microelectronics; Plasma Science and Engineering; Solid-State Energy Conversion Technologies; Plasma Science & Engineering.
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