Electrical Engineering and Computer Science

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Winter 2013: EECS 598-010 Plasma Chemistry and Plasma Surface Interactions

Course No.: EECS 598-010
Credit Hours: 3 credits
Instructor: Mark Kushner

Course Description:
Low temperature plasmas are used for materials and microelectronics processing, plasma aided combustion, lighting, lasers and medicine. This course will address the plasma initiated chemistry and plasma surface interactions of these systems. Electron impact, ion-molecule and excited state reactions, radiation transport; and the reaction of these species with inorganic, organic and liquid surfaces will be discussed. [More Info]