MEMS and Microsystems

This research area encompasses projects on a variety of micromachined sensors and actuators, and on integrated microsystems that combine these components. Devices such as micromachined neural probes for implantable prostheses, ultra-miniature low-power pressure sensors for catheters, tactile sensors arrays for fingerprint analysis, infra-red imagers for manufacturing process control, and micro gas chromatography systems for environmental monitoring are some of the past contributions of this program. The scope of the current research efforts encompasses exploration of new materials, new device concepts, new fabrication methods, new interface circuits, and new microsystems.


Environmental Sensors
Implantable Devices
MEMS Technology and Packaging
Microfluidics and Gas/Chemical
Plasma Fabrication and Plasma Based MEMS Devices
Power Sources and Energy Harvesting

Related Links

Wireless Integrated MicroSensing & Systems (WIMS2)

Related News Articles

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ECE Faculty

Aktakka, Ethem Erkan
Blaauw, David T.
Chen, Yu-Chih
Cho, Jae Yoong
Deotare, Parag
Flynn, Michael P.
Gianchandani, Yogesh B.
Kushner, Mark J.
Najafi, Khalil
Peterson, Becky (R.L.)
Qin, Yutao
Sarabandi, Kamal
Seymour, John
Sylvester, Dennis
Woo, Jong-Kwan
Yoon, Euisik

Courtesy Faculty

Chestek, Cynthia
Kurabayashi, Katsuo
Lynch, Jerome P.