|A B C D E F G H I J K L M N O P Q R S T U V W X Y Z|
Professor of Applied Physics, Mechanical Engineering (courtesy)
Address: 2403 EECS
Email: yogesh @ umich.edu
Phone: (734) 615-6407
Research Interests: Design and fabrication of microsensors, microactuators, and micro-electro-mechanical systems (MEMS) for a variety of applications such as inertial sensing, environmental sensing, scanning microscopy, microfluidics, microoptics, and biomedical instrumentation; Development of manufacturing processes using combinations of traditional and novel materials and techniques, for example, micro-electro-discharge machining and microplasmas; Design of interface circuits for MEMS and development of co-fabrication techniques for circuits and MEMS.
Research Areas: MEMS and Microsystems, Plasma Science and Engineering