Professor, Electrical Engineering and Computer Science
Professor (courtesy), Applied Physics; Mechanical Engineering
Director, Center for Wireless Integrated MicroSensing & Systems
Address: 2403 EECS
Email: yogesh @ umich.edu
Phone: (734) 615-6407
Research Interests: Design and fabrication of microsensors, microactuators, and micro-electro-mechanical systems (MEMS) for a variety of applications such as inertial sensing, environmental sensing, scanning microscopy, microfluidics, microoptics, and biomedical instrumentation; Development of manufacturing processes using combinations of traditional and novel materials and techniques, for example, micro-electro-discharge machining and microplasmas; Design of interface circuits for MEMS and development of co-fabrication techniques for circuits and MEMS.