Electrical Engineering and Computer Science

Mark J. Kushner

George I. Haddad Professor of Electrical Engineering and Computer Science
Professor, Electrical Engineering and Computer Science
Professor (courtesy), Nuclear Engineering and Radiological Sciences; Chemical Engineering; Applied Physics
Website: http://uigelz.eecs.umich.edu
Division: ECE
Address: 2236 EECS
Phone: (734) 647-8148
Research Interests: Plasma science and technology: materials processing, propulsion, lasers, electromagnetics, plasma chemistry, microelectronics/MEMS fabrication, polymer funtionalization, biocompatibility
Research Areas: Applied Electromagnetics and RF Circuits; MEMS and Microsystems; Optics and Photonics; Quantum Science and Technology; Integrated Circuits and VLSI; Plasma Science and Engineering; Energy Science and Engineering.
Areas of Specialty: Computational Electromagnetics; Microfluidics and Gas/Chemical; MEMS Technology and Packaging; Optoelectronics; Plasma Fabrication and Plasma Based MEMS Devices; Plasma Materials Processing of Microelectronics; Plasma Science and Engineering; Solid-State Energy Conversion Technologies; Plasma Science & Engineering.
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